JPH02259601A - Reflecting film and reflector - Google Patents

Abstract

PURPOSE:To increase the reflectance and adhesion of the film and to optionally change the wavelength characteristic of reflection by interposing a multilayer dielectric layer consisting of the film of alternate low dielectric layer and high dielectric layer between glass and aluminum layers. CONSTITUTION:A low dielectric and a high dielectric or a high dielectric and a low dielectric are alternately laminated in >=4 layers, and an aluminum layer is further formed. Namely, TiO2, 2 is formed on glass 1 by vapor deposition, and SiO2 3 is then formed by vapor deposition. TiO2 4 is then formed by vapor deposition, and then SiO2 5 is formed by vapor deposition. Al 6 is further formed by sputtering or vapor deposition. As a result, the maximum reflectance can be obtained at a specified incident angle. By this method, a reflecting film having good adhesion to the glass 1, with high reflectivity and with the reflecting characteristics for each wavelength easily adjustable is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a reflective film and a reflector that reflect electromagnetic waves having particularly long wavelengths such as infrared rays.

<Prior art> Conventionally, the structure of a reflective film or reflector for electromagnetic waves of such wavelengths is to provide an aluminum layer on glass, and then layer a low dielectric layer and a high dielectric layer or a high dielectric layer and a low dielectric layer on top of the aluminum layer. Known structures include a structure in which dielectric layers are alternately formed in multiple layers, a structure in which a copper layer and a black layer are sequentially formed on glass, and a structure in which an aluminum layer is formed on glass.

<Problem to be solved by the invention> Of the above structures, an aluminum layer is provided on the glass,
In a structure in which a low dielectric layer and a high dielectric layer or a high dielectric layer and a low dielectric layer are alternately formed on top of the aluminum layer, if the aluminum layer is too thick, the aluminum layer may be formed on top of the aluminum layer. Multi-layer dielectric layers do not work, and only the reflectance of the aluminum layer depends. Furthermore, if the aluminum layer is thin, the multi-N dielectric layer will work, but on the other hand, the reflection effect of the aluminum layer itself will not work, resulting in only a low reflectance.

Furthermore, a structure in which a copper layer and a chromium layer are sequentially formed on glass certainly improves reflectance. However, the copper layer has poor adhesion to glass and is prone to chipping and peeling.

In addition, in a copper layer and chromium layer configuration or a single layer aluminum layer configuration, a corresponding film thickness is required in order to obtain a reflection effect, and when the spot light is reflected, the spot shape may be deformed or the optical axis may be shifted. Misalignment occurs. In addition, these materials only provide a wavelength curve for reflection specific to the material, and it is not possible to maximize the reflectance of electromagnetic waves of a desired wavelength or to reduce only the electromagnetic waves of a desired wavelength.

Therefore, there has been a need for a reflective film or reflector that has high reflectance, strong film adhesion, is thin, and can arbitrarily change the wavelength characteristics of reflection.

<Means for solving the problems> In view of the above-mentioned problems, a multilayer dielectric layer consisting of alternating films of low dielectric layers and high dielectric layers is sandwiched between glass and aluminum layers. be.

Of course, the type of glass mentioned here does not matter, such as float glass, quartz glass, optical fiber general glass, etc., and the number of layers of multilayer dielectric does not matter, and examples of high dielectric materials include ttot, ZrO, etc.

HfOR is typical, and 510 is a low dielectric material.
8, MgF, etc. are representative.

<Function> Since the reflective film has good adhesion, troubles during the manufacturing process such as chipping and peeling can be prevented.

Also, compared to the case of a laminated structure of a copper layer and a chromium layer, the thickness of the multilayer dielectric part is 1μ to obtain the same reflectance.
A thickness of less than 1.5 m is sufficient, and even when reflecting a minute spot of light with a diameter of several tens of μm, the spot shape does not deform or the optical axis shifts much. By changing the wavelength, it is possible to design the reflection characteristics for each wavelength to a certain extent.

<Example> TiO□ (2) was deposited on glass (1) to give a concentration of 1.31
Zero-order SiO□ formed by Xλ (1300ns) thickness
(3) is formed by vapor deposition to a thickness of 1.26Xλ (1300 nm). Next, T i Oz (4) is formed by vapor deposition to a thickness of 1.23×λ (1300 nm).

Next, S i Ow (5) was evaporated to 1.24Xλ
(1300nm) thickness (0-order A I (6)
is formed to a thickness of 250 nm by sputtering or vapor deposition. In this case, as shown in FIG. 1, the maximum reflectance can be obtained at an incident angle of 45° and a wavelength of electromagnetic waves (7) (λ-1350 nm).

Next, this film A and aluminum single layer II! (Film thickness: 200
FIG. 2 shows a reflectance spectral curve simulation of B (nm)B.

<Effects of the Invention> According to the present invention, it is possible to obtain a reflective film that has good adhesion to glass, has a high reflectance, and can easily adjust the reflection characteristics for each wavelength, or a reflector made of the same on glass. I can do it.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram of electromagnetic wave incidence showing an embodiment of the present invention;
FIG. 2 is a reflection characteristic diagram for each wavelength. 1...Glass 2, 4...Tilt 3. 5
... S50 6 ... Al 7 ... Electromagnetic wave A ... Reflection characteristic curve of this example B ... Reflection characteristic curve of aluminum single layer patent
Applicant Toppan Printing Co., Ltd. Representative Kazuo Suzuki Figure 1-7tL &<97ybn Figure 2

Claims (2)

[Claims] (1) A reflective film in which a total of four or more layers of a low dielectric material and a high dielectric material or a high dielectric material and a low dielectric material are alternately laminated, and an aluminum layer is further formed. (2) A reflector in which a total of four or more layers of a low dielectric material and a high dielectric material or a high dielectric material and a low dielectric material are alternately laminated on glass, and an aluminum layer.