JPS63140064U - - Google Patents

Info

Publication number
JPS63140064U
JPS63140064U JP3145987U JP3145987U JPS63140064U JP S63140064 U JPS63140064 U JP S63140064U JP 3145987 U JP3145987 U JP 3145987U JP 3145987 U JP3145987 U JP 3145987U JP S63140064 U JPS63140064 U JP S63140064U
Authority
JP
Japan
Prior art keywords
glow discharge
reaction chamber
decomposition device
amorphous semiconductor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3145987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3145987U priority Critical patent/JPS63140064U/ja
Publication of JPS63140064U publication Critical patent/JPS63140064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP3145987U 1987-03-03 1987-03-03 Pending JPS63140064U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3145987U JPS63140064U (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3145987U JPS63140064U (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Publications (1)

Publication Number Publication Date
JPS63140064U true JPS63140064U (enrdf_load_stackoverflow) 1988-09-14

Family

ID=30837211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3145987U Pending JPS63140064U (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Country Status (1)

Country Link
JP (1) JPS63140064U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS63140064U (enrdf_load_stackoverflow)
JPS6413119U (enrdf_load_stackoverflow)
JPS63183236U (enrdf_load_stackoverflow)
JPH01106564U (enrdf_load_stackoverflow)
JPS61177374A (ja) プラズマｃｖｄ装置及びプラズマｃｖｄによる成膜方法
JPH0469465U (enrdf_load_stackoverflow)
JPS63187326U (enrdf_load_stackoverflow)
JPH0338730B2 (enrdf_load_stackoverflow)
JPS63482A (ja) グロ−放電分解装置
JPH0160528U (enrdf_load_stackoverflow)
JPS62172718A (ja) 堆積膜形成装置
JPH1053883A (ja) 反応性イオンエッチング装置
JPS6273542U (enrdf_load_stackoverflow)
JPH0183067U (enrdf_load_stackoverflow)
JPS60179033U (ja) 放電電極
JPH02113333U (enrdf_load_stackoverflow)
JPH01154630U (enrdf_load_stackoverflow)
JPH0187529U (enrdf_load_stackoverflow)
JPH0176035U (enrdf_load_stackoverflow)
JP2670248B2 (ja) 堆積膜形成方法
JPS6192052U (enrdf_load_stackoverflow)
JPS6453759U (enrdf_load_stackoverflow)
JPS6116348B2 (enrdf_load_stackoverflow)
JPS62147335U (enrdf_load_stackoverflow)
JPH0217555U (enrdf_load_stackoverflow)