JPH02218142A - Bonding of inner lead - Google Patents

Bonding of inner lead

Info

Publication number
JPH02218142A
JPH02218142A JP3825589A JP3825589A JPH02218142A JP H02218142 A JPH02218142 A JP H02218142A JP 3825589 A JP3825589 A JP 3825589A JP 3825589 A JP3825589 A JP 3825589A JP H02218142 A JPH02218142 A JP H02218142A
Authority
JP
Japan
Prior art keywords
carrier tape
inner lead
positions
positional deviation
accurately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3825589A
Other languages
Japanese (ja)
Other versions
JP2704426B2 (en
Inventor
Shigeki Fujita
茂樹 藤田
Yukihiro Iketani
之宏 池谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1038255A priority Critical patent/JP2704426B2/en
Publication of JPH02218142A publication Critical patent/JPH02218142A/en
Application granted granted Critical
Publication of JP2704426B2 publication Critical patent/JP2704426B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To bond a work accurately by detecting the central positions of inner leads in the direction X and the direction Y, comparing the positions with reference positions, and correcting the amount of the position deviation of a carrier tape according to the difference. CONSTITUTION:An X-Y table 2 is provided at the side surface of a carrier tape 3 on which inner leads 4 are formed. The right end of an arm 2b is fixed to a moving table 2a of the table 2. The tip of the arm 2b is made to protrude toward the upper surface of the carrier tape 3. A lighting position and a camera 1 are attached so as to face downward. The output of the camera 1 is connected to a position-deviation operating unit 11. The central positions of the inner leads 4 in the direction X and the direction Y are detected. The results are compared with reference central positions which are inputted into the position- deviation operating unit 11. The position deviation of the carrier tape 3 is corrected according to the difference. In this way, the positions of the inner leads are accurately detected, and a work can be bonded accurately.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、インナーリードボンディング方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to an inner lead bonding method.

(従来の技術) 従来のインナーリードボンダにおいて、デバイス穴のピ
ッチで間欠的に順送りされるキャリアテープの位置ずれ
を検出する方法には、デバイス穴にあらかじめ設けられ
た位置決めマークを認識する方法や、インナーリードの
先端部を認識する方法がある。
(Prior Art) In conventional inner lead bonders, methods for detecting positional deviation of carrier tape that is intermittently fed sequentially at the pitch of device holes include a method of recognizing positioning marks provided in advance in device holes, There is a method for recognizing the tip of the inner lead.

(発明が解決しようとする課題) ところがこのうち前者は、キャリアテープに位置決めマ
ークを設ける必要があり、又、後者は、インナーリード
に高い精度が要求される。そしてこの方法は、第4図に
示すように、幅のばらつきに対してはインナーリード1
2.13の幅方向の中心を求めることで対応できるが、
認識対象14の中心から求める長さ方向のばらつきはそ
のま)認識精度のばらつき15となり、又、紙面上下方
向の反りに対しては、対応することができず、更に認識
精度を落とす。すると正確にワークをボンディングでき
ない。
(Problems to be Solved by the Invention) However, the former method requires positioning marks to be provided on the carrier tape, and the latter method requires high precision for the inner lead. In this method, as shown in Fig. 4, the inner lead 1
This can be handled by finding the center in the width direction of 2.13, but
Variations in the length direction determined from the center of the recognition object 14 directly result in variations 15 in recognition accuracy, and it is not possible to cope with warping in the vertical direction of the paper surface, further reducing recognition accuracy. Then, the workpiece cannot be bonded accurately.

そこで本発明の目的は、インナーリードの位置を正確に
検出し、ワークを正確にボンディングすることのできる
インナーリードボンディング方法を得ることである。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an inner lead bonding method that can accurately detect the position of an inner lead and bond a workpiece accurately.

[発明の構成] (課題を解決するための手段と作用) 本発明は、デバイス穴にX方向とY方向にインナーリー
ドが形成され間欠的に所定のピッチで順送りされるキャ
リアテープの位置を検出し、この結果を位置ずれ量演算
ユニットに予め入力された基準位置と比較してキャリア
テープの位置を補正するインナーリードボンデインク方
法において、インナーリードのX方向とY方向の中心位
置を検出し、この結果を位置ずれ伍演算ユニットに予め
入力された基準中心位置と比較して、その差でキャリア
テープの位置ずれを補正することで、インナーリードの
位置を正確に検出しワークを正確にボンディングするイ
ンナーリードボンディング方法である。
[Structure of the Invention] (Means and Effects for Solving the Problems) The present invention detects the position of a carrier tape that has inner leads formed in device holes in the X direction and the Y direction and is intermittently fed sequentially at a predetermined pitch. In the inner lead bonding method in which the position of the carrier tape is corrected by comparing this result with a reference position input in advance to a positional deviation calculation unit, the center position of the inner lead in the X direction and the Y direction is detected, This result is compared with the reference center position input in advance to the positional deviation calculation unit, and the difference is used to correct the positional deviation of the carrier tape, thereby accurately detecting the position of the inner lead and bonding the workpiece accurately. This is an inner lead bonding method.

(実施例) 以下、本発明のインナーリードボンディング方法の一実
施例を図面を参照して説明する。
(Example) Hereinafter, an example of the inner lead bonding method of the present invention will be described with reference to the drawings.

第1図において、デバイス穴りa内のX方向とY方向に
インナーリード4が形成されたキャリアテープ3の側面
には、X−Yテーブル2が設けられ、このX−Yテーブ
ル2の上面の移動テーブル2aにはアーム2bの右端が
固定され、このアーム2bの先端はキャリアテープ3の
上面に突き出ていて、照明位置とカメラ1が下に向けて
取付られ、このカメラ1の出力は別置の位置ずれ量演算
ユニット11に接続されている。
In FIG. 1, an X-Y table 2 is provided on the side surface of the carrier tape 3 on which inner leads 4 are formed in the X and Y directions within the device hole a. The right end of an arm 2b is fixed to the moving table 2a, and the tip of this arm 2b protrudes from the top surface of the carrier tape 3, and the illumination position and camera 1 are installed facing downward, and the output of this camera 1 is installed separately. It is connected to the positional deviation amount calculation unit 11.

第2図は、第1図のデバイス穴部の拡大詳細図である。FIG. 2 is an enlarged detailed view of the device hole of FIG. 1;

第2図において、キャリアテープ3のデバイス穴3aに
は、紙面前後方向にX方向の認識対象リド4aが形成さ
れ、又、紙面左右方向にはY方向の認識対象リード4b
が形成されている。
In FIG. 2, in the device hole 3a of the carrier tape 3, a recognition target lead 4a is formed in the X direction in the front and back direction of the paper, and a recognition target lead 4b in the Y direction is formed in the left and right direction of the paper.
is formed.

このような構成のインナーリードボンダにおいて、キャ
リアテープ3は図示しないテープ送り装置で間欠的に所
定のピッチで順送りされ、キャリアテープのパーフォレ
ーションを基準に位置決めされる。又、カメラ1は、先
ずX−Yテーブル2で第2図の鎖線で示す認識視野9の
位置に移動され、X方向の認識対象リード4aの幅方向
の中心位置Xを認識し、次にY方向の認識対象リード4
bの認識対象視野10の位置に駆動されて、認識対象リ
ード4bの幅方向の中心位置y@:認識する。
In the inner lead bonder having such a configuration, the carrier tape 3 is intermittently fed sequentially at a predetermined pitch by a tape feeding device (not shown), and is positioned based on the perforations of the carrier tape. Further, the camera 1 is first moved to the position of the recognition field of view 9 shown by the chain line in FIG. 2 on the X-Y table 2, and recognizes the widthwise center position Direction recognition target lead 4
b is driven to the position of the recognition target visual field 10, and the center position y@: of the recognition target lead 4b in the width direction is recognized.

次に、上記動作でカメラ]が認識した中心位置X、yは
、位置ずれ開演篩ユニット11内に入力され、位置ずれ
量演算ユニット11内に予め登録されたX方向基準リー
ド5Aの幅方向の中心X。及びY方向基準リード5Bの
幅方向の中心y。どの差、ΔX”=X   X□   
と  Δ’/=’!   ’10を演算して、基準キャ
リアテープに対する認識対象キャリアテープ3の位置ず
れ量を検出する。
Next, the center positions X and y recognized by the camera in the above operation are input into the positional deviation detection sieve unit 11, and the center positions X and y in the width direction of the Center X. and the center y in the width direction of the Y-direction reference lead 5B. Which difference, ΔX”=X X□
and Δ'/='! '10 is calculated to detect the amount of positional deviation of the recognition target carrier tape 3 with respect to the reference carrier tape.

そして、この結果は、位置ずれ量演算ユニット11から
図示しない自動微動調整用のモータ駆動装置に送られて
、図示しないキャリアテープの調整台が駆動されてボン
ディング位置が補正される。
This result is sent from the positional deviation calculation unit 11 to a motor drive device for automatic fine adjustment (not shown), and a carrier tape adjustment table (not shown) is driven to correct the bonding position.

この結果、図示しないワークは正確にインナーリードに
ボンディングされる。
As a result, the workpiece (not shown) is accurately bonded to the inner lead.

第3図は、本発明のインナーリードボンディング方法の
他の実施例を示す。
FIG. 3 shows another embodiment of the inner lead bonding method of the present invention.

第3図においては、第2図の認識対象の対角となる部分
(例えばデバイス穴の対角)に対して同様の認識を行な
い、基準データx01= ”01に対する認識データ×
1.y1得ることで、基準キレリアテープに対する認識
対象キャリアテープの位置ずれ量ΔX、Δyと、回転ず
れ量Δθを検出することができる。
In FIG. 3, similar recognition is performed on the diagonal portion of the recognition target in FIG. 2 (for example, the diagonal of the device hole), and the recognition data for reference data x01 = "01 x
1. By obtaining y1, it is possible to detect the positional deviation amounts ΔX, Δy and the rotational deviation amount Δθ of the recognition target carrier tape with respect to the reference Kyrelia tape.

この方法は、第2図のX、Y方向のずれ量の検出方法と
併用してもよく、この結果インナーリードの位置を更に
高精度に認識することができ、位置ずれ量演算ユニット
11で基準値と比較し、その結果でキャリアテープのX
、Y方向の位置や角度を補正することで、ワークを正確
にボンディングすることができる。
This method may be used in combination with the method of detecting the amount of deviation in the X and Y directions shown in FIG. Compare the value and use the result to determine the carrier tape's
By correcting the position and angle in the Y direction, the workpiece can be bonded accurately.

[発明の効果] 以上、本発明によれば、X方向とY方向にインナーリー
ドが形成され間欠的に所定のピッチで順送りされるキャ
リアテープの位置を検出し、位置ずれ量演算ユニットに
予め入力された位置と比較し、キャリアテープの位置を
補正するインナーリードボンディング方法において、X
方向とY方向のインナーリードの中心位置を検出し、こ
の結果を位置ずれ最演算ユニットに予め入力された基準
中心位置と比較して、その差でキャリアテープの位置ず
れ量を補正したので、インナーリードの位置ずれを正確
に補正でき、インナーリードをワークに正確にボンディ
ングすることのできるインナリードボンディング方法を
得ることができる。
[Effects of the Invention] As described above, according to the present invention, the position of a carrier tape having inner leads formed in the X direction and the Y direction and which is intermittently fed sequentially at a predetermined pitch is detected and inputted in advance to the positional deviation amount calculation unit. In an inner lead bonding method that corrects the position of the carrier tape by comparing it with the
The center position of the inner lead in the direction and Y direction was detected, and this result was compared with the reference center position input in advance to the position deviation calculation unit, and the positional deviation amount of the carrier tape was corrected based on the difference. It is possible to obtain an inner lead bonding method that can accurately correct the positional deviation of the lead and accurately bond the inner lead to the workpiece.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のインナーリードボンディング方法の一
実施例を示す斜視図、第2図は本発明のインナーリード
ボンディング方法の要部を示す部分詳細図、第3図は本
発明のインナーリードボンディング方法の他の実施例を
示す図、第4図は従来のインナーリードボンディング方
法を示す図である。 3・・・キャリアテープ 3a・・・デバイス穴 4a・・・X方向のインナーリード 4b・・・Y方向のインナーリード 11・・・位置ずれ量演痒ユニット (8733)代理人 弁理士 猪 股 祥 晃(ほか 
1名) 第 第2図 第
FIG. 1 is a perspective view showing an embodiment of the inner lead bonding method of the present invention, FIG. 2 is a partial detailed view showing the main parts of the inner lead bonding method of the present invention, and FIG. 3 is a perspective view showing an embodiment of the inner lead bonding method of the present invention. FIG. 4 is a diagram showing another embodiment of the method, and FIG. 4 is a diagram showing a conventional inner lead bonding method. 3...Carrier tape 3a...Device hole 4a...Inner lead in X direction 4b...Inner lead in Y direction 11...Positional deviation amount manipulation unit (8733) Agent Patent attorney Sho Inomata Akira (and others)
1 person) Figure 2

Claims (1)

【特許請求の範囲】 デバイス穴にX方向とY方向のインナーリードが形成さ
れ間欠的に所定のピッチで順送りされるキャリアテープ
の位置を検出し、その位置データを位置ずれ量演算ユニ
ットの基準位置と比較して前記キャリアテープの位置を
補正するインナーリードボンディング方法において、 前記X方向とY方向のインナーリードの中心位置を検出
し、この結果を前記位置ずれ量演算ユニットに予め入力
された基準中心位置と比較して、その差で前記キャリア
テープの位置ずれを補正したことを特徴とするインナー
リードボンディング方法。
[Claims] The position of the carrier tape, which has inner leads in the X and Y directions formed in the device hole and is fed intermittently at a predetermined pitch, is detected, and the position data is transferred to the reference position of the positional deviation calculation unit. In the inner lead bonding method for correcting the position of the carrier tape in comparison with the position of the carrier tape, the center position of the inner lead in the X direction and the Y direction is detected, and this result is used as a reference center input in advance into the positional deviation amount calculation unit. An inner lead bonding method characterized in that the positional deviation of the carrier tape is corrected based on the difference between the positions of the carrier tapes.
JP1038255A 1989-02-20 1989-02-20 Inner lead bonding equipment Expired - Fee Related JP2704426B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1038255A JP2704426B2 (en) 1989-02-20 1989-02-20 Inner lead bonding equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1038255A JP2704426B2 (en) 1989-02-20 1989-02-20 Inner lead bonding equipment

Publications (2)

Publication Number Publication Date
JPH02218142A true JPH02218142A (en) 1990-08-30
JP2704426B2 JP2704426B2 (en) 1998-01-26

Family

ID=12520205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1038255A Expired - Fee Related JP2704426B2 (en) 1989-02-20 1989-02-20 Inner lead bonding equipment

Country Status (1)

Country Link
JP (1) JP2704426B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6220339A (en) * 1985-07-19 1987-01-28 Marine Instr Co Ltd Tape bonding device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6220339A (en) * 1985-07-19 1987-01-28 Marine Instr Co Ltd Tape bonding device

Also Published As

Publication number Publication date
JP2704426B2 (en) 1998-01-26

Similar Documents

Publication Publication Date Title
JP2803221B2 (en) IC mounting apparatus and method
JP3086578B2 (en) Component mounting device
KR970025347A (en) Component recognition method and device of surface mounter
JP2000031693A (en) Electronic component sucking part teaching apparatus
JPH02218142A (en) Bonding of inner lead
JP3265143B2 (en) Component mounting method and device
JP3161234B2 (en) How to mount electronic components with bumps
JP2757127B2 (en) Method and apparatus for correcting bonding position of wire bonder
JPS6358994A (en) Chip mounter
JPH07302806A (en) Lead frame positioning apparatus
JP3404755B2 (en) Wire bonding equipment
JP2864161B2 (en) Positioning control method
JP3328760B2 (en) Chip image recognition device
JPH0262099A (en) Method of mounting of electronic parts
JPH08335603A (en) Method of manufacturing semiconductor device
JPH0793328B2 (en) Die bonding method
JP2551859B2 (en) Carrier tape cutting device
JPH0380345B2 (en)
JPH02143500A (en) Mounting of electronic component
JP2000353900A (en) Mounting method of electronic part and mark for positional recognition
JPS6386528A (en) Die-bonding device
JP2977953B2 (en) Wire bonding method
JPH0462944A (en) Bonding method of inner lead
JPH06326163A (en) Ultrasonic wire bonding device
JPS63129634A (en) Bonding method

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071009

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081009

Year of fee payment: 11

LAPS Cancellation because of no payment of annual fees