JPS57209676A - Washing and drying device - Google Patents
Washing and drying deviceInfo
- Publication number
- JPS57209676A JPS57209676A JP9580281A JP9580281A JPS57209676A JP S57209676 A JPS57209676 A JP S57209676A JP 9580281 A JP9580281 A JP 9580281A JP 9580281 A JP9580281 A JP 9580281A JP S57209676 A JPS57209676 A JP S57209676A
- Authority
- JP
- Japan
- Prior art keywords
- washing
- drying device
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Extraction Or Liquid Replacement (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9580281A JPS5939162B2 (en) | 1981-06-20 | 1981-06-20 | washing drying equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9580281A JPS5939162B2 (en) | 1981-06-20 | 1981-06-20 | washing drying equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57209676A true JPS57209676A (en) | 1982-12-23 |
JPS5939162B2 JPS5939162B2 (en) | 1984-09-21 |
Family
ID=14147557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9580281A Expired JPS5939162B2 (en) | 1981-06-20 | 1981-06-20 | washing drying equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5939162B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254443A (en) * | 1985-07-01 | 1987-03-10 | F S I Japan Kk | Process and device for drying wafers |
JPH02111011A (en) * | 1988-10-20 | 1990-04-24 | Yosuke Yamada | Drainage of water and apparatus therefor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07100296B2 (en) * | 1986-10-29 | 1995-11-01 | マツダ株式会社 | Grindstone changing device |
DE69122740T2 (en) * | 1990-08-22 | 1997-04-10 | Toshiba Kawasaki Kk | CLEANING PROCEDURE |
-
1981
- 1981-06-20 JP JP9580281A patent/JPS5939162B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254443A (en) * | 1985-07-01 | 1987-03-10 | F S I Japan Kk | Process and device for drying wafers |
JPH02111011A (en) * | 1988-10-20 | 1990-04-24 | Yosuke Yamada | Drainage of water and apparatus therefor |
Also Published As
Publication number | Publication date |
---|---|
JPS5939162B2 (en) | 1984-09-21 |
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