JPH0220369B2 - - Google Patents

Info

Publication number

JPH0220369B2

JPH0220369B2 JP26047885A JP26047885A JPH0220369B2 JP H0220369 B2 JPH0220369 B2 JP H0220369B2 JP 26047885 A JP26047885 A JP 26047885A JP 26047885 A JP26047885 A JP 26047885A JP H0220369 B2 JPH0220369 B2 JP H0220369B2

Authority

JP

Japan

Prior art keywords

piston

electrode

processed

gas

electrostatic chuck

Prior art date

1985-11-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 238000004381 surface treatment Methods 0.000 claims 1
• 238000001020 plasma etching Methods 0.000 description 7
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• 238000000609 electron-beam lithography Methods 0.000 description 2
• 238000005530 etching Methods 0.000 description 2
• 238000005468 ion implantation Methods 0.000 description 2
• 238000003825 pressing Methods 0.000 description 2
• 238000001179 sorption measurement Methods 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
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• 238000001312 dry etching Methods 0.000 description 1
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• 238000010884 ion-beam technique Methods 0.000 description 1
• 150000002500 ions Chemical class 0.000 description 1
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• 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 230000001105 regulatory effect Effects 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1