JPH02287087A - Vertical type heat treatment furnace - Google Patents

Abstract

PURPOSE:To reduce a temperature decreasing time and improve an efficiency of production by a method wherein some separable thermal insulation pipes separators are arranged some concave portions formed at a main body of a furnace core pipe and a central circumferential surface of a main body of the thermal insulation pipe enclosing a heating material. CONSTITUTION:A thermal insulation pipe device 50 encloses a furnace core pipe device 20, a soaking pipe 30 and a heating member 40. Some separable thermal insulation pipe separators 52A and 52B separable from a main body 51 of the thermal insulation pipe by moving means 53a and 53b are arranged in a concave portion 51a formed at a central circumferential surface of the main body 51 of the thermal insulation pipe. A thermal radiation speed at the central part in the main body 51 is adjusted through movement of the separate members 52A and 52B, a substantial uniform thermal radiation over an entire length of the main body 51 can be accomplished, and then a cooling of the main body 21 of the furnace core pipe can be uniformly promoted over an entire length of the pipe. with such an arrangement above, it is possible to shorten a temperature decreasing time and to improve an efficiency of production.

Description

[Detailed description of the invention] The present invention relates to a vertical heat treatment furnace in which a recess is formed and a heat insulating tube segment is separably arranged in the recess.

[Prior Art] Conventionally, in this type of vertical heat treatment furnace, the wall thickness at the top, center, and bottom of the insulating tube device surrounding the furnace core tube body and the heating member is substantially the same. Since the heat dissipation rate in the central part was lower than that in the upper and lower parts, it was proposed to generate heat in the upper and lower parts of the heating member, thereby lowering the temperature almost uniformly over the entire length of the furnace core tube body. .

[Problems to be solved] However, in conventional vertical heat treatment furnaces, when the temperature is lowered while maintaining a uniform temperature state in the internal space, the heat radiation rate in the center of the insulated pipe device is equal to the heat radiation rate in the upper and lower parts. Since the temperature was lowered while adjusting the smaller size with the heating member, the temperature drop rate of the fil furnace core tube body decreased.
In other words, (ii)
i] There were 7 to 15 drawbacks as the production efficiency increased to π.

Therefore, in order to eliminate these drawbacks, the present invention divides the circumferential surface of the central part of an insulated pipe device into a plurality of insulated pipe segments, and when the temperature decreases, it is separated from the insulated pipe body for 21 minutes. By this, the amount of heat dissipated approaches the amount of heat dissipated in the part and the lower part, thereby improving the cooling rate, which in turn shortens the cooling time and improves the production ME rate. We aim to provide the following.

(2) Structure of the invention [Means for solving the problem 1 The means for solving the problem provided by the present invention is that the semiconductor wafer placed on the "furnace lid body" 2 is placed in a furnace core surrounded by a heat insulating pipe device. In a vertical heat treatment furnace, the insulated tube is inserted into the internal space of the tube body, heat-treated by heating with a heating member placed around the furnace core tube body and inside the insulated tube device, and then taken out. The device is disposed in a recess formed in the (at) insulated tube body surrounding the furnace core tube body and the heating member, and (b) the central circumferential surface of the insulated tube body so that it can be heated for 7 minutes. It is characterized by comprising a heat insulating pipe segment and a vertical type).

[Function] Since the vertical heat treatment furnace according to the present invention has the configuration described in L, (1) it has the effect of bringing the heat radiation degree in the central part of the insulated pipe device closer to the heat radiation rate in the upper part and the first part. (11) It has the effect of shortening the temperature cooling time, and as a result, it has the effect of fiii) improving the production efficiency. [Example] Next, preferred examples of the vertical heat treatment furnace according to the present invention are shown. will be listed and explained in detail.

However, the examples described below are provided to facilitate or accelerate the beating of the present invention, and are not described to limit the present invention. . In other words, each member disclosed in the embodiments described below includes all design changes and equivalent substitutions that fall within the spirit and technical scope of the present invention.

FIG. 1 is a vertical sectional view along I-1$51 showing an embodiment of the vertical heat treatment furnace according to the present invention, and is a 1tlF
The heat tube division bodies 52A and 52B are shown fitted into the heat insulating tube body 51.

FIG. 2 is a cross-sectional view taken along the line IN--IN of the embodiment shown in FIG. 1, and the gas supply pipe 22 and the like are omitted.

FIG. 3 shows the operating state of the embodiment shown in FIG.
11 is a vertical cross-sectional view taken along line 11, showing a heat insulating pipe division body 52A.
, 52B is separated from the heat insulating tube body 51! j−ζ is shown.

FIG. 4 shows the usage state of the embodiment of FIG. 1 -t' +v
This is a sectional view taken along the line -1v, and the gas supply pipe 22 and the like are omitted.

First, the configuration of an embodiment of the vertical heat treatment furnace according to the present invention will be described in detail with reference to FIGS. 1 to 4. .

10 is a vertical heat treatment furnace according to the present invention, with a furnace core tube 'A' made of a suitable material such as quartz; 0, a soaking tube 30 disposed as desired around the furnace core tube device 20 at an appropriate interval, a heating member 40 disposed around the soaking tube 30, and a heating portion oil 40. A heat insulating pipe device 50 arranged therein, a housing 60 made of a suitable material such as stainless steel and held by the furnace core tube support 61 of the furnace core tube device 204, and a suitable material such as slanless It is provided with a furnace lid 'A' 70 having a furnace lid main body 71 which is made of a material and directly abuts against the lower surface of the furnace core tube support part 61.

A gas supply pipe 22 extends from the outside through the gas supply pipe 22 and extends in the axial direction along the outer peripheral surface, and then opens to the internal space 21B at the top, and a heat insulating pipe device that opens near the opening 21A and The gas exhaust pipe 23 extends to the outside by penetrating the heat insulating pipe body 51. It is preferable that the portions of both the gas supply pipe 22 and the gas discharge pipe 23 located inside the heat insulating pipe 4 be made of a suitable material such as quartz as much as possible.

The soaking tube is made of silicon carbide, for example, and is designed to secure or expand the heating area equivalent to that of a furnace core tube device.
It is arranged so as to surround almost the entire length of the furnace core tube device.

The heating members are disposed outside of the heat soaking tube, and are appropriately arranged along the axial direction of the furnace core tube device to ensure a heat soaking area as large as possible.

The heat insulating tube device is made of a suitable material such as glass fiber, surrounds the furnace core tube device, the soaking tube, and the heating member as a whole, and has a recess 51a on the circumferential surface of the central portion. Moving means 53a, 5 are disposed in relation to the heat insulating pipe body 51 and the recess 51a in the heat insulating pipe body 51.
3b as desired from the heat insulating pipe body 51 1Iif
It includes heat insulating tube segments 52A and 52B spaced apart from each other.

The housing plate supports the end surface of the opening 21A of the furnace core tube body 21 by the upper surface of the furnace core tube body support portion 61. An arrangement groove 62 is formed on the upper surface of the furnace core tube support portion 61, and an O-ring 63 is provided to ensure a seal between the furnace core tube support portion 61 and the end surface of the opening 21A of the furnace core tube body 21. .

The furnace lid device U supports a furnace lid main body 71 formed of stainless steel or the like that is in direct contact with the lower surface of a furnace core tube support part 61 similar to a housing, and the lower surface of the furnace lid main body 71. Place the furnace cover body 71 on the lower surface of the furnace core tube support 61 (
Furthermore, the furnace lid moving member 72 is arranged to move toward and away from the furnace core tube body 21 (end face of the opening 21A of the furnace core tube body 21 included in the furnace core tube device), and the furnace lid moving member 72 is arranged in a recess on the upper surface of the furnace lid moving member 72. an elastic member 73 that functions as a cushioning material when the furnace lid body 71 abuts against the lower surface of the furnace tube support 61; and a drive shaft disposed at one end of the furnace lid moving member 72. 74 and 0, which are accommodated in the groove 75 formed on the upper surface of the furnace lid body 71, so that the furnace lid body 71 abuts against the lower surface of the furnace core tube support 61 to ensure a seal. It includes a ring 76.

Further, the operation of an embodiment of the vertical heat treatment furnace according to the present invention will be explained in detail with reference to FIGS. 1 to 4.

Moving means 53a. 53b to insulated pipe segment 52A5
2B as shown by arrows A and B, the recess 51 formed on the circumferential surface of the central part of the heat insulating pipe body 51
Separate from a. As a result, the heat dissipation rate in the central part of the heat insulating pipe body 51 can be improved.
The heat dissipation rate at the top and bottom of 1 can be approximated. Therefore, according to the present invention, the heat insulating pipe body 5
Heat dissipation can be achieved almost uniformly over the entire length of the tube 1, and cooling of the vertical heat treatment furnace and, by extension, the furnace core tube body 21 can be uniformly promoted over its entire length.

Therefore, according to the present invention, it is possible to avoid the need to partially operate the heating members to achieve homogeneous cooling, and the temperature lowering operation can be simplified.

In contrast to the above, the arrow A2 is moved by the moving means 53a and 53b.
A recess 51a is formed in the circumferential surface of the central part of the heat insulating pipe body 51 by moving the heat insulating pipe segments 52A and 52B in the B2 direction.
By approaching and fitting the heat insulating pipe body 51
It is possible to suppress heat dissipation in the central part of the furnace, and to suitably perform heat treatment in the vertical heat treatment furnace hearth tube body 21.

The other functions of the vertical heat treatment furnace according to the present invention are substantially the same as those of the well-known vertical heat treatment furnace, and therefore will be omitted here for convenience of explanation.

In addition, an embodiment of the vertical heat treatment furnace according to the present invention will be described with reference to specific numerical values in order to deepen understanding.

When the insulated pipe segments 52A and 52B were separated and separated from the recess 51a formed on the circumferential surface of the central part of the insulated pipe body 51, the temperature in the vicinity of the heating member increased from 1200°C to 8 (J).
It took 45 minutes to reach 0°C.

When the insulating tube segments 52A and 52B are brought close to and fitted into the first recess 51a formed on the circumferential surface of the central part of the insulating tube body 51, the area near the heating member 40 In order to reduce the temperature from 1200℃ to 800℃, 10
It took 0 minutes.

As is clear from a comparison of Examples and Comparative Examples, the vertical heat treatment furnace according to the present invention can improve the cooling rate, shorten the cooling time, and improve the productivity of the heat treatment furnace. .

In addition, in the above description, the case where the heat insulating pipe division body is formed by two division bodies has been explained, but the present invention
The structure is not limited to this, and may be formed into three or more divided bodies, if desired.

(3) Effects of the Invention As is clear from the above, the vertical heat treatment furnace according to the present invention has the following effects: (1) The heat radiation rate in the central part of the insulated pipe device can approach the heat radiation rate in the upper and lower parts, As a result, (11) it has the effect of shortening the temperature cooling time, and as a result, (iii) it has the effect of improving production efficiency.

[Brief explanation of the drawing]

FIG. 1 shows an embodiment of a vertical heat treatment furnace according to the present invention.
3 is a longitudinal sectional view taken along line 1.11-1.11 showing the operating state of the embodiment in FIG. 1, and FIG. IV-I indicating usage status
It is a sectional view along the V line. 10. ... Vertical heat treatment furnace 20.
・・・・・・・・・・・・・・・Furnace core tube device 21...
・・・・・・・・・・・・Furnace core tube body 21A・・・・
...... Opening 21B ... ... ... ... 22 ... ... ... ... 51 ... 51a ... 52A, 52B S3a 53b 71 ... ... ... 72・・・・・・ ・・・・・・ 73・・・・・・・・・ 75・・・ ・ ・ ・ 76・・・・・・・ Internal space/gas supply pipe gas Discharge pipe soaking tube heating member, heat insulating pipe device, heat insulating tube body recess, heat insulating tube segment moving means, housing, furnace core tube support part arrangement groove O-ring furnace lid device, furnace lid body furnace lid moving member, elastic member drive Shaft arrangement groove 77...0-ring Patent applicant Toshiba Ceramics Co., Ltd. Agent Patent attorney
Takao Kou ＼ Kazu ＼ Figure 21J:

Claims (1)

[Claims] A semiconductor wafer placed on the furnace lid body is inserted into the internal space of the furnace core tube body surrounded by the heat insulating tube device, and the semiconductor wafer placed on the furnace lid body is inserted into the inner space of the furnace core tube body surrounded by the heat insulating tube device. In a vertical heat treatment furnace in which heat treatment is performed by heating with a heating member disposed inside the furnace and then taken out, an insulated tube device includes (a) an insulated tube body that surrounds a furnace core tube body and a heating member; (b) ) A vertical heat treatment furnace comprising: a heat insulating tube segment separably disposed in a recess formed on the circumferential surface of a central portion of a heat insulating tube body;