JPH01102153U - - Google Patents

Info

Publication number
JPH01102153U
JPH01102153U JP19912587U JP19912587U JPH01102153U JP H01102153 U JPH01102153 U JP H01102153U JP 19912587 U JP19912587 U JP 19912587U JP 19912587 U JP19912587 U JP 19912587U JP H01102153 U JPH01102153 U JP H01102153U
Authority
JP
Japan
Prior art keywords
substrate holder
plasma cvd
cvd apparatus
area
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19912587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19912587U priority Critical patent/JPH01102153U/ja
Publication of JPH01102153U publication Critical patent/JPH01102153U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19912587U 1987-12-28 1987-12-28 Pending JPH01102153U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19912587U JPH01102153U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19912587U JPH01102153U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Publications (1)

Publication Number Publication Date
JPH01102153U true JPH01102153U (enrdf_load_stackoverflow) 1989-07-10

Family

ID=31489594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19912587U Pending JPH01102153U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH01102153U (enrdf_load_stackoverflow)

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