JPH02208842A - Manufacture of stamper for optical disk - Google Patents

Abstract

PURPOSE:To form a rust proofing material on a master disk with superior adhesiveness as a peeling layer and to keep the long service life of the master disk by laminating stainless steel on the master disk with an irregular pattern after applying sputter-etching. CONSTITUTION:The sputter-etching is applied on the master disk in which information is recorded optically on photosensitive resin 5 on a master disk substrate 6, and the stainless steel 3 is laminated by a sputtering method. Next, after ultraviolet hardening resin 2 being applied on the stainless steel 3, a transmissive member 1 is superposed on the resin 2, then, is flattened, and it is radiated with an ultraviolet ray 7 from the back side of the transmissive member 1. After that, when peeling is performed at the boundary layer of the ultraviolet hardening resin 2 and the stainless steel 3, the ultraviolet hardening resin 2 is formed on the transmissive member 1, and a component such that the irregular pattern of the master disk is transfered on the surface of the resin can be obtained. In such a way, the peeling layer with superior adhesiveness can be formed on the master disk 6, which prolong the service life of the master disk 6.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an optical disc, and more particularly, to a method of manufacturing a stamper for an optical disc suitable for prolonging the life of a master disc.

[Conventional technology]

In the conventional process, as shown in FIG. 3, a photosensitive resin 5 is applied to a master substrate 6, and a concavo-convex pattern is formed on the surface by optical means. Then, after depositing Ni8 as a release layer, an ultraviolet curing resin 2 is applied, a transparent member 1 is stacked on top of the other as a stamper substrate, ultraviolet 7 is irradiated from the back of the transparent member 1, and the ultraviolet curing resin 2 is applied. The stamper was manufactured by curing the resin and peeling it off from the interface between the ultraviolet curable resin 2 and Ni8. An example of this is Japanese Patent Application No. 59-233169.

Note that the same fabrication can be performed using AQ in addition to Ni.

[Problem to be solved by the invention]

In the above-mentioned conventional technology, the stress applied to the master disc during peeling for stamper production is large, so if the stamper is manufactured several times, the release layer (Ni, AQ, etc.) of the master disc will peel off and remain on the stamper, resulting in disc No consideration was given to problems in terms of lifespan, such as the impossibility of manufacturing or the occurrence of rust and corrosion.

The aim of the invention is to address the above-mentioned drawbacks.

The purpose is to form a release layer on the master disc using a material that does not rust and has good adhesive properties.

[Means to solve the problem]

The above object is achieved by sputter-etching a master disc with a concavo-convex pattern and then laminating stainless steel thereon.

To further strengthen the adhesion, inorganic material can be layered on the board.
Stainless steel may be laminated thereon.

[Effect]

By performing sputter etching and laminating stainless steel on the photosensitive resin of the patterned master, it became possible to form a release layer with good adhesion on the master. As a result, the number of stampers produced from a master disc can now be several dozen or more. Additionally, since it does not rust or corrode, it can be reused even after long-term storage, extending the lifespan of master discs.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

<Example 1> As shown in Fig. 1, a master substrate (blue plate glass = 10t)
Photosensitive resin (photoresist AZ-1350) on 6
Sputter etching is applied to the master disk on which information is optically recorded, and then stainless steel (for example, 5IJ
S316) 3 is laminated by sputtering. Suitable conditions for sputter etching are to perform the sputter etching in an Ar gas pressure atmosphere at a discharge power of 30 to 100 W for 3 to 5 minutes.

The sputtering conditions for stainless steel are preferably to perform the sputtering in an atmosphere of Ar gas pressure with a discharge power in the range of 100 to 300 W for several minutes.The thickness of the stainless steel is such that the information pattern on the S board 6 is kept in the same shape. It is desirable that the film thickness be within 2000. Also, when stainless steel is sputtered at high gas pressure, stress occurs, so the pressure of Ar gas is 1X10-' ~ 5X10''
This must be done within the range of Torr.

After that, after applying ultraviolet curing resin 2 on the stainless steel 3, a transparent member (plastic: 2t) 1 is superimposed on the previous wood M2 as a stamper substrate and made flat, and the ultraviolet rays 7 are applied to the transparent material. Irradiate from the back side of 1 (irradiation power:
4 layers w/cd, irradiation time: 30 seconds), and then peeling is performed at the boundary layer of UV-curable IFM resin 2 and stainless steel 3, and two layers of UV-curable resin are formed on the transparent member 1.
Its surface is a transfer of the uneven pattern of the master.

After the stamper has been produced in this manner, the master disc has no peeling of the release layer, and the stamper production described above can be repeated at least 10 times.

In addition, conventionally, rust and corrosion occurred after about 3 months, but since it has become possible to form stainless steel, it has become possible to store it for a long period of 6 months or more.

<Example 2> Next, a second embodiment of the present invention will be described with reference to FIG.

After performing sputter etching on a photosensitive resin (photoresist AZ-1350) 5 on a master substrate (blue plate glass: 1Ot) 6 to optically record information, an inorganic material (for example, 5iOz) 4 is applied. Sputter. Suitable conditions for sputter etching are to perform the sputter etching in an Ar gas pressure atmosphere at a discharge power of 30 to 100 W for 3 to 5 minutes. The sputtering conditions for the inorganic substance 4 are preferably such that the sputtering is performed for several minutes at a discharge power of 100 to 300 W in a gas pressure atmosphere containing 5 to 20% Ar or N2.
6) Layer 3 by sputtering. The sputtering conditions are
In an atmosphere of Ar gas pressure, the discharge power is set to 100~3
The thickness of the stainless steel and inorganic material is preferably 2000W for the reasons stated above.
It is desirable that the number be within 1 person.

Further, as the inorganic material, in addition to oxides such as 5iOt, nitrides such as SiN, carbides such as SiC, and semimetal materials such as Si can be used.

After that, an ultraviolet curable resin 2 is applied on the photosensitive resin 5, and a translucent member (plastic: 2t) 1 is superimposed and flattened on the resin 2 as a stamper substrate, and ultraviolet rays 7 are transmitted through it. Irradiate from the back side of sexual member 1 (irradiation power:
4kw/a&, irradiation time: 30 seconds), and then peeled off at the boundary layer of the ultraviolet curing resin 2 and stainless steel 3 to produce a stamper.

〔Effect of the invention〕

According to the present invention, in the method for producing a stamper for an optical disc, stainless steel can be laminated on a sputter-etched photosensitive resin, so a release layer with good adhesiveness can be formed on the master disc. . Additionally, since stainless steel is a material that does not rust or corrode, we were able to achieve a longer lifespan for the master disk.

As a result, the number of stampers produced from one master disc was conventionally limited to about 2.3 stampers, but it has become possible to produce 10 stampers or more.

[Brief explanation of the drawing]

FIG. 1 shows the first method of manufacturing an optical disk stamper of the present invention.
FIG. 2 is a sectional view showing the second embodiment. FIG. 3 is a cross-sectional view showing a conventional method for manufacturing an optical disk stamper. 1... Translucent member, 2... Ultraviolet curing resin, 3...
・Stainless steel, 4... Inorganic material, 5... Photosensitive resin,
6... Master board, 7... Ultraviolet light, 8... N x
Figure m Figure 1 Figure 3 Figure 2 Procedure (method) % formula % Display of the case 1999 Patent No. 27408 Name of the invention Person who amends the manufacturing method of a stamper for optical disks Relationship with the case Patent Issue Original person's name ( 5
10) Hitachi Co., Ltd. Target of date correction of Heisei drawings April 25, 1 ↓,, /7

Claims (1)

[Claims] 1. A step of sputter etching a master substrate and a photosensitive resin film on which information is recorded by optical means, and then laminating stainless steel, and applying an ultraviolet curing resin. For an optical disc, the method comprises a step of coating, a step of overlaying a stamper member on the resin, a step of irradiating the resin with ultraviolet rays to harden the resin, and a step of peeling the member and the resin from the master. How to make a stamper. 2. The method for producing a stamper for an optical disc according to claim 1, characterized in that an inorganic layer is provided on the photosensitive resin film, and stainless steel is sputtered thereon. Fabrication method. 3. In the method for producing an optical disk stamper according to claim 1 or 2, as the inorganic material,
A method for producing a stamper for an optical disk, characterized in that an oxide such as SiO_2, a nitride such as SiN, a carbide such as SiC, or a semimetal such as Si is used.