JPH02298110A - Crystal resonator - Google Patents
Crystal resonatorInfo
- Publication number
- JPH02298110A JPH02298110A JP11813489A JP11813489A JPH02298110A JP H02298110 A JPH02298110 A JP H02298110A JP 11813489 A JP11813489 A JP 11813489A JP 11813489 A JP11813489 A JP 11813489A JP H02298110 A JPH02298110 A JP H02298110A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- external connection
- layer film
- external
- external conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 37
- 239000002184 metal Substances 0.000 claims abstract description 37
- 238000005219 brazing Methods 0.000 claims abstract description 31
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims description 30
- 230000005284 excitation Effects 0.000 claims description 20
- 230000010355 oscillation Effects 0.000 claims description 16
- 230000005496 eutectics Effects 0.000 claims description 8
- 229910000679 solder Inorganic materials 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 3
- 239000006023 eutectic alloy Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は水晶振動子の外部導通電極構造に間する。[Detailed description of the invention] [Industrial application field] The present invention relates to an external conducting electrode structure of a crystal resonator.
〔従来の技術]
従来の水晶振動子の外部導通電極構造としては、特公昭
64−2288号公報に記載されたものがある。これは
第4図に示す様に、外部導通電極に金属ロー材と共晶合
金をつくりにくい流れ止め部分、すなわち第2層膜露出
部25を嬶成し、金属ロー材が外部導通電極から励振電
極へ伝わらないようにして、金属ロー材の流れ込みによ
る振動バランスのくずれを防止しようとするものである
。[Prior Art] A conventional external conductive electrode structure of a crystal resonator is described in Japanese Patent Publication No. 64-2288. As shown in Fig. 4, this creates a flow-stopping part in which it is difficult to form a eutectic alloy with the metal brazing material on the external conductive electrode, that is, a second layer film exposed part 25, and the metal brazing material is excited from the external conductive electrode. This is intended to prevent the vibration balance from being lost due to the flow of the brazing metal material by preventing it from being transmitted to the electrodes.
[発明が解決しようとする課題]
しかしながら従来の技術では、低いクリスタルインピー
ダンス(以下、IC値と略す)、優れた温度特性を得る
ために外部導通電極部側面に電極を設けると、その側面
から金属ロー材が励振電極へ流れ込んでしまう、その結
果、水晶振動子の振動バランスがくずれ、Q値、発振周
波数の安定性耐衝撃性等の特性の劣化や前記諸特性の長
期信頼性の劣化等の問題が生じる。[Problems to be Solved by the Invention] However, in the conventional technology, in order to obtain low crystal impedance (hereinafter abbreviated as IC value) and excellent temperature characteristics, when an electrode is provided on the side surface of the external conductive electrode section, metal The brazing material flows into the excitation electrode, resulting in the vibration balance of the crystal resonator being disrupted, resulting in deterioration of characteristics such as the Q value, stability of oscillation frequency, and impact resistance, as well as deterioration of the long-term reliability of the above-mentioned characteristics. A problem arises.
第4図及び第5図に従来例を示すが、第4図は外部導通
電極付近の平面拡大図であり、第4図へ方向から見た時
の断面図が第5図である。A conventional example is shown in FIGS. 4 and 5. FIG. 4 is an enlarged plan view of the vicinity of the external conductive electrode, and FIG. 5 is a sectional view when viewed from the direction of FIG. 4.
前述の理由から外部導通1!極側面に電極を設けると、
第5図から明らかな如く、外部導通電極21と外部導通
側面電極22及び裏面外部導通電極23が一つの膜から
形成されてしまう、外部導通14極とリード線の接合は
、通常接合のための金属ロー材をメッキしたリード線を
外部導通W極21に当てがい、約500℃以下の温度を
かけることにより前記金属ロー材を溶解させ、金属ロー
材と外部導通電極(第2層膜)が共晶合金をつくること
により達成される。ところが、この接合の際に外部導通
電極21と外部導通側面電極22及び裏面外部導通電極
23が一つの膜がら形成されているため、金属ロー材が
外部導通電極21がら外部導通fII11面電極22へ
流れ込むこと1こなる6外部導通側面電極22は励振電
極と同じ第2層膜がら形成されているため、外部導通側
面電極22へ流れ込んだ金属ロー材は励振電極2へも流
れ込むことになり、前述の問題が発生することになる。For the reasons mentioned above, external conduction 1! When an electrode is provided on the extreme side,
As is clear from FIG. 5, the external conductive electrode 21, the external conductive side electrode 22, and the rear external conductive electrode 23 are formed from one film, and the connection between the 14 external conductive poles and the lead wire is normally performed for bonding. A lead wire plated with a metal brazing material is applied to the external conductive W pole 21, and the metal brazing material is melted by applying a temperature of about 500°C or less, and the metal brazing material and the external conductive electrode (second layer film) are melted. This is achieved by creating a eutectic alloy. However, at the time of this bonding, since the external conductive electrode 21, the external conductive side electrode 22, and the back external conductive electrode 23 are formed as one film, the metal brazing material flows from the external conductive electrode 21 to the external conductive fII11 surface electrode 22. Since the external conductive side electrode 22 is formed of the same second layer film as the excitation electrode, the metal brazing material that has flowed into the external conductive side electrode 22 will also flow into the excitation electrode 2, as described above. problem will occur.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは低いIC値、優れた温度特性を持
ちながら、高いQ値、安定した発振周波数、強い耐衝撃
性等層れた特性の水晶振動子を提供することにある。Therefore, the present invention aims to solve these problems, and aims to have low IC value, excellent temperature characteristics, high Q value, stable oscillation frequency, strong impact resistance, etc. Our goal is to provide crystal oscillators with unique characteristics.
[課題を解決するための手段1
本発明の水晶振動子は、一部に支持部を備えた水晶発振
片の励振電極として、第1層膜を金属ロー材と共晶し難
い金属から形成し、第2層膜を金属ロー材と容易に共晶
する金属から形成するとともに、前記励振1f極の一部
を前記支持部まで伸長して外部導通電極を形成し、外部
導通電極とり一ド線を前記ロー材により接合して成る水
晶振動子において、前記外部導通電極と励振電極及び外
部導通電極の水晶発振片平面電極と側面電極の電気的接
続がリード線接合部周囲において前記第1層膜により成
っていることを特徴とする。[Means for Solving the Problems 1] In the crystal resonator of the present invention, the first layer film is formed of a metal that is difficult to eutectic with the metal brazing material, as an excitation electrode of a crystal oscillation piece partially provided with a support portion. , the second layer film is formed from a metal that is easily eutectic with the metal brazing material, and a part of the excitation 1f pole is extended to the support part to form an external conductive electrode, and a direct wire is connected to the external conductive electrode. In the crystal resonator, the electrical connection between the external conduction electrode and the excitation electrode and the crystal oscillation piece plane electrode of the external conduction electrode and the side electrode is made by contacting the first layer film around the lead wire joint. It is characterized by being made up of.
〔実 施 例]
第1図は本発明の実施例における平面断面図であるが、
lは水晶発振片であり、該水晶発振片lには励振電極2
が形成されている。励振1i極2は水晶発振片支持部3
1まで延長され、外部導通電極41を形成している。外
部導通電極41の周囲はフォトエツチング技術により外
部導通電極41の第2層膜をエツチングし、外部導通電
極41と励振量1fi2の電気的接続を第1層膜のみで
とるために、第1層膜露出部51を設けである。リード
線7はプラグ体9にガラス8を介して取り付けられてお
り、該リード線は外部導通′@1fi41にハンダ等の
金属ロー材で接合される。6はケースであり5@述のよ
うに水晶発振片とリード線を接合した後、プラグ体9に
真空中で圧入され水晶振動子が完成する。[Embodiment] FIG. 1 is a plan sectional view of an embodiment of the present invention.
l is a crystal oscillation piece, and an excitation electrode 2 is attached to the crystal oscillation piece l.
is formed. Excitation 1i pole 2 is crystal oscillation piece support part 3
1 to form an external conductive electrode 41. The second layer film of the external conductive electrode 41 is etched around the external conductive electrode 41 using a photo-etching technique, and in order to establish an electrical connection with the external conductive electrode 41 with an excitation amount of 1fi2 only using the first layer film. A membrane exposed portion 51 is provided. The lead wire 7 is attached to the plug body 9 via the glass 8, and the lead wire is joined to the external conductor'@1fi41 with a metal brazing material such as solder. 6 is a case, and after joining the crystal oscillation piece and the lead wire as described in 5@, it is press-fitted into the plug body 9 in a vacuum to complete the crystal resonator.
水晶発振片に形成する電極の材質は、第1層膜が金属ロ
ー材と共晶し難いクロム等の金属膜、第2層膜が金属ロ
ー材と容易に共晶する金、銀等の金属膜が望、ましい。The material of the electrode formed on the crystal oscillator piece is such that the first layer film is a metal film such as chromium, which is difficult to eutectic with the metal brazing material, and the second layer film is a metal film such as gold or silver, which is easily eutectic with the metal brazing material. A membrane is preferred.
第2図は第1図外部導通電極付近の水晶発振片拡大図で
あり、第2図へ方自から見た時の断面図が第3図である
。第3図から明らかな如く、外部導通電極41と外部導
通側面電極42の電気的接続は第1層膜露出部51を設
けることにより第1層膜52のみで行なわれている。な
お、第3図では外部導通電極41と裏面外部導通電極4
3を同一形状としたが、本発明はこれに限定されるもの
ではなくリード線を接合する側にのみ第1層膜露出部5
1を設ければよい。しかし、リード線接合面のみに本発
明の構成をとると、リード線接合時に水晶発振片表裏の
分類が必要となり工数がかかるため、表裏同一形状が望
ましい。FIG. 2 is an enlarged view of the crystal oscillation piece near the external conducting electrode of FIG. 1, and FIG. 3 is a sectional view when viewed from the direction of FIG. 2. As is clear from FIG. 3, the electrical connection between the external conductive electrode 41 and the external conductive side electrode 42 is achieved only through the first layer film 52 by providing the first layer film exposed portion 51. In addition, in FIG. 3, the external conductive electrode 41 and the back external conductive electrode 4
3 have the same shape, but the present invention is not limited to this, and the first layer film exposed portion 5 is formed only on the side where the lead wire is joined.
1 may be provided. However, if the structure of the present invention is applied only to the lead wire joining surface, it is necessary to classify the front and back sides of the crystal oscillator pieces when joining the lead wires, which takes a lot of man-hours, so it is desirable that the front and back sides have the same shape.
水晶発振片がリード線に接合された状態が第1図である
が、この接合の過程を第2図、第3図により詳細に説明
する。FIG. 1 shows a state in which the crystal oscillation piece is joined to the lead wire, and the process of this joining will be explained in detail with reference to FIGS. 2 and 3.
水晶発振片とリード線の接合は、通常ハンダ等の金属ロ
ー材をメッキしたリード線を第2図に示した外部導通電
極41に当てかい約500℃以下の温度をかけ金属ロー
材を溶解させ、溶゛解した金属ロー材が外部導通電極4
1と共晶合金をつくることにより成される。外部導通電
極41の材質は、前述の通り金、銀等の金属ロー材と容
易に共晶する金属膜であるため、リード線との接合は容
易にできる。The crystal oscillator piece and the lead wire are usually joined by applying a lead wire plated with a metal brazing material such as solder to the external conducting electrode 41 shown in Fig. 2, and applying a temperature of about 500°C or less to melt the metal brazing material. , the melted metal brazing material becomes the external conducting electrode 4
This is achieved by creating a eutectic alloy with 1. As described above, the material of the external conductive electrode 41 is a metal film that is easily eutectic with a metal brazing material such as gold or silver, so that it can be easily joined to the lead wire.
本発明はリード線接合部周囲において外部導通電極41
と励振電極2、外部導通電極41と外部導通測面電極4
2の電気的接続を第1N膜52のみでとることにより、
金属ロー材の励振電極への流れ込みを防止した。換言す
れば、金属ロー材と共晶し難い第1層膜の露出部51を
設けたことにより、金属ロー材が外部導通電極41から
励振電極2へ、また外部導通電極41から外部導通側面
電極42へ流れ込むのを防止したのである。The present invention provides an external conductive electrode 41 around the lead wire joint.
and excitation electrode 2, external conduction electrode 41, and external conduction measurement surface electrode 4.
By making the electrical connection of 2 only through the first N film 52,
This prevents the metal brazing material from flowing into the excitation electrode. In other words, by providing the exposed portion 51 of the first layer film that is difficult to eutectic with the metal brazing material, the metal brazing material is transferred from the external conductive electrode 41 to the excitation electrode 2 and from the external conductive electrode 41 to the external conductive side electrode. This prevents it from flowing into the 42.
外部導通電極41と励振電極2、外部導通電極41と外
部導通側面電極42との電気的接続を第1層膜により成
すためには、前述の通りフォトエツチング技術により簡
単に実現できる。なお、第1層膜露出部51の大きさは
10〜50μmあればよい。The electrical connection between the external conductive electrode 41 and the excitation electrode 2, and between the external conductive electrode 41 and the external conductive side electrode 42 can be easily achieved by the photo-etching technique as described above, using the first layer film. Note that the first layer film exposed portion 51 may have a size of 10 to 50 μm.
以上、本発明の実施例は第1図に示した音叉型本島振動
子により説明したが1本発明は以上の水晶発振片や振動
電極形状に限定されるものではなく1例えば縦振動水晶
振動子や2次高調波を利用した励振電極を設けである水
晶振動子にも応用できる。As mentioned above, the embodiment of the present invention has been described using the tuning fork type main island resonator shown in FIG. It can also be applied to crystal oscillators equipped with excitation electrodes that utilize second-order harmonics.
[発明の効果1
以上述べたように本発明によれば、外部導通電極と励振
電極及び外部導通電極と外部導通側面電極との電気的接
続がリード線接合部周囲において第1層膜により成って
いるため、リード線と外部導通電極接合時に金属ロー材
が励振電極へ流れ込むことが完全に防止でき、高いQ値
、安定した発振周波数、強い耐衝撃性等層れた特性の水
晶振動子を丙ることができる。また、経時変化に伴う金
属ロー材の励振電極への流れ込みも防止できるため、長
期信頬性も極めて高くなる。さらに、本発明の水晶振動
子は外部導通側面電極を設けであるため、低いIC値、
優れた温度特性を得ることができる。[Effects of the Invention 1] As described above, according to the present invention, the electrical connection between the external conductive electrode and the excitation electrode, and between the external conductive electrode and the external conductive side electrode is formed by the first layer film around the lead wire joint. This completely prevents the metal brazing material from flowing into the excitation electrode when connecting the lead wire and the external conductive electrode, making it possible to use a crystal resonator with layered characteristics such as a high Q value, stable oscillation frequency, and strong impact resistance. can be done. Furthermore, since it is possible to prevent the metal brazing material from flowing into the excitation electrode due to changes over time, long-term reliability is also extremely high. Furthermore, since the crystal resonator of the present invention is provided with external conductive side electrodes, the IC value is low.
Excellent temperature characteristics can be obtained.
また、金属ロー材の流れる部分が第1層膜露出部内側に
限られるため、接合に必要な金属ロー材が従来より少な
くても十分な接合強度が得られることより金属ロー材の
削減ができ、すなわちコストダウンが可能となる。In addition, since the part where the metal brazing material flows is limited to the inside of the exposed part of the first layer film, sufficient bonding strength can be obtained even if less metal brazing material is required for joining than before, which makes it possible to reduce the amount of metal brazing material. In other words, cost reduction becomes possible.
本発明は1以上多大な効果を有するものである。The present invention has one or more significant advantages.
第1図は本発明の水晶振動子の実施例を示す主要平面断
面図。
第2図は本発明の水晶振動子の実施例の外部導通電極付
近を示す平面図。
第3図は本発明の水晶振動子の実施例の外部導通型(÷
付近を示す断面図。
第4図は従来の水晶振動子の外部導通電極付近を示す平
面図。
第5図は従来の水晶振動子の外部導通電極付近を示す断
面図。
l・・・・・・水晶発振片
2・・・・・・1iill振電極
3・・・・・・水晶発振片支持部
21.41・・・外部導通電極
22.42・・・外部導通側面電極
23.43・・・裏面外部導通電極
51・・・・・・第1Fl膜露出部
24.52・・・第1層膜
6 ・・・・・ケース
7・ ・ ・ ・ ・ リード線
8・・・・・・ガラス
9・・・・・・プラグ体
以上FIG. 1 is a main plan cross-sectional view showing an embodiment of the crystal resonator of the present invention. FIG. 2 is a plan view showing the vicinity of the external conducting electrodes of the embodiment of the crystal resonator of the present invention. Figure 3 shows an external conduction type (÷
A sectional view showing the vicinity. FIG. 4 is a plan view showing the vicinity of external conducting electrodes of a conventional crystal resonator. FIG. 5 is a sectional view showing the vicinity of the external conducting electrode of a conventional crystal resonator. l...Crystal oscillation piece 2...1iill Oscillation electrode 3...Crystal oscillation piece support portion 21.41...External conduction electrode 22.42...External conduction side surface Electrode 23.43... Back external conduction electrode 51... First Fl film exposed portion 24.52... First layer film 6... Case 7... Lead wire 8... ...Glass 9...Plug body or more
Claims (1)
1層膜を金属ロー材と共晶し難い金属から形成し、第2
層膜を金属ロー材と容易に共晶する金属から形成すると
ともに、前記励振電極の一部を前記支持部まで伸長して
外部導通電極を形成し、外部導通電極とリード線を前記
金属ロー材により接合して成る水晶振動子において,前
記外部導通電極と励振電極及び外部導通電極の水晶発振
片平面電極と側面電極の電気的接続がリード線接合部周
囲において前記第1層膜により成っていることを特徴と
する水晶振動子。As an excitation electrode for a crystal oscillation piece partially equipped with a support part, the first layer film is formed from a metal that is difficult to eutectic with the metal brazing material, and the second
The layer film is formed from a metal that is easily eutectic with the metal brazing material, a part of the excitation electrode is extended to the support part to form an external conduction electrode, and the external conduction electrode and the lead wire are connected to the metal brazing material. In the crystal resonator formed by joining the external conductive electrode and the excitation electrode, and the crystal oscillation piece plane electrode of the external conductive electrode and the side electrode, electrical connections are made by the first layer film around the lead wire joint part. A crystal oscillator characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11813489A JPH02298110A (en) | 1989-05-11 | 1989-05-11 | Crystal resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11813489A JPH02298110A (en) | 1989-05-11 | 1989-05-11 | Crystal resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02298110A true JPH02298110A (en) | 1990-12-10 |
Family
ID=14728891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11813489A Pending JPH02298110A (en) | 1989-05-11 | 1989-05-11 | Crystal resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02298110A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
WO2007023685A1 (en) * | 2005-08-22 | 2007-03-01 | Seiko Epson Corporation | Piezoelectric device |
WO2007072668A1 (en) * | 2005-12-21 | 2007-06-28 | Daishinku Corporation | Piezoelectric vibration piece and piezoelectric vibration device |
JP2008061039A (en) * | 2006-08-31 | 2008-03-13 | Citizen Miyota Co Ltd | Method of manufacturing piezoelectric vibrator |
JP2011120212A (en) * | 2009-10-29 | 2011-06-16 | Daishinku Corp | Piezoelectric vibrator |
US20120056513A1 (en) * | 2010-09-03 | 2012-03-08 | Nihon Dempa Kogyo Co., Ltd. | Tuning-fork type quartz-crystal vibrating pieces and quartz-crystal devices comprising same |
JP2012054895A (en) * | 2010-09-03 | 2012-03-15 | Daishinku Corp | Tuning fork type piezoelectric vibrator |
JP2012114536A (en) * | 2010-11-22 | 2012-06-14 | Daishinku Corp | Piezoelectric vibrator |
US8476811B2 (en) | 2010-08-07 | 2013-07-02 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric device with tuning-fork type piezoelectric vibrating piece |
-
1989
- 1989-05-11 JP JP11813489A patent/JPH02298110A/en active Pending
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US6961981B2 (en) | 1998-07-24 | 2005-11-08 | Seiko Epson Corporation | Method of producing a piezoelectric resonator |
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US7745979B2 (en) | 2005-08-22 | 2010-06-29 | Seiko Epson Corporation | Piezoelectric device |
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WO2007072668A1 (en) * | 2005-12-21 | 2007-06-28 | Daishinku Corporation | Piezoelectric vibration piece and piezoelectric vibration device |
JP2008061039A (en) * | 2006-08-31 | 2008-03-13 | Citizen Miyota Co Ltd | Method of manufacturing piezoelectric vibrator |
JP2011120212A (en) * | 2009-10-29 | 2011-06-16 | Daishinku Corp | Piezoelectric vibrator |
US8476811B2 (en) | 2010-08-07 | 2013-07-02 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric device with tuning-fork type piezoelectric vibrating piece |
US20120056513A1 (en) * | 2010-09-03 | 2012-03-08 | Nihon Dempa Kogyo Co., Ltd. | Tuning-fork type quartz-crystal vibrating pieces and quartz-crystal devices comprising same |
JP2012054895A (en) * | 2010-09-03 | 2012-03-15 | Daishinku Corp | Tuning fork type piezoelectric vibrator |
JP2012114536A (en) * | 2010-11-22 | 2012-06-14 | Daishinku Corp | Piezoelectric vibrator |
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