JPS57130580A - Precise washing drying device - Google Patents

Precise washing drying device

Info

Publication number
JPS57130580A
JPS57130580A JP1575181A JP1575181A JPS57130580A JP S57130580 A JPS57130580 A JP S57130580A JP 1575181 A JP1575181 A JP 1575181A JP 1575181 A JP1575181 A JP 1575181A JP S57130580 A JPS57130580 A JP S57130580A
Authority
JP
Japan
Prior art keywords
drying device
washing drying
precise washing
precise
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1575181A
Other languages
Japanese (ja)
Inventor
Yasuhide Ootsu
Katsuhiro Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1575181A priority Critical patent/JPS57130580A/en
Publication of JPS57130580A publication Critical patent/JPS57130580A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
JP1575181A 1981-02-06 1981-02-06 Precise washing drying device Pending JPS57130580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1575181A JPS57130580A (en) 1981-02-06 1981-02-06 Precise washing drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1575181A JPS57130580A (en) 1981-02-06 1981-02-06 Precise washing drying device

Publications (1)

Publication Number Publication Date
JPS57130580A true JPS57130580A (en) 1982-08-13

Family

ID=11897468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1575181A Pending JPS57130580A (en) 1981-02-06 1981-02-06 Precise washing drying device

Country Status (1)

Country Link
JP (1) JPS57130580A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162087A (en) * 1986-12-25 1988-07-05 アイシン精機株式会社 Signboard automatic washing drying machine
JPH02209305A (en) * 1989-02-08 1990-08-20 Toshiba Ceramics Co Ltd Carrying device
JPH0671232A (en) * 1992-07-10 1994-03-15 Internatl Business Mach Corp <Ibm> Fluid treating device and method
US5518552A (en) * 1992-05-28 1996-05-21 Tokyo Electron Limited Method for scrubbing and cleaning substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022921A (en) * 1973-07-04 1975-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022921A (en) * 1973-07-04 1975-03-12

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162087A (en) * 1986-12-25 1988-07-05 アイシン精機株式会社 Signboard automatic washing drying machine
JPH02209305A (en) * 1989-02-08 1990-08-20 Toshiba Ceramics Co Ltd Carrying device
US5518552A (en) * 1992-05-28 1996-05-21 Tokyo Electron Limited Method for scrubbing and cleaning substrate
JPH0671232A (en) * 1992-07-10 1994-03-15 Internatl Business Mach Corp <Ibm> Fluid treating device and method

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