JPH0221142A - 超恒温清浄チャンバー - Google Patents
超恒温清浄チャンバーInfo
- Publication number
- JPH0221142A JPH0221142A JP17104788A JP17104788A JPH0221142A JP H0221142 A JPH0221142 A JP H0221142A JP 17104788 A JP17104788 A JP 17104788A JP 17104788 A JP17104788 A JP 17104788A JP H0221142 A JPH0221142 A JP H0221142A
- Authority
- JP
- Japan
- Prior art keywords
- air
- chamber
- constant temperature
- passage
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002156 mixing Methods 0.000 claims abstract description 46
- 238000010030 laminating Methods 0.000 claims abstract 2
- 230000001143 conditioned effect Effects 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000012856 packing Methods 0.000 claims description 3
- 239000011800 void material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000000052 comparative effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 235000019592 roughness Nutrition 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229920000742 Cotton Polymers 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000003303 reheating Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Other Air-Conditioning Systems (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17104788A JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17104788A JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5206850A Division JP2732345B2 (ja) | 1993-07-30 | 1993-07-30 | 超恒温清浄チヤンバー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221142A true JPH0221142A (ja) | 1990-01-24 |
| JPH0449015B2 JPH0449015B2 (US20110009641A1-20110113-C00116.png) | 1992-08-10 |
Family
ID=15916098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17104788A Granted JPH0221142A (ja) | 1988-07-11 | 1988-07-11 | 超恒温清浄チャンバー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221142A (US20110009641A1-20110113-C00116.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085607A (ja) * | 2005-09-21 | 2007-04-05 | Hitachi Plant Technologies Ltd | 精密温度制御装置 |
| JP2009127987A (ja) * | 2007-11-27 | 2009-06-11 | Takasago Thermal Eng Co Ltd | 建屋のレイアウト |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222025U (US20110009641A1-20110113-C00116.png) * | 1988-07-29 | 1990-02-14 | ||
| JPH0315955U (US20110009641A1-20110113-C00116.png) * | 1989-06-30 | 1991-02-18 |
-
1988
- 1988-07-11 JP JP17104788A patent/JPH0221142A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222025U (US20110009641A1-20110113-C00116.png) * | 1988-07-29 | 1990-02-14 | ||
| JPH0315955U (US20110009641A1-20110113-C00116.png) * | 1989-06-30 | 1991-02-18 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085607A (ja) * | 2005-09-21 | 2007-04-05 | Hitachi Plant Technologies Ltd | 精密温度制御装置 |
| JP4492504B2 (ja) * | 2005-09-21 | 2010-06-30 | 株式会社日立プラントテクノロジー | 精密温度制御装置 |
| JP2009127987A (ja) * | 2007-11-27 | 2009-06-11 | Takasago Thermal Eng Co Ltd | 建屋のレイアウト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449015B2 (US20110009641A1-20110113-C00116.png) | 1992-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4449816A (en) | Method for measuring the number of hyperfine particles and a measuring system therefor | |
| Saad et al. | Confined multiple impinging slot jets without crossflow effects | |
| FI91319C (fi) | Ilmastointilaitteiston tuloilman ja palautusilman välinen sekoitusosa | |
| CZ309563B6 (cs) | Větrný tunel | |
| KR20160142880A (ko) | 공기 처리 시스템에서 공급 공기 유동의 제어 장치 및 방법 | |
| JP2002525551A (ja) | 空気調整システムにおける空気処理システム | |
| JPH0221142A (ja) | 超恒温清浄チャンバー | |
| JPH0136055B2 (US20110009641A1-20110113-C00116.png) | ||
| JPH0317284B2 (US20110009641A1-20110113-C00116.png) | ||
| JP2732345B2 (ja) | 超恒温清浄チヤンバー | |
| JP4796584B2 (ja) | 抗原曝露室システム | |
| CN102538161B (zh) | 空调系统和信息处理设备室的空调系统 | |
| JPH0262014B2 (US20110009641A1-20110113-C00116.png) | ||
| Coney et al. | Dehumidification of turbulent air flow over a thick fin: an experimental study | |
| CN104535106B (zh) | 用于冷却塔的横流填料测试台 | |
| Freitag et al. | Particle image velocimetry measurements of the internal air flow in active chilled beams | |
| JP2536188B2 (ja) | 空気清浄装置 | |
| JPH08189692A (ja) | 空気調和装置 | |
| Borowski et al. | Air Distribution Assessment-Ventilation Systems with Different Types of Linear Diffusers | |
| JPS61213648A (ja) | 空気調和機の空気エンタルピ法試験装置 | |
| JP4492504B2 (ja) | 精密温度制御装置 | |
| JPS60207037A (ja) | 超微小粒子数の測定方法とその測定装置 | |
| CN116841125A (zh) | 光路稳定控制装置及光刻机 | |
| Müller et al. | A particle streak tracking system (PST) to measure flow fields in ventilated rooms | |
| TWI814319B (zh) | 出風管道及其出風均勻度調整方法 |
