JPH0228443Y2 - - Google Patents

Info

Publication number

JPH0228443Y2

JPH0228443Y2 JP14893582U JP14893582U JPH0228443Y2 JP H0228443 Y2 JPH0228443 Y2 JP H0228443Y2 JP 14893582 U JP14893582 U JP 14893582U JP 14893582 U JP14893582 U JP 14893582U JP H0228443 Y2 JPH0228443 Y2 JP H0228443Y2

Authority

JP

Japan

Prior art keywords

temperature

humidity

integrating circuit

sensing

sensitive

Prior art date

1982-09-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000003990 capacitor Substances 0.000 claims description 26
• 238000001514 detection method Methods 0.000 claims description 14
• 239000010409 thin film Substances 0.000 description 20
• 238000005259 measurement Methods 0.000 description 13
• 238000009529 body temperature measurement Methods 0.000 description 9
• 230000010354 integration Effects 0.000 description 9
• 229910052751 metal Inorganic materials 0.000 description 9
• 239000002184 metal Substances 0.000 description 9
• 239000012212 insulator Substances 0.000 description 8
• 239000000758 substrate Substances 0.000 description 6
• 229910021417 amorphous silicon Inorganic materials 0.000 description 4
• 238000005245 sintering Methods 0.000 description 4
• 230000008859 change Effects 0.000 description 3
• 230000001747 exhibiting effect Effects 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 2
• 239000003989 dielectric material Substances 0.000 description 2
• 229910052748 manganese Inorganic materials 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910052759 nickel Inorganic materials 0.000 description 2
• 150000003839 salts Chemical class 0.000 description 2
• 229920006395 saturated elastomer Polymers 0.000 description 2
• JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 2
• 229910001220 stainless steel Inorganic materials 0.000 description 2
• 239000010935 stainless steel Substances 0.000 description 2
• 229910000314 transition metal oxide Inorganic materials 0.000 description 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 238000004378 air conditioning Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000003792 electrolyte Substances 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 229920000642 polymer Polymers 0.000 description 1
• 230000009467 reduction Effects 0.000 description 1
• 230000004044 response Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1