JPH0228609Y2 - - Google Patents
Info
- Publication number
- JPH0228609Y2 JPH0228609Y2 JP15919283U JP15919283U JPH0228609Y2 JP H0228609 Y2 JPH0228609 Y2 JP H0228609Y2 JP 15919283 U JP15919283 U JP 15919283U JP 15919283 U JP15919283 U JP 15919283U JP H0228609 Y2 JPH0228609 Y2 JP H0228609Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- electron
- detector
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065967U JPS6065967U (ja) | 1985-05-10 |
| JPH0228609Y2 true JPH0228609Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-07-31 |
Family
ID=30350501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15919283U Granted JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065967U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403852B2 (ja) | 2005-08-12 | 2014-01-29 | 株式会社荏原製作所 | 検出装置及び検査装置 |
| US8742342B2 (en) | 2009-11-06 | 2014-06-03 | Hitachi High-Technologies Corporation | Electron microscope |
| JP6931555B2 (ja) * | 2017-06-02 | 2021-09-08 | 日本電子株式会社 | 走査電子顕微鏡 |
-
1983
- 1983-10-14 JP JP15919283U patent/JPS6065967U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6065967U (ja) | 1985-05-10 |