JPH02217363A - Production of ain sintered compact having high heat conductivity - Google Patents
Production of ain sintered compact having high heat conductivityInfo
- Publication number
- JPH02217363A JPH02217363A JP1038260A JP3826089A JPH02217363A JP H02217363 A JPH02217363 A JP H02217363A JP 1038260 A JP1038260 A JP 1038260A JP 3826089 A JP3826089 A JP 3826089A JP H02217363 A JPH02217363 A JP H02217363A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inert gas
- ain
- furnace
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000007789 gas Substances 0.000 claims abstract description 21
- 239000000843 powder Substances 0.000 claims abstract description 17
- 238000005245 sintering Methods 0.000 claims abstract description 15
- 239000011261 inert gas Substances 0.000 claims abstract description 12
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 239000003575 carbonaceous material Substances 0.000 claims abstract description 8
- 238000010304 firing Methods 0.000 claims description 14
- 238000000465 moulding Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 abstract description 12
- 239000001301 oxygen Substances 0.000 abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052799 carbon Inorganic materials 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- -1 At4C3 Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 229910014813 CaC2 Inorganic materials 0.000 description 1
- RGJOEKWQDUBAIZ-IBOSZNHHSA-N CoASH Chemical compound O[C@@H]1[C@H](OP(O)(O)=O)[C@@H](COP(O)(=O)OP(O)(=O)OCC(C)(C)[C@@H](O)C(=O)NCCC(=O)NCCS)O[C@H]1N1C2=NC=NC(N)=C2N=C1 RGJOEKWQDUBAIZ-IBOSZNHHSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000011304 carbon pitch Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は高熱伝導性のＡｌＮ焼結体の製法に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for producing a highly thermally conductive AlN sintered body.
ＡｌＮ焼結体は高熱伝導性、耐熱性、耐食性等に優れ、
汎用セラミックスであるＡｔ２０３焼結体に代る半導体
装置の絶縁性基板用材料として注目されている。AlN sintered body has excellent thermal conductivity, heat resistance, corrosion resistance, etc.
It is attracting attention as a material for insulating substrates of semiconductor devices in place of the At203 sintered body, which is a general-purpose ceramic.
ＡｌＮ粉末の焼結は通常焼結助剤を添加混合し、緻密性
と高熱伝導性を得ているが、さらに高熱伝導率を得るた
めに焼結方法の検討が種々なされている。例えば特開昭
６３−１０００６９号公報にはＱ、１Ｖｏｌ ４以上の
還元性ガスを含む不活性ガス雰囲気中で焼結することが
、また特開昭６６−３０３８６３号公報には焼成中にカ
ーボンガス雰囲気をつくり出す容器を用いることが提案
されている。In sintering AlN powder, a sintering aid is usually added and mixed to obtain denseness and high thermal conductivity, but various studies have been made on sintering methods to obtain even higher thermal conductivity. For example, JP-A-63-100069 discloses that sintering is carried out in an inert gas atmosphere containing a reducing gas of Q, 1 Vol 4 or more, and JP-A-66-303,863 discloses that carbon gas is It has been proposed to use containers that create an atmosphere.
しかしながら、これらの従来技術では安定して高熱伝導
率のＡｌＮ焼結体を得ることが難しく、原料の純度、酸
素含有量、焼成雰囲気の変動等の要因に大きく影響され
、これらを制御することは困難であった。However, with these conventional techniques, it is difficult to stably obtain an AlN sintered body with high thermal conductivity, and it is greatly affected by factors such as the purity of raw materials, oxygen content, and fluctuations in the firing atmosphere, and it is difficult to control these factors. It was difficult.
雰囲気の制御により安定に達成する製法について鋭意検
討した結果．ＡｌＮ粉末の焼結に際し、温度１５００°
Ｃ以上における焼成雰囲気のＣＯガス濃度をコントロー
ルすることにより可能となることを見い出し、本発明を
完成するに到った。This is the result of intensive research into a manufacturing method that achieves stability by controlling the atmosphere. When sintering AlN powder, the temperature is 1500°.
They have discovered that it is possible to achieve this by controlling the CO gas concentration in the firing atmosphere above C and have completed the present invention.
すなわち、本発明は、以下を要旨とするものである。 That is, the present invention has the following gist.
１、焼結助剤を含むＡｌＮ粉末混合物を所望形状に成形
した後、温度１５００°Ｃ以上における焼成雰囲気のＣ
Ｏガス濃度が９００ ｐｐｍ以下となるように不活性ガ
スを供給して焼結することを特徴とする高熱伝導性Ａｌ
Ｎ焼結体の製法。1. After molding the AlN powder mixture containing the sintering aid into the desired shape, carbon in the firing atmosphere at a temperature of 1500°C or higher
High thermal conductivity Al characterized by being sintered by supplying an inert gas so that the O gas concentration is 900 ppm or less
Manufacturing method of N sintered body.
２、 ＡｌＮ粉末混合物はさらに炭素質物質を含んで
なるものであることを特徴とする請求項１記載の高熱伝
導性ＡｌＮ焼結体の製法。2. The method for producing a highly thermally conductive AlN sintered body according to claim 1, wherein the AlN powder mixture further contains a carbonaceous material.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
本発明に用いるＡｌＮ粉末は、通常、酸素含有量が６重
量−以下好ましくは１．５重量−以下のものが使用され
る。The AlN powder used in the present invention usually has an oxygen content of 6 weight or less, preferably 1.5 weight or less.
焼結助剤としては、ＣａＯ、ＢａＯ等のＩｌａ族酸化物
、Ｙ２Ｏ３、ＣｅＯ２等の脂族酸化物、ＣａＣ２。Sintering aids include Ila group oxides such as CaO and BaO, aliphatic oxides such as Y2O3 and CeO2, and CaC2.
Ｂ、Ｃ、Ａｔ４Ｃ３、８１Ｃ等の炭化物、Ｃａ 、 Ｂ
ａ 、 Ｓｒ及び希土類元素の水素化物、窒化物、ホウ
化物、シアン化物、チオシアン化物、ケイフッ化物、硫
化物、リン化物、ケイ化物、フッ化物等、さらにはＣｕ
、 Ｎｉ 、 Ｍｏ 、 ＡＬ等の金属等があげられ
る。B, C, carbides such as At4C3, 81C, Ca, B
a, hydrides, nitrides, borides, cyanides, thiocyanides, fluorosilicides, sulfides, phosphides, silicides, fluorides, etc. of Sr and rare earth elements, and further Cu
, Ni, Mo, AL, and other metals.
これらのうち、焼結性、熱伝導率、機械的強度、経済性
の点からＹ２Ｏ３が最も望ましい。Among these, Y2O3 is most desirable from the viewpoint of sinterability, thermal conductivity, mechanical strength, and economical efficiency.
また、本発明では．ＡｌＮ焼結体の熱伝導率をさらに向
上させるために炭素質物質をＡｌＮ粉末混合物に含ませ
ることもできる。炭素質物質には、塩化ビニル樹脂やポ
リビニルアルコール等の有機重合体の熱分解生成物、カ
ーボンブラック、グラファイト、高固定炭素系ピッチな
どがある（特開昭６５−１６２５７７号公報、同６１−
２１９７＜Ｓ３号公報参照）。In addition, in the present invention. A carbonaceous material can also be included in the AlN powder mixture to further improve the thermal conductivity of the AlN sintered body. Carbonaceous substances include thermal decomposition products of organic polymers such as vinyl chloride resin and polyvinyl alcohol, carbon black, graphite, and highly fixed carbon pitch (Japanese Patent Application Laid-open No. 162577/1983, 61-
2197 (see Publication No. S3).
本発明の高熱伝導性ｋｔＮ焼結体を得る手順としては、
ＡＡＮ粉末１００重量部に対し、通常、焼結助剤０．１
〜１０．０重量部、炭素質物質０〜１０．０重量部の割
合で混合する。これらの原料粉末は平均粒度１０μｍ以
下好ましくは５μｍ以下である。The procedure for obtaining the high thermal conductivity ktN sintered body of the present invention is as follows:
Normally, 0.1 sintering aid is added to 100 parts by weight of AAN powder.
~10.0 parts by weight of the carbonaceous material and 0 to 10.0 parts by weight of the carbonaceous material. These raw material powders have an average particle size of 10 μm or less, preferably 5 μm or less.
その混合方式としては通常ボールミル中で乾式又は湿式
により混合する。得られたＡｌＮ粉末混合物は必要に応
じて／々インダーを添加し成形、脱脂、焼成を行なう。The mixing method is usually dry or wet mixing in a ball mill. The obtained AlN powder mixture is subjected to molding, degreasing, and sintering, with an inder added thereto as needed.
焼成炉は、ＢＮ 、 Ｃ．ＡｌＮ製の耐熱性容器をカー
ボンやタングステンの発熱体もしくは高周波加熱炉の炉
内に置き、該耐熱性容器に同様のＢＮ。The firing furnace is BN, C. A heat-resistant container made of AlN is placed in a heating element of carbon or tungsten or in a high-frequency heating furnace, and a similar BN is placed in the heat-resistant container.
Ｃ．ＡｌＮ製の配管を行ない、そこに炉外よ、６ ｃ
ｏ。C. Install AlN piping and place it outside the furnace at 6c.
o.
Ａｒ 、 Ｎ２等のガスを供給できるような構造とする
。The structure shall be such that gases such as Ar and N2 can be supplied.
耐熱性容器を２重構造とし外側容器と内側容器の間及び
内側容器の両方に不活性ガスを供給することにより、外
部よりＣＯガス等が該容器中に侵入するのを抑えること
ができる。グリーン成形体は耐熱性容器の中に置かれる
が、その際の敷板としては雛形性の良いＢＮを配合した
ものが好ましい。By making the heat-resistant container have a double structure and supplying inert gas between the outer container and the inner container and to both the inner container, it is possible to prevent CO gas and the like from entering the container from the outside. The green molded body is placed in a heat-resistant container, and the bottom plate at that time is preferably one containing BN, which has good patternability.
焼成条件は、グリーン成形体の形状や寸法により異なる
が、通常、５０〜６００°Ｑ／ｈｒで昇温し途中１２０
０〜１７ｏｏ’ｃ付近で保持することもあるが、最高温
度は１８００〜２０００°Ｃである。Firing conditions vary depending on the shape and dimensions of the green compact, but usually the temperature is raised at 50 to 600°Q/hr and
The maximum temperature is 1800 to 2000°C, although it may be held at around 0 to 17 oo'c.
本発明で重要なことは、この焼成工程で、温度１５００
°Ｃ以上における焼成雰囲気のＣＯガス濃度が９００
ｐｐｍ以下となるように不活性ガスを供給することであ
る。不活性ガスとしては、Ｎ２ ｒＡＩ”等があるがＮ
２が望ましい。１５００°Ｃ以上の温度における焼成雰
囲気のＣＯガス濃度が９００ｐｐｍをこえると、本発明
が目的とする高熱伝導率化例えば１８０ Ｗ ／ ｍＫ
以上を安定して達成することができない。本発明では、
温度１５００°Ｃ未満における焼成雰囲気のＣＯガス濃
度については特に制限する必要はなく、通常は数百ｐｐ
ｍ〜数千ｐｐｍ程度である。What is important in the present invention is that this firing step is performed at a temperature of 1500
The CO gas concentration in the firing atmosphere at temperatures above 900 °C
The purpose is to supply the inert gas so that the concentration is less than ppm. Examples of inert gases include N2 rAI'', but N
2 is desirable. If the CO gas concentration in the firing atmosphere exceeds 900 ppm at a temperature of 1500°C or higher, the high thermal conductivity that is the objective of the present invention, for example, 180 W/mK.
It is not possible to consistently achieve the above. In the present invention,
There is no particular restriction on the CO gas concentration in the firing atmosphere at temperatures below 1500°C, and it is usually several hundred pp.
m to several thousand ppm.
ＣＯガスは、カーボン製炉材・容器及び原料に混入され
る炭素質物質のＣ源と．ＡｌＮ粉末中のあるいは炉外か
ら侵入するＯ源との反応によって発生するが、これを本
発明のように９００ ｐｐｍ以下にコントロールする手
段としては、不活性ガスの手段を必要不可決として行い
、他の手段は任意的に行うのが望ましい。不活性ガスの
供給法は連続的・間欠的のいずれであってもよい。なお
、ＣＯガス濃度を９００ ｐｐｍ以下のある特定値の水
準に保ちながら焼結を行いたいときにはＣＯガスを積極
的に炉外から供給することもできる。CO gas is a C source of carbonaceous materials mixed into carbon furnace materials, containers, and raw materials. This is generated by the reaction with the O source in the AlN powder or from outside the furnace, but as a means of controlling this to 900 ppm or less as in the present invention, inert gas is necessary and other methods are used. It is desirable that these measures be carried out voluntarily. The method of supplying the inert gas may be either continuous or intermittent. Note that when it is desired to perform sintering while maintaining the CO gas concentration at a certain specific value level of 900 ppm or less, CO gas can also be actively supplied from outside the furnace.
温度１５００°Ｏ以上における焼成雰囲気のＣＯガス濃
度がＡｌＮ焼結体に与える影響については明瞭ではない
が、効果としては．ＡｌＮ焼結体中の酸素を還元して除
去することである。ＡｌＮ焼結体に含有されている酸素
量が多ければ多いほどＡｌＮ焼結体の熱伝導率は低下し
、一方、酸素含有量が少なければ熱伝導率は向上する。Although the effect of the CO gas concentration in the firing atmosphere on the AlN sintered body at temperatures above 1500°O is not clear, the effect is... The purpose is to reduce and remove oxygen in the AlN sintered body. The higher the amount of oxygen contained in the AlN sintered body, the lower the thermal conductivity of the AlN sintered body, while the lower the oxygen content, the higher the thermal conductivity.
本発明者はこの点に着目し、最も効率的にＡｌＮ焼結体
中の酸素を取り除く条件を決定し本発明を完成させたも
のである。The present inventor focused on this point, determined the conditions for most efficiently removing oxygen from the AlN sintered body, and completed the present invention.
以下、実施例と比較例をあげて−さらに具体的に本発明
を説明する。Hereinafter, the present invention will be explained in more detail by giving Examples and Comparative Examples.
実施例１〜７、比較例１〜２
酸素含有量１．５重量％のＡｌＮ粉末９８重量部とＹ２
Ｏ３２重量部をエタノール中で？−ルミル混合し乾燥し
た後金型プレスで予備成形後、２７００に９／ｃＷＬ２
の圧力でｃｘｐ （冷間コ−Ａ／ ｆプレス）シ、φ１
６ｆｉ−５ｍｔの円板を得た。この円板をＢＮ製敷板に
のせ、それを外側が内容積９．６ｔの黒鉛製容器、内側
が内容積０．４１（ＤＢＮ製容器で構成されてなる耐熱
性２重容器に入れ、表−１に示す条件で焼成した。Examples 1 to 7, Comparative Examples 1 to 2 98 parts by weight of AlN powder with an oxygen content of 1.5% by weight and Y2
2 parts by weight of O3 in ethanol? - After mixing and drying Lumil, preforming with mold press, 9/cWL2 to 2700
cxp (cold co-A/f press) at a pressure of φ1
A 6fi-5mt disc was obtained. This disc was placed on a BN bottom plate, and placed in a heat-resistant double container consisting of a graphite container with an internal volume of 9.6 tons on the outside and a DBN container with an internal volume of 0.41 tons on the inside. It was fired under the conditions shown in 1.
なお、実施例３〜５及び比較例１〜２は、上記配合に、
さらに塩化ビニル樹脂の熱分解生成物を１重量部配合し
たものである。また、実施例６〜７はＹ２Ｏ３のかわり
にＣａＣｚとしたものである。In addition, in Examples 3 to 5 and Comparative Examples 1 to 2, in the above formulation,
Furthermore, 1 part by weight of a thermal decomposition product of vinyl chloride resin is blended. Further, in Examples 6 and 7, CaCz was used instead of Y2O3.
焼成炉は、耐熱性２重容器を黒鉛粒で覆ってなる高周波
加熱炉であって、上記ＢＮ製の内側容器、並びに上記Ｂ
Ｎｇの内側容器と上記黒鉛製の外側容器との間に、それ
ぞれＢＮ製のガス導入管（以下、それぞれ導入管１、導
入管２という）を接続してなるものである。焼成中、導
入管２には６１／ｍｉｎのＮ２ガスを常時供給し、導入
管１には表−１に示す流量のＮ２ガスを供給した。The firing furnace is a high-frequency heating furnace consisting of a heat-resistant double container covered with graphite particles, and includes the inner container made of BN and the B
Gas introduction tubes made of BN (hereinafter referred to as introduction tube 1 and introduction tube 2, respectively) are connected between the Ng inner container and the graphite outer container. During firing, N2 gas was constantly supplied to the introduction tube 2 at a rate of 61/min, and N2 gas was supplied to the introduction tube 1 at a flow rate shown in Table-1.
得られたＡｌＮ焼結体の酸素含有量とレーデ−フラッシ
ュ法で測定した熱伝導率を表−１に示す。Table 1 shows the oxygen content and thermal conductivity of the obtained AlN sintered body measured by the Lede flash method.
実施例１〜７は、温度１５００℃以上における焼成雰囲
気のＣｏ濃度は９００ ｐｐｍ以下に抑えられ、その結
果、熱伝導率は１８０〜２２０Ｗ／ｍ４となった。一方
、比較例１〜２のＣｏ濃度は９００ｐｐｍをこえ、熱伝
導率は１２５Ｗ／ｍ４程度しか得られなかった。In Examples 1 to 7, the Co concentration in the firing atmosphere at a temperature of 1500°C or higher was suppressed to 900 ppm or less, and as a result, the thermal conductivity was 180 to 220 W/m4. On the other hand, in Comparative Examples 1 and 2, the Co concentration exceeded 900 ppm, and the thermal conductivity was only about 125 W/m4.
実施例８ 比較例６〜５
実施例１の配合において、酸素含有量６．０重量％のＡ
ｌＮ粉末を用い、表−２に示す条件で焼結した。比較例
３は、雰囲気のＣｏ濃度を故意に高めるために、実施例
８に外部からＣＯガスを供給したものである。Example 8 Comparative Examples 6-5 In the formulation of Example 1, A with an oxygen content of 6.0% by weight
Sintering was performed using IN powder under the conditions shown in Table 2. In Comparative Example 3, CO gas was supplied from the outside to Example 8 in order to intentionally increase the Co concentration in the atmosphere.
その結果を表−２に示す。The results are shown in Table-2.
酸素含有量の高い、通常、高熱伝導率の得られないＡｌ
Ｎ粉末を用いても本発明の実施例８では１９０Ｗ／ｍ−
にと高い値が得られることが判った。Al that has a high oxygen content and usually does not have high thermal conductivity
Even if N powder is used, in Example 8 of the present invention, the power consumption is 190 W/m-
It was found that very high values could be obtained.
一方、比較例では最高でも１１２Ｗ／ｍ−にであり、実
施例に比べて低い値であった。On the other hand, in the comparative example, the maximum power was 112 W/m-, which was a lower value than that of the example.
本発明の高熱伝導性ＡｌＮ焼結体の製法によれば安定し
て高熱伝導率のＡｌＮ焼結体を得ることができ工業的価
値は極めて大きいものである。According to the method for producing a highly thermally conductive AlN sintered body of the present invention, an AlN sintered body having a high thermal conductivity can be stably obtained, and the industrial value is extremely large.
特許出願人 電気化学工業株式会社Patent applicant Denki Kagaku Kogyo Co., Ltd.
Claims (2)
した後、温度１５００℃以上における焼成雰囲気のＣＯ
ガス濃度が９００ｐｐｍ以下となるように不活性ガスを
供給して焼結することを特徴とすの高熱伝導性ＡｌＮ焼
結体の製法。1. After molding the AlN powder mixture containing the sintering aid into the desired shape, CO2 in the firing atmosphere at a temperature of 1500°C or higher
A method for producing a highly thermally conductive AlN sintered body, characterized in that sintering is performed by supplying an inert gas so that the gas concentration is 900 ppm or less.
ものであることを特徴とする請求項１記載の高熱伝導性
ＡｌＮ焼結体の製法。2. 2. The method for producing a highly thermally conductive AlN sintered body according to claim 1, wherein the AlN powder mixture further contains a carbonaceous material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1038260A JP2721535B2 (en) | 1989-02-20 | 1989-02-20 | Method for producing high thermal conductivity AlN sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1038260A JP2721535B2 (en) | 1989-02-20 | 1989-02-20 | Method for producing high thermal conductivity AlN sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02217363A true JPH02217363A (en) | 1990-08-30 |
| JP2721535B2 JP2721535B2 (en) | 1998-03-04 |
Family
ID=12520350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1038260A Expired - Lifetime JP2721535B2 (en) | 1989-02-20 | 1989-02-20 | Method for producing high thermal conductivity AlN sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2721535B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450172A (en) * | 1990-06-18 | 1992-02-19 | Kawasaki Steel Corp | Preparation of highly conductive aln sintered |
| JPH09157034A (en) * | 1995-12-06 | 1997-06-17 | Denki Kagaku Kogyo Kk | Aluminum nitride sintered body, its production and circuit board |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63265865A (en) * | 1987-04-24 | 1988-11-02 | Onoda Cement Co Ltd | Production of aluminum nitride sintered body |
| JPS63303863A (en) * | 1987-01-13 | 1988-12-12 | Toshiba Corp | Aluminum nitride sintered body having high thermal conductivity and its production |
-
1989
- 1989-02-20 JP JP1038260A patent/JP2721535B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63303863A (en) * | 1987-01-13 | 1988-12-12 | Toshiba Corp | Aluminum nitride sintered body having high thermal conductivity and its production |
| JPS63265865A (en) * | 1987-04-24 | 1988-11-02 | Onoda Cement Co Ltd | Production of aluminum nitride sintered body |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450172A (en) * | 1990-06-18 | 1992-02-19 | Kawasaki Steel Corp | Preparation of highly conductive aln sintered |
| JPH09157034A (en) * | 1995-12-06 | 1997-06-17 | Denki Kagaku Kogyo Kk | Aluminum nitride sintered body, its production and circuit board |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2721535B2 (en) | 1998-03-04 |
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