JPH0228908B2 - - Google Patents
Info
- Publication number
- JPH0228908B2 JPH0228908B2 JP57029897A JP2989782A JPH0228908B2 JP H0228908 B2 JPH0228908 B2 JP H0228908B2 JP 57029897 A JP57029897 A JP 57029897A JP 2989782 A JP2989782 A JP 2989782A JP H0228908 B2 JPH0228908 B2 JP H0228908B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- resist
- junction
- lower electrode
- frequency plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57029897A JPS58147182A (ja) | 1982-02-26 | 1982-02-26 | ジヨセフソン接合の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57029897A JPS58147182A (ja) | 1982-02-26 | 1982-02-26 | ジヨセフソン接合の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58147182A JPS58147182A (ja) | 1983-09-01 |
| JPH0228908B2 true JPH0228908B2 (cg-RX-API-DMAC7.html) | 1990-06-27 |
Family
ID=12288761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57029897A Granted JPS58147182A (ja) | 1982-02-26 | 1982-02-26 | ジヨセフソン接合の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58147182A (cg-RX-API-DMAC7.html) |
-
1982
- 1982-02-26 JP JP57029897A patent/JPS58147182A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58147182A (ja) | 1983-09-01 |
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