JPH02198759A - Cutting method and device by wire saw - Google Patents

Abstract

PURPOSE:To prevent the thermal effect onto a grooved roller and to maintain the cutting capacity with high accuracy by shielding thermally a cutting part to which a grooved roller is attached, from various driving motors, etc., of a heating element. CONSTITUTION:In a wire saw device 1, the heating member of a grooved roller driving motor 20 for traveling a wire S and wire winding reel driving motors 23, 24, etc., are thermally shielded from a cutting part 2 including grooved roller 4, 5, 6. By this structure heat generated by each driving motor, etc., is not transferred to each grooved roller 4, 5, 6 and no distortion is caused under the fitting state of the groove roller 4, 5, 6. Consequently, the relative position between each groove roller 4, 5, 6 and initial cutting body W is stabilized, and thus the cutting capacity of high accuracy can be kept.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention mainly relates to a cutting method using a wire saw for simultaneously cutting an ingot material made of high hardness and brittle materials such as silicon-based single crystal into a large number of wafer shapes, and the method thereof. Regarding equipment.

[Conventional technology]

An example of the above-mentioned wire-type cutting machine is shown in FIGS. 7 and 8.

This wire saw device 100 has a wire feeding and winding reel 10 paired with a cutting section 101 for tensioning the wire S.
2,103. The cutting section 101 includes three grooved rollers 105, 106. 10
7 are arranged horizontally and in a substantially equilateral triangular shape and rotatably supported by front and rear support brackets) 108 and 109, and support brackets) 108 and 109 are attached to the frame 110 of the drive mechanism 104. There is.

Each groove roller 105. 106. 107 forms an annular groove at a predetermined pitch, along which the wire S is spirally wound, and both ends are wound around payout and take-up reels 102 and 103 via dancer rollers 111 and 112, respectively. 113 and 114 are the drive motors for each reel, and 1
Reference numeral 15 denotes a drive motor for the groove roller 105, which drives a drive belt 117 via a gear box or reduction mechanism 116, and a drive bell (117) rotates a drive shaft 118 connected to the groove roller 105.

[Problem to be solved by the invention]

In the above wire saw device, the heat generated by various drive motors, etc. is supported by the support bracket)108. Frame 110 to which 109 is attached
This causes distortion in the frame 110, which causes fluctuations in the interposition of the three grooved rollers 105, 106, and 107, resulting in poor cutting accuracy. According to experimental results, when the temperature of the frame 110 is +6° relative to room temperature, the position of the groove roller 106 farthest from the frame deviates by about 50 μm.

In view of this point, the present invention aims to prevent the influence of heat generated by each drive motor etc. from exerting on each groove roller.

(Means for Solving the Problems) The method of the present invention for achieving the above object provides heat generating members such as the groove roller drive motor gear box and the wire take-up reel drive motor for running the wire in the wire saw device. The groove roller is thermally isolated from the cutting section including the grooved roller.

A second invention relates to an apparatus for carrying out the above method, which is divided into a cutting section to which a grooved roller is attached, and a drive mechanism that houses various motors such as a grooved roller drive motor, a gear box, and a wire take-up reel drive motor. However, a gap is formed between the two.

Note that instead of forming the above-mentioned gap, the cutting section and the drive mechanism may be connected via a heat insulating material.

Alternatively, the groove roller drive motor may be surrounded by a surrounding wall, and the inside of the surrounding wall may be forcedly cooled.

Furthermore, as another means, the storage chamber itself that accommodates at least the groove roller drive motor of the drive mechanism may be forcibly cooled.

[Function] The heat generated by each drive motor etc. is transmitted to the machine frame, but the frame of the cutting section is thermally isolated from the machine frame, so each groove roller is affected by the above heat generation. Never.

〔Example〕

1 to 3 show a first embodiment of the present invention. The wire saw device 1 includes a cutting section 2 that tensions the wire S, and a drive mechanism 3 that applies a predetermined tension to the wire S and winds it up.

The cutting section 2 has three grooved rollers 4. 5. 6 are arranged substantially horizontally and in a substantially equilateral triangular shape, and are rotatably supported by the front and rear support brackets 7 and 8.
．． 8 is fixed to the side wall 11 of the tension frame 10. Each groove roller4. 5. As is well known, annular grooves are formed at predetermined intervals, and the cutting wire S is spirally wound around each roller. Note that the full roller 4 is a drive roller, and the drive shaft 1
The drive shaft 13 passes through the rear wall 12 and is supported by a bearing 14, and is provided with a pulley 15. 16 is a coupling.

The drive mechanism 3 includes a drive motor 20 for the groove roller 4, reels 21 and 22 for winding both ends of the wire S, and drive motors 23 and 24 for each reel, and these are housed in a drive frame 25. 26 and 27 are dancer rollers for keeping the tension of the wire S uniform, and a predetermined tension is applied to each of them by constant tension spring mechanisms 28 and 29. Also, each reel 21, 22 has a braking mechanism 30, 31.
The braking mechanisms 30 and 31 are released during winding by the motors 23 and 24. Further, when the wire is fed out, a predetermined resistance is applied, and a predetermined tension is applied to the wire S being fed out.

The groove roller drive motor 20 is placed on a mounting base 33 attached to a side wall 32 of a drive frame 25, and has a belt 36 between it and a pulley 35 attached to an intermediate shaft 34 provided in the cutting section 2. Healds 38 are installed between the pulley 37 of the shaft 34 and the pulley 15, respectively.

The driving frame 25 and the tensioning frame 10 are provided with an appropriate distance therebetween as heat shielding means, and A indicates the gap between the respective side walls 11.32 of both frames 10.25.

Note that W in the figure represents an object to be cut, which is supported by a suitable elevating means 40 and is elevated at a predetermined slow speed.

In the above configuration, the drive motor 24 of one of the take-up reels 22, for example, is released, the drive motor 23 of the take-up reel 21 being used is driven, and the wire S is wound onto the take-up reel 21.

At the same time, the drive motor 20 is driven, the groove roller 4 is rotated in synchronization with the running of the wire S, and the other groove rollers 5 and 6 are also rotated via the wire S. At this time, a braking mechanism 31 is attached to the wire feed-out side girdle 22.
A predetermined tension is applied to the wire being fed out, and each groove roller 4. 5. 6. Apply appropriate tension to the wire for cutting. At the same time, a machining fluid containing abrasive grains is supplied to the wire to cut the workpiece W.
Gradually raise it to make the cut.

In this case, the exhaust temperature increases together with the temperature of the drive motor 20 of the full roller 4 and the reel drive motor 23,
As a result, the temperature of the frame 25 increases, but the groove roller 4. 5. Since the tension frame IO to which the tension frame 6 is attached is separated and separated from the drive frame 25, the temperature increase is not transmitted to the tension frame IO.

Note that the gap A may be filled with a heat insulating material B. That is, the side walls 11.degree. 32 may be connected with the filler B sandwiched therebetween.

Next, FIGS. 4 and 5 show a second embodiment.

In this embodiment, the groove roller drive motor 20, which generates a large amount of heat and is installed close to the cutting section, is thermally shut off.In this case, as shown in the first embodiment, the cutting section 2 and the drive mechanism 3 need not be separated.

That is, in the wire saw device 40 of this embodiment, a cutting section 41 and a drive mechanism 42 are connected to each other by sharing a side wall 43, similar to the known structure. The drive motor 20 has a heat insulating sheet 44
The mounting base 45 is attached to the side wall 43 through the mounting base 45.
It is attached to. Reference numeral 46 denotes a surrounding wall surrounding the motor 20, which includes a cold air introduction pipe 47 and an exhaust pipe 48.
6.Forcibly cool the inside with cold air. That is, the drive motor 20, which is a heating element, is thermally shut off. In the figure, 49 is a thermocouple for measuring the temperature inside the surrounding wall, which regulates the introduction of cold air. The rest of the structure is the same as that of the previous example, and the same parts are given the same reference numerals and explanations will be omitted.

Note that instead of providing the surrounding wall 46, the device frame is provided with partition walls 50, 51 and side walls 43 for housing the drive motor 20.
In addition, a storage chamber 53 may be formed by the rear wall 52, and a cold air introduction pipe 54 and an exhaust pipe 55 may be communicated with the storage chamber 53 to cool the storage chamber 53.

Note that in any of the above embodiments, the groove roller 4.
5. It is preferable to forcibly control the heat generation of the bearing section 6. As the cooling means, for example, JP-A-62-251
There is Publication No. 063, and by combining this,
Furthermore, highly accurate cutting becomes possible.

Next, experimental results comparing the above embodiment and the conventional example (FIGS. 7 and 8) are shown below. The amount of displacement is measured using displacement gauges 60 at both ends of the lower groove rollers 5 and 60, as shown in FIG.
．． 61. 62. G3 was attached and the maximum difference between the respective measurement values was measured. Further, the bearings at both ends of each of the grooved rollers 4 to 6 are provided with well-known cooling means (for example, JP-A-62
-251063) is adopted.

Further, the first embodiment has a structure in which the cutting section and the drive mechanism are separated from each other, and the second embodiment has a structure in which the drive motor 20 is surrounded by a surrounding wall and the inside of the surrounding wall is forcibly cooled.

The cutting conditions are as follows.

Motor output IIIax 2.5 to V Wire speed 600 IIl/min One-way running Cutting time 5 hours Room temperature 24℃ (air conditioning) Forced cooling method 10℃ cooling water max 30 Q/ff1in circulation (cutting fluid) Mixing of abrasive grains and lap oil Diameter of liquid cut object 8
“Number of wafers to be cut: 95 [Effects of the Invention] According to the present invention, the cutting part to which the groove roller is attached is thermally isolated from various drive motors, gear boxes, bearings, etc. that are heat generating elements, so the motor This prevents thermal effects on the grooved rollers due to the heat generated by the grooved rollers, and does not cause distortion in the mounting condition of the grooved rollers. Therefore, the relative position between each grooved roller and the object to be cut is stabilized, and high-precision cutting can be maintained. .

In addition, in order to thermally isolate the above, the heat generated on the drive mechanism side can be completely blocked by providing the cutting section at a distance from the drive mechanism including various motors, or by providing it through a heat insulating material. Can be done.

In addition, a groove roller drive motor, etc., which is close to the cutting part and has the greatest heat effect on the cutting part, is surrounded by an enclosure wall, and the inside of the surrounding wall is forcibly cooled, or a storage chamber in which the drive motor etc. is installed is forcibly cooled, The above effect can be sufficiently obtained simply by blocking the generated heat from being transmitted to the device frame.

[Brief explanation of the drawing]

1 to 3 relate to the first embodiment of the present invention, FIG. 1 is a front view, FIG. 2 is a plan view, and FIG. 3 is an I in FIG.
4 and 5 are views of the second embodiment, FIG. 4 is a partially cutaway front view, and FIG. 5 is a view taken along line U-I in FIG. FIG. 6 is a view taken along line U, FIG. 6 is an explanatory diagram of how to measure the amount of displacement of a grooved roller, FIGS. 7 and 8 are related to a conventional example, FIG. 7 is a front view, and FIG. 8 is a plan view. 1 is a wire cutting machine, 2 is a tensioning mechanism, 3 is a drive mechanism, 4
~6 is a groove roller, 20 is a groove roller drive motor, 21.2
2 is a wire take-up reel, 23 and 24 are reel drive motors, A is a gap, and W is an object to be cut. Figure 2 3

Claims (5)

[Claims] (1) A plurality of grooved rollers are set up, a wire is spirally wound around each grooved roller, and the wire is run while supplying a machining fluid containing abrasive grains to the wire, and the workpiece is stretched as described above. In a wire saw device that simultaneously cuts a workpiece into a large number of wafer shapes by pressing against a wire to be processed, heat-generating members such as the groove roller drive motor and the wire take-up reel drive motor for running the wire, including the groove roller. The cutting process is a method of cutting using a wire saw, which is characterized by thermal isolation. (2) A plurality of grooved rollers are set up, a wire is spirally wound around each grooved roller, the wire is run, and the objects to be cut are fed to the side of the stretched wire to cut many objects at the same time. A wire saw device for cutting into wafers is divided into a cutting section to which the groove roller is attached and a drive mechanism that houses various motors such as a groove roller drive motor and a wire take-up reel drive motor, and a gap is provided between the two. A cutting method using a wire saw characterized in that a formed shape is formed. (3) Assemble a plurality of grooved rollers, wrap a wire spirally around each grooved roller, run the wire and feed the object to be cut to the side of the stretched wire, and simultaneously cut the portion to be cut. A wire saw device that cuts a large number of wafers is divided into a cutting section to which the groove roller is attached, and a drive mechanism that houses various motors such as a groove roller drive motor and a wire take-up reel drive motor, and both are covered with heat insulating material. A wire saw device characterized in that the wire saw device is connected via a wire saw device. (4) Assemble a plurality of grooved rollers, wrap a wire spirally around each grooved roller, run the wire, and feed the object to be cut to the side of the stretched wire, cutting many sections at the same time. A wire saw device for cutting into wafers is divided into a cutting section to which the groove roller is attached, and a drive mechanism housing various motors such as a groove roller drive motor and a wire take-up reel drive motor. A wire saw device characterized in that a drive motor is surrounded by a wall and the inside of the wall is forcedly cooled. (5) Assemble a plurality of grooved rollers, wrap a wire spirally around each grooved roller, run the wire, and feed the object to be cut to the tensioned wire side, thereby cutting many sections at the same time. A wire saw device for cutting into wafers is divided into a cutting section to which the groove roller is attached, and a drive mechanism that houses various motors such as a groove roller drive motor and a wire take-up reel drive motor. A wire saw device characterized in that a storage chamber housing at least a groove roller drive motor is forcibly cooled.