JPH02235211A - Production of vertically magnetizing/recording head - Google Patents

Abstract

PURPOSE:To eliminate the need for individually forming respective plating grounds and to shorten a head production process by using a part of the multilayer film of a main magnetic pole as a plating ground for the formation of a coil and a main magnetic pole buildup layer. CONSTITUTION:In the production method of a vertically magnetizing/recording head constituting the main magnetic pole of the multilayer film obtained by alternately laminating soft magnetic layers and non-magnetic layers and forming the coil 5 by copper plating, at least one layer 15 of the film constituting the main magnetic pole is used as the plating ground of the coil 5 and the uppermost layer 16 of the main magnetic pole is used as the plating ground of the buildup layer 4 of the main magnetic pole. Consequently, the process for individually forming respective plating grounds can be omitted, the production process can be simplified and the production cost can be reduced.

Description

[Detailed Description of the Invention] [Summary] Regarding a method of manufacturing a perpendicular magnetization recording head for a magnetic recording device that uses perpendicular magnetization for magnetic recording, for the purpose of reducing manufacturing costs, a soft magnetic film and a nonmagnetic film are alternately used. The main magnetic pole is made up of multilayer films stacked on top of each other, and the coil is formed by copper plating. In the method of manufacturing a perpendicular magnetization recording head, at least one layer of the film constituting the main pole is used as a plating base for the coil, and the uppermost layer of the main pole is used as a plating base for the main pole raised layer. do.

[Industrial application field]

The present invention relates to a method for manufacturing a perpendicular magnetization recording head for a magnetic recording device that uses perpendicular magnetization for magnetic recording.

In recent years, magnetic recording has become more dense.

In line with this, research and development efforts are underway to develop perpendicular magnetization recording, which is more suitable for high-density recording than horizontal magnetization recording, which has been employed in the past.

[Conventional technology]

Conventional perpendicular magnetic recording heads have the disadvantage of increasing the recording density by reducing the track width. (2) Use a magnetic pole material with a Bs large enough to record on a recording medium with a large Hc. ■Making the axis of easy magnetization at the tip of the magnetic pole parallel to the recording surface reduces magnetic permeability and improves high frequency characteristics. In order to satisfy these conditions, a main magnetic pole made of a multilayer film is used. FIG. 2 shows a schematic cross section of such a perpendicular magnetization recording head. In the figure, reference numeral 1 denotes a return yoke that constitutes a part of the magnetic path, and is usually made of ferrite. 2, the intermediate layer is alternately stacked with non-magnetic intermediate layers such as silicon dioxide and titanium, and f. : Main pole made of amorphous cobalt zirconium multilayer magnetic film, 3 is a non-magnetic filling part made of glass or the like to isolate the main pole and return yoke 1, 4 is a main pole raised layer made of permalloy, etc. , 5 is a coil made of copper or the like, 6 is a protective film made of alumina or the like, and 7 is an insulating layer made of heat-cured photosensitive resin or the like.

Here, the coil 5 is made by plating copper on a copper plating base 8. Further, the main pole raised layer 4 is similarly made by plating permalloy on the permalloy plating base 9.

A method of manufacturing a conventional perpendicular magnetization recording head using a multilayer main pole will be explained with reference to FIG. First, as shown in FIG.
After coating a photosensitive resin film on the substrate, it is exposed and developed to shape a pattern, and further heated and cured to form an insulating layer 7. Next, as shown in the figure (b), a plating base 8 for forming the coil by plating method
is formed by a method such as vapor deposition. Next, a frame 10 for coil plating is formed thereon by applying a photosensitive resin, exposing it to light, and developing it, as shown in FIG. Then (d
) As shown in the figure, the coil 5 is formed by plating with copper or the like, and the plating frame and the plating base of the parts other than the coil are removed. Next, as shown in FIG. 3(e), an insulating layer pattern 11 covering the coil 5 is formed, and a multilayer magnetic pole film 12 is formed thereon. Furthermore, as shown in FIG. 3(f), after forming a main pole protection pattern 13 made of alumina or quartz, a plating base 9 made of permalloy or the like for plating the main pole heaping layer is formed. Next, as shown in the figure (g), a plating frame 14 for plating the main pole raised layer is formed. This plating frame is formed by applying a photosensitive resin, followed by exposure and development. Next, as shown in the figure (h), the main pole raised layer 4 is formed by plating, the plating frame and excess plating base are removed, and a processing protection film (not shown) is formed. The main pole layer is completed by cutting it further and removing the excess portion of the main pole layer.

[Problem to be solved by the invention]

In the method of manufacturing a perpendicular magnetization recording head as described above, a plating base formation process is required when forming the coil 5 and the main pole raised layer 4, which takes a long time to complete and increases the manufacturing cost. The problem was that it was expensive.

In view of the above conventional problems, it is an object of the present invention to provide a method for manufacturing a perpendicular magnetic recording head that reduces manufacturing costs.

[Means to solve the problem]

In order to achieve the above object, in the method of manufacturing a perpendicular magnetization recording head of the present invention, the main pole is composed of a multilayer film in which soft magnetic films and nonmagnetic films are alternately laminated, and the coil is formed by copper plating. In the method of manufacturing a perpendicular magnetization recording head, at least one layer of the film constituting the main pole is formed into a coil 5.
The top layer of the main pole is used as the plating base for the main pole raised layer 4.

[For production]

By using the multilayer magnetic film constituting the main pole as the plating base for the coil 5 and the main pole embankment layer 4, there is no need to separately form the respective plating bases, simplifying the manufacturing process and reducing manufacturing costs. It becomes possible.

〔Example〕

FIGS. 1(a) to 1(g) show manufacturing steps of an embodiment of the present invention.

In this embodiment, first, as shown in figure (a), glass 3 is placed in the groove.
A photosensitive resin film is applied, exposed, developed, and then heated and cured to form an insulating layer 7 on the substrate 1 in which the insulating layer 7 is embedded. Next, as shown in the figure (b), a layer 15, which is part of the multilayer film constituting the main pole, is formed on the substrate 1 and the insulating layer 7. Next, as shown in the figure (C), a frame 10 for coil plating is formed by applying, exposing, and developing a photosensitive resin. Next, as shown in the figure (d), copper plating is performed using the part of the layer 15 of the multilayer film exposed at the bottom of the frame 10 as a base to form the coil 5, and then the plating frame 10 is removed and the main layer is plated. A part of the main magnetic pole multilayer film l5 that is to constitute the magnetic pole tip is left, and the multilayer film in other regions is removed. Next, as shown in FIG. 3(e), after forming an insulating pattern 11 covering the coil 5, the remaining layer 16 of the main pole multilayer film is formed. Next, as shown in the figure (f), after forming the main magnetic pole protection pattern 13, a plating frame 14 for forming the main magnetic pole raised layer is formed by coating, exposing and developing a photosensitive resin. Next, as shown in the figure (g), after forming the main magnetic pole build-up layer 4 by plating, the plating frame 14 and excess multilayer film are removed, and a processing protection film (not shown) is formed. Cut and complete.

According to the present embodiment described above, the formation of the base 8 of the copper plating for coil formation and the third
2 of forming the base 9 for main pole build-up layer plating in Figure (f)
Since steps can be deleted, the manufacturing process can be simplified.

〔Effect of the invention〕

As explained above, according to the present invention, a part of the main pole multilayer film is used as the plating base for forming the coil and the main pole raised layer, so there is no need to separately form the plating base for each. The head manufacturing process can be shortened.

Therefore, manufacturing costs can be reduced compared to conventional manufacturing methods.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the manufacturing process of an embodiment of the present invention, FIG. 2 is a sectional view showing a conventional perpendicular magnetization recording head, and FIG. 3 is a diagram showing the manufacturing process of a conventional perpendicular magnetization recording head. be. In the figure, 1 is a substrate (return yoke), 3 is glass, 4 is a main pole build-up layer, 5 is a coil, 7 is an insulating layer, 10.14 is a plating frame, 13 is a main pole protection pattern, 15 is a main pole multilayer Some layers of the film: 16 indicates the remaining layers of the main pole multilayer film.

Claims (1)

[Claims] 1. In a method for manufacturing a perpendicular magnetization recording head in which the main pole is formed of a multilayer film consisting of alternating layers of soft magnetic films and non-magnetic films, and the coil is formed by copper plating, at least one layer of the films constituting the main pole is provided. A method for manufacturing a perpendicular magnetization recording head, characterized in that the top layer of the main pole is used as the plating base of the main pole heaping layer (4).