JPH02298690A - 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置 - Google Patents

流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置

Info

Publication number
JPH02298690A
JPH02298690A JP11519490A JP11519490A JPH02298690A JP H02298690 A JPH02298690 A JP H02298690A JP 11519490 A JP11519490 A JP 11519490A JP 11519490 A JP11519490 A JP 11519490A JP H02298690 A JPH02298690 A JP H02298690A
Authority
JP
Japan
Prior art keywords
bellows
valve
vacuum
pressure
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11519490A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512555B2 (enrdf_load_stackoverflow
Inventor
Hajime Ishimaru
石丸　肇
Katsuya Narishima
成島　勝也
Yasuo Osawa
大沢　康雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saginomiya Seisakusho Inc
Original Assignee
Saginomiya Seisakusho Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saginomiya Seisakusho Inc filed Critical Saginomiya Seisakusho Inc
Priority to JP11519490A priority Critical patent/JPH02298690A/ja
Publication of JPH02298690A publication Critical patent/JPH02298690A/ja
Publication of JPH0512555B2 publication Critical patent/JPH0512555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP11519490A 1990-05-02 1990-05-02 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置 Granted JPH02298690A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11519490A JPH02298690A (ja) 1990-05-02 1990-05-02 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11519490A JPH02298690A (ja) 1990-05-02 1990-05-02 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8499782A Division JPS58202384A (ja) 1982-05-21 1982-05-21 真空装置の起動負荷軽減装置

Publications (2)

Publication Number Publication Date
JPH02298690A true JPH02298690A (ja) 1990-12-11
JPH0512555B2 JPH0512555B2 (enrdf_load_stackoverflow) 1993-02-18

Family

ID=14656685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11519490A Granted JPH02298690A (ja) 1990-05-02 1990-05-02 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置

Country Status (1)

Country Link
JP (1) JPH02298690A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0512555B2 (enrdf_load_stackoverflow) 1993-02-18

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