JPH02222182A - Rare earth element added long size glass waveguide and manufacture thereof - Google Patents
Rare earth element added long size glass waveguide and manufacture thereofInfo
- Publication number
- JPH02222182A JPH02222182A JP4250989A JP4250989A JPH02222182A JP H02222182 A JPH02222182 A JP H02222182A JP 4250989 A JP4250989 A JP 4250989A JP 4250989 A JP4250989 A JP 4250989A JP H02222182 A JPH02222182 A JP H02222182A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- glass waveguide
- glass
- core
- items
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 81
- 229910052761 rare earth metal Inorganic materials 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 12
- 230000005284 excitation Effects 0.000 claims description 11
- 239000003550 marker Substances 0.000 claims description 4
- 238000005253 cladding Methods 0.000 claims description 3
- 238000007526 fusion splicing Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000007493 shaping process Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 21
- 239000013307 optical fiber Substances 0.000 description 14
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 241000270281 Coluber constrictor Species 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000270272 Coluber Species 0.000 description 1
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 235000008708 Morus alba Nutrition 0.000 description 1
- 240000000249 Morus alba Species 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、希土類元素を添加したガラス導波路レーザー
およびガラス導波路増幅器用の長尺ガラス導波路および
その製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a long glass waveguide doped with a rare earth element for a glass waveguide laser and a glass waveguide amplifier, and a method for manufacturing the same.
［従来の技術］
近年、光ファイバのコアに希土類元素を添加した光フア
イバレーザーの研究が活発化し、各種レザー光源用、光
増幅媒質用として注口されるようになってきた。[Prior Art] In recent years, research on optical fiber lasers in which rare earth elements are added to the core of the optical fiber has become active, and they have come to be used as various laser light sources and optical amplification media.
第６図は従来の光フアイバレーザーの構成例を示したも
のである（木材、中沢：光ファイバレザーの発振特性と
その光通信への応用、レーザ学会研究会、ＰＴＭ−８７
−１６，ＰＰ、３１＝３７、 １９８８年１１゜これは
光ファイバのコアに希土類元素を添加した光ファイバの
両端面をレーザーミラーに直に接触させるが、光ファイ
バの両端面に誘電体多層膜を蒸着させて光共振器を構成
したものである。励起光源にはＡｒイオンレサー（波長
５１４． ５ｎｍ） 、色素レーサー（波長６５０ｎｍ
）、半導体レーザー（波長８３０ ｎｍ）等を用いて端
面励起か行われる。また光増幅器の例として第７図に示
す構成が上記両氏により提案されている。すなわち、希
土類を添加した光フアイバ内に信号光を伝搬させ、励起
光は光フアイバカップラを用いて合成させ、また光フア
イバカップラで分離させる構成である。Figure 6 shows an example of the configuration of a conventional optical fiber laser (Kiku, Nakazawa: Oscillation characteristics of optical fiber laser and its application to optical communications, Laser Society Research Group, PTM-87
-16, PP, 31=37, 1988 11゜In this method, both end faces of an optical fiber whose core is doped with a rare earth element are brought into direct contact with a laser mirror, but a dielectric multilayer film is applied to both end faces of the optical fiber. The optical resonator is constructed by vapor-depositing. The excitation light source includes an Ar ion laser (wavelength 514.5 nm) and a dye laser (wavelength 650 nm).
), a semiconductor laser (wavelength: 830 nm), etc. are used for end face excitation. Further, as an example of an optical amplifier, the configuration shown in FIG. 7 has been proposed by the above-mentioned authors. That is, the configuration is such that signal light is propagated in an optical fiber doped with rare earth elements, and excitation light is combined using an optical fiber coupler and separated using an optical fiber coupler.
［発明が解決しようとする課題］
前述した光フアイバレーザーおよび光フアイバ増幅器は
、
■ 光ファイバのコア径が細径であるため励起パワー密
度が大きくなり、励起効率を上げられること
■ 相互作用長を長くとれること
■ 特に石英系ファイバの場合、低損失であること
■ 可撓性があること
なとの特徴かある。しかしながら、他の光部品、例えば
光源、受光器、光変調器、光カプラ、光合分波器、光フ
ィルタ、光スィッチ、光メモリなとと組合せて多機能光
集積回路を実現しようとすると、実装か複雑になり、小
形化、高性能化か勤しく、また光軸調整にも時間かかか
り、低コスト化も容易てないといった問題点があった。[Problems to be solved by the invention] The above-mentioned optical fiber laser and optical fiber amplifier have the following features: ■ The small core diameter of the optical fiber increases the pumping power density and increases the pumping efficiency. ■ The interaction length can be increased. It has the following characteristics: ■ It can be long; ■ It has low loss, especially in the case of silica-based fiber; ■ It has flexibility. However, when trying to realize a multifunctional optical integrated circuit by combining other optical components such as a light source, optical receiver, optical modulator, optical coupler, optical multiplexer/demultiplexer, optical filter, optical switch, and optical memory, it becomes difficult to implement the circuit. There are problems in that it is complicated, requires effort to be made smaller and more sophisticated, and it takes time to adjust the optical axis, making it difficult to reduce costs.
本発明の目的は、前記した従来技術の問題点を解決する
ことにあり、量産化、小形化、低コスト化か容易な長尺
のガラス導波路構造とその製造方法を提供することにあ
る。An object of the present invention is to solve the problems of the prior art as described above, and to provide a long glass waveguide structure that can be easily mass-produced, downsized, and reduced in cost, and a method for manufacturing the same.
［課題を解決するための手段］
本発明は、一枚の基板上に、少なくとも一つの基準マー
カーと、コア導波路を一つの組としたものを複数組並列
に配置して形成し、各組をそれぞれ切断してガラス導波
路ユニットと成し、該ユニットを直列に接続して構成す
ることにより長尺のガラス導波路を実現させるようにし
たものである。[Means for Solving the Problems] The present invention includes forming a plurality of sets of at least one reference marker and a core waveguide arranged in parallel on one substrate, and A long glass waveguide is realized by cutting each of the glass waveguide units to form a glass waveguide unit, and connecting the units in series.
また、この場合には、基準マーカーとコア導波路の間隔
を一定にしたものを一枚の基板上に複数組構成させ、各
組をそれぞれ切断してガラス導波路ユニットと成し、基
準マーカー同志が合うようにそれぞれのガラス導波路ユ
ニットを直列に接続するのか好ましい。接続はＣＯｚ
レーザーで導波路を融着接続することによって達成する
ことかできる。In addition, in this case, multiple sets of reference markers and core waveguides with constant spacing are constructed on one substrate, and each set is cut to form a glass waveguide unit. It is preferable to connect the respective glass waveguide units in series so that they match. Connection is COz
This can be achieved by fusion splicing the waveguides with a laser.
［作用］
ガラス導波路をしてより安定な発振をさせる、あるいは
より高い増幅度を得るためには、コア導波路を長くする
か、活性物質である希土類元素をコア導波路内に多量に
添加する必要かある。しかしなから、前者のコア導波路
を長くしようとすると、現状の基板（直径３ないし４イ
ンチ）および製造プロセス技術により制約されてしまう
。すなわち、直径５インチ以」二の基板を用いると、そ
の上へのガラス膜形成に際して、面内での膜厚および屈
折率分布の均一性が問題になる。また厚み約１０μｍ、
幅約１０μｍの矩形状コア導波路を側面の垂直性を保ち
、その長さ方向に精密な寸法を保ってドライエツチング
によりパターン化することは極めて難しく、結果的に長
尺のコア導波路を上記大面積基板で作ろうとすると、不
均一なコア導波路となり、散乱損失が大きくなってしま
い、光共振器として不適確であるためてあった。後者の
希土類元素をコア導波路内に多量に添加する方法は、現
状のＣＶＤ法、蒸着法なとでは限界かあり、多量に添加
することは困難であった。以」二の理由から本発明はな
されたものであって、本発明では比較的小面積の基板で
よいため、現状のプロセスで低損失、かつ均質なコア導
波路を歩留り良く、大量生産することができる。しかも
基板の厚み、コア導波路の厚みおよび屈折率の均一な一
枚の基板から、同一構造の基準マーカー付きコア導波路
を多数枚切断してとれるので、これら切断した基板を基
準マーカー同志か合うように直列に接続すれば、長尺の
低損失、均質なガラス導波路を容易に作ることかできる
。その結果、ガラス導波路レーサー、ガラス導波路増幅
器として、極めて性能の良いものを実現することかでき
る。[Effect] In order to achieve more stable oscillation or higher amplification using a glass waveguide, the core waveguide must be made longer, or a large amount of rare earth elements, which are active substances, must be added into the core waveguide. Is there a need to do that? However, attempts to lengthen the former core waveguide are limited by current substrates (3 to 4 inches in diameter) and manufacturing process technology. That is, when a substrate with a diameter of 5 inches or more is used, the in-plane uniformity of the film thickness and refractive index distribution becomes a problem when forming a glass film thereon. Also, the thickness is about 10 μm,
It is extremely difficult to pattern a rectangular core waveguide with a width of about 10 μm by dry etching while keeping the verticality of the sides and precise dimensions in the length direction, and as a result, it is extremely difficult to pattern a rectangular core waveguide with a width of about 10 μm by dry etching. If an attempt was made to fabricate a large-area substrate, the core waveguide would be non-uniform, resulting in large scattering losses, making it unsuitable for use as an optical resonator. The latter method of adding a large amount of rare earth elements into the core waveguide is limited by the current CVD method and vapor deposition method, and it has been difficult to add a large amount of rare earth elements. The present invention was made for the following two reasons. Since the present invention requires a substrate with a relatively small area, it is possible to mass-produce a low-loss, homogeneous core waveguide with a high yield using the current process. Can be done. Moreover, many core waveguides with reference markers of the same structure can be cut from a single substrate with uniform substrate thickness, core waveguide thickness, and refractive index, so these cut substrates can be aligned with each other with reference markers. By connecting them in series, it is possible to easily create a long, low-loss, homogeneous glass waveguide. As a result, glass waveguide racers and glass waveguide amplifiers with extremely high performance can be realized.
［実施例コ
第１図に本発明の希土類元素を添加した長尺のガラス導
波路の実施例を示す。同図（ａ）はガラス導波路の側面
図、（ｂ）は（ａ）のＡ−Ａ−断面図を示したものであ
る。これは３つのガラス導波路ユニット７−１．７−２
．７−３を直列に接続した例であり、直径３インチの石
英ガラス基板１に形成させたガラス導波路を切断して得
たユニットのごく一部（約１／１０）を使って構成した
ものである。低屈折率層２には、この実施例てはＳ １
ｏ２−ＴｉＯｚ −Ｂ２０３系ガラスを用いた（その屈
折率をｎｓとする）。また、コア導波路３には、この実
施例では５ｉ０２−Ｔｉ０２系ガラスにＥｒを添加した
ものを用い（その屈折率をｎｅとすると、ｎＣ＞ｎＳで
ある）クラッド４には、低屈折率層２と同じガラス組成
のものを用いた（その屈折率をｎｃｌとすると、ＩＣ＞
ｎｃｌ）。[Example 1] Fig. 1 shows an example of a long glass waveguide doped with a rare earth element according to the present invention. 3(a) is a side view of the glass waveguide, and FIG. 2(b) is a cross-sectional view taken along line A--A in FIG. This consists of three glass waveguide units 7-1, 7-2
．． 7-3 are connected in series, and is constructed using a small portion (approximately 1/10) of a unit obtained by cutting a glass waveguide formed on a quartz glass substrate 1 with a diameter of 3 inches. It is. In this embodiment, the low refractive index layer 2 includes S 1
o2-TiOz-B203 glass was used (its refractive index is ns). Furthermore, in this example, the core waveguide 3 is made of 5i02-Ti02 glass doped with Er (when its refractive index is ne, nC>nS), and the cladding 4 is a low refractive index layer. A glass with the same composition as 2 was used (if its refractive index is ncl, then IC>
ncl).
ｎｃとｎｃｌの比屈折率差は約０．３％とし、コア導波
路の厚みおよび幅はいずれも１０μｍとした。The relative refractive index difference between NC and NCL was approximately 0.3%, and the thickness and width of the core waveguide were both 10 μm.
５−１および５−２は基準マーカーであり、これらは各
ガラス導波路ユニット７−１．７−２．７３を低損失に
接続するための位置合せマーカである。このマーカーは
少なくとも一つ、多ければ多い程、有効である。上記各
ユニット間の接続は、例えばＣＯ２レーサー光を照射し
てユニット同志を融着させるか、あるいは各ユニッＩ・
を金属ケース内に収容し、金属ケース同志をＹＡＧレザ
ーて融層するようにしてもよい。コア導波路は後で述べ
るように、並列に複数本設けておいてもよい。基板１の
材料としてはガラス以外に、５１１ＧａＡｓＸ ＩｎＰ
、ＬｉＮｂＯ３なとてもよい。5-1 and 5-2 are reference markers, and these are alignment markers for connecting each glass waveguide unit 7-1.7-2.73 with low loss. There is at least one marker; the more markers there are, the more effective it is. Connections between the above units can be made, for example, by irradiating CO2 laser light to fuse the units together, or by connecting each unit
may be housed in a metal case, and the metal cases may be bonded together with YAG leather. As described later, a plurality of core waveguides may be provided in parallel. In addition to glass, the material for the substrate 1 is 511GaAsX InP.
, LiNbO3 is very good.
またコア３、クラッド４、低層、折率層２には上記以外
に５ｉＯｚにＰ ％ Ｇ ｅ １Ａρ、Ｚ ｎ ％ Ｋ
％Ｎａ、Ｂａ、Ｆ、Ｍｇなとの添加物を少なくとも１
種含んでいてもよい。さらに希土類元素にはＮ ａ ％
Ｙ ｂ −、ＨＯ％ Ｔ ｍなとを少なくとも１種含
んでいてもよい。In addition to the above, the core 3, cladding 4, low layer, and refractive index layer 2 contain 5iOz, P % G e 1 Aρ, Z n % K
At least 1% of additives such as Na, Ba, F, Mg, etc.
May contain seeds. Furthermore, rare earth elements have Na%
It may contain at least one kind of Yb-, HO%Tm, etc.
第２図は本発明の希土類元素を添加した長尺ガラス導波
路の製造工程を示したものである。同図１（ａ）はガラ
ス導波路の側面図、（ｂ）は（ａ）のＡ−Ａ″断面図を
それぞれ示したものである。FIG. 2 shows the manufacturing process of a long glass waveguide doped with rare earth elements according to the present invention. 1(a) is a side view of the glass waveguide, and FIG. 1(b) is a cross-sectional view taken along line AA'' in FIG. 1(a).
これは、例えば直径３インチの石英基板十にガラス導波
路を形成後、同図（ｂ）のように長方形に切１＃ｒシた
ものである。これには７−１から７−５のガラス導波路
ユニットか構成されている。これらのユニットは２つの
基準マーカー５−１と５２、一つのコア導波路３からな
り、いずれも同一構造のユニットからなっている。８−
１から８４は各ユニットの切断個所を示したものである
。For example, a glass waveguide is formed on a 3-inch diameter quartz substrate and then cut into a rectangular shape 1#r as shown in FIG. 2(b). This includes glass waveguide units 7-1 to 7-5. These units consist of two reference markers 5-1 and 52 and one core waveguide 3, and all units have the same structure. 8-
1 to 84 indicate the cutting locations of each unit.
この実施例での各ユニットの数は図面をわかりやすくす
るために５個であるか、実際には１０個以」二とること
ができるので、長さ５００ｍｎ＋以上のガラス導波路を
作ることは容易な事である。このプロセスはｍ産が容易
で、歩留りも良いので、非常に低コストにてきるという
利点も特徴の一つになる。The number of each unit in this example is 5 to make the drawing easier to understand, but in reality it can be 10 or more, so it is easy to create a glass waveguide with a length of 500 m+ or more. That's what it is. This process is easy to produce, has a good yield, and has the advantage of being extremely low cost.
第３図も本発明の希土類元素を添加した長尺ガラス導波
路の実施例を示したもので、同図（ａ）はガラス導波路
の側面図、（ｂ）は（ａ）のＡＡ′断面図を示したもの
である。これは基準７７’７−５−１．５−２としてガ
ラス導波路ユニットの両端面付近のみに設けた実施例で
ある。このように、基準マーカーは種々のものを用いる
ことができる。またす；（桑マーカーの数も２つにとと
まらす、３つ以上にすれは、より位置精度を高めること
ができる。Fig. 3 also shows an embodiment of the long glass waveguide doped with rare earth elements of the present invention, in which (a) is a side view of the glass waveguide, and (b) is the AA' cross section of (a). The figure is shown below. This is an example in which the reference 77'7-5-1.5-2 is provided only near both end faces of the glass waveguide unit. In this way, various reference markers can be used. (Also, limit the number of mulberry markers to two, or use three or more to increase positional accuracy.
第４図も本発明の希土類元素を添加した長尺ガラス導波
路の実施例を示したもので、同図（ａ）はガラス導波路
の側面図、（ｂ）は（ａ）のＡＡ゛断面図を示したもの
である。これはコアガラス導波路３−１．３−２．３−
３を３つ並列に配列させた場合の実施例である。このよ
うに、各ガラス導波路ユニットにコア導波路を複数個並
列に並へてもよい。Figure 4 also shows an embodiment of the long glass waveguide doped with rare earth elements of the present invention, where (a) is a side view of the glass waveguide, and (b) is the AA' cross section of (a). The figure is shown below. This is the core glass waveguide 3-1.3-2.3-
3 is arranged in parallel. In this way, a plurality of core waveguides may be arranged in parallel in each glass waveguide unit.
第５図は本発明の長尺ガラス導波路を用いてガラス導波
路レーザーとした一実施例を示したものである。これは
ガラス導波路の入、出力端面にレザーミラー１１．１２
をはりつけたものであり、ミラー１１にはレーザー発振
波長帯で９９％の反射率のものを、ミラー１２には反射
率９０％のものを用いて構成されている。FIG. 5 shows an embodiment of a glass waveguide laser using the long glass waveguide of the present invention. This is a laser mirror 11.12 on the input and output end faces of the glass waveguide.
The mirror 11 has a reflectance of 99% in the laser oscillation wavelength band, and the mirror 12 has a reflectance of 90% in the laser oscillation wavelength band.
第６図はガラス導波路に励起光導入用導波路９１、励起
光結合用方向性結合器１０−１、励起押出用方向性結合
器１０−２、励起光取出し用導波路９−２を備えたガラ
ス導波路増幅器の一実施例を示したもので、同一構造の
ガラス導波路ユニット７−１と７−２を接続することに
よって構成したものである。尚、ガラス導波路ユニット
７１と７−２の間にさらに第１図のような直線状のコア
導波路を複数個直列に接続することによって、より高い
増幅度の増幅器を得ることが可能である。FIG. 6 shows a glass waveguide equipped with a waveguide 91 for introducing excitation light, a directional coupler 10-1 for coupling excitation light, a directional coupler 10-2 for excitation extrusion, and a waveguide 9-2 for extracting excitation light. This figure shows an example of a glass waveguide amplifier constructed by connecting glass waveguide units 7-1 and 7-2 of the same structure. Incidentally, by further connecting a plurality of linear core waveguides in series as shown in FIG. 1 between the glass waveguide units 71 and 7-2, it is possible to obtain an amplifier with higher amplification. .
本発明は上記実施例に限定されるものではない。The present invention is not limited to the above embodiments.
すなわち、直線上のコア導波路の途中、あるいは入、出
力端側に、光カップラ、光フィルタ、光合分波器なとの
光受動回路や、半導体レーザ、発光ダイオード、受光素
子、さらには光スィッチ、光変調器なとを一体的に組合
せて、種々の機能をもたせるようにしてもよい。また基
板１に石英ガラス基板を用いた場合には、低屈折率層２
は特になくてもさしつかえない。In other words, passive optical circuits such as optical couplers, optical filters, optical multiplexers/demultiplexers, semiconductor lasers, light emitting diodes, photodetectors, and even optical switches are installed in the middle of the linear core waveguide or at the input and output ends. , an optical modulator, etc. may be integrally combined to provide various functions. Furthermore, when a quartz glass substrate is used as the substrate 1, the low refractive index layer 2
There is no need for anything special.
［発明の効果］
以上に述べたように、本発明の希土類元素を添加したガ
ラス導波路は、長さ５００ｍｍ以上の長尺のものを容易
に作ることができ、しかも低損失、かつ均質なコア導波
路を歩留り良く、大量生産することができる。またこの
長尺の低損失なガラス導波路を用いることにより、より
安定なガラス導波路レーサーや高い増幅度のガラス導波
路増幅器を実現することができる。[Effects of the Invention] As described above, the rare earth element-doped glass waveguide of the present invention can be easily made into a long one with a length of 500 mm or more, and has a low loss and a homogeneous core. Waveguides can be mass-produced with high yield. Furthermore, by using this long, low-loss glass waveguide, it is possible to realize a more stable glass waveguide racer and a glass waveguide amplifier with high amplification.
第１図、第３図、第４図は本発明の希土類元素を添加し
た長尺のガラス導波路の実施例、第２図は本発明のガラ
ス導波路の製造工程の実施例、第５図は本発明のガラス
導波路レーサーの実施例、第６図は本発明のガラス導波
路増幅器の実施例、第７図は従来の光フアイバレーザー
の構成例、第８図は従来の光フアイバ増幅器の構成例を
それぞれ示したものである。
１：基板、２：低屈折率層、
３・コア導波路、４・クラッド、
５−１．５−２・基準マーカ
７−１〜７−５・ガラス導波路ユニット。
代理人 弁理士 薄 １）利 幸Figures 1, 3, and 4 are examples of long glass waveguides doped with rare earth elements of the present invention, Figure 2 is an example of the manufacturing process of glass waveguides of the present invention, and Figure 5 6 shows an example of the glass waveguide racer of the present invention, FIG. 6 shows an example of the structure of a conventional optical fiber laser, and FIG. 8 shows an example of a conventional optical fiber amplifier. Each configuration example is shown. 1: Substrate, 2: Low refractive index layer, 3. Core waveguide, 4. Clad, 5-1.5-2. Reference markers 7-1 to 7-5. Glass waveguide unit. Agent Patent Attorney Susuki 1) Toshiyuki
Claims (1)
ッドに覆われた直線状のコア導波路からなるガラス導波
路ユニットを複数個直列に接続したことを特徴とする長
尺ガラス導波路。 ２、第１項記載のガラス導波路において、コア導波路内
に希土類元素が少なくとも１種添加されていることを特
徴とする長尺ガラス導波路。 ３、第１〜２項において、各ガラス導波路ユニットには
直線上のコア導波路が少なくとも２つ並列に形成されて
いることを特徴とする長尺ガラス導波路。 ４、第１〜３項において、ガラス導波路は埋込み型、あ
るいはリッジ型構造を用いたことを特徴とする長尺ガラ
ス導波路。 ５、第１〜４項において、基板の上には低屈折率が設け
られ、その層の上にコア導波路か形成されていることを
特徴とする長尺ガラス導波路。 ６、第１〜５項において、直列に接続されるガラス導波
路ユニットの少なくともコア導波路同志は一体的に融着
されていることを特徴とする長尺ガラス導波路。 ７、第１〜６項において、長尺のガラス導波路のコア導
波路の入、出力端面には所望の反射率のミラーが設けら
れたことを特徴とする長尺ガラス導波路。 ８、第１〜６項において、長尺ガラス導波路の入力側に
は、励起光を導入させる導入用導波路と方向性結合器を
、出力側には励起光を取出すための取出し用方向性結合
器と取出し用導波路を設けたことを特徴とするガラス導
波路増幅器用の長尺ガラス導波路。 ９、第８項において、励起光を導入させる導入用導波路
から励起光を入射させるように構成したことを特徴とす
る長尺ガラス導波路。 １０、第１〜６項のガラス導波路の製造方法として、一
枚の基板上に少なくとも一つの基準マーカーと、コア導
波路を一つの組としたものを複数組並列に配置して形成
し、各組をそれぞれ切断してガラス導波路ユニットと成
し、該ユニットを直列に接続するようにしたことを特徴
とする長尺ガラス導波路の製造方法。 １１、第１０項において、一枚の基板上に、基準マーカ
ーとコア導波路間隔を一定にしたものを複数組構成させ
たことを特徴とする長尺ガラス導波路の製造方法。 １２、第１０〜１１項において各ガラス導波路ユニット
の基準マーカー同志が合うように上記各ガラス導波路ユ
ニットを直列に接続したことを特徴とする長尺ガラス導
波路の製造方法。 １３、第１０〜１２項において、各ガラス導波路はＣＯ
＿２レーザー光を照射することによって融着接続したこ
とを特徴とする長尺ガラス導波路の製造方法。[Claims] 1. A long glass waveguide unit characterized by connecting in series a plurality of glass waveguide units each consisting of at least one reference marker and a straight core waveguide covered with a low refractive index cladding. glass waveguide. 2. The long glass waveguide according to item 1, wherein at least one rare earth element is added to the core waveguide. 3. The elongated glass waveguide according to items 1 and 2, characterized in that each glass waveguide unit has at least two linear core waveguides formed in parallel. 4. The elongated glass waveguide according to items 1 to 3, characterized in that the glass waveguide has a buried type or ridge type structure. 5. The elongated glass waveguide according to items 1 to 4, characterized in that a low refractive index layer is provided on the substrate, and a core waveguide is formed on the layer. 6. The elongated glass waveguide according to items 1 to 5, wherein at least the core waveguides of the glass waveguide units connected in series are integrally fused. 7. A long glass waveguide according to items 1 to 6, characterized in that mirrors having a desired reflectance are provided on the input and output end faces of the core waveguide of the long glass waveguide. 8. In items 1 to 6, on the input side of the long glass waveguide, an introduction waveguide and a directional coupler are provided to introduce the excitation light, and on the output side, an extraction waveguide and a directional coupler are provided to take out the excitation light. A long glass waveguide for a glass waveguide amplifier, characterized by being provided with a coupler and an extraction waveguide. 9. The elongated glass waveguide according to item 8, characterized in that the elongated glass waveguide is configured such that the excitation light is introduced from the introduction waveguide through which the excitation light is introduced. 10. The method for manufacturing a glass waveguide according to items 1 to 6 includes forming a plurality of sets of at least one reference marker and a core waveguide arranged in parallel on one substrate, A method for manufacturing a long glass waveguide, characterized in that each set is cut to form a glass waveguide unit, and the units are connected in series. 11. The method for manufacturing a long glass waveguide according to item 10, characterized in that a plurality of sets of reference markers and core waveguides having a constant interval are formed on one substrate. 12. A method for manufacturing a long glass waveguide, characterized in that in items 10 and 11, the glass waveguide units are connected in series so that the reference markers of each glass waveguide unit align with each other. 13. In items 10 to 12, each glass waveguide is CO
_2 A method for manufacturing a long glass waveguide, characterized by fusion splicing by irradiation with laser light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1042509A JP2730955B2 (en) | 1989-02-22 | 1989-02-22 | Rare earth element-doped long glass waveguide and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1042509A JP2730955B2 (en) | 1989-02-22 | 1989-02-22 | Rare earth element-doped long glass waveguide and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02222182A true JPH02222182A (en) | 1990-09-04 |
| JP2730955B2 JP2730955B2 (en) | 1998-03-25 |
Family
ID=12638036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1042509A Expired - Fee Related JP2730955B2 (en) | 1989-02-22 | 1989-02-22 | Rare earth element-doped long glass waveguide and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2730955B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000349369A (en) * | 1999-06-03 | 2000-12-15 | Trw Inc | High-output fiber ribbon laser, and amplifier |
| WO2003077383A1 (en) * | 2002-03-13 | 2003-09-18 | Nikon Corporation | Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device |
| JP2010008751A (en) * | 2008-06-27 | 2010-01-14 | Fujitsu Ltd | Optical waveguide device and its manufacturing method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01237507A (en) * | 1987-12-04 | 1989-09-22 | Nippon Telegr & Teleph Corp <Ntt> | Absolute single polarizing optical fiber |
-
1989
- 1989-02-22 JP JP1042509A patent/JP2730955B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01237507A (en) * | 1987-12-04 | 1989-09-22 | Nippon Telegr & Teleph Corp <Ntt> | Absolute single polarizing optical fiber |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000349369A (en) * | 1999-06-03 | 2000-12-15 | Trw Inc | High-output fiber ribbon laser, and amplifier |
| WO2003077383A1 (en) * | 2002-03-13 | 2003-09-18 | Nikon Corporation | Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device |
| JP2010008751A (en) * | 2008-06-27 | 2010-01-14 | Fujitsu Ltd | Optical waveguide device and its manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2730955B2 (en) | 1998-03-25 |
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