JPH02195217A - Apparatus for correcting deterioration of temperature detector - Google Patents

Apparatus for correcting deterioration of temperature detector

Info

Publication number
JPH02195217A
JPH02195217A JP1015844A JP1584489A JPH02195217A JP H02195217 A JPH02195217 A JP H02195217A JP 1015844 A JP1015844 A JP 1015844A JP 1584489 A JP1584489 A JP 1584489A JP H02195217 A JPH02195217 A JP H02195217A
Authority
JP
Japan
Prior art keywords
thermocouple
deterioration
main
temperature
thermocouples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1015844A
Other languages
Japanese (ja)
Other versions
JP2750720B2 (en
Inventor
Osamu Shimizu
修 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohkura Electric Co Ltd
Original Assignee
Ohkura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohkura Electric Co Ltd filed Critical Ohkura Electric Co Ltd
Priority to JP1015844A priority Critical patent/JP2750720B2/en
Publication of JPH02195217A publication Critical patent/JPH02195217A/en
Application granted granted Critical
Publication of JP2750720B2 publication Critical patent/JP2750720B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To output a correcting signal or an alarm signal by taking out the outputs of main and secondary temperature detecting elements, and obtaining the deterioration of the main temperature detecting element based on the similar associated data which are changed with time as the associated reference data of the initial values of the elements when they are provided. CONSTITUTION:The outputs of a primary thermocouple 14 and secondary thermocouples 15 and 16 for correction are inputted into a microprocessor 45 through an analog multiplexer 41, an AD converter 43 and an I/O interface 44. The initial associated data are stored in a RAM 47. With the data as references, deterioration correcting operation is performed in the muP 45 based on the present associated data of the thermocouples 14 - 16 which are obtained in time. A primary thermocouple correcting signal (h) is obtained through a DA converter 48. When the deterioration exceeds the reference values, a primary thermocouple deterioration signal (g) is outputted through the interface 44. A program is stored in a ROM 46, and an initial command and the like are imparted with a operating switch 12. With this apparatus, the deterioration of the temperature detecting element which is arranged in a heat treating furnace 1 can be detected readily and accurately.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、温度測定に関し、更に詳しくは、温度測定用
熱電対の劣化を検出し補正演算を行って精度の良い温度
測定を行ったり熱電対の劣化警報を得るための温度検出
器劣化補正装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to temperature measurement, and more specifically, to detecting deterioration of a thermocouple for temperature measurement and performing correction calculations to perform accurate temperature measurement. The present invention relates to a temperature detector deterioration correction device for obtaining a deterioration alarm.

従来の技術 従来におけるこの種の温度計測は、定期的に熱電対をと
り外して熱電対検定装置で精度確認を行っている。
BACKGROUND OF THE INVENTION Conventionally, in this type of temperature measurement, the thermocouple is periodically removed and the accuracy is checked using a thermocouple verification device.

発明が解決しようとする課題 従来の温度計測では、熱電対の劣化はオフラインによる
熱電対の温度検定装置によって試験せざるを得なかった
。又は温度計測を基準に熱処理された製品の出来、不出
来から間接的に熱電対の劣化が発見されていた。
Problems to be Solved by the Invention In conventional temperature measurement, deterioration of thermocouples must be tested using an off-line thermocouple temperature verification device. Alternatively, deterioration of thermocouples has been indirectly discovered from the quality of products that have been heat-treated based on temperature measurement.

一般に熱電対の劣化は使用温度が高いはど又使用時間が
長いほど劣化が大きくなる。
In general, the deterioration of thermocouples increases as the operating temperature increases and the longer the operating time.

本発明は従来の上記実情に鑑みてなされたものであり、
従って本発明の目的は、熱電対使用時のオンラインで熱
電対の劣化を検出して、熱電対の起電力補正箸しくは劣
化警報の出力を行ってより精度の良い温度測定を可能と
した新規な補正装置を提供することにある。
The present invention has been made in view of the above-mentioned conventional situation,
Therefore, an object of the present invention is to provide a new method that enables more accurate temperature measurement by detecting thermocouple deterioration online when using a thermocouple, and outputting a thermocouple electromotive force correction signal or deterioration alarm. The object of the present invention is to provide a correcting device.

課題を解決するための手段 上記目的を達成する為に、本発明に係る温度検出器劣化
補正装置は、主温度検出素子と副温度検出素子の出力信
号をとり込みこれらの温度検出素子の設置初期値の関連
”データ基準として経時的に変化する同様の関連データ
から主温度検出素子の劣化を求め主温度検出素子の補正
信号若しくはアラーム信号を出力するように構成される
Means for Solving the Problems In order to achieve the above object, the temperature sensor deterioration correction device according to the present invention captures the output signals of the main temperature detection element and the sub temperature detection element, It is configured to determine the deterioration of the main temperature detection element from similar related data that changes over time as a value related data reference, and output a correction signal or alarm signal for the main temperature detection element.

発明の原理 第2図のように熱電対を設置すると炉壁を堺として炉内
と外で熱傾斜を持つ、この熱傾斜は熱流の流れによるも
ので熱電対が設置されれば決まるものである。
Principle of the Invention When a thermocouple is installed as shown in Figure 2, there is a thermal gradient inside and outside the furnace with the furnace wall as the center.This thermal gradient is due to the flow of heat and is determined by the installation of the thermocouple. .

主熱電対14、側熱電対15、側熱電対16はこの熱傾
斜を測定するものであり、側熱電対15は外気温度と炉
内温度の中間温度が望ましい、側熱電対15が主熱電対
14に近い温度であると主熱電対14の劣化と同時に側
熱電対15も劣化して主熱電対14の劣化検出が出来な
い、逆に側熱電対15が側熱電対16と近い温度では主
熱電対14の劣化が検出出来ない、側熱電対15は主熱
電対14より低い温度の測定のために、熱的劣化が主熱
電対14に比べて無視できる。
The main thermocouple 14, side thermocouple 15, and side thermocouple 16 are used to measure this thermal gradient.The side thermocouple 15 is preferably set at an intermediate temperature between the outside temperature and the furnace temperature.The side thermocouple 15 is the main thermocouple. If the temperature is close to 14, the side thermocouple 15 will deteriorate at the same time as the main thermocouple 14, and deterioration of the main thermocouple 14 cannot be detected.On the other hand, if the side thermocouple 15 is close to the side thermocouple 16, the main The thermal deterioration of the side thermocouple 15, which cannot detect the deterioration of the thermocouple 14, is negligible compared to that of the main thermocouple 14 because the side thermocouple 15 measures a temperature lower than that of the main thermocouple 14.

R熱電対の半年での経時劣化実験では1600℃で一6
0℃、1400℃で一20℃との報告があり、低い温度
では急速に劣化が少なくなる。
In a six-month aging test of the R thermocouple, the temperature at 1600℃ was -6
There are reports that the deterioration is -20°C at 0°C and 1400°C, and deterioration decreases rapidly at lower temperatures.

側熱電対15の温度を中間温度に調整するには熱電対の
支持部13を調整して熱電対保護管12の炉内挿入長さ
を変えれば良い。
In order to adjust the temperature of the side thermocouple 15 to an intermediate temperature, the length of the thermocouple protection tube 12 inserted into the furnace may be changed by adjusting the thermocouple support portion 13.

実施例 次に本発明をその好ましい一実施例について図面を参照
しながら具体的に説明する。
Embodiment Next, a preferred embodiment of the present invention will be specifically explained with reference to the drawings.

第1図は本発明に係る温度検出器劣化補正装置の一実施
例を示す概略ブロック構成図である。
FIG. 1 is a schematic block diagram showing an embodiment of a temperature detector deterioration correction device according to the present invention.

第1図を参照するに、参照番号1は物体の熱処理に使用
される熱処理炉(例えば電気炉)を示し、該熱処理炉の
炉壁11には一部が炉外(外気)に露出された保護管1
2が支持部13により固定されている。熱処理炉1内に
はまた炉加熱用ヒータ2が配置されている。保護管12
の端子部12aからは信号線3により例えば熱電対の如
き温度検出素子の検出出力が後述される信号処理回路に
結合されている。
Referring to FIG. 1, reference number 1 indicates a heat treatment furnace (for example, an electric furnace) used for heat treatment of objects, and a part of the furnace wall 11 of the heat treatment furnace is exposed to the outside of the furnace (outside air). Protection tube 1
2 is fixed by a support part 13. A heater 2 for heating the furnace is also arranged within the heat treatment furnace 1 . Protection tube 12
A detection output of a temperature detection element such as a thermocouple is connected to a signal processing circuit to be described later by a signal line 3 from the terminal portion 12a.

第2図(al  (b)は保護管12の近傍の具体的な
構成図、測定温度曲線図である0図示された実施例は温
度検出素子として熱電対を用いた場合のものである。
FIG. 2 (al(b)) is a specific configuration diagram of the vicinity of the protection tube 12 and a measured temperature curve diagram. The embodiment shown in FIG. 2 is an example in which a thermocouple is used as the temperature detection element.

第2図1alを参照するに、参照番号11は物質の熱処
理に用いられる熱処理炉の炉壁を示し、該炉壁11には
測定データの取出しをする端子部12aを有する保護管
12が支持部13により支持固定されている。保護管1
2は、端子部12aを含む一部が炉壁11の外部(外気
)に露出されている。
Referring to FIG. 2 1al, reference numeral 11 indicates a furnace wall of a heat treatment furnace used for heat treatment of materials, and a protective tube 12 having a terminal portion 12a for taking out measurement data is mounted on the furnace wall 11 as a supporting portion. It is supported and fixed by 13. Protection tube 1
2, a part including the terminal portion 12a is exposed to the outside of the furnace wall 11 (outside air).

保護管12内には、計測用主熱電対14と、熱電対使用
外気を測定する側熱電対16とそれらの中間に配置され
た側熱電対15が図示の如く配設されている。
Inside the protection tube 12, a main thermocouple for measurement 14, a side thermocouple 16 for measuring outside air using the thermocouple, and a side thermocouple 15 disposed between them are arranged as shown.

熱電対の劣化の原因は穐々考えられているが、主には使
用温度と使用時間に起因している。第2図(a)  l
b)からも判るように、主熱電対14は他の熱電対(側
熱電対15、側熱電対161より高温にさらされている
ためにその劣化は速い。
The causes of thermocouple deterioration are widely considered, but are mainly due to the operating temperature and operating time. Figure 2(a) l
As can be seen from b), the main thermocouple 14 is exposed to higher temperatures than the other thermocouples (the side thermocouple 15 and the side thermocouple 161), so its deterioration is faster.

第3図は本発明に使用される信号処理回路の一実施例を
示すブロック構成図である。
FIG. 3 is a block diagram showing one embodiment of a signal processing circuit used in the present invention.

第3図を参照するに、温度測定するための主熱電対14
と主熱電対14の劣化を補正するための複数の側熱電対
(図示された本実施例では15.16の2本)の出力は
アナログマルチプレクサ41、A/Dコンバータ43、
I10インタフェイス回路44を介してマイクロプロセ
ッサ(uP)45に入力され、熱電対設置時の初期関連
データが設定されてそれらはメモリRAM47上に格納
される。このストアされた初期関連データを基準として
経時的に得られる主熱電対14と2組の側熱電対15.
16の現関連データからμP45の演算により熱電対の
劣化補正演算を行いその結果をD/Aコンバータ48を
介して主熱電対補正信号りとして出力する。
Referring to FIG. 3, the main thermocouple 14 for measuring temperature
The outputs of a plurality of side thermocouples (two thermocouples 15 and 16 in the illustrated embodiment) for correcting the deterioration of the main thermocouple 14 are output from an analog multiplexer 41, an A/D converter 43,
It is input to the microprocessor (uP) 45 via the I10 interface circuit 44 to set initial related data at the time of thermocouple installation, and these are stored on the memory RAM 47. A main thermocouple 14 and two sets of side thermocouples 15 obtained over time based on the stored initial related data.
16 current related data, thermocouple deterioration correction calculation is performed by the calculation of μP 45, and the result is outputted as the main thermocouple correction signal via the D/A converter 48.

又、主熱電対の劣化がある基準値を越えた場合には、I
10インタフェイス回路44を介して主熱電対補正信号
gとして出力する。
In addition, if the deterioration of the main thermocouple exceeds a certain standard value, the I
10 interface circuit 44 as the main thermocouple correction signal g.

尚、ROM a6にはプログラムが格納されている。Note that a program is stored in the ROM a6.

第3図では主熱電対14と側熱電対15.16の冷接点
補正回路は省略されている。
In FIG. 3, the cold junction correction circuits for the main thermocouple 14 and side thermocouples 15, 16 are omitted.

操作スイッチ42は熱電対設定時の初期指令信号等を与
えるための入力用スイッチである。
The operation switch 42 is an input switch for giving an initial command signal etc. when setting the thermocouple.

第3図にに示された信号処理回路では主熱電対T4と側
熱電対15.16の3組の入力をとり込んでいるが、温
度測定は主熱電対14で行い、側熱電対15゜16は主
熱電対14の劣化補正用として用いられる。
The signal processing circuit shown in FIG. 3 takes in three sets of inputs: the main thermocouple T4 and the side thermocouples 15 and 16. Temperature measurement is performed with the main thermocouple 14 and the side thermocouple 15° 16 is used for correcting deterioration of the main thermocouple 14.

即ち、新品の熱電対設置時の主熱電対14と副熱電。That is, the main thermocouple 14 and the sub-thermocouple when a new thermocouple is installed.

対15.16の関連をRAM47上に記憶しておく。熱
電対を高温下で長時間使用し主熱電対14が劣化すると
、主熱電対14と側熱電対15.16の温度バランスが
新品時(又は熱電対設置初期時)と変化してくる。これ
らのソフトウェア処理の一例を第4図に示す。
The relationship between pair 15 and 16 is stored on the RAM 47. When the main thermocouple 14 deteriorates due to long-term use of the thermocouple at high temperatures, the temperature balance between the main thermocouple 14 and the side thermocouples 15 and 16 changes from when it was new (or when the thermocouple was initially installed). An example of these software processes is shown in FIG.

ここで主熱電対14と2つの側熱電対15.16の初期
関連データと高温度で長時間使用した現関連データの処
理の一例として比例関係で補正すると次のようになる。
Here, as an example of the processing of the initial related data of the main thermocouple 14 and the two side thermocouples 15 and 16 and the current related data that have been used for a long time at high temperatures, the following is obtained when the proportional relationship is corrected.

但し、主熱電対14、側熱電対15、側熱電対16の初
期値をT1、T2、T3とし、劣化後後の値をTr’ 
、 T2’ 、Ts’ とする。ここで主熱電対14の
劣化分をαとし、側熱電対15.16の劣化は無視出来
るものとすると、初期値におけるITI−Tz) : 
1T2−T3)の関係を劣化後の値T1°、T2°2T
3ト劣化分αテ示すと、l(T+’+al−T2’l:
 (T2°−Ts’)となる、即ち、(1)式の関係が
得られる。
However, the initial values of the main thermocouple 14, side thermocouple 15, and side thermocouple 16 are T1, T2, and T3, and the values after deterioration are Tr'
, T2' and Ts'. Here, if the deterioration of the main thermocouple 14 is α and the deterioration of the side thermocouples 15 and 16 can be ignored, then ITI-Tz at the initial value:
1T2-T3) to the values after deterioration T1°, T2°2T
3T deterioration αte is shown as l(T+'+al-T2'l:
(T2°-Ts'), that is, the relationship of equation (1) is obtained.

(Tl−T21: (Tz−Till(T1’+al−
T2’l: (T2°−73’1・・・・・・・・・・
+1) この式より となる。
(Tl-T21: (Tz-Till(T1'+al-
T2'l: (T2°-73'1...
+1) From this formula.

第4図に表示された補正データとは劣化分αを示す、α
は上記比例部分で求める方法と実験的に劣化データをも
とにウェイト付、例えばある常数を乗算して求め、より
劣化データの精度をあげる方法も可能である。
The correction data displayed in Fig. 4 indicates the deterioration amount α, α
In addition to the above-mentioned method of obtaining the proportional part, it is also possible to obtain it with a weight based on the deterioration data experimentally, for example, by multiplying it by a certain constant to further improve the accuracy of the deterioration data.

又、本実施例では側熱電対を2本にした例であるが側熱
電対の本数を変えて同等以上の精度を上げる効果を演算
で求めることも出来る。
Further, in this embodiment, the number of side thermocouples is two, but the effect of increasing the accuracy by changing the number of side thermocouples can also be determined by calculation.

更に又、本発明に係る熱電対としては第2図のように同
一保護管内に主熱電対と側熱電対を封入したもので説明
したが、別々の熱電対で熱的に同等の関連を得る形に設
置した温度検出器で同様の効果を得ることも可能である
Furthermore, although the thermocouple according to the present invention has been described as having a main thermocouple and a side thermocouple enclosed in the same protection tube as shown in Fig. 2, it is possible to obtain the same thermal relationship by using separate thermocouples. It is also possible to obtain a similar effect with a temperature sensor installed in the shape.

本発明は主熱電対と側熱電対の信号をとり込みその初期
データを基準に経時的に得られる現データから主熱電対
の劣化を判定する機能を持った劣化補正装置が容易に得
られる。
According to the present invention, it is possible to easily obtain a deterioration correction device having a function of taking in the signals of the main thermocouple and side thermocouples and determining the deterioration of the main thermocouple from current data obtained over time based on the initial data.

劣化データの利用方法として本発明では熱電対の劣化補
正と熱電対の劣化アラームの例を示しているがこれに関
してはいずれか一方のみを利用してもよい。
In the present invention, examples of thermocouple deterioration correction and thermocouple deterioration alarm are shown as methods of using deterioration data, but only one of them may be used.

以上説明した実施例においては温度検出素子として熱電
対が使用されているが、熱電対の代わりに測温抵抗体又
はサーミスタ等を使用することが出来る。
In the embodiments described above, a thermocouple is used as the temperature detection element, but a resistance temperature detector, a thermistor, or the like can be used instead of the thermocouple.

発明の詳細 な説明したように、本発明によれば、熱処理炉内に配置
された温度検出素子の劣化を容易にしかも的確に検出出
来る効果が得られる。
As described in detail, according to the present invention, it is possible to easily and accurately detect deterioration of a temperature detection element disposed in a heat treatment furnace.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る温度検出器劣化補正装置の一実施
例の全体を示すブロック構成図、第2図(a)  (b
)は熱処理炉に固定された保護管近傍の拡大部分構成図
、第3図は信号処理装置の一実施例を示すブロック構成
図、第4図は本発明の動作フローチャートである。 1・・・熱処理炉、2・・・ヒータ、3・・・信号線、
4・・・信号処理装置、6・・・電源線、11・・・炉
壁、12・・・保護管、13・・・支持部、14・・・
主熱電対、15.16・・・側熱電対、41・・・アナ
ログマルチプレクサ、42・・・操作スイッチ、43・
・・A/Dコンバータ、44・・・!10インタフェイ
ス回路、45・・・μP、46・・・RAM 、47・
・・RAM 、 48・・・D/八へンバータ 特許出願人  大倉電気株式会社 代 理 人  弁理士 熊谷雄太部 第 図 第 図 第 図
FIG. 1 is a block diagram showing the entire embodiment of the temperature detector deterioration correction device according to the present invention, and FIGS. 2(a) (b)
) is an enlarged partial configuration diagram of the vicinity of the protection tube fixed to the heat treatment furnace, FIG. 3 is a block configuration diagram showing one embodiment of the signal processing device, and FIG. 4 is an operation flowchart of the present invention. 1... Heat treatment furnace, 2... Heater, 3... Signal line,
4... Signal processing device, 6... Power line, 11... Furnace wall, 12... Protection tube, 13... Support part, 14...
Main thermocouple, 15. 16... Side thermocouple, 41... Analog multiplexer, 42... Operation switch, 43.
...A/D converter, 44...! 10 interface circuit, 45...μP, 46...RAM, 47.
...RAM, 48...D/Hachiverta Patent applicant: Okura Electric Co., Ltd. Agent: Patent attorney: Yutabe Kumagai

Claims (1)

【特許請求の範囲】[Claims] 主温度検出素子と副温度検出素子の出力信号をとり込み
これらの温度検出素子の設置初期値の関連データを基準
として経時的に変化する同様の関連データから主温度検
出素子の劣化を求め主温度検出素子の補正信号若しくは
アラーム信号を出力することを特徴とした温度検出器劣
化補正装置。
The output signals of the main temperature detection element and the sub temperature detection element are taken in, and the deterioration of the main temperature detection element is determined from similar related data that changes over time using the related data of the initial values of these temperature detection elements as a reference, and the main temperature is determined. A temperature sensor deterioration correction device characterized by outputting a detection element correction signal or an alarm signal.
JP1015844A 1989-01-25 1989-01-25 Temperature detector deterioration correction device Expired - Lifetime JP2750720B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1015844A JP2750720B2 (en) 1989-01-25 1989-01-25 Temperature detector deterioration correction device

Applications Claiming Priority (1)

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JP1015844A JP2750720B2 (en) 1989-01-25 1989-01-25 Temperature detector deterioration correction device

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JPH02195217A true JPH02195217A (en) 1990-08-01
JP2750720B2 JP2750720B2 (en) 1998-05-13

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010116297A (en) * 2008-11-13 2010-05-27 Canon Inc Apparatus for manufacturing optical element, and method for manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946525A (en) * 1982-09-03 1984-03-15 Yokogawa Hokushin Electric Corp Monitor for insulation of thermocouple
JPS6220340U (en) * 1985-07-22 1987-02-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946525A (en) * 1982-09-03 1984-03-15 Yokogawa Hokushin Electric Corp Monitor for insulation of thermocouple
JPS6220340U (en) * 1985-07-22 1987-02-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010116297A (en) * 2008-11-13 2010-05-27 Canon Inc Apparatus for manufacturing optical element, and method for manufacturing the same

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