JPH02242214A - Microscope device - Google Patents

Abstract

PURPOSE:To observe fine scratch and fine dust simultaneously with color tone with high sensitivity by illuminating the surface of a sample with white light, simultaneously irradiating it with laser light from an aperture on the side of an objective lens and observing the sample while it is rotated. CONSTITUTION:The sample 8 is placed on a sample rotating means 10 and irradiated with vertical illuminating white light from a white light source 3 in the 1st side part tube 12 of a 1st optical system through the objective lens 1. The sample 8 is irradiated with the laser light from the laser light source 9 of the 2nd side part tube 13 of a 2nd optical system from the aperture on the side of the objective lens 1 simultaneously with the irradiation of the white light and observed while it is rotated. Since the bright field light source 3 is separated from the dark field laser light source 9, the light quantity of the bright field light source can be adjusted by adjusting the input voltage of the bright field light source and the color tone, the fine scratch and the fine dust on the surface of a magnetic disk and the surface of a floating head slider, etc., are simultaneously observed with high sensitivity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a microscope device that makes it possible to visualize minute scratches and minute dust at the same time as the color tone of a mirror surface sample with high sensitivity.

[Conventional technology]

An example of this type of conventional microscope equipment is shown in Figure 2 (,).
There is something like the one shown in (b).

FIG. 2 is an explanatory cross-sectional view of a conventional microscope device.
Figure a) is an explanatory cross-sectional view of the configuration for bright-field observation, and Figure (b) is an explanatory cross-sectional view of the configuration for dark-field observation. 1 is an objective lens, 2 is an eyepiece lens, 3 is a white light source means for illumination, and 4 is a remate lens (,) (b) Common parts to each figure. Furthermore, in the (,) figure, 5 is the half mirror 1 (b
) In the figure, 6 and 7 are mirrors.

8 is a sample. Reference numeral 11 indicates a central barrel, and reference numeral 12 indicates a first side barrel 14, which is a lens barrel. The line indicated by the arrow indicates the direction of the light beam.

In the bright field observation shown in the figures (,), the illumination beam A emitted from the white light source means 3 becomes a parallel beam aperture at the collimating lens 4, is reflected at the half mirror 5, and is irradiated onto the sample 8 through the objective lens 1. This reflected light beam 2 from the sample surface is observed through an objective lens 1 and an eyepiece lens 2. Therefore, when the sample surface is a mirror surface, it is suitable for color tone observation because of reflected light observation, but it is difficult to observe minute scratches, minute dust, etc. on the sample surface because the field of view is bright.

(b) In the dark field observation shown in the figure, the illumination light beam A emitted from the white light source means 3 is turned into a parallel light beam by the collimating lens 4, reflected by the mirrors 6 and 7, and is irradiated obliquely onto the sample surface from all directions. Objective lens 1
, observed through the eyepiece lens 2. Therefore, when the sample surface is a mirror surface, most of the reflected light does not pass through the objective lens 1 as shown by the dotted line, so the field of view is dark and the scattered light of minute scratches and minute dust is observed with emphasis.

Bright field observation shown in (a) and (b) using a practical microscope device.
) The switching of the dark field observation shown in the figure is possible by switching between the half mirror 5 for bright field illumination and the mirror 6 for dark field illumination.

As mentioned above, bright-field observation and dark-field observation have been used selectively depending on the observation target.

[Problem to be solved by the invention]

However, the magnetic disk surface, floating head slider surface,
When observing a mirror-surfaced sample such as a silicon wafer surface, there are cases where it is desired to observe the color tone using bright field observation and at the same time to know the location of minute scratches and minute dust. In such a case, it is considered that the sample surface should be irradiated with bright-field illumination light and dark-field illumination light at the same time for observation.

However, for mirror-surfaced samples, bright-field reflected light is large, especially for microscopic scratches.
Microscopic dust scattered light is masked and can hardly be visualized.

Therefore, it is necessary to attenuate only the bright field illumination light to such an extent that minute scratches and minute dust scattered light are not masked. In order to attenuate only the bright field light intensity, it is necessary to insert and adjust an ND filter or the like only in the bright field optical path. However, it has the disadvantage that it requires major modifications to the microscope, such as the rotation adjustment mechanism of the ND filter and the selection of an insertion position that does not interfere with the dark field optical path.

Furthermore, since the brightness of white light illumination cannot be increased too much, the intensity of scattered light from minute scratches and minute dust is also low. Therefore, unless the bright field illumination is kept extremely low, minute scratches and minute dust scattered light will be masked. As a result, the entire visual field became dark, making it unsuitable for observation with the naked eye.

Furthermore, when observing a magnetic disk surface having scratch marks, there is a drawback that the scattered light from the scratch marks is so large that it masks the scattered light scattered by fine dust and makes it difficult to see.

An object of the present invention is to provide a microscope device that enables simultaneous high-sensitivity observation of the color tone, minute scratches, and minute dust of a mirror surface sample, as well as high-sensitivity observation of minute dust scattered on a mirror surface with scratch marks.

[Means to solve the problem]

The present invention uses a laser light source with higher brightness than a white light source as dark-field illumination light, and enables dark-field observation by arbitrarily changing the direction of laser incidence on the sample surface using a sample rotation mechanism. This is a microscope device that enables dark-field observation by simultaneously irradiating dark-field light and the sample surface, and is configured as follows. That is, the microscope device includes a central cylinder having an objective lens on the lower surface, a lower mirror in an opening provided close to the side of the objective lens, and an eyepiece on the upper surface, and a central cylinder that protrudes continuously from the central cylinder. The lens barrel includes a first side barrel provided on one side and a second side barrel provided on the other side.
A first optical system is formed which includes a white light source means at the end of the side cylinder, a collimating lens provided in the white light optical path, and a half mirror at the central cylinder. A second optical system is formed by the laser light source means, an upper mirror provided in the laser beam path of the central barrel, and the lower mirror, and a sample rotation means centered at the center of the objective lens is connected to the lens barrel. The first optical system irradiates epi-illumination white light through the objective lens onto the sample surface placed on the sample rotation means, and also illuminates the sample surface through the side opening of the objective lens. The laser beam of the second optical system is irradiated and observed at the same time, and the sample placed on the sample rotating means is rotated and observed.

[Effect]

Since the present invention has been configured as described above, the present invention operates as follows.

(1) It is possible to perform bright-field and dark-field observations exactly the same as conventional microscopes, and the versatility of the microscope device is not compromised.

(2) Particularly in dark-field observation, high-intensity laser light illumination increased visibility compared to white light illumination.In photography, exposure time could be shortened by one to two orders of magnitude.

(3) In dark field observation, it became possible to emphasize fine dust and scratch marks on the mirror surface by changing the laser incidence direction. In the conventional dark-field observation mentioned above, illumination light is irradiated from all directions in order to increase the amount of scattered light. Therefore, in the case of a sample with many scratch marks, the scattered light is masked by the scattered light, and the microscopic dust and microscopic particles that are present at the same time are masked by the scattered light. Whereas scratches were masked and difficult to see, the present invention's oblique illumination from one direction makes it possible to emphasize or suppress scratch marks. By choosing the direction of incidence, we had the advantage of suppressing the scattered light caused by scratch marks and making it possible to observe minute scratches and minute dust.

(4) Switching between bright-field observation and dark-field observation is possible by simply turning on and off the power of bright-field illumination white light and dark-field illumination laser light. There is an advantage that the mirror switching mechanism unlike the conventional device is not required and the device can be simplified.

(5) The present invention has made simultaneous bright field and dark field observation possible for the first time. In order to make this possible with conventional devices, the bright field light intensity must be attenuated accordingly since the dark field surface is dark. To achieve this, it was necessary to insert and adjust an ND filter or the like only in the bright field front optical path. N.D.
The rotation mechanism of the filter and the selection of an insertion position that does not interfere with the optical path ahead of the dark field are complicated. On the other hand, the present invention has the advantage that the light intensity of the bright field light source can be adjusted by adjusting the input voltage of the bright field light source since it is divided into the bright field light source 3 and the dark field laser light source 9. Furthermore, since a high-intensity laser light source is used as the light source for dark-field illumination, the amount of attenuation of the bright-field illumination light can be kept small during simultaneous bright-field and dark-field observation, resulting in the advantage that observation can be performed in a bright field.

〔Example〕

An embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view for explaining the configuration of an embodiment of the present invention.

In Fig. 1, 1 is an objective lens, 2 is an eyepiece lens,
3 is a white light source means, 4 is a collimating lens, 5 is a half mirror, 6 and 7 are mirrors, 8 is a sample, 9 is a laser light source means, 10 is a sample rotation means, 11 is a central cylinder, 12 is a first
The side cylinder body, 13 is a second side cylinder body, and ECO is a lens barrel.

An objective lens 1 is provided at the lower end of the central cylinder 11, and an eyepiece lens 2 is provided at the upper end. A first side cylinder 12 is continuously provided on the side of the central cylinder 11, and a white light source means 3 is provided at the end of the first side cylinder 12 to emit illumination light. A is a first optical system formed by a half mirror 5 provided above the objective lens 1 at the center of the central cylindrical body 11;
The irradiation light beam C enters the objective lens L and irradiates the sample 8 below it. The irradiation light beam irradiating the sample 8 is reflected by the sample 8, and the reflected light beam enters the eyepiece lens 2 for bright field observation. Further, a second side cylinder 13 is continuously provided on any other side of the central cylinder 11,
A laser light source means 9 is provided at the end of the second side cylinder 13, and the laser beam is reflected by a mirror 6.2 at a predetermined position, and a second optical system irradiates the sample 8 obliquely from one direction. , and the scattered light beam from this sample surface is sent to the objective lens 1.
The sample 8 is configured to perform dark field observation through the eyepiece 2 and the eyepiece 2, and the sample 8 is placed on sample rotating means below the central cylinder 11.

The above constructed embodiment operates and is observed as follows.

In bright field observation, the laser light source means 9 is turned off. The illumination light beam A emitted from the white light source means 3 is reflected by the collimator lens 4 and the sinofer mirror 5, which serves as a parallel beam aperture, and is irradiated onto the sample 8 through the objective lens 1. This reflected light beam 2 from the sample surface is observed through an objective lens 1 and an eyepiece lens 2.

In dark field observation, the white light source means 3 is turned off. The laser beam is reflected by a mirror 6.7 and is obliquely irradiated onto the sample 8 from one direction. This scattered light source from the sample surface is observed through an objective lens 1 and an eyepiece lens 2. For a sample with scratch marks, the scratch marks can be observed with emphasis by adjusting the sample rotation means 10 perpendicular to the laser irradiation direction. On the other hand, when the scratch marks and the laser irradiation direction are made parallel, the scattering of light beams caused by the scratch marks is suppressed, and as a result, fine dust and scratch marks perpendicular to the laser incident direction can be observed with emphasis.

In simultaneous bright field and dark field observation, white light source means 3;
The laser light source means 9 is also turned on. Simultaneous observation is possible by adjusting the irradiation intensity by the white light source means 3 so that the laser scattered light from minute dust and minute scratches on the sample surface is not masked.

〔Effect of the invention〕

As described above, according to the first aspect of the present invention, (1) bright field and dark field observations are possible in the same manner as the conventional apparatus.

(2) Visibility is higher in dark field observation than conventional devices.

(3) Enhanced dark field observation of scratch marks and fine dust is possible.

(4) Switching between bright field and dark field observation is possible simply by turning on and off the illumination light source.

(5) Simultaneous dark field and bright field illumination observation is possible.

It has the advantage of having the following advantages.

[Brief explanation of drawings]

Fig. 1 is a sectional view for explaining the configuration of an embodiment of the present invention, and Fig. 2 is a sectional view for explaining the configuration of a conventional microscope device (,) is a sectional view for explaining the configuration in the case of bright field observation (b). FIG. 3 is a cross-sectional view for explaining the configuration in the case of dark field observation. 1°...objective lens, 2...eyepiece lens, 3...white light 8 means, 4...collimating lens, 5...half mirror 6,7...° mirror 8...sample, 9...
・Laser light source means, 10...Sample rotation means, 11...
・Central cylindrical body, 12...first side cylindrical body, 13...second
Side barrel, L Uni 1: Objective lens 2: Eyepiece lens

Claims (1)

[Claims] 1. A central cylinder having an objective lens on its lower surface and a lower mirror in an opening provided close to the side of the objective lens, and an eyepiece on its upper surface; a lens barrel including a first side barrel provided on one side so as to protrude and a second side barrel provided on the other side; A first optical system including a white light source means at the end of the cylinder, a collimator lens provided in the white light optical path, and a half mirror in the central cylinder, and a laser light source at the end of the second side cylinder. a second device comprising an upper mirror provided in the laser beam optical path of the means and the central cylinder and the lower mirror;
A microscope apparatus is constructed by providing a sample rotation means centered at the center of the objective lens below the lens barrel, and a first optical system is formed on the surface of the sample placed on the sample rotation means. The system irradiates epi-illumination white light through the objective lens, simultaneously irradiates the sample surface with the laser light of the second optical system through the side aperture of the objective lens for observation, and the sample placed on the sample rotation means. A microscope device characterized in that it is configured to be rotated for observation.