JPH0220327U - - Google Patents
Info
- Publication number
- JPH0220327U JPH0220327U JP9864488U JP9864488U JPH0220327U JP H0220327 U JPH0220327 U JP H0220327U JP 9864488 U JP9864488 U JP 9864488U JP 9864488 U JP9864488 U JP 9864488U JP H0220327 U JPH0220327 U JP H0220327U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- cover
- core tube
- receivers
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9864488U JPH0648827Y2 (ja) | 1988-07-26 | 1988-07-26 | 縦型気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9864488U JPH0648827Y2 (ja) | 1988-07-26 | 1988-07-26 | 縦型気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220327U true JPH0220327U (enExample) | 1990-02-09 |
| JPH0648827Y2 JPH0648827Y2 (ja) | 1994-12-12 |
Family
ID=31325102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9864488U Expired - Lifetime JPH0648827Y2 (ja) | 1988-07-26 | 1988-07-26 | 縦型気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648827Y2 (enExample) |
-
1988
- 1988-07-26 JP JP9864488U patent/JPH0648827Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648827Y2 (ja) | 1994-12-12 |