JPH02209305A - Carrying device - Google Patents

Abstract

PURPOSE:To make it possible to avoid the contamination or damage caused by a carrying means by providing e liquid bath containing liquid and a carrying brush to carry the carried article as it is cleaned in liquid in the liquid bath, end carrying the carried article as it is immersed in the liquid for cleaning it during carrying process. CONSTITUTION:When a carried article M has been fed to the tip of a liquid bath 12 through a belt conveyor 31 and a guide member 32 of a supply device 30, the article M is led along the guide member 32 into liquid 11, and carried by carrying brushes 13A, 13B in a direction shown by an arrow X. The carrying brushes 13A, 13B establish contact with the upper and lower faces of the carried article M, and thereby clean the above faces during its conveyance. In addition to that, a piezoelectric transducer 14 vibrates the liquid 11 supersonically to produce the better cleaning of the carried article M. When the carried article M carried as it is kept in the liquid 11 attains the rear end of the liquid bath 12, a taking out device 20 to which a cassette 24 is previously assigned receives the cassette 24.

Description

[Detailed Description of the Invention] fi1 Purpose of the Invention [Industrial Application Field] The present invention relates to a conveying device, and in particular, the present invention relates to a conveying device, in particular a conveying brush disposed in a liquid tank containing a liquid so as to be immersed in the liquid. The present invention relates to a conveyance device that conveys an object while cleaning the object.

[Prior Art] Conventionally, this type of conveyance technology involves directly grasping and conveying the object to be conveyed using a bin set, or by causing the object to be conveyed to float in the air by injecting compressed air. or (iii)
There have been proposals for conveying objects by placing them on a belt conveyor.

[Problems to be Solved] However, with conventional conveyance techniques, there is a drawback that when conveying an object by gripping it with tweezers, the conveyed object is contaminated by hair or dander that has fallen off the human body; When conveying objects by floating them in the air, compressed air is jetted toward the conveyed objects, which has the disadvantage that the conveyed objects are contaminated by dust in the compressed air. When the conveyor belt is conveyed by placing the conveyor on the belt, dust in the air adheres to the belt surface, so there is a drawback that the conveyed object is contaminated by the dust when the conveyed object comes into contact with the belt conveyor, A drawback is that the transported object must be cleaned before being processed in a subsequent device.

SUMMARY OF THE INVENTION In order to eliminate these drawbacks, the present invention aims to provide a conveyance device that conveys an object while cleaning it while being immersed in a liquid that is free from contamination.

(2) Structure of the Invention Means for Solving the Problems] The means for solving the problems provided by the present invention are as follows:
(b) a transport brush disposed in the liquid in the liquid tank for cleaning and transporting the transported object; It is a transport device that transports

[Function] The conveying device according to the present invention includes fa) a liquid tank containing a liquid, and (b) a conveying brush disposed in the liquid in the liquid tank for cleaning and conveying an object to be conveyed. Since the conveyed object is conveyed while being immersed in liquid, it has the effect of avoiding contamination of the conveyed object by the conveying means during conveyance, and also prevents contamination of the conveyed object during conveyance. It has the function of cleaning the transported object, and also has a fi
(iii) It serves to prevent the transported object from being damaged during transport.

First, with reference to FIG. 1, the configuration of an embodiment of the conveying device according to the present invention will be described in detail.

[Example] Next, the conveyance device according to the present invention will be specifically described by citing preferred examples thereof. However, the examples described below are described to facilitate or accelerate the understanding of the present invention, and are not described to limit the present invention. In other words, each member disclosed in the embodiments described below includes all design changes and equivalent substitutions that fall within the spirit and technical scope of the present invention.

FIG. 1 is a sectional view showing an embodiment of a conveying device according to the present invention.

First, the conveying device according to the present invention includes a liquid tank 1 made of stainless steel, vinyl chloride, Teflon, or quartz glass, which contains a liquid such as pure water that is not likely to be contaminated.
2, conveyance brushes 13A and 13B disposed in the liquid tank 12 and for conveying the object M while contacting the lower and upper surfaces thereof, respectively, while cleaning them; An ultrasonic vibrator 14 is provided for promoting cleaning of the transported object M by ultrasonic vibration of the liquid 11, and an ultrasonic vibrator 14 is provided at an appropriate distance from the lower surface of the liquid tank 12. A vibration isolating member 15ζ made of rubber or the like is provided. The ultrasonic transducer 14 may be removed if desired, but will be described here assuming that it is provided.

When the ultrasonic transducer 14 is removed, the vibration isolation member 15 may also be removed.

This is a device for taking out a conveyed object M, which is optionally arranged at the rear end of the conveyance device according to the present invention, and includes a liquid layer 1.
2, a holding member 23 that is preferably moved up and down in synchronization with the rotation of the conveying brushes 13A and 13B at a constant ratio by an output shaft 22 of the driving device 21; The cassette 24 is held by a cassette 23 and placed in the liquid 11 at the rear end of the liquid tank 12 for accommodating the transported object M. The holding member 23 and the cassette 24 may be made of stainless steel or quartz glass, respectively.

M is a desired object to be transported, such as a silicon wafer, which is transported by the transport device according to the present invention, and is cleaned in the liquid by the transport brushes 13A and 13B while moving from the front end to the rear end of the liquid tank 12. transported towards
At the rear end of the liquid tank 12, a cassette 24 similar to a take-out device is provided.
be accommodated against.

Furthermore, with reference to FIG. 1, the operation of an embodiment of the conveying device according to the present invention will be described in detail.

The second one is a feeding device for the transported object M, which is disposed at the tip of the transporting device (1) according to the present invention, and is used to feed the transported object M from an appropriate preceding device (for example, a mirror finishing device for silicon wafers, etc.). a belt conveyor 31 for conveying the
A conveying brush 13A disposed at the rear end of the belt conveyor 31 and conveying the object M in the liquid tank 12;
13B.

The conveyance brushes 13A and 13B are rotated in the direction of the arrow at an appropriate speed (for example, at the same speed) by an appropriate drive circuit (not shown), and the ultrasonic transducer 14 is rotated by an appropriate control circuit (not shown). ) to cause the liquid 11 to vibrate ultrasonically.

In this state, the conveyed object M is supplied to the tip of the liquid tank 12 by the belt conveyor 31 and guide member 32 of the supply device 30. The object M to be conveyed is guided into the liquid 11 along the guide member 32, and the conveyance brush 13A.

13B begins to convey it in the direction of arrow X. Since the transport brushes 13A and 13B are in contact with the lower and upper surfaces of the transported object M, respectively, they clean the lower and upper surfaces during transport. In addition, since the liquid 11 is ultrasonically vibrated by the ultrasonic vibrator 14, the object M to be transported can be cleaned even more effectively.

When the transported object M transported in the liquid 1 reaches the rear end of the liquid tank 12, a cassette 24 similar to a take-out device is placed there.
are arranged in advance, so they are accommodated in the cassette 24. When the conveyed object M is accommodated in the cassette 24, the output shaft 22 is rotated by the drive device 21, and the holding member 23 is raised in the direction of the arrow Y. As a result, the cassette 24 is also raised in the direction of the arrow Y, and waits for the subsequent conveyed object M to be conveyed.

In the above description, only the case where a take-out device is provided at the rear end of the liquid tank 12 has been described, but the present invention is not limited to this, and other suitable take-out devices may be used. Includes cases where it is placed.

(3) Effects of the Invention As is clear from the above, the conveyance device according to the present invention has a liquid tank containing (al liquid) and a (bl liquid tank) which is disposed in the liquid and which cleans the transported object. Since the conveyor brush is equipped with a conveyor brush for conveying the object while being immersed in the liquid, it is possible to avoid contamination of the conveyed object by the conveyance means during conveyance. Hair-1 together with fii) has the effect of achieving cleaning of the transported object during transport, and (iii) has the effect of preventing the transported object from being damaged during transport.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing one embodiment of a conveying device according to the present invention. 21...... Drive device 22...
・・・・・・・・・・・・Output shirt 23・・・・・・・
...... Holding member 24 ......
...Cassette 30... ...Feeding device 31 ......Belt conveyor...
・・・・・・Guiding member・Transferred object

Claims (2)

[Claims] (1) It is equipped with (a) a liquid tank that contains a liquid, and (b) a transport brush that is disposed in the liquid in the liquid tank and that transports the transported object while cleaning it, and is immersed in the liquid. A conveyance device that conveys an object in a state where it is conveyed. (2) Claim (1) comprising an ultrasonic vibrator disposed inside the liquid tank for ultrasonic vibration of the liquid to promote cleaning of the conveyed object. conveyance device.