JPS57130580A - Precise washing drying device - Google Patents
Precise washing drying deviceInfo
- Publication number
- JPS57130580A JPS57130580A JP1575181A JP1575181A JPS57130580A JP S57130580 A JPS57130580 A JP S57130580A JP 1575181 A JP1575181 A JP 1575181A JP 1575181 A JP1575181 A JP 1575181A JP S57130580 A JPS57130580 A JP S57130580A
- Authority
- JP
- Japan
- Prior art keywords
- drying device
- washing drying
- precise washing
- precise
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1575181A JPS57130580A (en) | 1981-02-06 | 1981-02-06 | Precise washing drying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1575181A JPS57130580A (en) | 1981-02-06 | 1981-02-06 | Precise washing drying device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57130580A true JPS57130580A (en) | 1982-08-13 |
Family
ID=11897468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1575181A Pending JPS57130580A (en) | 1981-02-06 | 1981-02-06 | Precise washing drying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57130580A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63162087A (en) * | 1986-12-25 | 1988-07-05 | アイシン精機株式会社 | Signboard automatic washing drying machine |
JPH02209305A (en) * | 1989-02-08 | 1990-08-20 | Toshiba Ceramics Co Ltd | Carrying device |
JPH0671232A (en) * | 1992-07-10 | 1994-03-15 | Internatl Business Mach Corp <Ibm> | Fluid treating device and method |
US5518552A (en) * | 1992-05-28 | 1996-05-21 | Tokyo Electron Limited | Method for scrubbing and cleaning substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022921A (en) * | 1973-07-04 | 1975-03-12 |
-
1981
- 1981-02-06 JP JP1575181A patent/JPS57130580A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022921A (en) * | 1973-07-04 | 1975-03-12 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63162087A (en) * | 1986-12-25 | 1988-07-05 | アイシン精機株式会社 | Signboard automatic washing drying machine |
JPH02209305A (en) * | 1989-02-08 | 1990-08-20 | Toshiba Ceramics Co Ltd | Carrying device |
US5518552A (en) * | 1992-05-28 | 1996-05-21 | Tokyo Electron Limited | Method for scrubbing and cleaning substrate |
JPH0671232A (en) * | 1992-07-10 | 1994-03-15 | Internatl Business Mach Corp <Ibm> | Fluid treating device and method |
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