JPH02276280A - Piezoelectric laminated body - Google Patents
Piezoelectric laminated bodyInfo
- Publication number
- JPH02276280A JPH02276280A JP1096496A JP9649689A JPH02276280A JP H02276280 A JPH02276280 A JP H02276280A JP 1096496 A JP1096496 A JP 1096496A JP 9649689 A JP9649689 A JP 9649689A JP H02276280 A JPH02276280 A JP H02276280A
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- piezoelectric
- piezoelectric plate
- sectional
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims abstract description 10
- 229920002379 silicone rubber Polymers 0.000 claims abstract description 9
- 239000004945 silicone rubber Substances 0.000 claims abstract description 9
- 239000003822 epoxy resin Substances 0.000 claims abstract description 6
- 230000002093 peripheral effect Effects 0.000 claims abstract description 6
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 6
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- -1 heat-shrinkable tube Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 9
- 239000003960 organic solvent Substances 0.000 abstract description 3
- 238000005238 degreasing Methods 0.000 abstract description 2
- 230000035515 penetration Effects 0.000 abstract 1
- 238000004382 potting Methods 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 7
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野]
本発明は圧電積層体に係り、特に耐久性を向上させた圧
電積層体に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric laminate, and particularly to a piezoelectric laminate with improved durability.
従来の圧電積層体を示すものとして例えば特開昭62−
299094号公報がある。この公報に示された圧電積
層体では圧電板、金属板及びダミー板を内部に有する樹
脂ケースを設け、この樹脂ケースの外周に熱を付与する
ことによって収縮する熱収縮チェーブが嵌めこまれてい
る。An example of a conventional piezoelectric laminate is JP-A-62-
There is a publication No. 299094. The piezoelectric laminate disclosed in this publication has a resin case containing a piezoelectric plate, a metal plate, and a dummy plate inside, and a heat-shrinkable tube that shrinks when heat is applied to the outer periphery of the resin case is fitted. .
〔発明が解決しようとする課題]
上記の構造の圧電積層体においては圧電積層体本体(圧
電板)と周囲の樹脂ケースとの間に隙間があるのでその
隙間から湿気、等が内部へ侵入して短絡が発生し、圧電
板の作動が不可能となる。[Problems to be Solved by the Invention] In the piezoelectric laminate having the above structure, there is a gap between the piezoelectric laminate body (piezoelectric plate) and the surrounding resin case, so moisture, etc. may enter the interior through the gap. This will cause a short circuit and the piezoelectric plate will not be able to operate.
また圧電板に電圧を印加すると伸縮するがその伸縮の際
(電気エネルギーが機械エネルギーになる時)熱が発生
し、圧電板の温度が上昇する。Furthermore, when a voltage is applied to a piezoelectric plate, it expands and contracts, and during this expansion and contraction (when electrical energy becomes mechanical energy) heat is generated, increasing the temperature of the piezoelectric plate.
上記課題は本発明によれば圧電材料よりなり、電圧が印
加されることにより伸張もしくは収縮する複数枚積層さ
れた圧電板の外周側面に、エポキシ樹脂、シリコンゴム
、熱収縮チューブ、接着剤のうち少なくとも1種を含有
する絶縁層を密着形成させてなることを特徴とする圧電
積層体によって解決される。According to the present invention, the above-mentioned problem is solved by applying an adhesive such as epoxy resin, silicone rubber, heat shrinkable tube, or adhesive to the outer peripheral side of the piezoelectric plate, which is made of a piezoelectric material and expands or contracts when a voltage is applied. The problem is solved by a piezoelectric laminate characterized by closely forming an insulating layer containing at least one type of insulating layer.
特に、本発明では前記絶縁層の外周側面に高熱伝導性金
属薄板を被着してなることがより好ましい。In particular, in the present invention, it is more preferable that a highly thermally conductive metal thin plate is adhered to the outer peripheral side surface of the insulating layer.
すなわち本発明によれば圧電板の外周側面にエポキシ樹
脂、シリコンゴム等が密着形成されているため外部環境
に対する抵抗力が増大する。That is, according to the present invention, since epoxy resin, silicone rubber, etc. are closely formed on the outer peripheral side surface of the piezoelectric plate, the resistance against the external environment is increased.
以下本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.
第1図(a)、(b)は第1の実施例を示すそれぞれ横
断面図、縦断面図である。FIGS. 1(a) and 1(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the first embodiment.
第1図において、lはPZT系の圧電体を複数積層した
圧電板(成層体本体)1である。2は圧電積層体に電圧
を印加するための塩化ビニル、シリコンゴム、テフロン
等で被覆されたリード線である。これらのリード線2は
半田付、溶接等の方法で圧電板1側面の所定位置に接続
されている。In FIG. 1, l is a piezoelectric plate (laminated body) 1 in which a plurality of PZT-based piezoelectric bodies are laminated. 2 is a lead wire coated with vinyl chloride, silicone rubber, Teflon, etc. for applying voltage to the piezoelectric laminate. These lead wires 2 are connected to predetermined positions on the side surface of the piezoelectric plate 1 by soldering, welding, or the like.
リード線2間に電圧を印加することにより、圧電板1は
伸縮する。圧電板1の外周には絶縁層3が形成されてお
り、その形成工程は、まず圧電板1の外周の面粗度を整
えリード線2の易接着処理を施した後、トリクレン等の
有機溶剤で脱脂処理、乾燥を行ない注型法(その他デイ
ツプ法等もあり)により形成する。その後焼付又はキャ
アリングを行ない絶縁層3を圧電板1とリード線2の一
部に密着させる。絶縁層3の材質としては耐環境性に優
れたエポキシ樹脂、シリコンゴム等を用いる。By applying a voltage between the lead wires 2, the piezoelectric plate 1 expands and contracts. An insulating layer 3 is formed on the outer periphery of the piezoelectric plate 1, and the formation process is such that the surface roughness of the outer periphery of the piezoelectric plate 1 is first adjusted and the lead wires 2 are treated to facilitate adhesion, and then an organic solvent such as trichlene is applied. After degreasing and drying, it is formed by a casting method (other methods such as dip methods are also available). Thereafter, baking or carrying is performed to bring the insulating layer 3 into close contact with the piezoelectric plate 1 and a portion of the lead wire 2. As the material of the insulating layer 3, epoxy resin, silicone rubber, etc., which have excellent environmental resistance, are used.
この様に絶縁層3を圧電積層体本体に密着させることに
より圧電板1の近傍に水分が侵入することを防止できる
ため高温雰囲気及び水中(水を含有する液中)でも圧電
積層体が使用できる。By bringing the insulating layer 3 into close contact with the piezoelectric laminate body in this way, it is possible to prevent moisture from entering the vicinity of the piezoelectric plate 1, so the piezoelectric laminate can be used even in high-temperature atmospheres and underwater (in liquids containing water). .
次に第2の実施例を説明する。Next, a second embodiment will be described.
第2図(a)、(b)は第2の実施例を示すそれぞれ横
断面図、縦断面図である。FIGS. 2(a) and 2(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the second embodiment.
第2の実施例は上記第1の実施例の工程に更に熱収縮チ
ューブ4を被覆したものである。すなわち絶縁層3の周
囲に該チューブ4が堅固に被着されたものである。この
熱収縮チューブの材質は塩化ビニル、シリコンゴム、テ
フロン等が用いられる。この様に圧電板の外周を2重被
覆することにより外部環境に対してより強固なものとな
る。The second embodiment is obtained by adding a heat shrinkable tube 4 to the process of the first embodiment. That is, the tube 4 is firmly attached around the insulating layer 3. The material used for this heat shrink tube is vinyl chloride, silicone rubber, Teflon, or the like. By doubly covering the outer periphery of the piezoelectric plate in this manner, it becomes more robust against the external environment.
次に第3の実施例を説明する。Next, a third embodiment will be described.
第3図(a)、(b)は第3の実施例を示すそれぞれ横
断面図、縦断面図である。FIGS. 3(a) and 3(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the third embodiment.
第3の実施例は第2の実施例で示した絶縁層3と熱収縮
チューブ4間の境界面を接着剤5により接着した例であ
る。この様に接着剤5を該境界面に施すことにより湿気
の侵入を確実に防止できる。The third embodiment is an example in which the interface between the insulating layer 3 and the heat shrinkable tube 4 shown in the second embodiment is bonded with an adhesive 5. By applying the adhesive 5 to the boundary surface in this way, it is possible to reliably prevent moisture from entering.
最外周の熱収縮チューブ4の材質により易接着処理を施
すのが望ましい。It is desirable that the material of the outermost heat-shrinkable tube 4 be treated to facilitate adhesion.
次に第4の実施例を説明する。Next, a fourth embodiment will be explained.
第4図(a)、(b)は第4の実施例を示すそれぞれ横
断面図、縦断面図である。FIGS. 4(a) and 4(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the fourth embodiment.
第4の実施例は上記第3図で示した実施例3の接着剤5
aを両端部のみに施した例であり、この方式は第3の実
施例の製造工程を簡略化できる。The fourth example is the adhesive 5 of Example 3 shown in FIG.
This is an example in which a is applied only to both ends, and this method can simplify the manufacturing process of the third embodiment.
次に第5の実施例を説明する。Next, a fifth embodiment will be described.
第5図(a)、 (b)は第5の実施例を示すそれぞれ
横断面図、縦断面図である。FIGS. 5(a) and 5(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the fifth embodiment.
本実施例は圧電板lの外周に塩化ビニル、シリコンゴム
、テフロン等の熱収縮チューブ4を被覆し、該チューブ
4のみを接着剤6で接着したものである。圧電板lの駆
動電圧の電界強度が比較的低いものに適する構造である
。In this embodiment, the outer periphery of the piezoelectric plate 1 is covered with a heat-shrinkable tube 4 made of vinyl chloride, silicone rubber, Teflon, etc., and only the tube 4 is bonded with an adhesive 6. This structure is suitable for those in which the electric field strength of the driving voltage of the piezoelectric plate l is relatively low.
次に第6の実施例を説明する。Next, a sixth embodiment will be described.
第6の実施例は上記実施例1に示した圧電板1の絶縁層
3の外周に第6図、第7図に示すように例えばCu仮、
Affi板等の熱伝導性の良い薄板材6を密着巻回した
。第8図は第1図に示した圧電板1を作動させた場合の
圧電板1の温度分布を実線Aで示し、第6図、第7図で
示した圧電積層体を作動させた場合の圧電板の温度分布
を破線Bで示す。第6の実施例の方が第1の実施例より
圧電積層体の表面温度分布の最大値(特に中央部)が低
下し、均一に近い温度分布にすることができる。In the sixth embodiment, as shown in FIGS. 6 and 7, the outer periphery of the insulating layer 3 of the piezoelectric plate 1 shown in the first embodiment is
A thin plate material 6 with good thermal conductivity, such as an Affi plate, was tightly wound. FIG. 8 shows the temperature distribution of the piezoelectric plate 1 when the piezoelectric plate 1 shown in FIG. 1 is activated by a solid line A, and the temperature distribution when the piezoelectric laminate shown in FIGS. The temperature distribution of the piezoelectric plate is shown by a broken line B. In the sixth embodiment, the maximum value of the surface temperature distribution of the piezoelectric laminate (particularly in the center) is lower than in the first embodiment, and a nearly uniform temperature distribution can be achieved.
その結果耐久性が従来構造と比較しlXl0”→lX
10”と大巾に向上することができた。また、絶縁層外
周の薄板の重なり部は半田付等の接触によりより表面温
度の均質化が可能となる。As a result, the durability is lXl0”→lX compared to the conventional structure.
10". Furthermore, the surface temperature of the overlapping portion of the thin plates on the outer periphery of the insulating layer can be made more uniform by contacting them by soldering or the like.
次に第7の実施例を説明する。Next, a seventh embodiment will be described.
第9図(a)、(b)は第7の実施例を示すそれぞれ横
断面図、縦断面図である。FIGS. 9(a) and 9(b) are a cross-sectional view and a vertical cross-sectional view, respectively, showing the seventh embodiment.
第9図(a)、(b)に示すように第7の実施例は圧電
板1の外周に熱伝導性の良いCu仮、Al板等の薄板で
作成した筒6aを一定隙間あけて配置し、その隙間に例
えばエポキシ系、アクリル系の接着剤を注入し、固化し
、一体化した。接着剤を隙間に注入する際は空気の巻き
込みを防止するため減圧して行なった。このようにして
作成した圧電積層体を作動させ表面温度を測定した結果
、その温度分布は実施例6と同様であり、しかも耐久性
においても同様であった。As shown in FIGS. 9(a) and 9(b), in the seventh embodiment, a cylinder 6a made of a thin plate such as a copper plate or an Al plate with good thermal conductivity is placed around the outer periphery of a piezoelectric plate 1 with a certain gap. Then, an epoxy or acrylic adhesive, for example, was injected into the gap, solidified, and integrated. When injecting the adhesive into the gap, the pressure was reduced to prevent air from being entrained. The piezoelectric laminate thus produced was operated and its surface temperature was measured. As a result, the temperature distribution was the same as in Example 6, and the durability was also the same.
以上説明した様に本発明によれば圧電成層体の外周に絶
縁層を密着成形することにより湿気侵入が防止され、特
に金属箔等で被覆するため圧電積層体の有機溶剤等に対
する抵抗力が増大する。As explained above, according to the present invention, moisture intrusion is prevented by closely molding the insulating layer around the outer periphery of the piezoelectric laminate, and in particular, since the piezoelectric laminate is covered with metal foil, etc., the resistance of the piezoelectric laminate to organic solvents, etc. is increased. do.
第1図(a)、(b)は第1の実施例を示すそれぞれ部
分横断面図、縦断面図であり、
第2図(a)、(b)は第2の実施例を示すそれぞれ部
分横断面図、縦断面図であり、
第3図(a)、(b)は第3の実施例を示すそれぞれ部
分横断面図、縦断面図であり、
第4図(a)、(b)は第4の実施例を示すそれぞれ部
分横断面図、縦断面図であり、
第5図(a)、(b)は第5の実施例を示すそれぞれ部
分横断面図、縦断面図であり、
第6図及び第7図は第6の実施例を示すそれぞれ斜視図
及び断面図である。
第8図は第1の実施例第6の実施例で示した圧電積層体
の表面温度分布をそれぞれA、Bで示す図であり、
第9図(a)、(b)は第7の実施例を示すそれぞれ部
分横断面図、縦断面図である。
■・・・圧電板(圧電積層体本体)、
2・・・リード線、 3・・・絶縁層、4・・・熱
収縮チューブ、5,5a・・・接着剤、6・・・熱伝導
性の良い金属薄板、
6a・・・薄板筒。FIGS. 1(a) and (b) are a partial cross-sectional view and a vertical cross-sectional view, respectively, showing a first embodiment, and FIGS. 2(a) and (b) are a partial cross-sectional view, respectively, showing a second embodiment. FIGS. 3(a) and 3(b) are a partial cross-sectional view and a longitudinal sectional view, respectively, showing the third embodiment; FIGS. 4(a) and (b) are a partial cross-sectional view and a longitudinal cross-sectional view, respectively, showing the fourth embodiment, and FIGS. 5(a) and (b) are a partial cross-sectional view and a longitudinal cross-sectional view, respectively, showing the fifth embodiment, FIGS. 6 and 7 are a perspective view and a sectional view, respectively, showing the sixth embodiment. FIG. 8 is a diagram showing the surface temperature distribution of the piezoelectric laminate shown in the first embodiment and the sixth embodiment as A and B, respectively, and FIGS. They are a partial cross-sectional view and a vertical cross-sectional view, respectively, showing an example. ■... Piezoelectric plate (piezoelectric laminate body), 2... Lead wire, 3... Insulating layer, 4... Heat shrink tube, 5, 5a... Adhesive, 6... Heat conduction Thin metal plate with good properties, 6a... Thin plate tube.
Claims (1)
張もしくは収縮する複数枚積層された圧電板の外周側面
に、エポキシ樹脂、シリコンゴム、熱収縮チューブ、接
着剤のうち少なくとも1種を含有する絶縁層を密着形成
させてなることを特徴とする圧電積層体。1. An insulating layer containing at least one of epoxy resin, silicone rubber, heat-shrinkable tube, and adhesive on the outer peripheral side of a piezoelectric plate made of a piezoelectric material and expanded or contracted by applying a voltage. A piezoelectric laminate characterized by being formed by closely forming.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1096496A JPH02276280A (en) | 1989-04-18 | 1989-04-18 | Piezoelectric laminated body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1096496A JPH02276280A (en) | 1989-04-18 | 1989-04-18 | Piezoelectric laminated body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02276280A true JPH02276280A (en) | 1990-11-13 |
Family
ID=14166703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1096496A Pending JPH02276280A (en) | 1989-04-18 | 1989-04-18 | Piezoelectric laminated body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02276280A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1079534A (en) * | 1996-09-03 | 1998-03-24 | Tokin Corp | Piezoelectric transformer and power supply for piezoelectric transformer |
WO2002061856A1 (en) * | 2001-02-01 | 2002-08-08 | Delphi Technologies, Inc. | Method of assembling an actuator arrangement |
KR100382350B1 (en) * | 2001-04-04 | 2003-05-09 | 주식회사 한신 | Manufacturing process of piezo-electric transducer for part feeder |
KR100660612B1 (en) * | 2005-11-23 | 2006-12-22 | 주식회사 한신 | Piezo-electric element for parts feeder and manufacturing process of the same |
US7191503B2 (en) * | 2000-09-18 | 2007-03-20 | Par Technologies, Llc | Method of manufacturing a piezoelectric actuator |
WO2007128948A1 (en) * | 2006-05-03 | 2007-11-15 | Delphi Technologies, Inc. | Method for enshrouding an actuator |
JP2011119583A (en) * | 2009-12-07 | 2011-06-16 | Denso Corp | Method of manufacturing piezo-actuator, and piezo-actuator manufactured thereby |
US20150243877A1 (en) * | 2014-02-27 | 2015-08-27 | Tdk Corporation | Piezoelectric element unit and driving device |
US20150243876A1 (en) * | 2014-02-27 | 2015-08-27 | Tdk Corporation | Piezoelectric element unit and driving device |
-
1989
- 1989-04-18 JP JP1096496A patent/JPH02276280A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1079534A (en) * | 1996-09-03 | 1998-03-24 | Tokin Corp | Piezoelectric transformer and power supply for piezoelectric transformer |
US7191503B2 (en) * | 2000-09-18 | 2007-03-20 | Par Technologies, Llc | Method of manufacturing a piezoelectric actuator |
WO2002061856A1 (en) * | 2001-02-01 | 2002-08-08 | Delphi Technologies, Inc. | Method of assembling an actuator arrangement |
KR100382350B1 (en) * | 2001-04-04 | 2003-05-09 | 주식회사 한신 | Manufacturing process of piezo-electric transducer for part feeder |
KR100660612B1 (en) * | 2005-11-23 | 2006-12-22 | 주식회사 한신 | Piezo-electric element for parts feeder and manufacturing process of the same |
JP2009535564A (en) * | 2006-05-03 | 2009-10-01 | デルファイ・テクノロジーズ・インコーポレーテッド | Method for coating an actuator |
WO2007128948A1 (en) * | 2006-05-03 | 2007-11-15 | Delphi Technologies, Inc. | Method for enshrouding an actuator |
US8236115B2 (en) | 2006-05-03 | 2012-08-07 | Delphi Technologies Holdings S.arl | Method for enshrouding an actuator |
JP2011119583A (en) * | 2009-12-07 | 2011-06-16 | Denso Corp | Method of manufacturing piezo-actuator, and piezo-actuator manufactured thereby |
US20150243877A1 (en) * | 2014-02-27 | 2015-08-27 | Tdk Corporation | Piezoelectric element unit and driving device |
US20150243876A1 (en) * | 2014-02-27 | 2015-08-27 | Tdk Corporation | Piezoelectric element unit and driving device |
US9691964B2 (en) * | 2014-02-27 | 2017-06-27 | Tdk Corporation | Piezoelectric element unit and driving device |
US9698333B2 (en) * | 2014-02-27 | 2017-07-04 | Tdk Corporation | Piezoelectric element unit and driving device |
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