JPH0220325U - - Google Patents

Info

Publication number
JPH0220325U
JPH0220325U JP9733688U JP9733688U JPH0220325U JP H0220325 U JPH0220325 U JP H0220325U JP 9733688 U JP9733688 U JP 9733688U JP 9733688 U JP9733688 U JP 9733688U JP H0220325 U JPH0220325 U JP H0220325U
Authority
JP
Japan
Prior art keywords
discharge electrode
bottom plate
attached
electrode according
showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9733688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648826Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988097336U priority Critical patent/JPH0648826Y2/ja
Publication of JPH0220325U publication Critical patent/JPH0220325U/ja
Application granted granted Critical
Publication of JPH0648826Y2 publication Critical patent/JPH0648826Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988097336U 1988-07-25 1988-07-25 着脱式の放電電極 Expired - Lifetime JPH0648826Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988097336U JPH0648826Y2 (ja) 1988-07-25 1988-07-25 着脱式の放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988097336U JPH0648826Y2 (ja) 1988-07-25 1988-07-25 着脱式の放電電極

Publications (2)

Publication Number Publication Date
JPH0220325U true JPH0220325U (enrdf_load_stackoverflow) 1990-02-09
JPH0648826Y2 JPH0648826Y2 (ja) 1994-12-12

Family

ID=31322713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988097336U Expired - Lifetime JPH0648826Y2 (ja) 1988-07-25 1988-07-25 着脱式の放電電極

Country Status (1)

Country Link
JP (1) JPH0648826Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023053171A1 (ja) * 2021-09-28 2023-04-06 島津産機システムズ株式会社 プラズマ処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226925A (ja) * 1985-04-01 1986-10-08 Anelva Corp 放電反応装置
JPS6393084A (ja) * 1986-10-07 1988-04-23 Mitsubishi Electric Corp 文字読取り装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226925A (ja) * 1985-04-01 1986-10-08 Anelva Corp 放電反応装置
JPS6393084A (ja) * 1986-10-07 1988-04-23 Mitsubishi Electric Corp 文字読取り装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023053171A1 (ja) * 2021-09-28 2023-04-06 島津産機システムズ株式会社 プラズマ処理装置
JPWO2023053171A1 (enrdf_load_stackoverflow) * 2021-09-28 2023-04-06

Also Published As

Publication number Publication date
JPH0648826Y2 (ja) 1994-12-12

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