JPH021860Y2 - - Google Patents

Info

Publication number
JPH021860Y2
JPH021860Y2 JP15839185U JP15839185U JPH021860Y2 JP H021860 Y2 JPH021860 Y2 JP H021860Y2 JP 15839185 U JP15839185 U JP 15839185U JP 15839185 U JP15839185 U JP 15839185U JP H021860 Y2 JPH021860 Y2 JP H021860Y2
Authority
JP
Japan
Prior art keywords
shroud
stainless steel
clad
aluminum
cooling fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15839185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265829U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15839185U priority Critical patent/JPH021860Y2/ja
Publication of JPS6265829U publication Critical patent/JPS6265829U/ja
Application granted granted Critical
Publication of JPH021860Y2 publication Critical patent/JPH021860Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15839185U 1985-10-15 1985-10-15 Expired JPH021860Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15839185U JPH021860Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15839185U JPH021860Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Publications (2)

Publication Number Publication Date
JPS6265829U JPS6265829U (enrdf_load_stackoverflow) 1987-04-23
JPH021860Y2 true JPH021860Y2 (enrdf_load_stackoverflow) 1990-01-17

Family

ID=31081834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15839185U Expired JPH021860Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPH021860Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6265829U (enrdf_load_stackoverflow) 1987-04-23

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