JPH02207847A - クリーンドラフトチヤンバー - Google Patents
クリーンドラフトチヤンバーInfo
- Publication number
- JPH02207847A JPH02207847A JP2939389A JP2939389A JPH02207847A JP H02207847 A JPH02207847 A JP H02207847A JP 2939389 A JP2939389 A JP 2939389A JP 2939389 A JP2939389 A JP 2939389A JP H02207847 A JPH02207847 A JP H02207847A
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean
- exhaust
- exhaust port
- recessed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims abstract description 30
- 239000002253 acid Substances 0.000 abstract description 7
- 239000002904 solvent Substances 0.000 abstract description 4
- 239000003570 air Substances 0.000 description 61
- 239000007788 liquid Substances 0.000 description 14
- 239000012080 ambient air Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003187 abdominal effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2939389A JPH02207847A (ja) | 1989-02-08 | 1989-02-08 | クリーンドラフトチヤンバー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2939389A JPH02207847A (ja) | 1989-02-08 | 1989-02-08 | クリーンドラフトチヤンバー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02207847A true JPH02207847A (ja) | 1990-08-17 |
| JPH0470054B2 JPH0470054B2 (enExample) | 1992-11-09 |
Family
ID=12274897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2939389A Granted JPH02207847A (ja) | 1989-02-08 | 1989-02-08 | クリーンドラフトチヤンバー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02207847A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007038050A (ja) * | 2005-07-29 | 2007-02-15 | Nas Giken:Kk | クリーンドラフトと処理用容器と処理装置 |
| JP2013024550A (ja) * | 2011-07-21 | 2013-02-04 | Tornex Inc | プッシュプル型換気装置 |
-
1989
- 1989-02-08 JP JP2939389A patent/JPH02207847A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007038050A (ja) * | 2005-07-29 | 2007-02-15 | Nas Giken:Kk | クリーンドラフトと処理用容器と処理装置 |
| JP2013024550A (ja) * | 2011-07-21 | 2013-02-04 | Tornex Inc | プッシュプル型換気装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0470054B2 (enExample) | 1992-11-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081109 Year of fee payment: 16 |
|
| LAPS | Cancellation because of no payment of annual fees |