JPH02253593A - Luminous element - Google Patents

Luminous element

Info

Publication number
JPH02253593A
JPH02253593A JP1071792A JP7179289A JPH02253593A JP H02253593 A JPH02253593 A JP H02253593A JP 1071792 A JP1071792 A JP 1071792A JP 7179289 A JP7179289 A JP 7179289A JP H02253593 A JPH02253593 A JP H02253593A
Authority
JP
Japan
Prior art keywords
metal
layer
light
transparent conductive
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1071792A
Other languages
Japanese (ja)
Inventor
Hiroshi Waki
脇 浩
Yutaka Ohashi
豊 大橋
Nobuhiro Fukuda
福田 信弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP1071792A priority Critical patent/JPH02253593A/en
Publication of JPH02253593A publication Critical patent/JPH02253593A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/311Flexible OLED
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • H10K50/816Multilayers, e.g. transparent multilayers

Landscapes

  • Electroluminescent Light Sources (AREA)

Abstract

PURPOSE:To obtain a flexible, a large area, and even membrane by composing a transparent conductive membrane with a laminate membrane of metal oxides and a metal, in a luminous element making the transparent conductive membrane as one side electrode, and providing an organic compound membrane layer to present the luminous function between two opposite electrodes. CONSTITUTION:A transparent conductive membranes 2 formed on a polymer film 1 is made at least as one side electrode, and an organic compound membrane layer 3 is arranged between the opposite two electrodes as the layer to present the luminous function to form a luminous element. The transparent conductive membrane 2 formed on the film 1 is a luminous element which consists of a laminate membrane of metal oxides 2-1 and 2-3, and a metal 2-2. And the metal oxide 2-1 is a luminous element which consists of In as the main component, and Sn, or Sn and Sb, while the metal 2-2 consists of Au, Ag, or Pd, or an alloy of some of them. In order to form the transparent conductive membrane 2 and the like on the film 1, a vacuum evaporation method, a spattering method, a CVD method, or the like is applied.

Description

【発明の詳細な説明】 〔技術分野] 本発明は、電界発光を行う電界発光素子(エレクトロル
ミネッセンス(EL)素子)に関し、(わしくは一つの
電極から電子を、もう一方の電極から正孔を注入して動
作する注入型EL素子において、発光機能を発現する層
として、有機化合物薄膜層を設けた十分な発光輝度を有
し、かつポリマーフィルムを基体とすることから付与さ
れる可撓性を有するEL素子に関する。
Detailed Description of the Invention [Technical Field] The present invention relates to an electroluminescent (EL) device that emits electroluminescence (electrons are emitted from one electrode and holes are emitted from the other electrode). In an injection-type EL device that operates by injecting a polymer film, a thin organic compound layer is provided as a layer that exhibits a light-emitting function, so that it has sufficient luminance and flexibility that is provided by using a polymer film as a base material. The present invention relates to an EL element having:

〔発明の背景〕[Background of the invention]

EL素子は、一般に注入型EL素子と真性型EL素子と
に分類される。このなかで注入型EL素子の動作機構は
、ダイオードなどのp −n接合に順方向バイアスを印
加して、両側の電極からそれぞれ電子と正孔を注入し、
その再結合により光を発生する。一般にこのEL素子は
、上記の光発光機能を発現する層を、2つの電極間に配
置した構造を有し、これら電極間に電圧を印加すること
により、電気エネルギーを直接光に変換する発光素子で
ある。注入型EL素子の特徴としては、直流から交流ま
での広い駆動周波数範囲で動作し、しかも抵電圧駆動が
可能であり、また電気から光への変換効率がよいなどの
可能性や、従来の発光素子、例えば白熱電球や、蛍光灯
などとは異なり、′gi膜パネル、ベルト状、円筒状等
の種々の形状の例えば、線、図、画像等の表示用部料や
、あるいは大面積のパネル等の面状の発光体を実現化で
きる可能性を有することである。一方真性型EL素子は
2つの電極間に誘電体層で挟む、あるいは高誘電性ポリ
マーなとで分散させる、などの方法で遷移金属や希土類
金属などをドープした硫化亜鉛などの発光材料を設け、
画電極に比較的高い交流電圧を印加することにより、電
気エネルギーを直接光に変換する発光素子である。これ
らの真性型EL素子はFi)IIパネルや液晶デイスプ
レィなどのバックライトとして広く利用されているが低
電圧駆動させることができないなどの問題を抱えていた
EL elements are generally classified into injection type EL elements and intrinsic type EL elements. Among these, the operation mechanism of injection-type EL elements is to apply a forward bias to a p-n junction such as a diode, and inject electrons and holes from electrodes on both sides, respectively.
Light is generated by their recombination. Generally, this EL element has a structure in which a layer that exhibits the above-mentioned light-emitting function is placed between two electrodes, and by applying a voltage between these electrodes, the light-emitting element converts electrical energy directly into light. It is. The characteristics of injection type EL elements include that they can operate in a wide driving frequency range from direct current to alternating current, can be driven with resistance voltage, have high conversion efficiency from electricity to light, and can be used in conventional light emitting devices. Unlike elements such as incandescent light bulbs and fluorescent lamps, they can be used to display elements such as lines, diagrams, images, etc. in various shapes such as gi membrane panels, belt-shaped, cylindrical, etc., or large-area panels. It is possible to realize a planar light emitting body such as the following. On the other hand, in an intrinsic type EL element, a luminescent material such as zinc sulfide doped with a transition metal or rare earth metal is provided by sandwiching a dielectric layer between two electrodes or dispersing it in a highly dielectric polymer.
It is a light emitting element that directly converts electrical energy into light by applying a relatively high alternating current voltage to the picture electrode. These intrinsic type EL elements are widely used as backlights for Fi) II panels, liquid crystal displays, etc., but they have had problems such as being unable to be driven at a low voltage.

最近になり正札伝導性と電子伝導性の有機化合物薄膜を
2層重ねた注入型発光ダイオード素子が報告された。(
C,W、Tang :App 1.Phys、Lett
、51.(12)、193.(1987))  この有
機材料を用いた発光素子は、種々の薄膜形成方法が選択
でき、また精度よく大面積で薄膜の形成が可能である等
の特徴を有するため注目されている。
Recently, an injection-type light-emitting diode device has been reported, which has two layers of organic compound thin films that are conductive and electronically conductive. (
C, W, Tang: App 1. Phys, Lett
, 51. (12), 193. (1987)) Light-emitting elements using this organic material are attracting attention because they have features such as being able to select from various thin film formation methods and being able to form thin films over a large area with high precision.

しかしながら、現在知られているEL用の有機材料のみ
で素子を形成した時、発光の強度がある程度限られる、
また発光強度が不安定等の問題があり現実には実用化さ
れていない。
However, when an element is formed using only currently known organic materials for EL, the intensity of light emission is limited to some extent.
In addition, there are problems such as unstable emission intensity, so it has not been put into practical use.

大面積に均一なTRI膜の製造が可能で、量産性に富み
、コスト的にも有利なEL素子が求められている。しか
も実用性を考える時には素子形態に可撓性をもつことが
重要である。本発明者らは、鋭意検討の結果、上記の問
題点を解決し、しかも可撓性を有し、大面積に均一な薄
膜の製造が可能で、しかも量産性に富み、コスト的にも
有利なEL素子を発明した。
There is a need for an EL device that can produce a uniform TRI film over a large area, is mass-producible, and is cost-effective. Moreover, when considering practicality, it is important to have flexibility in the element form. As a result of intensive studies, the present inventors have solved the above problems, are flexible, can produce a uniform thin film over a large area, are mass-producible, and are advantageous in terms of cost. Invented an EL element.

〔発明の開示〕[Disclosure of the invention]

本発明は、ポリマーフィルム上に形成された透明導電膜
を少なくとも一方のmsとし、対向する2つの電極間に
発光機能を発現する層として、有機化合物薄膜層を設け
た発光素子であり、該ポリマーフィルム上に形成された
透明導電膜が金属酸化物と金属との積層膜である発光素
子であり、また、該金属酸化物がインジウムを主成分と
し、錫あるいは錫およびアンチモンからなる複合金属酸
化物である発光素子、であり、また、該金属が金あるい
は錫あるいはパラジウムあるいはそれらの合金からなる
発光素子である。
The present invention is a light-emitting element in which a transparent conductive film formed on a polymer film is used as at least one ms, and a thin organic compound layer is provided between two opposing electrodes as a layer that exhibits a light-emitting function. This is a light emitting element in which the transparent conductive film formed on the film is a laminated film of a metal oxide and a metal, and the metal oxide is a composite metal oxide containing indium as a main component and tin or tin and antimony. This is a light-emitting element in which the metal is gold, tin, palladium, or an alloy thereof.

上記の透明導電膜のポリマーフィルム上への形成方法と
しては、蒸着法、スパッタ法、化学的気相堆積(CVD
)法などの各種の物理的または化学的な薄膜形成法など
が用いられる。特に好ましくはDCあるいはRFマグネ
トロンスパッタ法で形成される。これらの薄膜は数10
0人の1ilIllでありながらピンホールの少ない良
好なものであった。
Methods for forming the above-mentioned transparent conductive film on a polymer film include vapor deposition, sputtering, and chemical vapor deposition (CVD).
) Various physical or chemical thin film forming methods such as the method are used. It is particularly preferably formed by DC or RF magnetron sputtering. These thin films are number 10
It was a good product with few pinholes even though it was 1ilIll for 0 people.

有機化合物y1膜層は、1種類の有機化合物薄膜、また
は2種類以上の有機化合物薄膜の積層膜よりなる。
The organic compound y1 film layer is composed of one type of organic compound thin film or a laminated film of two or more types of organic compound thin films.

有機化合物は、高い発光量子効率を持ち、外部摂動を受
けやすいπ電子系を有し、容易に励起されやすい有機化
合物などが好適に用いられる。
As the organic compound, an organic compound that has a high luminous quantum efficiency, has a π-electron system that is susceptible to external perturbation, and is easily excited is preferably used.

このような有機化合物としては、例えば縮合多環芳香族
炭化水素、P−ターフェニル、2.5−ジフェニルオキ
サゾール、1. 4−b l S −(2−メチルスチ
リル)−ベンゼン、キサンチン、クマリン、アクリジン
、シアニン色素、ベンゾフェノン、フタロシアニン、お
よび金属と有機物の配位子とから形成される金属錯体化
合物、ならびに上記以外の複素環式化合物およびその誘
導体、芳香族アミン、芳香族ポリアミン、およびキノン
構造を有する化合物のなかで励起状態で錯体を形成する
化合物、ポリアセチレン、ポリシランなど、またはこれ
らの化合物の混合されたものを用いる、より具体的に金
属と有機物の配位子から形成される金属錯体化合物を説
明すると、錯体を形成する金属としては、AI、Ga、
Ir、Zn、Cd、Mg、Pb、Taなどが用いられる
。有機物の配位子としては、ポルフィリン、クロロフィ
ル、8−ヒ)′ロキシキノリン(オキシン(Ox))、
フタロシアニン、サリチルアルデヒドオキシム、1−ニ
トロソ−2−ナフトール、クフェロン、ジチゾン、アセ
チルアセトンなどが用いられる。さらにより具体的に説
明すると、オキシン錯体頚テは2、オキシン錯体、5.
7−ジブロムオキシン錯体(以下d 1Broxで示す
)、5.7−ジヨードオキシン錯体(以下d i IO
xで示す)、チオオキシン錯体(以下Th i oox
で示す)、セレノオキシン錯体(以下Se IOXで示
す)5メチルオキシン錯体(以下MeOxで示す)など
が挙げられ、この金属錯体化合物をより具体的に示すと
、AI  (Ox)s、  Zn (Ox)t、  Z
n (d  1Brox)t  、 Zn  (d  
i  l0x)t  、  Zn(ThioOx)、、
Zn(SelOx)x、  Bi  (MeOx)xな
どが用いられる。
Examples of such organic compounds include fused polycyclic aromatic hydrocarbons, P-terphenyl, 2.5-diphenyloxazole, 1. 4-b l S-(2-methylstyryl)-benzene, xanthine, coumarin, acridine, cyanine dye, benzophenone, phthalocyanine, and metal complex compounds formed from a metal and an organic ligand, as well as complexes other than the above. Cyclic compounds and their derivatives, aromatic amines, aromatic polyamines, compounds that form complexes in an excited state among compounds having a quinone structure, polyacetylenes, polysilanes, etc., or mixtures of these compounds are used. To explain more specifically the metal complex compound formed from a metal and an organic ligand, the metals forming the complex include AI, Ga,
Ir, Zn, Cd, Mg, Pb, Ta, etc. are used. Examples of organic ligands include porphyrin, chlorophyll, 8-hy)'roxyquinoline (oxine (Ox)),
Phthalocyanine, salicylaldehyde oxime, 1-nitroso-2-naphthol, cupferone, dithizone, acetylacetone, etc. are used. To explain more specifically, the oxine complexes are: 2, oxine complexes, 5.
7-dibromooxine complex (hereinafter referred to as d 1Brox), 5,7-diiodooxine complex (hereinafter referred to as d i IO
x), thiooxin complex (hereinafter referred to as Th i oox
), selenoxine complexes (hereinafter referred to as Se IOX), 5-methyloxine complexes (hereinafter referred to as MeOx), etc. More specifically, these metal complex compounds include AI (Ox)s, Zn (Ox )t, Z
n (d 1Brox)t, Zn (d
i l0x)t , Zn(ThioOx),,
Zn(SelOx)x, Bi(MeOx)x, etc. are used.

有機化合物薄膜は、上記有機化合物の非晶質、または微
結晶、微結晶を含む非晶質、多結晶、単結晶薄膜である
The organic compound thin film is an amorphous, microcrystalline, or amorphous containing microcrystalline, polycrystalline, or single crystalline thin film of the above organic compound.

上記の有機化合物薄膜の製造方法としては、真空蒸着法
などの各種の物理的または化学的な薄膜形成法などが用
いられるほか、昇華法や、塗布法、スピンコーティング
法、引き上げ法なども有効に用いられる。
In addition to various physical or chemical thin film forming methods such as vacuum evaporation, sublimation, coating, spin coating, and pulling methods are also effective methods for producing the organic compound thin films mentioned above. used.

ポリマーフィルムとしては透明性のよいものであれば特
に限定する必要はないが、電極形成条件によっては耐熱
性を必要とすることがある。利用しやすいものとしては
、ポリエチレンテレフタレー) (PET) 、ポリカ
ーボネート(PC)、ポリエーテルスルフォン(PES
)、ポリエーテルエーテルケトン(PEEK)などであ
るが、ポリエチレン(PE)、ポリプロピレン(pp)
なども利用できる。さらにホモポリマーのみならず各種
コポリマーも利用できる。
The polymer film is not particularly limited as long as it has good transparency, but heat resistance may be required depending on the electrode formation conditions. Easily used materials include polyethylene terephthalate (PET), polycarbonate (PC), and polyether sulfone (PES).
), polyetheretherketone (PEEK), etc., but polyethylene (PE), polypropylene (pp)
etc. can also be used. Furthermore, not only homopolymers but also various copolymers can be used.

金属酸化物層は、インジウムを主成分とし錫あるいは錫
およびアンチモンを含む複合酸化物からなり、好ましく
はインジウムに対して錫とアンチモンを加えたものの割
合が2〜25at%であること、さらに好ましくは、錫
に対してアンチモンの割合が0〜50at%であること
が望ましい、また1層当たりの金属酸化物層の厚みは5
0人〜1000人が好ましい、金属層は金あるいは錫あ
るいはパラジウムあるいはそれらの合金からなり、その
厚みは1層当たり10人〜500人が好ましい、積層構
成としては金属層を金属酸化物が挟むようにする。この
場合その全厚みは100Å以上であれば十分である。
The metal oxide layer is made of a composite oxide containing indium as a main component and tin or tin and antimony, and preferably the ratio of tin and antimony to indium is 2 to 25 at%, more preferably , the ratio of antimony to tin is preferably 0 to 50 at%, and the thickness of each metal oxide layer is 5
The metal layer is preferably made of gold, tin, palladium, or an alloy thereof, and the thickness is preferably 10 to 500 per layer.The laminated structure is such that the metal layer is sandwiched between metal oxides. Make it. In this case, it is sufficient that the total thickness is 100 Å or more.

対向電橋には上記透明電極あるいは一般の金属酸化物電
極のみならず金属、合金、金属シリサイドなどの金属化
合物等の薄膜、またはそれらの1種類または2種類以上
の積層薄膜が用いられる。
For the opposite electric bridge, not only the above-mentioned transparent electrode or general metal oxide electrode but also a thin film of a metal, an alloy, a metal compound such as metal silicide, or a laminated thin film of one or more of these are used.

よりこの好ましくは、接触している有機発光層への電子
の注入効率のよい材料を用いるとよい。
More preferably, a material with high efficiency of electron injection into the organic light emitting layer in contact with the organic light emitting layer is preferably used.

この電極材料として、より具体的に説明すると、−船釣
に電子の仕事関数の小さな金属や合金薄膜、それらの積
層薄膜などが用いられる、さらにより具体的にはMg、
Li、Na、に、Ca、Rb、Sr、Ceなどの金属、
Mg−Agなどの合金、CCs−0−A、Cs3 sb
、、Na、KSb。
To explain this electrode material more specifically, metals with small electron work functions, alloy thin films, and laminated thin films thereof are used for boat fishing, and more specifically, Mg,
Metals such as Li, Na, Ca, Rb, Sr, Ce,
Alloys such as Mg-Ag, CCs-0-A, Cs3 sb
,,Na,KSb.

(Cs)Nag KSbなどの金属化合物薄膜、またそ
れらの積N薄膜などが好適である。
Metal compound thin films such as (Cs)Nag, KSb, and N thin films thereof are suitable.

上記発明の素子は、電極層/発光機能を発現する層/電
極層/光機能を発現する層/電極層/発光機能を発現す
る層/電極・・・と多段かさねでもよい、この素子構造
により、色調の調整や多色化なども可能である。また、
この素子を、平面上に多数ならべてもよい、この平面上
に並べられた素子では、それぞれの素子の発光色を変え
て、カラー表示用部材として用いてもよい。
The device of the above invention may be stacked in multiple stages such as electrode layer/layer exhibiting a light-emitting function/electrode layer/layer exhibiting a light-emitting function/electrode layer/layer exhibiting a light-emitting function/electrode... Due to this device structure, It is also possible to adjust the color tone and create multiple colors. Also,
A large number of these elements may be arranged on a plane. In the elements arranged on this plane, the emitted light color of each element may be changed and used as a color display member.

〔実施例〕〔Example〕

第1図に示すように、厚さ75μmのPETフィルム1
上にインジウム−錫−アンチモンターゲットを用いたD
Cマグネトロンスパッタ法により金属酸化膜2−1を2
00人形成し、続いて金22を50人、さらに第1層と
同じ金属酸化膜23を200人形成し第一の積層透明電
極層とした。このときの金属酸化膜中のインジウム、錫
、アンチモンの組成比は87/11/2であった。
As shown in Figure 1, a PET film 1 with a thickness of 75 μm
D using an indium-tin-antimony target on top
Metal oxide film 2-1 is formed by C magnetron sputtering method.
Then, gold 22 was formed by 50 people, and metal oxide film 23, which is the same as the first layer, was formed by 200 people to form the first laminated transparent electrode layer. The composition ratio of indium, tin, and antimony in the metal oxide film at this time was 87/11/2.

次に本電橿層上に、真空抵抗加熱蒸着法により、アルミ
ニュームオキシン(Al(OX)3)の薄膜を膜厚40
0A堆積し、有機化合物薄膜層3を形成した。さらに、
この層の上に、電子ビーム蒸着法によりMg金属薄膜を
堆積し、第二電極層4を形成し、本発明の発光素子を得
た0Mg金属の蒸着膜の面積は3mm角である。
Next, a thin film of aluminum oxine (Al(OX)3) with a thickness of 40 mm was deposited on this electrode layer by vacuum resistance heating vapor deposition.
0A was deposited to form an organic compound thin film layer 3. moreover,
On this layer, a Mg metal thin film was deposited by electron beam evaporation to form the second electrode layer 4, and the light emitting element of the present invention was obtained.The area of the 0Mg metal evaporation film was 3 mm square.

本発明の発光素子に、直流電圧を印加して、印加電圧に
対す電流特性を調べた。第2図にその特性を示す、透明
電極をプラス、Mg側をマイナスにすると、it流が電
圧の増加とともに増加し、この逆の橿性では、電流が流
れない、所謂ダイオード特性を示した。また、このダイ
オードの順方向に電圧10Vを印加すると、100mA
の注入電流が観測された。この電流値を電流密度に換算
すると、1.1A/cm”にも達した。また、この素子
は、直流でも交流でも動作した。また、通常の室内の蛍
光灯の下で、明るく、しかもはっきりと緑色の面発光が
観測された。またポリマーフィルムの可撓性を利用し円
筒状にし、同様の通電試験を行ったところ同一の発光が
観測された。
A direct current voltage was applied to the light emitting device of the present invention, and the current characteristics with respect to the applied voltage were investigated. The characteristics are shown in FIG. 2. When the transparent electrode was made positive and the Mg side was made negative, the IT current increased as the voltage increased, and when the polarity was the opposite, no current flowed, showing so-called diode characteristics. Also, when a voltage of 10V is applied in the forward direction of this diode, the output voltage is 100mA.
injection current was observed. When this current value was converted into a current density, it reached 1.1A/cm". Also, this device operated with both direct current and alternating current. It was also bright and clearly visible under normal indoor fluorescent lighting. A green surface luminescence was observed.The same luminescence was also observed when the polymer film was made into a cylindrical shape using its flexibility and a similar current test was conducted.

〔比較例1〕 PETフィルムにインジウムターゲットを用いたDCマ
グネトロンスパッタ法で形成した透明導電膜を電極とし
実施例と同様な試験を行った。その結果は発光は観測さ
れるものの発光強度は低く、また安定性も不十分であっ
た。
[Comparative Example 1] A test similar to that of the example was conducted using a transparent conductive film formed on a PET film by DC magnetron sputtering using an indium target as an electrode. As a result, although luminescence was observed, the luminescence intensity was low and the stability was also insufficient.

〔比較例2〕 PETフィルムにインジウム、錫、アンチモンを膜組成
としてインジウム/錫/アンチモン=70/15/15
となるようにDCマグネトロンスパッタ法で形成したも
のを電極として実施例と同様な試験を行った。その結果
は発光はほとんど観測されなかった。
[Comparative Example 2] Indium/tin/antimony = 70/15/15 with film composition of indium, tin, and antimony on PET film
A test similar to that of the example was conducted using an electrode formed by DC magnetron sputtering so as to have the following properties. As a result, almost no luminescence was observed.

〔発明の効果〕〔Effect of the invention〕

以上の実施例、比較例から明らかなように、本発明は注
入型発光素子に関するものであり、従来技術において、
到達できなかった可撓性を有する高性能な発光素子を提
供するものであり、表示用部材等として工業的に有用な
ものである。
As is clear from the above Examples and Comparative Examples, the present invention relates to an injection type light emitting device, and in the prior art,
This provides a high-performance light-emitting element with flexibility that has not been achieved previously, and is industrially useful as a display member or the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の発光素子の実施の一例を示す説明図で
ある。第2図は本発明の発光素子の特性を示すグラフで
ある。 図中 1−−−−−−・−ポリマーフィルム、2・・・
−・・・−透明電極層、2−1−・−・・・・・・・・
金属酸化物、2−2金属、2−3・・−・・・・・−・
・金属酸化物、3   有機化合物薄膜層、4・・−−
−−−−−−一第二電掻層、を示す。 第1図
FIG. 1 is an explanatory diagram showing an example of implementation of the light emitting device of the present invention. FIG. 2 is a graph showing the characteristics of the light emitting device of the present invention. In the figure: 1---Polymer film, 2...
-...-Transparent electrode layer, 2-1-...
metal oxide, 2-2 metal, 2-3...
・Metal oxide, 3 Organic compound thin film layer, 4...
---------The first and second electrode layers are shown. Figure 1

Claims (3)

【特許請求の範囲】[Claims] (1) ポリマーフィルム上に形成された透明導電膜を
少なくとも一方の電極とし、対向する2つの電極間に発
光機能を発現する層として,有機化合物薄膜層を設けた
発光素子であり、該ポリマーフィルム上に形成された透
明導電膜が金属酸化物と金属との積層膜であることを特
徴とする発光素子。
(1) A light-emitting element in which a transparent conductive film formed on a polymer film is used as at least one electrode, and a thin organic compound layer is provided between two opposing electrodes as a layer that exhibits a light-emitting function, and the polymer film A light-emitting device characterized in that the transparent conductive film formed thereon is a laminated film of a metal oxide and a metal.
(2) 金属酸化物がインジウムを主成分とし、錫ある
いは錫およびアンチモンからなる複合金属酸化物である
請求項1記載の発光素子。
(2) The light emitting device according to claim 1, wherein the metal oxide is a composite metal oxide containing indium as a main component and consisting of tin or tin and antimony.
(3) 金属が金あるいは錫あるいはパラジウムあるい
はそれらの合金からなる請求項1記載の発光素子。
(3) The light emitting device according to claim 1, wherein the metal is gold, tin, palladium, or an alloy thereof.
JP1071792A 1989-03-27 1989-03-27 Luminous element Pending JPH02253593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1071792A JPH02253593A (en) 1989-03-27 1989-03-27 Luminous element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1071792A JPH02253593A (en) 1989-03-27 1989-03-27 Luminous element

Publications (1)

Publication Number Publication Date
JPH02253593A true JPH02253593A (en) 1990-10-12

Family

ID=13470777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1071792A Pending JPH02253593A (en) 1989-03-27 1989-03-27 Luminous element

Country Status (1)

Country Link
JP (1) JPH02253593A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05174975A (en) * 1991-10-16 1993-07-13 Fuji Electric Co Ltd Organic thin film luminous element
US6133581A (en) * 1997-09-22 2000-10-17 Fuji Electric Co., Ltd. Organic light-emitting device and method of manufacturing the same
US6280861B1 (en) 1996-05-29 2001-08-28 Idemitsu Kosan Co., Ltd. Organic EL device
JP2003115393A (en) * 2001-10-02 2003-04-18 Sony Corp Organic electroluminescence element and its manufacturing method, image display equipment
JP2005108644A (en) * 2003-09-30 2005-04-21 Sanyo Electric Co Ltd Organic el element
KR100561232B1 (en) * 2001-07-23 2006-03-15 파이오니아 코포레이션 Layered wiring line of silver or silver alloy and method for forming the same and display panel substrate using the same
WO2012176407A1 (en) * 2011-06-24 2012-12-27 三菱マテリアル株式会社 Conductive film and method for producing same, and sputtering target used for same
CN108878683A (en) * 2018-06-29 2018-11-23 云南大学 A kind of metal oxide stack field-effect electrode

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174838A (en) * 1984-09-21 1986-04-17 コニカ株式会社 Transparent conductive laminate
JPS6218254A (en) * 1985-07-16 1987-01-27 日東電工株式会社 Laminate
JPS63102928A (en) * 1986-10-20 1988-05-07 グンゼ株式会社 Metallic film laminate
JPS63295695A (en) * 1987-02-11 1988-12-02 イーストマン・コダック・カンパニー Electric field light emitting device having organic light emitting medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174838A (en) * 1984-09-21 1986-04-17 コニカ株式会社 Transparent conductive laminate
JPS6218254A (en) * 1985-07-16 1987-01-27 日東電工株式会社 Laminate
JPS63102928A (en) * 1986-10-20 1988-05-07 グンゼ株式会社 Metallic film laminate
JPS63295695A (en) * 1987-02-11 1988-12-02 イーストマン・コダック・カンパニー Electric field light emitting device having organic light emitting medium

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05174975A (en) * 1991-10-16 1993-07-13 Fuji Electric Co Ltd Organic thin film luminous element
US6280861B1 (en) 1996-05-29 2001-08-28 Idemitsu Kosan Co., Ltd. Organic EL device
US6133581A (en) * 1997-09-22 2000-10-17 Fuji Electric Co., Ltd. Organic light-emitting device and method of manufacturing the same
KR100561232B1 (en) * 2001-07-23 2006-03-15 파이오니아 코포레이션 Layered wiring line of silver or silver alloy and method for forming the same and display panel substrate using the same
US7235883B2 (en) 2001-07-23 2007-06-26 Pioneer Corporation Layered wiring line of silver alloy and method for forming the same and display panel substrate using the same
JP2003115393A (en) * 2001-10-02 2003-04-18 Sony Corp Organic electroluminescence element and its manufacturing method, image display equipment
JP2005108644A (en) * 2003-09-30 2005-04-21 Sanyo Electric Co Ltd Organic el element
WO2012176407A1 (en) * 2011-06-24 2012-12-27 三菱マテリアル株式会社 Conductive film and method for producing same, and sputtering target used for same
CN108878683A (en) * 2018-06-29 2018-11-23 云南大学 A kind of metal oxide stack field-effect electrode

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