JPH0226237U - - Google Patents
Info
- Publication number
- JPH0226237U JPH0226237U JP10329188U JP10329188U JPH0226237U JP H0226237 U JPH0226237 U JP H0226237U JP 10329188 U JP10329188 U JP 10329188U JP 10329188 U JP10329188 U JP 10329188U JP H0226237 U JPH0226237 U JP H0226237U
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- drive device
- plate
- movable plate
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Description
第１図は本考案の実施例の平面図、第２図はそ
の正面図（リニアエンコダ３４は省略してある）
、第３図はリニアモータの平面図、第４図はその
縦断面図、第５図はその側面図、第６図は別の実
施例の平面図、第７図は第６図―線断面正面
図、第８図は第６図―線断面側面図、第９図
は第６図―線断面側面図、第１０図は第６図
―線断面側面図である。
１……リニアモータ（Ｘ方向リニアモータ）、
１′……Ｙ方向リニアモータ、２……下ヨーク、
３……上ヨーク、４，４′……永久磁石、５……
中心線、６，６′……コイル、６１，６２……コ
イル部、７……コイル巻装材、８，８′……ヨー
ク、９，９′……Ｘ方向ガイド部、１０……下方
移動板、１１……スライダ、１２，１２′……連
結プレート、１３……ガイドレール、１４……上
方移動板、１５……ローラ挿入孔、１６……連結
バー、１７……ローラ取付板、１８……ローラ、
１９……ガイドレール、２０……Ｘ方向リニアモ
ータ、２１，２１′……永久磁石、２２，２２′
……ヨーク、２３，２３′……コイル、２４……
コイル巻装材、２５……連結プレート、２６……
ガイドブロツク、２７……Ｙ方向リニアモータ、
２８……コイル巻装材、２９……ヨーク、３０…
…コイル、３１，３２……連結用ビス穴、３３，
３４……リニアエンコダ。
Fig. 1 is a plan view of an embodiment of the present invention, and Fig. 2 is a front view thereof (the linear encoder 34 is omitted).
, FIG. 3 is a plan view of the linear motor, FIG. 4 is a vertical sectional view thereof, FIG. 5 is a side view thereof, FIG. 6 is a plan view of another embodiment, and FIG. 7 is a cross section taken along the line shown in FIG. 8 is a sectional side view taken along the line of FIG. 6, FIG. 9 is a sectional side view taken along the line of FIG. 6, and FIG. 10 is a sectional side view taken along the line of FIG. 6. 1...Linear motor (X direction linear motor),
1'...Y direction linear motor, 2...Lower yoke,
3...Upper yoke, 4,4'...Permanent magnet, 5...
Center line, 6, 6'... Coil, 61, 62... Coil part, 7... Coil winding material, 8, 8'... Yoke, 9, 9'... X direction guide part, 10... Downward Moving plate, 11...Slider, 12, 12'...Connection plate, 13...Guide rail, 14...Upward moving plate, 15...Roller insertion hole, 16...Connection bar, 17...Roller mounting plate, 18... Laura,
19... Guide rail, 20... X-direction linear motor, 21, 21'... Permanent magnet, 22, 22'
... Yoke, 23, 23' ... Coil, 24 ...
Coil winding material, 25... Connection plate, 26...
Guide block, 27...Y direction linear motor,
28...Coil winding material, 29...Yoke, 30...
... Coil, 31, 32 ... Connection screw hole, 33,
34...Linear encoder.
Claims (1)
移動板の上方にＹ方向駆動装置によりＹ方向移動
する上方移動板を支持して、該上方移動板をＸＹ
移動せしめるＸＹテーブルにおいて、前記Ｘ方向
駆動装置がリニアモータで、下方移動板の下方に
設けられていることを特徴とするＸＹテーブル。 (2) 前記Ｙ方向駆動装置もリニアモータで、前
記上方移動板の下方に前記下方移動板のリニアモ
ータに隣接して設けられている請求項１記載のＸ
Ｙテーブル。[Claims for Utility Model Registration] (1) An upwardly movable plate that is moved in the Y direction by a Y-direction drive device is supported above a downwardly movable plate that is moved in the X direction by an X-direction drive device, and the upwardly movable plate is
An XY table for moving, characterized in that the X-direction driving device is a linear motor and is provided below a downward moving plate. (2) The X according to claim 1, wherein the Y-direction drive device is also a linear motor, and is provided below the upward moving plate and adjacent to the linear motor of the downward moving plate.
Y table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329188U JPH0226237U (en) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329188U JPH0226237U (en) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226237U true JPH0226237U (en) | 1990-02-21 |
Family
ID=31333988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10329188U Pending JPH0226237U (en) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226237U (en) |
-
1988
- 1988-08-05 JP JP10329188U patent/JPH0226237U/ja active Pending
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