JPH02284621A - 高純度ガスの回収方法 - Google Patents

高純度ガスの回収方法

Info

Publication number
JPH02284621A
JPH02284621A JP1107005A JP10700589A JPH02284621A JP H02284621 A JPH02284621 A JP H02284621A JP 1107005 A JP1107005 A JP 1107005A JP 10700589 A JP10700589 A JP 10700589A JP H02284621 A JPH02284621 A JP H02284621A
Authority
JP
Japan
Prior art keywords
gas
purge
flow rate
useful
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1107005A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583285B2 (enrdf_load_html_response
Inventor
Mamoru Inoue
井上　衛
Hisaaki Kamiyama
久朗 神山
Akira Kamimura
彰 上村
Katsushi Kosuge
克志 小菅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1107005A priority Critical patent/JPH02284621A/ja
Publication of JPH02284621A publication Critical patent/JPH02284621A/ja
Publication of JPH0583285B2 publication Critical patent/JPH0583285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Carbon And Carbon Compounds (AREA)
JP1107005A 1989-04-26 1989-04-26 高純度ガスの回収方法 Granted JPH02284621A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1107005A JPH02284621A (ja) 1989-04-26 1989-04-26 高純度ガスの回収方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1107005A JPH02284621A (ja) 1989-04-26 1989-04-26 高純度ガスの回収方法

Publications (2)

Publication Number Publication Date
JPH02284621A true JPH02284621A (ja) 1990-11-22
JPH0583285B2 JPH0583285B2 (enrdf_load_html_response) 1993-11-25

Family

ID=14448077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1107005A Granted JPH02284621A (ja) 1989-04-26 1989-04-26 高純度ガスの回収方法

Country Status (1)

Country Link
JP (1) JPH02284621A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5833737A (en) * 1996-05-20 1998-11-10 Institute Of Research And Innovation Enrichment of krypton in oxygen/nitrogen mix gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5833737A (en) * 1996-05-20 1998-11-10 Institute Of Research And Innovation Enrichment of krypton in oxygen/nitrogen mix gas

Also Published As

Publication number Publication date
JPH0583285B2 (enrdf_load_html_response) 1993-11-25

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