JPH02187606A - Inspection device for mounted printed board - Google Patents

Inspection device for mounted printed board

Info

Publication number
JPH02187606A
JPH02187606A JP1008221A JP822189A JPH02187606A JP H02187606 A JPH02187606 A JP H02187606A JP 1008221 A JP1008221 A JP 1008221A JP 822189 A JP822189 A JP 822189A JP H02187606 A JPH02187606 A JP H02187606A
Authority
JP
Japan
Prior art keywords
printed circuit
light
circuit board
beam spot
printed board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1008221A
Other languages
Japanese (ja)
Inventor
Kenichi Kaita
健一 戒田
Osamu Yamada
修 山田
Daisuke Nagai
大介 永井
Eiji Okuda
英二 奥田
Hideyuki Kamioka
上岡 秀行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1008221A priority Critical patent/JPH02187606A/en
Publication of JPH02187606A publication Critical patent/JPH02187606A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To satisfactorily check the solder surface after the soldering process by arranging plural light receiving optical systems around the optical axis of an irradiating light thrown to a printed board and scanning a light throwing optical system and light receiving optical systems as one body on the mounted printed board while measuring. CONSTITUTION:A mounted printed board 38 is approximately vertically irradiated by the light from a beam spot light throwing optical system 1, and the reflected light is received by a light receiving optical system group including plural photoelectric conversion elements 2 to 13 arranged around the light throwing optical system 1 in an approximately concentric circle. Filters 26 to 37 and lenses 14 to 25 are provided on rotating body as one body so that brightness information of light having a specific wavelength out of the reflected light from the printed board 38 is made incident on the photoelectric conversion elements 2 to 13. The printed board 38 is moved relatively to this rotating body to detect the ruggedness and the brightness distribution of the mounted printed board 38, and further, parts, solder, lands, resists, etc., on the board are identified by color in accordance with brightness information of light having the specific wavelength.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、実装済みプリント基板の検査装置に関するも
ので、特に細く絞ったビームスポットを用いて実装され
た部品の位置ずれ、ハンダ不良、ハンダブリッヂ等を検
査せんとするものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an inspection device for mounted printed circuit boards, and in particular uses a narrow beam spot to detect misalignment of mounted components, solder defects, solder bridges, etc. It is intended to examine the

従来の技術 従来、実装済みプリント基板の部品の位置ずれ、欠品、
ハンダ不良、ハンダブリッヂ等を自動的に検査する装置
として、マルチスリット光とカメラを用いる方法がある
Conventional technology Conventionally, misalignment of components on mounted printed circuit boards, missing parts, etc.
As a device for automatically inspecting solder defects, solder bridges, etc., there is a method using a multi-slit light and a camera.

以下、図面を参照しながら説明する。第6図において、
55.56はそれぞれスリット光を照射する照射装置で
あシ、54はカメラ、67は実装済みプリント基板であ
る。2つのスリット光を実装済みプリント基板57に対
し上方斜めからそれぞれの光軸が直交するように照射し
、上方よシカメラ54で観察すると三角測量の原理で実
装部品の高さを測定できる。また、このときマルチスリ
ット照射装置55.56を交互に照射することにより、
X、7方向(第6図参照)の部品位置を知ることが出来
る。
This will be explained below with reference to the drawings. In Figure 6,
55 and 56 are irradiation devices that irradiate slit light, 54 is a camera, and 67 is a mounted printed circuit board. By irradiating the mounted printed circuit board 57 with two slit lights obliquely from above so that their respective optical axes are perpendicular to each other and observing it with the upward camera 54, the height of the mounted component can be measured using the principle of triangulation. Also, at this time, by alternately irradiating with the multi-slit irradiation devices 55 and 56,
The position of the parts in the X and 7 directions (see Figure 6) can be known.

発明が解決しようとする課題 しかしながら、上記のような構成では、はんだ付は前に
おける実装部品の位置測定などは可能であるが、はんだ
付は工程後の正確なはんだ面の検査は困難である。なぜ
なら、はんだ面は鏡面に近いため、はんだ面の向きとカ
メラの位置関係によっては、反射光が強過ぎてカメラが
飽和してしまう場合や、逆に反射光か弱過ぎて検出でき
ない場合が生じてしまうからである。
Problems to be Solved by the Invention However, with the above configuration, although it is possible to measure the position of the mounted component before soldering, it is difficult to accurately inspect the solder surface after the soldering process. This is because the solder surface is close to a mirror surface, so depending on the orientation of the solder surface and the position of the camera, the reflected light may be too strong and saturate the camera, or conversely, the reflected light may be too weak to be detected. This is because

課題を解決するだめの手段 回転1駆動される回転体と、その回転体に対して相対的
に検査すべきプリント基板を移動せしめる手段と、前記
回転体の回転中心を中心とする略凹−円周上に位置し、
それぞれ前記プリント基板に略垂直な方向よりビームス
ポットを照射し、そのビームスポットが前記回転体の回
転に伴って順次プリント基板を走査するよう前記回転体
上に配置された複数のビームスポット発生手段と、前記
回転体上にそれぞれの前記ビームスポットを中心として
放射状に配置され、前記プリント基板よりの前記ビーム
スポア)の反射光から互いに異なる複6 ページ 数の波長の光をそれぞれ分離通過せしめる複数の波長分
離手段と、その分離されたそれぞれの波長の反射光を受
光し、その受光位置に応じた出力すなわち距離に対応す
る出力と、前記特定波長分離手段によシ得られるそれぞ
れの波長光の受光エネルギーすなわち明るさに対応する
量を出力する、波長ごとの高さ及び輝度情報を出力する
複数の光電変換手段を備えたことを特徴とする実装済み
プリント基板の検査装置。
Means for Solving the Problems Rotation 1 A rotary body driven by rotation 1, a means for moving a printed circuit board to be inspected relative to the rotary body, and a substantially concave circle centered on the center of rotation of the rotary body. Located on the circumference,
a plurality of beam spot generating means disposed on the rotating body so that each beam spot is irradiated with a beam spot from a direction substantially perpendicular to the printed circuit board, and the beam spot sequentially scans the printed circuit board as the rotating body rotates; , a plurality of wavelength separations arranged radially on the rotary body around each of the beam spots, and for separating and passing light of different wavelengths from the reflected light of the beam spores from the printed circuit board, respectively; a means for receiving the separated reflected light of each wavelength, an output corresponding to the receiving position, that is, an output corresponding to the distance, and a received light energy of each wavelength light obtained by the specific wavelength separating means, that is, 1. An inspection device for a mounted printed circuit board, comprising a plurality of photoelectric conversion means for outputting height and luminance information for each wavelength, which outputs an amount corresponding to brightness.

作  用 上記構成によれは、ビームスポットの反射光を受光する
光電変換素子を前記ビームスポットの周囲に複数個配置
しているため、はんだ面の向きにより反射光が変化して
もそれに対応して前記反射光を受光することができ、そ
れによシ実装済みプリント基板の凹凸、及び輝度分布を
知ることができ、あらかじめ分かっている前面プリント
基板の凹凸の正しい情報と比較することにより、実装済
みプリント基板の検査を行うことが出来る。さらに、特
定波長の光の輝度情報を得ることによシ、61・−ノ 色情報を得ることが出来、実装済みプリント基板上の部
品、ハンダ、ランド、レジストなどを色によって識別が
可能となり、さらに、検査精度を上げることが出来る。
Effect The reason for the above structure is that a plurality of photoelectric conversion elements that receive reflected light from the beam spot are arranged around the beam spot, so even if the reflected light changes depending on the orientation of the solder surface, it is not possible to respond accordingly. The reflected light can be received, and the unevenness and brightness distribution of the mounted printed circuit board can be known from it, and by comparing with the correct information of the unevenness of the front printed circuit board that is known in advance, the mounted printed circuit board can be detected. It is possible to inspect the board. Furthermore, by obtaining information on the brightness of light at a specific wavelength, color information can be obtained, making it possible to identify components, solder, lands, resists, etc. on mounted printed circuit boards by color. Furthermore, inspection accuracy can be improved.

実施例 以下、本発明の一実施例の実装済みプリント基板の検査
装置について、図面を参照しながら説明する。
Embodiment Hereinafter, a mounted printed circuit board inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.

第1図は、ビームスポット投光用光学系と受光用光学系
群が一体となった単位検査装置の斜視図である。1は、
例えば白色光を使ったビームスポット投光用光学系、2
6.29.32.35は前記ビームスポット反射光のう
ちR光のみ通過させるフィルター、27.30,33.
36は、G光のみ通過させるフィルター、28,31,
34゜37は、B光のみ通過させるフィルターである。
FIG. 1 is a perspective view of a unit inspection device in which a beam spot projecting optical system and a light receiving optical system group are integrated. 1 is
For example, an optical system for projecting a beam spot using white light, 2
6.29.32.35 is a filter that allows only the R light to pass among the beam spot reflected light; 27.30, 33.
36 is a filter that allows only G light to pass; 28, 31,
34° and 37 are filters that allow only B light to pass through.

2〜13は前記ビームスポットの反射面からの反射光の
うち、前記フィルターを通ったそれぞれの特定波長の光
を受光し、その反射面の高さ及び輝度情報を得るだめの
半導体装置検出素子のような7 ヘ−ノ 光電変換素子である。この光電変換素子として、PSD
すなわち、ある所定の長さを有し、ビームスポットの照
射位置に応じて複数の出力端子の出力が相対的に変化す
るものを用いているが、これにはCCDラインセンサー
などを用いることも可能である。これにより、光電変換
素子によって得られるR、G、Bそれぞれの輝度情報よ
シ、その点の色情報を得ることができ高さ情報のみでは
判別が困難なチップ部品の種類とか、レジスト部と銅箔
部の分離などが良好に行える。14〜25は、三角測量
を行うために実装済みプリント基板からの反射ビームス
ポットに前記光電変換素子2〜13上にそれぞれ結像す
るだめのレンズもしくはレンズ群である。これらの光電
変換素子及びレンズは、ビームスポットの光軸を中心と
する同一円周上に等間隔に配置されている。3sは、実
装済みプリント基板、39はビームスポットであシ前記
実装済みプリント基板38に対しほぼ垂直に照射されて
いる。
2 to 13 are semiconductor device detection elements for receiving the light of each specific wavelength that has passed through the filter out of the reflected light from the reflecting surface of the beam spot, and obtaining information on the height and brightness of the reflecting surface; This is a 7-Heno photoelectric conversion element. As this photoelectric conversion element, PSD
In other words, we use a device that has a certain predetermined length and that outputs from multiple output terminals change relatively depending on the irradiation position of the beam spot, but it is also possible to use a CCD line sensor etc. It is. As a result, it is possible to obtain not only the brightness information of R, G, and B obtained by the photoelectric conversion element, but also the color information of that point. Separation of foil parts can be performed well. Reference numerals 14 to 25 designate lenses or lens groups that form images on the photoelectric conversion elements 2 to 13, respectively, on the reflected beam spots from the mounted printed circuit boards in order to perform triangulation. These photoelectric conversion elements and lenses are arranged at equal intervals on the same circumference centered on the optical axis of the beam spot. 3s is a mounted printed circuit board, and 39 is a beam spot that is irradiated almost perpendicularly to the mounted printed circuit board 38.

第2図は検査装置全体の斜視図である。41〜44は、
第1図で示した光学系群が一体となった単位検査装置で
ある。40はモーターなどの駆動源(図示せず)によυ
はぼ一定速度で回転1駆動される回転円盤である。単位
検査装置41〜44は、回転円盤40の中心に対し同一
円周」二に等間隔に回転円盤40の回転に伴って、前記
ビームスポットが順次実装済みプリント基板38を走査
するよう配置されている。従って、実装済みプリント基
板38を第2図に示すX、7.z座標系のy方向へ順次
移動することにより実装済みプリント基板38の全体を
ビームスポットにより走査することが可能となる。45
は現在単位検査装置43が走査している軌跡であり、4
6は直前に単位検査装置42で走査した軌跡を示してい
る。これにより、無駄な時間がなく最小時間で検査を終
了することが出来る。
FIG. 2 is a perspective view of the entire inspection device. 41 to 44 are
This is a unit inspection device in which the optical system group shown in FIG. 1 is integrated. 40 is driven by a drive source (not shown) such as a motor.
It is a rotating disk that is driven one rotation at a nearly constant speed. The unit inspection devices 41 to 44 are arranged so that the beam spots sequentially scan the mounted printed circuit board 38 as the rotating disk 40 rotates at equal intervals on the same circumference with respect to the center of the rotating disk 40. There is. Therefore, the mounted printed circuit board 38 is shown in FIG. By sequentially moving in the y direction of the z coordinate system, it becomes possible to scan the entire mounted printed circuit board 38 with the beam spot. 45
is the trajectory currently being scanned by the unit inspection device 43, and 4
6 indicates the locus scanned by the unit inspection device 42 immediately before. This allows the inspection to be completed in the minimum amount of time without wasting time.

第3図は、光電変換素子からの照射位置により相対的に
値が変化する2つの電流出力を演算して高さ及び輝度情
報を得るだめの本装置の電気回路を示している。67は
R波長光用の電気回路を示91\−ノ しており、以下に説明する。59は光電変換素子2の2
つの電流出力から割り算輝67を通して高さ情報を得、
また、前記゛2つの電流出力の和よりオペアンプ68を
通して輝度情報を得ている高さ及び輝度情報検出回路で
ある。60,61.62も前記高さ及び輝度情報・検出
回路b9と同様の検出回路であり光電変換素子5,8.
11に接続されている。この場合、一つの波長光に対し
て光電変換素子を4個使用しているため高さ及び輝度情
報も一つの光点に対して4個出力される。63は、4個
の高さ情報から一つの高さ情報を得る高さ情報選択回路
であり、選択方法として、例えば4個のうちの最大レベ
ルと最小レベルを除いた残りの2つの平均を収る方法が
ある。64は、4個の輝度情報から一つの輝度情報を得
る輝度情報選択回)洛であり、選択方法として、例えば
4個のうちの最大レベルを取る方法がある。このように
選択回’1′’(’(G 3 、 (34はRA M 
66の節約及び前処理をつけだことによるC P ’U
 e 6の負荷軽減の目的で設けられたものである。6
8はG波長光用の電気回10]\−2 路であり構成は67に準する。69はB波長光用の電気
回路であり、同様な構成である。前記三組の電気回路6
7.68.69からの出力は、CPU66のバスに接続
されているRAMesへ送られる。前記CPσ66では
、前記RAM65より読み出された高さ及び輝度情報と
、予め基準となる実装済みプリント基板から得られて予
め記憶されている高さ及び輝度情報とを比較し、被検査
実装済みプリント基板の良否を決定する。
FIG. 3 shows an electric circuit of the present device which calculates two current outputs whose values change relatively depending on the irradiation position from the photoelectric conversion element to obtain height and brightness information. Reference numeral 67 indicates an electric circuit for R wavelength light, which will be explained below. 59 is 2 of photoelectric conversion element 2
Height information is obtained from the two current outputs through the division brightness 67,
Further, it is a height and brightness information detection circuit which obtains brightness information from the sum of the two current outputs through an operational amplifier 68. 60, 61, 62 are also detection circuits similar to the height and brightness information/detection circuit b9, and the photoelectric conversion elements 5, 8.
11. In this case, since four photoelectric conversion elements are used for one wavelength of light, four pieces of height and brightness information are output for one light spot. 63 is a height information selection circuit that obtains one piece of height information from four pieces of height information, and the selection method is, for example, to remove the maximum level and minimum level of the four pieces of height information and collect the average of the remaining two. There is a way to do it. Reference numeral 64 indicates a brightness information selection time for obtaining one brightness information from four pieces of brightness information, and a selection method includes, for example, a method of taking the maximum level among the four pieces of brightness information. In this way, selection times '1''('(G 3, (34 is RAM
C P 'U by adding 66 savings and preprocessing
This was provided for the purpose of reducing the load on the e6. 6
8 is an electric circuit 10]\-2 for G wavelength light, and its configuration is similar to 67. Reference numeral 69 denotes an electric circuit for B wavelength light, which has a similar configuration. The three sets of electric circuits 6
The output from 7.68.69 is sent to the RAMes connected to the CPU 66 bus. The CPσ66 compares the height and brightness information read out from the RAM 65 with the height and brightness information that has been obtained and stored in advance from the mounted printed circuit board serving as a reference, and determines the mounted printed circuit board to be inspected. Determine the quality of the board.

第4図は、もう一つの実施例であるビームスポット投光
用光学系と受光用光学系が一体となった単位検査装置の
斜視図である。71は、例えばレザーを使ったビームス
ポット投光用光学系、72.73.74.75は前記ビ
ームスポットの反射面からの反射光を受光し、その反射
面の高さ及び輝度情報を得るだめの半導体装置検出装置
PSDまたはCCDラインセンサーのようなものである
。76、了7,78.79は三角測量を行うだめに実装
済みプリント基板からの反射光を前記光電変換素子了2
.73.74.76上にそれ11 へ−2 それ結像するだめの、レンズもしくはレンズ群である。
FIG. 4 is a perspective view of another embodiment of a unit inspection device in which a beam spot projecting optical system and a light receiving optical system are integrated. 71 is an optical system for projecting a beam spot using, for example, a laser, and 72, 73, 74, 75 is a device for receiving the reflected light from the reflecting surface of the beam spot and obtaining information on the height and brightness of the reflecting surface. It is like a semiconductor device detection device PSD or CCD line sensor. 76, 7, 78, 79, in order to perform triangulation, the reflected light from the mounted printed circuit board is converted into the photoelectric conversion element 2.
.. 73. 74. 76 It 11 To - 2 It is the lens or lens group that is used to form an image.

これらの光電変換素子及びレンズ群は、ピムスポソト7
1の光軸周辺に配置され、本実施例では4mをビームス
ポットを中心とする同一円周上に等間隔に配置しである
。この様な構成の単位検査装置のうち、レーザー波長が
R波長、G波長、B波長のものを用意する。
These photoelectric conversion elements and lens groups are
In this embodiment, 4 m long beams are arranged around the optical axis of 1, and are arranged at equal intervals on the same circumference with the beam spot as the center. Among the unit inspection apparatuses having such a configuration, those having laser wavelengths of R wavelength, G wavelength, and B wavelength are prepared.

第6図は、第2の実施例の検査装置全体の斜視図である
。81,84,87.90は、R波長のレーザーを使っ
た前記単位検査装置、82,85゜88.91は、G波
長のレーザーを使った前記単位検査装置、83.86.
89.92は、B波長のレーザーを使った前記単位検査
装置である。8゜はモーターなどの駆動源(図示せず)
によシはぼ一定速度で回転駆動される回転円盤である。
FIG. 6 is a perspective view of the entire inspection apparatus of the second embodiment. 81, 84, 87.90 are the unit inspection devices using an R wavelength laser; 82, 85; 88.91 are the unit inspection devices using a G wavelength laser; 83.86.
89.92 is the unit inspection device using a B wavelength laser. 8° is a drive source such as a motor (not shown)
The yoshi is a rotating disk that is driven to rotate at a nearly constant speed.

単位検査装置81〜92は、回転円盤8oの回転中心に
対し同一円周上に、R,G、B波長の各レーザを1組と
して、各組が等間隔になるよう配置され、回転円盤8o
の回転に伴って、R,G、Hの前記ビームスポットが順
次実装済みプリント基板38上の同一軌跡を走査するよ
う配置されている。
The unit inspection devices 81 to 92 are arranged on the same circumference with respect to the center of rotation of the rotating disk 8o, with each set of lasers of R, G, and B wavelength being arranged at equal intervals.
The R, G, and H beam spots are arranged so as to sequentially scan the same locus on the mounted printed circuit board 38 as the board rotates.

従って、実装済みプリント基板38を第5図に示す!、
7.Z座標系のy方向へ、1組の単位検査装置の走査が
完了する毎に間欠的に順次移・助することによシ実装済
みプリント基板38の全体をRlG、Bの各ビームスポ
ットにより走査することが可能となる。93は現在単位
検査装置87,88゜89が走査している軌跡であり、
94は直前に単位検査装置84,85.86で走査した
軌跡を示している。すなわち、R,G、B波長レーザー
を使った3種類の単位検査装置が同一の検査点を走査し
、特定波長ごとの高さ及び輝度情報を得ることが出来る
Therefore, the mounted printed circuit board 38 is shown in FIG. 5! ,
7. The entire mounted printed circuit board 38 is scanned by each beam spot of RlG and B by intermittently sequentially moving and assisting in the y direction of the Z coordinate system each time the scanning of one set of unit inspection devices is completed. It becomes possible to do so. 93 is the trajectory currently being scanned by the unit inspection devices 87, 88, 89,
Reference numeral 94 indicates the trajectory scanned by the unit inspection devices 84, 85, and 86 immediately before. That is, three types of unit inspection devices using R, G, and B wavelength lasers can scan the same inspection point and obtain height and brightness information for each specific wavelength.

第2の実施例の光電変換素子からの照射位置により相対
的に値が変化する2つの電流出力を演算して高さ及び輝
度情報を得るための電気回路は、第1の実施例と同様な
ので説明を省略する。
The electric circuit for obtaining height and brightness information by calculating two current outputs whose values change relatively depending on the irradiation position from the photoelectric conversion element of the second embodiment is the same as that of the first embodiment. The explanation will be omitted.

発明の効果 以上のように本発明によれば、ビームスポットを実装済
みプリント基板へほぼ垂直に照射し、そ13 ・\−/ の光軸のまわシに受光光学系を複数個配置し、それら照
射、受光光学系が一体となって実装済みプリント基板上
を計測しながら走査し被検査点の高さ情報、輝度情報、
色情報を得ることにより、従来の検査機では困難だった
はんだ面の検査が良好に行えるようになった。
Effects of the Invention As described above, according to the present invention, a beam spot is irradiated almost perpendicularly to a mounted printed circuit board, and a plurality of light receiving optical systems are arranged around the optical axis of the printed circuit board. The irradiation and light reception optical systems work together to measure and scan the mounted printed circuit board, and obtain height information, brightness information,
Obtaining color information has made it possible to better inspect solder surfaces, which was difficult to do with conventional inspection machines.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実装済みプリント基板検査装置の一実
施例における白色ビームスポット投光用光学系と受光光
学系が一体となった一単位検査装置の斜視図、第2図は
同実施例の要部を示す斜視図、第3図は同実施例の電気
回路のブロック図、第4図は第2の実施例の単位検査装
置の斜視図、第6図は同実施例の要部を示す斜視図、第
6図は従来のプリント基板検査装置の斜視図である。 1.71・・・・・・ビームスポット投光用光学系、2
〜13.72〜75・・・・・・光電変換素子、14〜
25゜76〜79・・・・・・レンズ、26〜37・・
・・・・特定波長通過用フィルター群、38・・・・・
・被検査プリント基板、39・・・・・・ビームスポッ
ト、40.80・・・・・・回14 \ 7 転円盤、41〜44.81〜92・・・・・・単位検査
装置、54・・・・・・カメラ、55.56・・・・・
・スリット光投光用照射装置、59,60,61.62
・・・・・・高さ及び輝度検出回路、63・・・・・・
高さ情報選択回路、64・・・・・・輝度情報選択回路
、65・・・・・・RAM、ee・・・・・・C20
FIG. 1 is a perspective view of a single unit inspection device in which a white beam spot projecting optical system and a light receiving optical system are integrated in one embodiment of the mounted printed circuit board inspection device of the present invention, and FIG. 2 is the same embodiment. 3 is a block diagram of the electric circuit of the same embodiment, FIG. 4 is a perspective view of the unit inspection device of the second embodiment, and FIG. 6 is a perspective view of the main part of the same embodiment. FIG. 6 is a perspective view of a conventional printed circuit board inspection device. 1.71...Optical system for beam spot projection, 2
~13.72~75...Photoelectric conversion element, 14~
25°76~79...Lens, 26~37...
... Filter group for passing specific wavelength, 38 ...
- Printed circuit board to be inspected, 39...Beam spot, 40.80...Times 14\7 Rotating disk, 41-44.81-92...Unit inspection device, 54 ...Camera, 55.56...
・Irradiation device for slit light projection, 59, 60, 61.62
...Height and brightness detection circuit, 63...
Height information selection circuit, 64...Brightness information selection circuit, 65...RAM, ee...C20

Claims (2)

【特許請求の範囲】[Claims] (1) 回転駆動される回転体と、その回転体に対して
相対的に検査すべきプリント基板を移動せしめる手段と
、前記回転体の回転中心を中心とする略同一円周上に位
置し、それぞれ前記プリント基板に略垂直な方向よりビ
ームスポットを照射し、そのビームスポットが前記回転
体の回転に伴って順次プリント基板を走査するよう前記
回転体上に配置された複数のビームスポット発生手段と
、前記回転体上にそれぞれの前記ビームスポットを中心
として放射状に配置され、前記プリント基板よりの前記
ビームスポットの反射光から互いに異なる複数の波長の
光をそれぞれ分離通過せしめる複数の特定波長分離手段
と、その特定波長分離手段により分離されたそれぞれの
波長の反射光を受光し、その受光位置に応じた出力と、
受光エネルギーに対応する量を出力する、複数の光電変
換手段を備えたことを特徴とする実装済みプリント基板
の検査装置。
(1) A rotary body that is driven to rotate, a means for moving a printed circuit board to be inspected relative to the rotary body, and a means for moving a printed circuit board to be inspected relative to the rotary body, located on substantially the same circumference around the center of rotation of the rotary body, a plurality of beam spot generating means disposed on the rotating body so that each beam spot is irradiated with a beam spot from a direction substantially perpendicular to the printed circuit board, and the beam spot sequentially scans the printed circuit board as the rotating body rotates; , a plurality of specific wavelength separation means arranged radially on the rotating body around each of the beam spots, and for separating and passing light of a plurality of different wavelengths from the light reflected from the beam spot from the printed circuit board; , receives the reflected light of each wavelength separated by the specific wavelength separation means, and outputs according to the receiving position;
A mounted printed circuit board inspection device characterized by comprising a plurality of photoelectric conversion means that output an amount corresponding to received light energy.
(2) 回転駆動される回転体と、その回転体に対して
相対的に検査すべきプリント基板を移動せしめる手段と
、前記回転体の回転中心を中心とする略同一円周上に位
置し、それぞれ前記プリント基板に略垂直な方向よりビ
ームスポットを照射し、そのビームスポットが前記回転
体の回転に伴って順次プリント基板を走査するよう前記
回転体上に配置された複数組の互いに波長の異なるビー
ムを発生する複数のビームスポット発生手段と、前記回
転体上にそれぞれの前記ビームスポットを中心として放
射状に配置され、前記プリント基板よりの前記ビームス
ポットの各反射光を受光し、その受光位置に応じた出力
と、受光エネルギーに対応する量を出力する、複数の光
電変換手段を備えたことを特徴とする実装済みプリント
基板の検査装置。
(2) a rotary body that is rotationally driven; a means for moving a printed circuit board to be inspected relative to the rotary body; A plurality of sets of beams having different wavelengths are arranged on the rotating body so that each beam spot is irradiated from a direction substantially perpendicular to the printed circuit board, and the beam spot sequentially scans the printed circuit board as the rotating body rotates. a plurality of beam spot generating means for generating beams; and a plurality of beam spot generating means arranged radially on the rotary body with each of the beam spots as a center, receiving each reflected light of the beam spot from the printed circuit board, and moving the beam spot to the light receiving position. 1. An inspection device for a mounted printed circuit board, comprising a plurality of photoelectric conversion means that output an output corresponding to the received light energy and an amount corresponding to the received light energy.
JP1008221A 1989-01-17 1989-01-17 Inspection device for mounted printed board Pending JPH02187606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1008221A JPH02187606A (en) 1989-01-17 1989-01-17 Inspection device for mounted printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1008221A JPH02187606A (en) 1989-01-17 1989-01-17 Inspection device for mounted printed board

Publications (1)

Publication Number Publication Date
JPH02187606A true JPH02187606A (en) 1990-07-23

Family

ID=11687142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1008221A Pending JPH02187606A (en) 1989-01-17 1989-01-17 Inspection device for mounted printed board

Country Status (1)

Country Link
JP (1) JPH02187606A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05187833A (en) * 1992-01-10 1993-07-27 Kubota Corp Three-dimensional shape measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05187833A (en) * 1992-01-10 1993-07-27 Kubota Corp Three-dimensional shape measuring instrument

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