JPH116928A - Arrayed waveguide grating type wavelength multiplexer /demultiplexer - Google Patents

Arrayed waveguide grating type wavelength multiplexer /demultiplexer

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Publication number
JPH116928A
JPH116928A JP16078697A JP16078697A JPH116928A JP H116928 A JPH116928 A JP H116928A JP 16078697 A JP16078697 A JP 16078697A JP 16078697 A JP16078697 A JP 16078697A JP H116928 A JPH116928 A JP H116928A
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Japan
Prior art keywords
dielectric multilayer
multilayer film
waveguides
grating type
output waveguides
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JP16078697A
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Japanese (ja)
Inventor
Akira Himeno
Yasuyuki Inoue
Makoto Sumita
靖之 井上
真 住田
明 姫野
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Nippon Telegr & Teleph Corp <Ntt>
日本電信電話株式会社
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Priority to JP16078697A priority Critical patent/JPH116928A/en
Publication of JPH116928A publication Critical patent/JPH116928A/en
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Abstract

PROBLEM TO BE SOLVED: To eliminate light of unwanted wavelengths and to improve crosstalk by inserting a dielectric multilayer film filter having a band-pass operation at a post stage. SOLUTION: A plurality of input waveguides 1, output waveguides 2, two slab waveguides 3, 4, and arrayed waveguides 5 with mutually different wave path lengths are formed on an Si substrate 10. When incident light is inputted to one of the input waveguides 1, it is sequentially propagated to the slab waveguide 3, arrayed waveguide 5, and slab waveguide 4, and outputted from one of output waveguides 2. At a post stage, namely, at a plurality of the output waveguides 2, dielectric multilayer film filters 6 having band-pass operation are arranged. The dielectric multilayer film filters 6 are not individually arranged on six-teen output waveguides 2 but extended over multiple output waveguides 2. The arrangement of the dielectric multilayer film filters 6 is achieved by forming grooves 1 on the substrate 10 to intersect the multiple output waveguides 2, inserting the dielectric multilayer film 6 in the grooves 7, and fixing them with an adhesive 8.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、アレイ導波路格子型波長合分波器に関する。 The present invention relates to relates to an arrayed waveguide grating type wavelength division multiplexer. 例えば、光通信或いは光情報処理などの分野で用いられる導波型光素子に関するものである。 For example, to a waveguide type optical element used in the field of optical communication or optical information processing. 具体的には、平面上に形成された導波路により構成されたアレイ導波路格子型波長合分波器(AWG: Specifically, the arrayed waveguide grating type wavelength demultiplexer constituted by a waveguide formed on a plane (AWG:
Arrayed-Waveguide Grating )において、そのクロストークを誘電体多層膜フィルタのバンドパス特性を利用して低減したことを特徴とする導波型光素子に関する。 In Arrayed-Waveguide Grating), relates to a waveguide type optical device, characterized in that the cross-talk was reduced by using a bandpass characteristic of the dielectric multilayer film filter.

【0002】 [0002]

【従来の技術】近年、例えばシリコン基板上に形成した石英系光導波路などによって構成されたプレーナ光波回路(PLC:Planner Lightwave Circit)の研究が盛んに行われている。 In recent years, planar lightwave circuit formed by such silica-based optical waveguide formed for example a silicon substrate: Study (PLC Planner Lightwave Circit) has been actively conducted. そのなかで最も重要な回路としてアレイ導波路格子型波長合分波器がある。 There is an array waveguide grating type wavelength division multiplexer as the most important circuit among them.

【0003】アレイ導波路格子型波長合分波器は、並列に並べられた互いに光路長がn×ΔLずつ異なる30〜 [0003] arrayed waveguide grating type wavelength demultiplexer is 30 the optical path length from each other arranged in parallel are different by n × [Delta] L
100本程度のアーム導波路を伝搬した複数の光の干渉により光の波長合分波機能を実現している。 It is realized WDM function of light by a plurality of interference of light propagated through the 100 degree arm waveguides. ここでnは導波路の実効屈折率、ΔLは10〜100μm程度の値である。 Where n is the effective refractive index of the waveguide, [Delta] L is the value of about 10 to 100 [mu] m. この回路の特徴は、複数の波長の光を一段の多光束干渉により実現していることである。 The feature of this circuit is that it multiple wavelengths of light realized by a multi-beam interference of the stage.

【0004】この結果として以下の2つの特長が生じる。 [0004] The following two features may occur as a result of this. 一つは、回路挿入損失が波長チャンネル数に依存しない。 One circuit insertion loss does not depend on the number of wavelength channels. もう一つは、分波される互いのチャンネル波長の間隔がフォトマスクの精度で定まり、0.1nm以下の精度で作製できる。 Second, the interval of the channel wavelength of each other to be demultiplexed Sadamari with the precision of the photomask can be fabricated by the following accuracy 0.1 nm.

【0005】これらの特長のため将来、多波長の光を使用する光通信システムにおいて、アレイ導波路格子型波長合分波器は極めて重要な光回路になることが予測されると報告されている(H.Takahashi et al., "Arrayed-W [0005] in future these features, in an optical communication system using optical multiple wavelength, array waveguide grating type wavelength division multiplexer has been reported to be a very important light circuit is predicted (H.Takahashi et al., "Arrayed-W
aveguide Grating for Wavelength Division Multi/Dem aveguide Grating for Wavelength Division Multi / Dem
ultiplexer with Nanometre Resolution," Electron.Le ultiplexer with Nanometre Resolution, "Electron.Le
tt., vol.26, no.2, pp.87-88, 1990. ) tt., vol.26, no.2, pp.87-88, 1990.)

【0006】図6にその回路構成を、図7に中心入力ポートから中心出力ポートヘの透過波長特性を示す。 [0006] The circuit arrangement in FIG. 6 shows the transmission wavelength characteristics of the center output Potohe from the center input port in FIG. 図6 Figure 6
に示すように、Si基板10上には、石英系光導波路よりなる複数の入力導波路1、出力導波路2、二つのスラブ導波路3,4及び互いに光路長がn×ΔLずつ異なるアレイ導波路5が形成され、入射光が何れかの入力導波路1に入射されると、スラブ導波路3、アレイ導波路5、スラブ導波路4を順に伝搬して出力導波路2から出射されることになる。 As shown in, on the Si substrate 10, a plurality of input waveguides 1 made of silica-based optical waveguide, the output waveguides 2, different arrays guiding two slab waveguides 3 and 4 and the optical path lengths from each other by n × [Delta] L waveguide 5 are formed, the incident light is incident on one of the input waveguide 1, the slab waveguide 3, the arrayed waveguide 5, to the slab waveguide 4 propagates sequentially emitted from the output waveguide 2 become.

【0007】ここで、アレイ導波路5における伝搬時に複数の光が干渉することにより、光の波長合分波機能が実現される。 [0007] Here, by interfering plurality of light during propagation in the arrayed waveguide 5, WDM function of the light is achieved. 例えば、図7に示すように、中心入力ポートから中心出力ポートヘ特定の波長のみが透過し、それ以外の波長の光は阻止されていることが分かる。 For example, as shown in FIG. 7, and transmits only the central output Potohe specific wavelength from the center input port, light of other wavelengths it is seen to have been blocked. 現在のところ、阻止波長の透過率と透過波長の透過率との比で表されるクロストークは30dB程度である。 Currently, crosstalk is expressed by the ratio of the transmittance of the blocking wavelength and transmittance of the transmission wavelength is approximately 30 dB.

【0008】このクロストークを低減することは、波長合分波機能として極めて重要な課題である。 [0008] It is to reduce the crosstalk, it is extremely important as a wavelength multiplexing and demultiplexing functions. このクロストークが−30dB程度に制限されている原因は、導波路の作製誤差によるものであり、現状のプロセス技術においてクロストークを大幅に改善することは容易ではない。 Cause the crosstalk is limited to about -30dB is caused by a production error of the waveguide, it is not easy to greatly improve the crosstalk in the state of the process technology.

【0009】一方、アレイ導波路格子型波長合分波器と同じ波長合分波機能を有する光部品として誘電体多層膜フィルタを用いたものが報告されている( MAScobey On the other hand, those using a dielectric multilayer film filter is reported as an optical component having the same wavelength multiplexing and demultiplexing functions as array waveguide grating type wavelength division multiplexer (MAScobey
et al. "Passive DWDM components using MicroPlasma et al. "Passive DWDM components using MicroPlasma
optical interference filters," OFC'96 Technical Di optical interference filters, "OFC'96 Technical Di
gest ThKl pp.242-243. ) gest ThKl pp.242-243.)

【0010】一般に誘電体多層膜フィルタを用いた波長合分波器では、分波する波長数と同じ数の誘電体多層膜フィルタが必要であり、かつ各々の入出力ファイバを調芯する必要がある。 [0010] In general, the wavelength division multiplexer using a dielectric multilayer film filter, the same number as the number of wavelengths demultiplexed dielectric multilayer filter is required, and is necessary to wick adjusting each of the input and output fiber is there. このため部品のコストが高くなるという問題がある。 For this reason there is a problem that the cost of parts is increased. また、使用する複数の誘電体多層膜フィルタの透過中心波長をそれぞれ0.1nm以下の精度で合わせる必要があり、このことが部品歩留まりを制限している。 Further, it is necessary to align a plurality of dielectric multilayer transmission center wavelength of 0.1nm or less accuracy the respective filter to use, which limits the part yields.

【0011】 [0011]

【発明が解決しようとする課題】本発明は、アレイ導波路格子型波長合分波器のクロストークを改善することを目的とする。 [0008] The present invention aims to improve the crosstalk of the arrayed waveguide grating type wavelength division multiplexer.

【0012】 [0012]

【課題を解決するための手段】アレイ導波路格子型波長合分波器のクロストークを改善する手段として、バンドパス機能を有する誘電体多層膜フィルタを用いる。 As means for improving the crosstalk of the arrayed waveguide grating type wavelength division multiplexer SUMMARY OF THE INVENTION The use of the dielectric multilayer film filter having a band pass function. 具体的には、アレイ導波路格子型波長合分波器で一括して多波長の光を分波した後、複数の出力導波路に誘電体多層膜フィルタを挿入して不要な波長の光を除去することによりアレイ導波路格子型波長合分波器のクロストークを改善する。 Specifically, after the demultiplexed light of collectively multiwavelength an array waveguide grating type wavelength demultiplexer, by inserting a dielectric multilayer filter to a plurality of output waveguides light of unwanted wavelengths improving the crosstalk of the arrayed waveguide grating type wavelength demultiplexer by removing.

【0013】このアレイ導波路格子型波長合分波器と誘電体多層膜フィルタの組み合わせは以下のような特長を有する。 [0013] The combination of the arrayed waveguide grating type wavelength division multiplexer and a dielectric multilayer film filter has the following features. 即ち、従来技術に示したように、アレイ導波路格子型波長合分波器は分波するチャンネル波長の数に依存せずほぼ一定の損失を有しており、かつ分波する各チャンネル波長の間隔は高精度に設定できている。 That is, as shown in the prior art, an array waveguide grating type wavelength division multiplexer has a substantially constant loss does not depend on the number of channels wavelength demultiplexing, and for each channel wavelength demultiplexing interval is can be set with high accuracy. そのアレイ導波路格子型波長合分波器の後段にバンドパス機能を有する誘電体多層膜フィルタを挿入することによって、アレイ導波路格子型波長合分波器単体では実現できなかった極めて低いクロストークを実現する。 By inserting a dielectric multilayer film filter having a band pass function downstream of the array waveguide grating type wavelength demultiplexer, very low crosstalk which could not be achieved by the arrayed waveguide grating type wavelength demultiplexer alone to achieve.

【0014】ここで誘電体多層膜フィルタはアレイ導波路格子型波長合分波器のクロストーク光を除去するためにのみ使われるため、その中心波長に対してかなり緩いスペックしか求められないため、歩留まりが高く安価なフィルタを使用することが可能である。 [0014] Here, since for the dielectric multilayer film filters which are only used to eliminate the cross talk light of the arrayed waveguide grating type wavelength demultiplexer, which only prompted considerable loose specifications with respect to the center wavelength, yield it is possible to use the high inexpensive filter.

【0015】 [0015]

【発明の実施の形態】図1(a)(b)に本発明の誘電体多層膜フィルタを用いたアレイ導波路格子型波長合分波器を示す。 Shows the DETAILED DESCRIPTION OF THE INVENTION Figure 1 (a) (b) in the dielectric multilayer film arrayed waveguide grating type wavelength demultiplexer using a filter of the present invention. この回路の基本的な機能は、アレイ導波路格子型波長合分波器によって多波長(本実施例では10 The basic function of this circuit is 10 multiwavelength (this example by an array waveguide grating type wavelength division multiplexer
0GHzチャンネル間隔16波長)の光を分波し、その出力導波路2に挿入した誘電体多層膜フィルタ6によってクロストークを改善するものである。 Demultiplexes the light of 0GHz channel spacing 16 wavelength), it is to improve the cross-talk by the dielectric multilayer film filter 6 inserted into the output waveguide 2.

【0016】即ち、図1(a)に示すように、Si基板10上には、石英系光導波路よりなる複数の入力導波路1、出力導波路2、二つのスラブ導波路3,4及び互いに光路長がn×ΔLずつ異なるアレイ導波路5が形成され、入射光が何れかの入力導波路1に入射されると、スラブ導波路3、アレイ導波路5、スラブ導波路4を順に伝搬して出力導波路2から出射されるようになっている。 [0016] That is, as shown in FIG. 1 (a), on the Si substrate 10, a plurality of input waveguides 1 made of silica-based optical waveguide, the output waveguide 2, two slab waveguides 3, 4 and to each other formed optical path length is arrayed waveguide 5 different by n × [Delta] L, the incident light is incident on one of the input waveguide 1, and propagates the slab waveguide 3, the arrayed waveguide 5, a slab waveguide 4 in order It is adapted to be emitted from the output waveguide 2 Te.

【0017】このような構成のアレイ導波路格子型波長合分波器の後段、つまり、複数の出力導波路2にバンドパス機能を有する誘電体多層膜フィルタ6が配置されている。 The subsequent stage of such a construction of the arrayed waveguide grating type wavelength demultiplexer, i.e., a dielectric multilayer film filter 6 having a band pass function to the plurality of output waveguides 2 are arranged. 誘電体多層膜フィルタ6は16本の出力導波路に個別に配置するのではなく、複数の出力導波路2にまたがる(本実施例では8つの出力導波路にまたがる)構成になっている。 Dielectric multilayer film filter 6 instead of separately disposed 16 output waveguides, across multiple output waveguides 2 (in this example spans eight output waveguides) has a structure.

【0018】誘電体多層膜フィルタ6の配置は、例えば、複数の出力導波路2に対して交差するように基板1 The arrangement of the dielectric multilayer film filter 6, for example, a substrate so as to intersect the plurality of output waveguides 2 1
0に溝7を形成し、この溝7に誘電体多層膜6を挿入し、接着剤8で固定することにより実現される。 0 to form a groove 7, by inserting a dielectric multilayer film 6 into the groove 7, it is realized by fixing with an adhesive 8. 図1 Figure 1
(b)に図1(a)中のa−a'線の拡大断面図を示す。 In (b) shows an enlarged cross-sectional view of line a-a 'in FIG. 1 (a). 誘電体多層膜フィルタ6の厚みは約50μm、溝7 The thickness of the dielectric multilayer film filter 6 about 50 [mu] m, the groove 7
の幅を55μm、溝7の深さを300μmとした。 The width 55 .mu.m, was 300μm and the depth of the groove 7.

【0019】各々の出力導波路2は誘電体多層膜フィルタ6に交差する角度が異なっており、この交差角度の違いによって誘電体多層膜フィルタ6を透過する波長が、 The output waveguide 2 each are different angles which intersect the dielectric multilayer film filter 6, a wavelength transmitted through the dielectric multilayer film filter 6 by the difference in the angle of intersection,
アレイ導波路格子型波長合分波器で分波された各出力チャンネル波長に一致するよう設計されている。 It is designed to match the respective output channel wavelengths demultiplexed by the arrayed waveguide grating type wavelength division multiplexer. 即ち、誘電体多層膜フィルタ6を直線導波路に挿入したときの透過波長特性は図3に示す通り特定の波長でピークを有するが、誘電体多層膜フィルタ6に対する直線導波路の入射角を変化させると、図4に示すように透過波長が変化する。 That is, the transmission wavelength characteristic was measured with the dielectric multilayer film filter 6 to the straight waveguide has a peak at a street specific wavelength shown in FIG. 3, changing the incident angle of the straight waveguide for the dielectric multilayer film filter 6 If is, the transmission wavelength is changed as shown in FIG.

【0020】従って、図4に示すような透過波長の入射角依存性を利用して、誘電体多層膜フィルタ6を透過する波長が、アレイ導波路格子型波長合分波器で分波された各出力チャンネル波長に一致するように設計することができる。 [0020] Thus, by using the incidence angle dependence of the transmission wavelength, as shown in FIG. 4, a wavelength transmitted through the dielectric multilayer film filter 6, demultiplexed by the arrayed waveguide grating type wavelength division multiplexer it can be designed to match the respective output channel wavelengths. 尚、入射角が大きくなると偏波による透過波長の変化が大きくなるため、入射角としては10°以下が好ましい。 Since the change in the transmission wavelength due to polarization when the incident angle increases increases, preferably 10 ° or less as the angle of incidence.

【0021】上記構成を有する本実施例の誘電体多層膜を用いたアレイ導波路格子型波長合分波器は、次の効果を奏する。 The arrayed waveguide grating type wavelength division multiplexer using a dielectric multilayer film of this example having the above structure, the following effects. 先ず、前提として、アレイ導波路格子型波長合分波器は分波するチャンネル波長の数に依存せずほぼ一定の損失を有しており、かつ分波する各チャンネル波長の間隔は高精度に設定できる。 First, as a premise, an array waveguide grating type wavelength division multiplexer has a substantially constant loss does not depend on the number of channels wavelength demultiplexing, and interval of each channel wavelength for demultiplexing the high-precision It can be set.

【0022】更に、そのアレイ導波路格子型波長合分波器の後段にバンドパス機能を有する誘電体多層膜フィルタ6を挿入することによって、不要な波長の光が除去され、アレイ導波路格子型波長合分波器単体では実現できなかった極めて低いクロストークを実現することができる。 Furthermore, by inserting a dielectric multilayer film filter 6 having a band pass function downstream of the array waveguide grating type wavelength demultiplexer, light of unnecessary wavelengths are removed, the arrayed waveguide grating type the wavelength demultiplexer alone can achieve very low crosstalk can not be realized. 例えば、本実施例における誘電体多層膜フィルタを用いたアレイ導波路格子型波長合分波器の透過波長特性は図5に示すように、図7に示す従来例に比較して、1 For example, the transmission wavelength characteristics of the arrayed waveguide grating type wavelength division multiplexer using a dielectric multilayer film filter in this embodiment, as shown in FIG. 5, as compared with the conventional example shown in FIG. 7, 1
dB程度の過剰損失が生じているが、10dB以上の大幅なクロストークの改善が認められる。 Although excess loss of about dB has occurred, it is observed improvement of 10dB or more of the significant cross-talk.

【0023】ここで、誘電体多層膜フィルタ6はアレイ導波路格子型波長合分波器のクロストーク光を除去するためにのみ使われるため、その中心波長に対してかなり緩いスペックしか求められないため、歩留まりが高く安価なフィルタを使用することが可能である。 [0023] Here, since the dielectric multilayer film filter 6 which is used only to remove the cross talk light of the arrayed waveguide grating type wavelength demultiplexer, only sought fairly loose specifications with respect to the center wavelength Therefore, it is possible to yield to use higher inexpensive filter.

【0024】尚、上述した実施例では、16本の出力導波路2を8本の出力導波路づつにまとめて誘電体多層膜フィルタ6を挿入したが、必要に応じて4本の出力導波路づつ、2本の出力導波路づつ、また16本の出力導波路2に対して各々別々に誘電体多層膜フィルタ6を挿入してもよい。 [0024] In the embodiment described above, 16 output waveguides 2 are summarized in the output waveguide by one of the eight was inserted a dielectric multilayer film filter 6, four output waveguides as necessary increments, two output waveguides at a time, or may be inserted a dielectric multilayer film filter 6 each independently of the 16 with respect to the output waveguides 2. この場合、これらの構成に合わせて挿入する誘電体多層膜の透過中心波長、導波路との交差角等を適宜設定すればよい。 In this case, it is sufficient to set the transmission center wavelength of the dielectric multilayer film to be inserted to fit these configurations, the crossing angle and the like between the waveguide appropriately.

【0025】また、図2に示すように出力導波路2は、 Further, the output waveguides 2, as shown in Figure 2,
誘電体多層膜フィルタ6に交差する部分にパラボラ形状部分9を有している。 It has a parabolic shaped portion 9 at the intersection to the dielectric multilayer film filter 6. パラボラ形状部分9は、フィルタ溝7による光の放射損失を低減すると共に、フィルタ6 Parabolic portion 9 serves to reduce the radiation loss of light by the filter groove 7, the filter 6
に入射する光を平行ビームに近づけるための手段である。 A means for approximating a parallel beam of light incident on.

【0026】 [0026]

【発明の効果】以上、実施例に基づいて具体的に説明したように、本発明の誘電体多層膜フィルタを用いたアレイ導波路格子型波長合分波器は、アレイ導波路格子型波長合分波器の後段にバンドパス機能を有する誘電体多層膜フィルタを挿入することによって、不要な波長の光が除去され、従来のアレイ導波路格子型波長合分波器に比べて大幅にクロストークが改善される。 Effect of the Invention] As has been specifically described based on examples, the dielectric arrayed waveguide grating type wavelength demultiplexer using a multilayer film filter of the present invention, the arrayed waveguide grating type wavelength multiplexer by inserting a dielectric multilayer film filter in the subsequent stage of the demultiplexer having a band pass function, light of unnecessary wavelengths is removed, significantly crosstalk as compared with the conventional arrayed waveguide grating type wavelength division multiplexer There is improved.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】図1(a)は本発明の誘電体多層膜フィルタを用いたアレイ導波路格子型波長合分波器の回路構成図、 1] Fig. 1 (a) is a circuit configuration diagram of a dielectric multilayer film arrayed waveguide grating type wavelength demultiplexer using a filter of the present invention,
図1(b)は、図1(a)中のa−a'線の拡大断面図である。 1 (b) is an enlarged sectional view of line a-a 'in FIG. 1 (a).

【図2】誘電体多層膜フィルタが挿入されている部分の拡大上面図である。 2 is an enlarged top view of a portion where the dielectric multilayer film filter is inserted.

【図3】直線導波路に挿入した誘電体多層膜フィルタの透過波長特性を示すグラフである。 3 is a graph showing the wavelength transmission characteristic of the inserted linear waveguide dielectric multilayer filter.

【図4】誘電体多層膜フィルタに交差する導波路の入射角と透過スペクトルの中心波長との関係を示すグラフである。 4 is a graph showing the relationship between the incident angle of the waveguide intersecting the dielectric multilayer film filter center wavelength of the transmission spectrum.

【図5】図1の誘電体多層膜フィルタを用いたアレイ導波路格子型波長合分波器の透過波長特性を示すグラフである。 5 is a graph showing the wavelength transmission characteristic of the arrayed waveguide grating type wavelength division multiplexer using a dielectric multilayer film filter of FIG.

【図6】アレイ導波路格子型波長合分波器の回路構成図である。 6 is a circuit diagram of the arrayed waveguide grating type wavelength division multiplexer.

【図7】図6に示したアレイ導波路格子型波長合分波器の中心入力ポートから中心出力ポートへの透過波長特性を示すグラフである。 7 is a graph showing the wavelength transmission characteristic to the center output port from the center input port of the arrayed waveguide grating type wavelength division multiplexer shown in FIG.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 入力導波路 2 出力導波路 3,4 スラブ導波路 5 アレイ導波路 6 誘電体多層膜フィルタ 7 溝 8 接着剤 9 パラボラ形状部分 1 input waveguide 2 output waveguides 3,4 slab waveguide 5 arrayed waveguide 6 dielectric multilayer filter 7 groove 8 adhesive 9 parabolic portion

Claims (3)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 平面基板上に形成され、分波された出力光を導く複数の出力導波路を有するアレイ導波路格子型波長合分波器において、前記複数の出力導波路に溝が形成され、該溝に誘電体多層膜フィルタが挿入されていることを特徴とするアレイ導波路格子型波長合分波器。 1. A formed on a planar substrate, in an array waveguide grating type wavelength division multiplexer having a plurality of output waveguides for guiding output light demultiplexed, grooves are formed on the plurality of output waveguides , arrayed waveguide grating type wavelength demultiplexer, wherein the dielectric multilayer filter is inserted into the groove.
  2. 【請求項2】 前記複数の出力導波路が前記溝に交差する角度が互いに一定ではないことを特徴とする請求項1 2. A method according to claim 1, wherein the plurality of output waveguides is characterized by an angle intersecting the groove is not constant with each other
    記載のアレイ導波路格子型波長合分波器。 Arrayed waveguide grating type wavelength demultiplexer according.
  3. 【請求項3】 前記複数の出力導波路と前記溝の交差部において、前記導波路がパラボラ形状を有していることを特徴とする請求項1又は請求項2記載のアレイ導波路格子型波長合分波器。 3. The intersection of the said plurality of output waveguides groove, array waveguide grating type wavelength according to claim 1 or claim 2, wherein said waveguide has a parabolic shape demultiplexer.
JP16078697A 1997-06-18 1997-06-18 Arrayed waveguide grating type wavelength multiplexer /demultiplexer Pending JPH116928A (en)

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