JPH02301423A - Transferring device - Google Patents

Abstract

PURPOSE:To prevent the positional shifting of a substrate to a stamper from occurring at the pressing with a pressure roller by a method wherein a substrate feeding mechanism, which places the substrate on the stamper held on a stamper holding stand and slightly presses the substrate against the stamper, is provided. CONSTITUTION:Liquid ultraviolet-curing resin 50 is supplied onto one side 29a of a disc substrate 29. By moving a delivery arm 46, a suction head 47 sucks the opening edge part of the center hole 30 on the other side 29b of the disc substrate 29. By pivoting the delivery arm 46, the side 29a of the disc substrate 29 is faced downward and placed through the ultraviolet-curing resin 50 onto a disc stamper 18. By lowering the delivery arm 46 further, the disc substrate 29 is fixed to the disc stamper 18 by pressure, resulting in squashing the liquid ultraviolet-curing resin 50 so as to temporarily fix the disc stamper 18 and the disc substrate 29 together. The ultraviolet-curing resin 50 is fully filled in the fine projections and recesses of the disc stamper 18. Further, no positional shifting of the disc substrate 29 to the disc stamper 18 occurs at the pressing with a pressure roller.

Description

[Detailed description of the invention] The transfer device of the present invention will be explained in detail according to the following items.

A. Industrial field of application B0 Overview of the invention C2 Prior art [Figure 10] D1 What the invention attempts to solve! ! ! l! [Figure 11
Means F for Solving Problem 1, Embodiment [Figures 1 to 9] a, Slide table b, Electromagnetic plate C1 upper plate d, Disk stamper e, Fixing of the upper plate to the slide table f, Disk substrate g. Disk substrate supply mechanism, supply of disk substrate G0 Effects of the invention (A. Field of industrial application) The present invention relates to a novel transfer device. Specifically, a transfer device that presses the substrate against the stamper using a pressure roller while facing the stamper through a liquid synthetic resin, and then peels the substrate together with the synthetic resin from the stamper after curing the synthetic resin. In the present invention, it is an object of the present invention to provide a novel transfer device capable of preventing displacement of a substrate with respect to a standber during pressure contact with a pressure roller.

(B. Summary of the Invention) The transfer device of the present invention uses a substrate supply mechanism that supplies the substrate onto the stamper to slightly press the substrate toward the stamper after placing the substrate on the stamper, and by this pressing, the substrate is slightly pressed toward the stamper. The liquid synthetic resin interposed between the substrate and the standber is tightly adhered to the substrate and the standber, and this acts as an adhesive between the substrate and the standber, so that the substrate is not bonded when the pressure roller presses the standber. This has the effect that positional deviation with respect to the stand bar is less likely to occur.

(C, Prior Art) [Figure 10] Various methods have been proposed for manufacturing optical discs such as compact audio discs (CDs) and laser discs (LDs, LVDs), among which the 2P method ( There is a method called photopolymerization method.

This 2P method uses ultraviolet curable resin to reproduce optical discs, and as shown in Figure 10, liquid ultraviolet curable resin is coated on one side of the disk substrate a using screen printing. 10(B)), place the disk substrate a on the disk stamper C so that the ultraviolet curable resin is in close contact with the disk stamper C (see FIG. 10(C)), and press the pressure roller d. Press the disk substrate a against the disk stamper C (see Fig. 10).
(see D)), as a result, the space between the disk substrate a and the disk standber C is filled with the ultraviolet curable resin bh<h> without any gaps.

Therefore, ultraviolet light is irradiated onto the ultraviolet curing resin through the disk substrate a using an ultraviolet lamp e (Fig. 10(E)).
), the liquid ultraviolet curing resin will harden, so peel off the disk substrate a from the disk standber C (
(See FIG. 10(F)), thereby, the fine irregularities formed on the surface of the disk standber C are transferred onto the disk substrate a.

Therefore, by depositing a metal film on the transferred uneven surface of the disk substrate a and then covering it with a protective film, it is possible to obtain an optical disk f in which bits corresponding to the unevenness of the disk standby C are formed (No. (See Figure 10 (G)).

According to the 22 method described above, even if the pattern of the disk standber C is minute, since the ultraviolet curing resin is in a liquid state, the pattern is sufficiently filled with the ultraviolet curing resin, so that the signal transferability is significantly improved. It has the advantage of being superior.

(D. Problem to be Solved by the Invention) [Fig. 11] By the way, in the above-mentioned optical disc manufacturing process, when the pressure roller d presses the disc substrate a, the disc substrate a is not positioned with respect to the disc standber C. There is a problem of causing

That is, as shown in FIG. 11, the pressure roller d is pressed while the pressure roller d is being moved (actually, the stamper holder f holding the disk stamper C is moved relative to the pressure roller d). Disk board a as shown by the arrow
It is performed from one end to the other end. Therefore, when the pressure roller d is placed on one end a of the disk substrate a, since the liquid ultraviolet curing resin is interposed between the disk substrate a and the disk standber C, the pressure roller d is placed on one end a of the disk substrate a. The other end a2 lifts up from the disk standber C, and when the pressure roller d moves toward the other end a2 in this state, the disk substrate a is caused by friction between the pressure roller d and the disk substrate a. is disk standby C
In addition, the disk substrate a may get onto the center bin g for positioning, and if the pressure roller d presses the disk in this state, the disk Substrate a may be destroyed, and even disk standber C may become unusable. Further, even if the disk substrate a does not break, distortion may remain in the disk substrate a.

Even if the disk substrate a and the disk stamper C are not destroyed or the disk substrate a remains distorted, the slight misalignment between the disk substrate a and the disk stamper C may cause the disk substrate a and the disk stamper C to As a result, the liquid ultraviolet curable resin is not completely filled into the unevenness of the disk standber C, and bubbles may remain partially, resulting in poor transfer.

For this reason, conventionally, some devices have been equipped with a displacement detection mechanism such as a photo sensor to detect the above-mentioned displacement of the disk substrate a. It is of no use in preventing misalignment.

(E. Means for Solving the Problems) In order to solve the above-mentioned problems, the transfer apparatus of the present invention uses a substrate supply mechanism that supplies the substrate onto the stamper to place the substrate on the stamper and then transfer the substrate to the stamper. It is designed so that it is pressed slightly in the direction of .

Therefore, according to the transfer device of the present invention, when the substrate is placed on the standber and then slightly pressed toward the stamper, the liquid synthetic resin interposed between the substrate and the stamper is transferred between the substrate and the stamper. Since this adhesive acts like an adhesive between the substrate and the stamper, it is difficult for the substrate to be misaligned with the stamper when the pressure roller is used to press the stamper. This effectively prevents a number of problems, such as poor transfer and destruction of the substrate and stamper.

(F. Embodiment) [FIGS. 1 to 9] Details of the transfer apparatus of the present invention will be described below according to the illustrated embodiment.

(a, Slide Table) 1 is a slide table, which is guided by rails 2.2 and can be moved along a predetermined yarn path.

Reference numeral 3 designates a base of the slide table 1, and a leg piece 4.4 is fixed to the lower surface of the base base, and the leg piece 4.4 is attached to the rail 2.
．． 2 and are individually slidably engaged with each other.

Reference numeral 5 denotes a mounting base, which is fixed to the base 3 via pillars 3a, 3a, . . . erected at the four corners of the base 3.

Reference numeral 6 denotes an air cylinder fixed to the center of the upper surface of the base 3, and a tap adapter 7 is fixed to the upper end of a piston rod 6a that moves up and down. tap adapter 7
is a known one, and when a rod-shaped object is inserted into the hole 7a opened at the upper end, it can be moved 8 times in the insertion direction, but is prevented from moving in the extraction direction, and is not shown. By pressing the release part, the object inserted into the hole 7a can be pulled out. A hole 5a is formed in the center of the mounting base 5, and a hole 7a of the tap adapter 7 faces upward through the chain hole 5a.

(b, Electromagnetic Plate) 8 is a flat electromagnetic plate, which is fixed on the mounting base 5 of the slide table 1 via a support base 9.

The electromagnetic plates 8 are made of ferromagnetic material 10.1 extending in the same direction.
Separator 11 made of a material with low magnetic permeability such as 0, .
．． 11, . Ru.

A mounting hole 8a is formed in the center of the electromagnetic plate 8, and a guide sleeve 12 made of synthetic resin is press-fitted into the mounting hole 8a. It faces the hole 7a from above.

(c, upper plate) 13 is a flat upper plate, and this upper plate 13 also has ferromagnetic materials 14, 14, . . . extending in the same direction.
・Separator 15.15 made of a material with low magnetic permeability,
. . . has a structure in which these are alternately arranged and integrated.

Then, the ferromagnetic materials 10, 10 . ...
The ferromagnetic materials 141.14, . . . of the upper plate 13 also refer to the separators 11.11, .
and the separators 15.15, .
. and 14.14, . . . and separator 11.
11, . . . and 15.15, . . . can be superimposed so that they exactly overlap.

A positioning hole 16 is formed in the center of the upper plate 13, and a recess 17 is formed at a position surrounding the positioning hole 16 on the lower surface of the upper plate 13. Therefore, the lower end of the positioning hole 16 opens into the recess 17.

(d, Disk Standber) Reference numeral 18 denotes a nickel-based disk standber, and its upper surface 18a is formed with fine irregularities (not shown) in the shape of signal bits. The lower surface 18b is formed into a flat surface.

In addition, a center hole 19 is provided at the center of the disk standber 18.
is formed, and the center hole 19 is formed in the upper plate 13.
It is formed to have the same diameter as the positioning hole 16 of.

Reference numeral 20 designates a fixing ring, which includes a tubular portion 21 having an outer diameter approximately the same as that of the positioning hole 16 of the upper plate 13 and the center hole 19 of the disk standber 18, and a portion slightly outward from the upper end of the tubular portion 21. A flange portion 22 extending from the tubular portion 21 is formed integrally with the tubular portion 21, and a threaded groove is formed on the outer surface of the lower end portion of the tubular portion 21 to form a threaded portion 23.

24 is a nut screwed into the threaded portion 23 of the fixing ring 20.

Thus, the disk standber 18 is attached to the upper plate 13 in the following manner.

First, the disk standbers 18 are stacked so that their lower surfaces 18b are in contact with the upper surface of the upper plate 13, and the center hole 19 of the disk standbers 18 and the positioning hole 16 of the upper plate 13 are aligned.

Then, from above, insert the tubular part 21 of the fixing ring 20 into the center hole 19 of the disk stanver 18, and then the upper plate 13.
The nuts 24 are inserted through the positioning holes 16 in the order shown in FIG. As a result, disk standby 1
The opening edge of the center hole 19 of No. 8 is held between the flange portion 22 of the fixing ring 20 and the upper surface of the upper plate 13.

(e. Fixing the upper plate to the slide table) 25 is a center bin, which is composed of a tubular main part 26 and a disc-shaped head 27 fixed to the upper end of the main part 26. The peripheral edge 28 of the rim 28 projects outwardly in the form of a flange. Further, the inner end of the lower surface of the peripheral portion 28 is connected to the main portion 26.
An annular recess 28a is formed on the outer peripheral surface of the recess 28a. The recess 28a has the fixing ring 2 therein.
The size is such that the flange portion 22 of No. 0 fits in with a slight margin.

The outer circumferential surface of the head 2 has a positioning surface 27a located in the middle and forming an annular surface parallel to the axis of the main portion 26, and an inclined surface continuous with the lower end of the positioning surface 27a and displacing outward as it goes downward. It consists of an engaging surface 27b and an introduction surface 27c, which is an inclined surface that is continuous with the upper end of the positioning surface 27a and moves inward as it goes upward.

Therefore, first, the upper plate 13 holding the disk standber 18 as described above is placed on the upper surface of the electromagnetic plate 8.

Then, from above, the main part 26 of the center bin 25 is
The fixing ring 20 and the guide sleeve 12 are inserted in this order, and the lower end thereof is inserted into the hole 7a of the tap adapter 7.

Therefore, when the air cylinder 6 is driven to lower the piston rod 6a, it is pulled by the piston rod 6a and the center bin 2
5 is lowered so that its head 27 covers the upper end of the fixing ring 20 and the flange 22.

When the electromagnetic plate 8 is energized, the upper plate 13 is magnetically attracted to the electromagnetic plate 8, and the disk stamper 18 is also magnetically attracted to the upper plate 13.
b follows the plane of the upper surface of the upper plate 13, achieving high flatness.

When removing the upper plate 13 from the slide table 1, turn off the power to the electromagnetic plate 8, release the lower end of the center pin 25 from the tap adapter 7, and fix the center pin 25 to the guide sleeve 12. It is sufficient to pull it out from the ring 20 and move the upper plate 13 from above the electromagnetic plate 8.

(f, Disk Substrate) 29 is a disk substrate, and the disk substrate 29 is formed into a disk shape from a transparent glass plate, a transparent synthetic resin, etc., and has a center hole 30 formed in its center.

The center hole 30 of the disk substrate 29 is chamfered at the top and bottom of its opening inner peripheral surface to form tapered surfaces 30a and 30b, and the portion between these two tapered surfaces 30a and 30b is the rotation axis of the disk substrate 29. The positioning surface 30c is parallel to the positioning surface 30c.

(g. Disk Substrate Supply Mechanism) 31 is a disk substrate supply mechanism for supplying the disk substrate 29 onto the disk standber 18.

Reference numeral 32 denotes a top plate of the machine base to which the rails 2.2 and the like are fixed, and a long hole 33 is formed in the top plate 32.

Reference numeral 34 denotes an air cylinder type feeding mechanism whose longitudinal direction is arranged along the negative side edge of the elongated hole 33 on the lower surface of the upper surface plate 32, and is moved along the longitudinal direction by controlling air. A piece 35 is provided on the side facing the elongated hole 33.

Reference numeral 36 denotes a rail provided on the upper surface of the upper surface plate 32 so as to be slightly apart from the elongated hole 33 and to extend parallel to the elongated hole 33.

Reference numeral 37 denotes a substantially plate-shaped moving base, and a leg piece 38 fixed to one edge of the lower surface of the base is slidably engaged with the rail 36, and the other edge is connected to the elongated hole 33. The moving piece 35 of the feeding mechanism 34 is connected to the moving piece 35 of the feeding mechanism 34 by a connecting piece 39 inserted therein. Therefore, when the movable piece 35 moves along the elongated hole 33 by air control, the movable base 37 is also moved along the elongated hole 33 while being guided by the rail 36.

Reference numeral 40 denotes an air cylinder fixed to the upper surface of the movable base 37, and a piston rod 40a that moves up and down protrudes from the upper end.

41 is a plate-shaped stay, the lower end 41a of which is fixed to the upper end of the piston rod 40a of the air cylinder 4o.

42 is a rotary air cylinder fixed to the upper end of the stay 41, and an output shaft 42a protruding in the horizontal direction is rotated by air control.

Reference numeral 43 denotes a support plate fixed directly outside the rotary air cylinder 42, which is located on the opposite side of the support plate 43 across the output shaft 42a of the rotary air cylinder 42, and is opposite to the output shaft 42a. Air connectors 44, 45 are fixed to both ends equidistantly spaced apart from each other.

Each air connector 44, 45 has a coupling 44a, 45a at its upper end, and outlets 44b, 45b located at its lower end are connected to an air suction mechanism (not shown) via a connecting pipe (not shown).

Reference numeral 46 denotes a delivery arm, whose base end 46a is fixed to the output shaft 42a of the rotary air cylinder 42. Therefore, when the rotary air cylinder 42 is driven by air control, the delivery arm 46 will rotate.

47 is a suction head provided at the rotating end of the delivery arm 46, and a surface 47a (suction surface) on the side opposite to the delivery arm 46 has a plurality of suction holes 47b arranged on the circumference of -.
, 47b, . . . are formed.

Reference numeral 48 denotes a connection hole that extends vertically through a position near the base end of the delivery arm 46. Further, 49 is an air passage formed in the delivery arm 46, one end of which is connected to the suction holes 47b, 47b, . . . of the suction head 47, and the other end is connected to the connection hole 48 in the vertical direction. It has an opening on the side in the center. When the couplings 44a, 45a of the air connectors 44, 45 are fitted into the connection hole 48, the connection hole 48 is sealed from the outside, and the other end of the air passage 49 is connected to the air connector. 44.4
5 is connected to an air suction mechanism (not shown), and therefore, when the air suction mechanism is driven, negative pressure is generated in the suction holes 47b, 547b, . . . of the suction head 47.

Then, when the delivery arm 46 rotates to a position where its connection hole 48 fits into the coupling 44a of one air connector 44 (hereinafter referred to as the "first position"), the suction head 47 The suction surface 47a of the air connector faces upward, and the transfer arm 46 rotates to a position where its connection hole 48 fits into the coupling 45a of the other air connector 45 (hereinafter referred to as the "second position"). At this time, the suction surface 47a of the suction head 47 faces downward.

(h. Supply of disk substrate) First, a liquid ultraviolet curable resin 5 is applied to one surface 29a of the disk substrate 29 in a desired pattern by a screen printing method, for example, by a resin supply unit (not shown).
0 is supplied.

Then, with the delivery arm 46 in the first position, the movable base 37 moves toward a resin supply section (not shown),
The suction surface 47a of the suction head 47 contacts the center of the lower surface 29b of the disk substrate 29 with the surface 29a supplied with the ultraviolet curable resin 50 facing upward, and the suction surface 47a of the suction head 47 contacts the center of the lower surface 29b of the disk substrate 29 with the surface 29a supplied with the ultraviolet curable resin 50 facing upward. , ... is generated in the center hole 3 of the other surface 29b of the disk substrate 29.
The opening edge of No. 0 is suctioned by the suction head 47.

Therefore, the moving base 37 is moved toward the slide table 1, and during this time the rotary air cylinder 42 is driven, the delivery arm 46 is rotated to the second position, and the disk substrate 29 is supplied with the ultraviolet curing resin 50. side 2
9a is directed downward.

Then, the air cylinder 6 is driven and its piston rod 6a is slightly raised, and accordingly, the center pin 2
5 rises slightly, and its head 27 touches the disc stamper 1.
It is located slightly above and away from 8.

Then, as described above, when the disk substrate 29 reaches a position directly above the disk standber 18, the air cylinder 40 is driven and its piston rod 40a is lowered, thereby lowering the delivery arm 46.
The center hole 30 of the disk board 29 is the center pin 25
It is fitted onto the head of the person.

At this time, the lower teniper surface 30b of the disk substrate 29 is the introduction surface of the center pin 25.
7c, its positioning surface 30c is fitted onto the positioning surface 27a of the center pin 25, and the lower tapered surface 30b of the disk substrate 29
is engaged with the engagement surface 27b of the center pin 25 from above. At this time, the suction of the disk substrate 29 by the suction pad 47 is released.

Then, the air cylinder 6 is driven and the center bin 2
5 is lowered, its head 27 contacts the disk stamper 18, and one surface 29a of the disk substrate 29 contacts the upper surface 18 of the disk stamper 18 via the ultraviolet curing resin 50.
It is superimposed on the disk stamper 18 so as to face the disk stamper a.

Therefore, the air cylinder 40 is driven and the delivery arm 4
6 is further lowered, and its suction head 47 presses downward the opening edge of the center hole 30 on the other surface 29b of the disk substrate 29, whereby the disk substrate 29 is pressed against the disk standber 18, The positioning surface 30c of the center hole 30 of the disk substrate 29 is the center pin 25.
is securely fitted onto the positioning surface 27a of the head 27 of the disc substrate 29, thereby accurately positioning the disk substrate 29 with respect to the disk standber 18. The ultraviolet curing resin 50 is slightly crushed and tightly adhered to the disk standber 18 and the disk substrate 29, acting as an adhesive between the disk standber 18 and the disk substrate 29. , has the effect of temporarily fixing the two. In order to achieve such an effect, it is desirable that the liquid ultraviolet curing resin 50 has a viscosity of several hundred centipoise or more at the operating temperature, and the above-mentioned pressing force by the delivery arm 46 is from several tens of gf to several tens of gf. 100 3f
It is sufficient that the value is within the range of .

After the transfer arm 46 presses the disk substrate 29 as described above, it is pulled upward and moved toward the resin supply section again.

Therefore, the disk substrate 29 is pressed toward the disk standber 18 by a pressure roller (not shown), and the liquid ultraviolet curing resin 50 interposed between the disk substrate 29 and the disk standber 18 is The fine unevenness (not shown) formed on the upper surface of the disk standber 18 is completely filled with the particles evenly distributed between the holes.

Then, as mentioned above, the disk substrate 29 is once used as a disk stamper! After being placed on the disk stamper 8, the liquid ultraviolet curing resin 50 is pressed toward the disk stamper 18.
Because the temporary fixation between the disk substrate 29 and the disk standber 18 is firmly established by There is no

After the above-described pressure is applied by the pressure roller, the other surface 29 of the disk substrate 29 is heated using an ultraviolet lamp (not shown).
The ultraviolet curing resin 50 is irradiated with ultraviolet light from the b side through the disk substrate 29, thereby curing the ultraviolet curing resin 50.

When the ultraviolet curing resin 50 is cured, the air cylinder 6 is driven to raise its piston rod 6a, thereby raising the center pin 25.

When the center pin 25 is raised, the tapered surface 30b which is on the lower side of the disk substrate 29 is lifted upward by the engagement surface 27c of the center pin 25, so that the disk substrate 29 will be peeled off from the disk standber 18 from its center together with the cured ultraviolet curing resin layer.

Then, the disk substrate 29 peeled off from the disk standber 18 is carried out by an unillustrated carrying means, and the next new disk substrate 29 is transferred to the disk standber 18.
It is superimposed on 8.

(G. Effects of the Invention) As is clear from the above description, in the transfer device of the present invention, the substrate is brought into contact with the stamper via a liquid synthetic resin, and the pressure roller presses the substrate against the stamper. This is a transfer device that peels the substrate together with the synthetic resin from the stamper after curing the synthetic resin, and the device places the substrate on the stamper held on a stamper holding table and moves the substrate slightly toward the stamper. The present invention is characterized in that it is provided with a substrate supply mechanism that presses the substrate.

Therefore, according to the transfer device of the present invention, when the substrate is placed on the standber and then slightly pressed toward the standber, the liquid synthetic resin interposed between the substrate and the standber is transferred between the substrate and the standber. This acts as an adhesive between the substrate and the standber, making it difficult for the substrate to shift relative to the standber when pressed by the pressure roller. This effectively prevents a number of problems, such as poor transfer and destruction of the substrate and standber.

In the above embodiment, the present invention was applied to a signal surface transfer device for an optical disc, but this does not mean that the scope of application of the present invention is limited to such a device.

Further, in the above embodiment, the stand bar is held by an electromagnetic chuck system, and the electromagnetic chuck has a 21 structure, but this is not limited to the electromagnetic chuck system or a double structure. do not have.

In addition, the structures shown in the above examples are merely examples of embodying the present invention, and the technical scope of the present invention should not be construed as limited by these. Rather, various modifications can be made within the scope of the spirit of the present invention.

[Brief explanation of the drawing]

Figures 1 to 11 show an example of the implementation of the transfer device of the present invention, of which Figures 1 to 6 show the stand bar holding section, Figure 1 is an exploded perspective view, and Figure 2 is a plan view. , FIG. 3 is a sectional view taken along line III-III in FIG. 2, FIG. 4 is an exploded sectional view of the main parts, FIG. 5 is an enlarged sectional view of the main parts, and FIG. (B) and (C) are enlarged cross-sectional views of the main parts; FIGS. 7 to 9 show the substrate supply mechanism; FIG. 7 is a partially cutaway front view; and FIG. 9 is a partially cutaway plan view, FIG. 9 is a side view, FIG. 10 is a schematic perspective view showing an example of the transfer method in order from (A) to (G), and FIG. 11 is a conventional transfer device. It is a schematic side view which shows the problem in . Explanation of symbols 13...Stander holding stand, 18...Standbar, 29...Substrate, 31...
Substrate supply mechanism, 50...Liquid synthetic resin Applicant: Yuji Komatsu, Patent Attorney, Sony Corporation\, Fig. 2 Cross-sectional view (m-m gravel) Fig. 3? Partial disassembly 1Ili surface concavity Fig. 4 31・・1 & plate feeder groove side view Fig. 9

Claims (1)

[Claims] With the substrate in contact with the stamper via a liquid synthetic resin, the substrate is pressed against the stamper by a pressure roller, and after the synthetic resin is cured, the substrate is peeled off from the stamper together with the synthetic resin. A transfer device comprising a substrate supply mechanism that places a substrate on a stamper held on a stamper holding table and slightly presses the substrate toward the stamper.