JPH0225020Y2 - - Google Patents

Info

Publication number
JPH0225020Y2
JPH0225020Y2 JP1984116031U JP11603184U JPH0225020Y2 JP H0225020 Y2 JPH0225020 Y2 JP H0225020Y2 JP 1984116031 U JP1984116031 U JP 1984116031U JP 11603184 U JP11603184 U JP 11603184U JP H0225020 Y2 JPH0225020 Y2 JP H0225020Y2
Authority
JP
Japan
Prior art keywords
fluid pressure
chamber
piezoelectric element
fluid
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984116031U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6132668U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984116031U priority Critical patent/JPS6132668U/ja
Priority to US06/756,198 priority patent/US4617952A/en
Priority to DE19853527069 priority patent/DE3527069A1/de
Priority to GB8519207A priority patent/GB2163833B/en
Publication of JPS6132668U publication Critical patent/JPS6132668U/ja
Application granted granted Critical
Publication of JPH0225020Y2 publication Critical patent/JPH0225020Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Temperature-Responsive Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP1984116031U 1984-07-31 1984-07-31 切換弁 Granted JPS6132668U (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1984116031U JPS6132668U (ja) 1984-07-31 1984-07-31 切換弁
US06/756,198 US4617952A (en) 1984-07-31 1985-07-18 Switching valve and an electro-pneumatic pressure converter utilizing the same
DE19853527069 DE3527069A1 (de) 1984-07-31 1985-07-29 Elektropneumatischer schalter bzw. wandler
GB8519207A GB2163833B (en) 1984-07-31 1985-07-30 Electric-pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984116031U JPS6132668U (ja) 1984-07-31 1984-07-31 切換弁

Publications (2)

Publication Number Publication Date
JPS6132668U JPS6132668U (ja) 1986-02-27
JPH0225020Y2 true JPH0225020Y2 (enrdf_load_html_response) 1990-07-10

Family

ID=30674979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984116031U Granted JPS6132668U (ja) 1984-07-31 1984-07-31 切換弁

Country Status (1)

Country Link
JP (1) JPS6132668U (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261778A (ja) * 1986-05-08 1987-11-13 Koganei Seisakusho:Kk 電歪素子を用いた弁
KR100751289B1 (ko) 2006-07-11 2007-08-23 한국과학기술연구원 압전식 유체 제어 밸브
DE102007034048B3 (de) * 2007-07-20 2008-06-12 Hoerbiger Automatisierungstechnik Holding Gmbh Piezoelektrisches Ventil
KR101301487B1 (ko) * 2011-06-07 2013-08-29 경원산업 주식회사 압전 밸브

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142369U (ja) * 1984-03-02 1985-09-20 株式会社　小金井製作所 電子弁
JPS60154674U (ja) * 1984-03-23 1985-10-15 株式会社　小金井製作所 電子弁

Also Published As

Publication number Publication date
JPS6132668U (ja) 1986-02-27

Similar Documents

Publication Publication Date Title
US4617952A (en) Switching valve and an electro-pneumatic pressure converter utilizing the same
US6581638B2 (en) Piezo valve
US6142444A (en) Piezoelectrically actuated microvalve
AU760730B2 (en) Electrically controllable valve
US5460202A (en) Three-way piezoelectric valve
JPH0225020Y2 (enrdf_load_html_response)
US6129002A (en) Valve arrangement, especially for a pneumatic control system
JP6046268B2 (ja) マイクロバルブデバイス及びバルブアセンブリ
JPH0435649Y2 (enrdf_load_html_response)
JPH0349281Y2 (enrdf_load_html_response)
CN104487748B (zh) 微阀装置及控制流体流动的方法
KR100356368B1 (ko) 압전형 서보 밸브
JPH0221664Y2 (enrdf_load_html_response)
JPH023017Y2 (enrdf_load_html_response)
JPH023019Y2 (enrdf_load_html_response)
CN113513511B (zh) 一种压电堆叠驱动电液比例阀
JP2664556B2 (ja) 切換弁
JPH0343501Y2 (enrdf_load_html_response)
JPH038851Y2 (enrdf_load_html_response)
JPS6114269U (ja) 電気式切換弁
JPS61256001A (ja) 電気−空気圧変換器
JPH057589B2 (enrdf_load_html_response)
JPH0313658Y2 (enrdf_load_html_response)
JPH0314616Y2 (enrdf_load_html_response)
KR100612591B1 (ko) 압전소자를 이용한 공기압 방향 제어밸브