JPH0225197Y2 - - Google Patents

Info

Publication number
JPH0225197Y2
JPH0225197Y2 JP1983151649U JP15164983U JPH0225197Y2 JP H0225197 Y2 JPH0225197 Y2 JP H0225197Y2 JP 1983151649 U JP1983151649 U JP 1983151649U JP 15164983 U JP15164983 U JP 15164983U JP H0225197 Y2 JPH0225197 Y2 JP H0225197Y2
Authority
JP
Japan
Prior art keywords
ion
plate
ion implantation
electrode plate
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983151649U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6059998U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983151649U priority Critical patent/JPS6059998U/ja
Publication of JPS6059998U publication Critical patent/JPS6059998U/ja
Application granted granted Critical
Publication of JPH0225197Y2 publication Critical patent/JPH0225197Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1983151649U 1983-09-30 1983-09-30 放射性ガスの固定化処分装置 Granted JPS6059998U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983151649U JPS6059998U (ja) 1983-09-30 1983-09-30 放射性ガスの固定化処分装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983151649U JPS6059998U (ja) 1983-09-30 1983-09-30 放射性ガスの固定化処分装置

Publications (2)

Publication Number Publication Date
JPS6059998U JPS6059998U (ja) 1985-04-25
JPH0225197Y2 true JPH0225197Y2 (enExample) 1990-07-11

Family

ID=30335995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983151649U Granted JPS6059998U (ja) 1983-09-30 1983-09-30 放射性ガスの固定化処分装置

Country Status (1)

Country Link
JP (1) JPS6059998U (enExample)

Also Published As

Publication number Publication date
JPS6059998U (ja) 1985-04-25

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