JPH08290421A - Grooved roller shaft support part cooling device of wire saw - Google Patents

Abstract

PURPOSE: To perform good cutting without losing heat balance on both sides of a grooved roller in a wire saw. CONSTITUTION: Cooling water held to definite temp. by a temp. controller is circulated and Supplied to the respective shaft support devices 60-70 of a plurality of grooved rollers by a cooling water circulating device. The supply amts. of cooling water supplied to the respective shaft support devices are individually adjusted by the flow rate adjusting valves provided on the way of supply pipings 72A-82A and this adjustment is performed by controlling the flow rate adjusting valves on the basis of the temps. of the shaft support devices detected by the temp. sensors 60T-70T arranged to the shaft support devices by a control unit so as to uniformly cool the shaft support devices.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grooved roller shaft supporting portion cooling device for a wire saw, and in particular, cutting a large number of thin wafers with a wire that travels through a workpiece such as a cylindrical semiconductor ingot, ceramic or glass. The present invention relates to a grooved roller shaft support cooling device for a wire saw.

[0002]

2. Description of the Related Art A wire saw is one of the cutting devices for cutting a workpiece such as a semiconductor ingot, ceramic, or glass into thin plate wafers. In this wire saw, a wire fed from one wire reel is wound around a plurality of grooved rollers to form a wire row, and is wound on the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. Then, the workpiece is pressed against the workpiece, and the lapping action of the abrasive grains cuts the workpiece into a large number of thin plate wafers.

In the wire saw, it is important to suppress the heat generation of the shaft supporting portion of the grooved roller in order to improve the cutting accuracy of the workpiece. Therefore, as a shaft supporting device for a grooved roller that suppresses heat generation in the shaft supporting portion of the grooved roller, there is one disclosed in Japanese Patent Laid-Open No. 154831/1993.
This shaft support device cools the shaft support part of the grooved roller by circulating and supplying a constant temperature and a constant flow rate of cooling water to the shaft support part that rotatably supports both ends of the grooved roller, The temperature rise of the shaft support is suppressed.

[0004]

By the way, the grooved roller is driven by transmitting drive from a motor by belt transmission. For this reason, the shaft support portion on the side to which the drive belt is connected has a temperature higher than that of the shaft support portion on the side to which the drive belt is not connected due to heat generation due to friction of the belt.

However, the above-mentioned Japanese Patent Laid-Open No. 5-15483.
In the shaft support device disclosed in Japanese Patent Laid-Open No. 1-Gazette, since each shaft support part is cooled with a constant temperature and a constant flow rate of cooling water, a temperature difference occurs at both ends of the grooved roller. For this reason, the grooved roller has a drawback that the balance of deformation due to heat is lost, the groove pitch changes, and the cutting accuracy is adversely affected. Further, not only the deformation balance of the grooved roller is lost, but also the structure of the bracket or the like that fixes the shaft support device from both sides is unbalanced due to heat, and twisting occurs, which adversely affects cutting. There is a drawback that.

The present invention has been made in view of the above circumstances, and cools the grooved roller shaft support portion of the wire saw capable of performing excellent cutting without disturbing the heat balance on both sides of the grooved roller. The purpose is to provide a device.

[0007]

In order to achieve the above object, the present invention provides a wire from one wire reel, which is wound around a plurality of grooved rollers to form a wire row and wound around the other wire reel. A wire saw for cutting and cutting the work into a large number of thin plate-shaped wafers by supplying a working liquid containing abrasive grains to the wire row and pressing the work to be processed. A grooved roller shaft supporting unit cooling device for a wire saw that supplies cooling water to a cooling water flow path of a shaft supporting unit for rotatably supporting the shaft supporting unit to cool the shaft supporting unit, at least among the plurality of grooved rollers. A cooling water supply passage for individually supplying the cooling water to the cooling water passage of each shaft support portion that axially supports the grooved rollers located on both sides of the workpiece pressed against the wire row, and the plurality of cooling water supply passages. Cooling through the cooling water supply channel Flow rate adjusting means for individually adjusting the flow rate of water, temperature constant adjusting means for maintaining the temperature of the cooling water at a constant temperature, a plurality of temperature sensors for individually detecting the temperature of each shaft support portion, and each of the above Control means for controlling the flow rate adjusting means so that the temperature of each of the shaft support portions becomes uniform based on the temperature detected by the temperature sensor.

In order to achieve the above object, a wire is unwound from one wire reel, wound around a plurality of grooved rollers to form a wire row, and wound on the other wire reel. A wire saw that supplies a working liquid containing abrasive grains and presses the work piece to cut the work piece into many thin plate-shaped wafers, and rotatably supports both ends of the grooved roller. A grooved roller shaft support part cooling device for a wire saw that supplies cooling water to a cooling water flow path of a shaft support part to cool the shaft support part, and is pressed against at least the wire row among the plurality of grooved rollers. Further, a cooling water supply path for individually supplying the cooling water to the cooling water flow path of each shaft support portion that axially supports grooved rollers located on both sides of the workpiece, and cooling that flows through the plurality of cooling water supply paths. Water temperature Temperature individual adjusting means, a plurality of temperature sensors for individually detecting the temperature of each of the shaft support portions, so that the temperature of each of the shaft support portions becomes uniform based on the temperature detected by each of the temperature sensors. And a control means for controlling the flow rate adjusting means.

In order to achieve the above-mentioned object, a wire is unwound from one wire reel, wound around a plurality of grooved rollers to form a wire row, and wound on the other wire reel. A wire saw that supplies a working liquid containing abrasive grains and presses the work piece to cut the work piece into many thin plate-shaped wafers, and rotatably supports both ends of the grooved roller. A grooved roller shaft support part cooling device for a wire saw that supplies cooling water to a cooling water flow path of a shaft support part to cool the shaft support part, and is pressed against at least the wire row among the plurality of grooved rollers. Further, a cooling water supply path for individually supplying the cooling water to the cooling water flow path of each shaft support portion that axially supports grooved rollers located on both sides of the workpiece, and cooling that flows through the plurality of cooling water supply paths. Water flow rate A flow rate adjusting means for adjusting, the temperature constant adjusting means for maintaining the temperature of the cooling water at a constant temperature,
It is characterized by consisting of.

[0010]

According to the first aspect of the present invention, the control means controls the flow rate adjusting means so that the temperature of each shaft support portion becomes uniform based on the temperature of each shaft support portion detected by each temperature sensor. The flow rate of the cooling water flowing through the cooling water supply passage was controlled. In this case, among the plurality of grooved rollers, at least the temperature of each shaft supporting portion that pivotally supports the grooved rollers located on both sides of the workpiece pressed against the wire row is made uniform. As a result, the deformation balance due to heat on both sides of the grooved roller is not disturbed, and accurate cutting can be performed.

According to the second aspect of the invention, based on the result measured by each temperature sensor, the control means controls the cooling water supply passages by the individual temperature adjusting means so that the temperature of each shaft support portion becomes uniform. The temperature of the cooling water flowing through each was controlled individually. Also in this case, the cutting can be performed with high precision for the same reason as in claim 1. According to the third aspect of the present invention, the cooling water flowing through each cooling water supply passage is adjusted by the flow rate adjusting means so that the temperature of each shaft supporting portion becomes uniform based on the value obtained by the operator through experience and experiments. The flow rate of was adjusted. Also in this case, the cutting can be performed with high precision for the same reason as in claim 1.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a grooved roller shaft supporting portion cooling device for a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows an overall configuration diagram of the wire saw 10. The wire 14 wound around one wire reel 12 is sequentially wound around the three grooved rollers 21, 22, and 23 via the wire guide device 16, the plurality of fixed guide rollers 18 and 18, and the dancer roller 20. After forming the wire row 24, the plurality of fixed guide rollers 1
It is wound around the other wire reel 26 through the rollers 8, 18, the dancer roller 20, and the wire guide device 16.

The dancer roller 20 has a weight 4 of a predetermined weight.
4 is suspended so that the traveling wire 14 is always given a required tension. A wire cleaning device 46 is provided in the middle of the wire traveling path, and the working liquid 40 attached to the wire 14 is removed by the wire cleaning device 46. The wire reels 12 and 26 are respectively connected to drive motors 28 and 30 capable of rotating in the forward and reverse directions, and the three grooved rollers 2 are connected.
The drive motor 32 capable of rotating in the forward and reverse directions is also connected to one of the motors 1, 22, and 23. As a result, the wire 14 reciprocates between the one wire reel 12 and the other wire reel 26.

The wire row 24 is provided with a polishing liquid storage tank 3
Abrasive grains stored in No. 8 (normally GC # 600 to # 1000
The working fluid 40 containing a certain amount is used from the polishing fluid supply nozzle 42. Below the wire row 24, a semiconductor ingot 54, which is a workpiece, is supported by a work feed table 48 via a work block 56 and a slice base 58. The work feed table 48 is provided so as to be vertically movable by a screw rod 52 which is rotated by a motor 50. The semiconductor ingot is pressed against the high-speed traveling wire row 24 by moving the work feed table 48 upward, and is lapped by the machining liquid 40 supplied to the high-speed traveling wire row 24 to form a large number of thin plate shapes. To be cut into wafers.

2 and 3 are explanatory views of a first embodiment of a grooved roller shaft supporting portion cooling device for a wire saw according to the present invention. The three grooved rollers 21, 22, 2
3 has shaft support devices 60, 62, 6 at both ends thereof.
It is supported by 4, 66, 68 and 70. A flow path (not shown) is formed inside the shaft support devices 60 to 70, and the cooling water flows through the flow paths to absorb the heat generated in the shaft support devices 60 to 70. Each shaft support device 6
The cooling water supplied to each of the shaft support devices 60 to
Supply pipes 72A, 74A, 7 connected to the 0 channel inlet
Discharge pipes 72B, 74B, 76B, 78 supplied from 6A, 78A, 80A, 82A and connected to the outlets of the flow paths.
It is discharged from B, 80B and 82B.

The supply pipes 72A to 82A and the discharge pipes 72B to 82B are both connected to a cooling water circulation device 84, and the cooling water supplied to each shaft support device 60 to 70 is circulated and supplied by the cooling water circulation device 84. . The cooling water circulation device 84 is provided with a temperature adjusting device (not shown), and the cooling water that has circulated and returned is cooled by this temperature adjusting device and adjusted to a predetermined temperature. Therefore, the cooling water circulating device 84 always supplies the cooling water having a constant temperature.

Further, the supply pipes 72A to 82A are
Flow rate adjusting valves 72C, 74C, 76C, 78C, 80
C and 82C are provided, and the flow rate adjusting valve 72C to
By controlling 82C individually, each shaft support device 60
Adjust the amount of cooling water supplied to ~ 70. The controller 86 controls the flow rate adjusting valves 72C to 82C.

The controller 86 controls the flow rate adjusting valve 72.
Control of C to 82C is performed as follows. That is, each of the shaft supporting devices 60 to 70 has a temperature sensor 60T, 62T, 64T, 66 for detecting the temperature of the shaft supporting device 60 to 70.
T, 68T, 70T are installed. The temperatures of the shaft support devices 60 to 70 detected by the temperature sensors 60T to 70T are input to the control device 86. The control device 86 controls the opening degree of each of the flow rate adjusting valves 72C to 82C based on the input temperature of each of the shaft supporting devices 60 to 70 so that each of the shaft supporting devices 60 to 70 has a uniform temperature. The flow rate adjustment valves 72C to 82C are calculated and controlled.

The operation of the first embodiment of the grooved roller shaft support portion cooling device for a wire saw according to the present invention constructed as described above is as follows. From the cooling water circulation device 84, the cooling water maintained at a constant temperature by the temperature adjusting device is supplied to the supply pipe 72A.
.About.82A to be supplied to each of the shaft supporting devices 60 to 70. The cooling water supplied to each shaft support device 60-70 flows through the flow path formed in the shaft support device 60-70, absorbs the heat generated in the shaft support device 60-70, and discharges the pipe 72B. It is returned again to the cooling water circulation device 84 through ~ 82B. The cooling water returned to the cooling water circulation device 84 is cooled by the temperature adjusting device and maintained at a predetermined temperature,
It is again supplied to the supply pipes 72A to 82A.

On the other hand, the temperature sensors 60T to 70T detect the temperatures of the shaft support devices 60 to 70 and output the detected values to the control device 86. The controller 86 uses the temperature sensor 60.
Based on the temperatures of the shaft support devices 60 to 70 detected at T to 70T, the opening degrees of the flow rate adjusting valves 72C to 82C are calculated so that the shaft support devices 60 to 70 have a uniform temperature. , And controls the flow rate adjusting valves 72C to 82C based on it. As a result, the supply amount of the cooling water supplied to each of the shaft supporting devices 60 to 70 is different in each of the shaft supporting devices 60 to 70. And, in the shaft support device whose temperature is higher than average,
A larger amount of cooling water is supplied, and a lower amount of cooling water is supplied to the shaft supporting device having a temperature lower than the average, so that the temperature of each shaft supporting device 60 to 70 becomes uniform as a whole.

As described above, according to the grooved roller shaft supporting portion cooling device for the wire saw of the first embodiment, each shaft supporting device 60 is provided.
It is possible to uniformly cool each of the shaft support devices 60 to 70 by individually controlling the supply amount of the cooling water having a constant temperature to be supplied to the shaft support devices 70 to 70. As a result, the grooved rollers 21, 2
Not only 2 and 23 but also the device structure that supports the grooved rollers 21, 22 and 23 from both sides does not cause distortion or the like due to the loss of heat balance, and good cutting can be performed.

2 and 4 are explanatory views of a second embodiment of the grooved roller shaft support portion cooling device for a wire saw according to the present invention. The same members and the same devices as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted. In the first embodiment, the supply amount of the cooling water having a constant temperature supplied to each of the shaft supporting devices 60 to 70 is individually adjusted for each of the shaft supporting devices 60 to 70. In the second embodiment, the temperature of the cooling water having a constant flow rate supplied to each of the shaft supporting devices 60 to 70 is individually adjusted for each of the shaft supporting devices 60 to 70. Therefore, as shown in FIG. 4, in the first embodiment, the flow rate adjusting valve 72
Temperature adjusting means 72D, 74D, 76 are provided at the positions where C to 82C were installed, that is, at the respective supply pipes 72A to 82A.
D, 78D, 80D and 82D are installed.

The temperature adjusting means 72D will be described in more detail as a representative. As shown in FIG. 5, a heater 72E installed in the middle of the supply pipe 72A, and a heater 72E installed downstream of the heater 72E in the supply pipe 72A. The temperature detector 72F detects the temperature of the cooling water heated by 72E, and the heater control device 72G that controls the heater 72E. The heater control device 72G uses the temperature detector 7 based on the target signal of the cooling water temperature output from the control device 86.
While feeding back the temperature of the cooling water detected in 2F, the heating amount of the heater 72E is controlled so that the temperature of the cooling water reaches the target value. Although not shown, the other supply pipe 7
Temperature adjusting means 74D to 82D installed in 4A to 82A
Is similarly configured.

The controller 86 includes temperature sensors 60T to 60T.
Calculation of the temperature of the cooling water supplied to each shaft support device 60-70 so that each shaft support device 60-70 has a uniform temperature based on the temperature of each shaft support device 60-70 detected at 70T. The heater control device 72G to
Output to 82G. The operation of the second embodiment of the grooved roller shaft support portion cooling device for a wire saw according to the present invention configured as described above is as follows.

The cooling water is circulated between the cooling water supply devices 84 through the respective shaft support devices 60 to 70 as in the first embodiment. On the other hand, the temperature sensors 60T to 70T detect the temperatures of the shaft support devices 60 to 70, and the detected values are detected by the control device 86.
Output to. The control device 86 uses the temperature sensors 60T to 70T.
Calculation of the temperature of the cooling water supplied to each shaft supporting device 60-70 so that each shaft supporting device 60-70 is cooled uniformly based on the temperature of each shaft supporting device 60-70 detected by T. Is performed, and the calculation result is calculated for each heater control device 72G-
Output to 82G. Each heater control device 72G to 82G
Is so that the temperature of the cooling water supplied to each of the shaft support devices 60 to 70 becomes the temperature calculated by the control device 86,
The heating amount of the heaters 72E to 82E is controlled while feeding back the temperature of the cooling water detected by the temperature detectors 72F to 82F. As a result, the temperature of the cooling water supplied to each of the shaft supporting devices 60 to 70 becomes different in each of the shaft supporting devices 60 to 70. Then, the cooling water, which has been heated by the temperature adjusting means, is supplied to the low-temperature shaft supporting device, so that the temperatures of the respective shaft supporting devices 60 to 70 become uniform as a whole.

As described above, according to the grooved roller shaft supporting portion cooling device for the wire saw of the second embodiment, each shaft supporting device 60 is provided.
Since the temperatures of the cooling waters supplied to 70 to 70 are individually controlled, the same effect as the first embodiment can be obtained. 2 and 6 are explanatory views of a third embodiment of the grooved roller shaft support portion cooling device for a wire saw according to the present invention. The same members and the same devices as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In the third embodiment, the openings of the flow rate adjusting valves 72C to 82C in the first embodiment are manually adjusted. Therefore, in the cooling device of the third embodiment, the control device 86 and the temperature sensors 60T to 70 in the first embodiment are included.
T is not provided. The flow rate adjusting valves 72C to 82C
In the method of adjusting the opening degree, cooling water having a constant flow rate and a constant temperature is supplied to each of the shaft supporting devices 60 to 70, and trial cutting is performed several times in this state. Then, the opening of each of the flow rate adjusting valves 72C to 82C is obtained from the result of the trial cutting.

As described above, according to the grooved roller shaft support portion cooling device for the wire saw of the third embodiment, the operator individually adjusts the temperature of the cooling water supplied to the shaft support devices 60 to 70. The same effect as that of the first embodiment can be obtained. In addition, in the first to third embodiments, all the shaft supporting devices 60 of the three grooved rollers 21, 22, and 23 are provided.
˜70 are cooled, but at least a shaft supporting device for a grooved roller forming a wire row for cutting, that is, in FIG. 2, shaft supporting devices 64, 66, 68, 70 for the grooved rollers 22, 23. Only one may be cooled.

In the first and second embodiments, the detection positions of the temperature sensors 60T to 70T for detecting the temperatures of the shaft support devices 60 to 70 are not specified.
By detecting the temperature in the vicinity of the outlet of the flow path where the endothermic effect of the cooling water is minimized, more accurate drive control can be performed.

[0030]

As described above, according to the present invention,
The temperature of each shaft support can be made uniform by individually adjusting the supply amount or temperature of the cooling water supplied to each shaft support of the plurality of grooved rollers in each shaft support. As a result, good cutting can be performed without disturbing the heat balance on both sides of the grooved roller.

[Brief description of drawings]

1] Overall configuration of a wire saw

FIG. 2 is an explanatory view of first to third embodiments of the grooved roller shaft support portion cooling device of the wire saw according to the present invention.

FIG. 3 is an explanatory diagram of a first embodiment of a grooved roller shaft support portion cooling device for a wire saw according to the present invention.

FIG. 4 is an explanatory diagram of a first embodiment of a grooved roller shaft support portion cooling device for a wire saw according to the present invention.

FIG. 5 is an explanatory view of temperature adjusting means of the second embodiment.

FIG. 6 is an explanatory diagram of a first embodiment of a grooved roller shaft support portion cooling device for a wire saw according to the present invention.

[Explanation of symbols]

 10 ... Wire saw 14 ... Wires 21, 22, 23 ... Grooved rollers 60-70 ... Shaft support device 60T-70T ... Temperature sensor 72A-82A ... Supply pipe 72B-82B ... Discharge pipe 72C-82C ... Flow control valve 72D-82D ... Temperature adjusting means 72E to 82E ... Heaters 72F to 82F ... Temperature detectors 72G to 82G ... Heater control device 84 ... Cooling water circulation device 86 ... Control device

Claims (5)

[Claims] 1. A wire is unwound from one wire reel, wound around a plurality of grooved rollers to form a wire row, and is wound around the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. Then, a work piece is pressed against the work piece, and the work piece is cut into a large number of thin plate-shaped wafers. The wire saw is provided in a cooling water flow path of a shaft support part that rotatably supports both ends of the grooved roller. In a grooved roller shaft support part cooling device for a wire saw that supplies cooling water to cool the shaft support part, at least both sides of the work piece pressed against at least the wire row among the plurality of grooved rollers. A cooling water supply passage that individually supplies the cooling water to the cooling water passage of each shaft support portion that axially supports the grooved roller that is positioned, and a flow rate of the cooling water that flows through the plurality of cooling water supply passages are individually adjusted. Flow rate adjustment means, A constant temperature adjusting means for maintaining the temperature of the cooling water at a constant temperature, a plurality of temperature sensors for individually detecting the temperature of each shaft support portion, and each shaft support portion based on the temperature detected by each temperature sensor. A controller for controlling the flow rate adjusting means so that the temperature of the roller is uniform, and a grooved roller shaft support portion cooling device for a wire saw. 2. A wire is unwound from one wire reel, wound around a plurality of grooved rollers to form a wire row, and wound on the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. Then, a work piece is pressed against the work piece, and the work piece is cut into a large number of thin plate-shaped wafers. The wire saw is provided in a cooling water flow path of a shaft support part that rotatably supports both ends of the grooved roller. In a grooved roller shaft support part cooling device for a wire saw that supplies cooling water to cool the shaft support part, at least both sides of the work piece pressed against at least the wire row among the plurality of grooved rollers. A cooling water supply passage that individually supplies the cooling water to the cooling water passage of each shaft support portion that axially supports the grooved roller that is positioned, and the temperature of the cooling water that flows through the plurality of cooling water supply passages are individually adjusted. With individual temperature adjustment means A plurality of temperature sensors that individually detect the temperature of each shaft support portion, and control means that controls the flow rate adjusting means so that the temperature of each shaft support portion becomes uniform based on the temperature detected by each temperature sensor. A grooved roller shaft support portion cooling device for a wire saw, comprising: 3. A wire is unwound from one wire reel and wound around a plurality of grooved rollers to form a wire row and wound on the other wire reel, and a working fluid containing abrasive grains is supplied to the wire row. Then, a work piece is pressed against the work piece, and the work piece is cut into a large number of thin plate-shaped wafers. The wire saw is provided in a cooling water flow path of a shaft support part that rotatably supports both ends of the grooved roller. In a grooved roller shaft support part cooling device for a wire saw that supplies cooling water to cool the shaft support part, at least both sides of the work piece pressed against at least the wire row among the plurality of grooved rollers. A cooling water supply passage that individually supplies the cooling water to the cooling water passage of each shaft support portion that axially supports the grooved roller that is positioned, and a flow rate of the cooling water that flows through the plurality of cooling water supply passages are individually adjusted. Flow rate adjustment means, A grooved roller shaft support portion cooling device for a wire saw, comprising: a constant temperature adjusting means for maintaining the temperature of the cooling water at a constant temperature. 4. The grooved roller shaft support portion cooling device for a wire saw according to claim 1, wherein the temperature sensor detects a temperature in the vicinity of a cooling water flow path outlet of the shaft support portion. 5. The temperature individual adjusting means is provided in the cooling water supply passage, and heating means for heating the cooling water supplied to the cooling water passage, and between the heating means and the cooling water passage. A temperature detecting means provided to detect the temperature of the cooling water heated by the heating means, and a heating means control for controlling the heating amount of the heating means based on the temperature of the cooling water detected by the temperature detecting means. An apparatus for cooling a grooved roller shaft support portion of a wire saw according to claim 2 or 4, characterized in that: