JPH0219785Y2 - - Google Patents
Info
- Publication number
- JPH0219785Y2 JPH0219785Y2 JP1982174841U JP17484182U JPH0219785Y2 JP H0219785 Y2 JPH0219785 Y2 JP H0219785Y2 JP 1982174841 U JP1982174841 U JP 1982174841U JP 17484182 U JP17484182 U JP 17484182U JP H0219785 Y2 JPH0219785 Y2 JP H0219785Y2
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- spring part
- movable part
- deflection element
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17484182U JPS5979825U (ja) | 1982-11-18 | 1982-11-18 | 光偏向素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17484182U JPS5979825U (ja) | 1982-11-18 | 1982-11-18 | 光偏向素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5979825U JPS5979825U (ja) | 1984-05-30 |
JPH0219785Y2 true JPH0219785Y2 (it) | 1990-05-31 |
Family
ID=30380537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17484182U Granted JPS5979825U (ja) | 1982-11-18 | 1982-11-18 | 光偏向素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5979825U (it) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5425742A (en) * | 1977-07-28 | 1979-02-26 | Seiko Epson Corp | Sweeping and driving device |
JPS5734462A (en) * | 1980-08-11 | 1982-02-24 | Yokogawa Hokushin Electric Corp | Deflecting element of light |
-
1982
- 1982-11-18 JP JP17484182U patent/JPS5979825U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5425742A (en) * | 1977-07-28 | 1979-02-26 | Seiko Epson Corp | Sweeping and driving device |
JPS5734462A (en) * | 1980-08-11 | 1982-02-24 | Yokogawa Hokushin Electric Corp | Deflecting element of light |
Also Published As
Publication number | Publication date |
---|---|
JPS5979825U (ja) | 1984-05-30 |
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