JPH02183407A - Magnetic head and its manufacture - Google Patents

Magnetic head and its manufacture

Info

Publication number
JPH02183407A
JPH02183407A JP1003157A JP315789A JPH02183407A JP H02183407 A JPH02183407 A JP H02183407A JP 1003157 A JP1003157 A JP 1003157A JP 315789 A JP315789 A JP 315789A JP H02183407 A JPH02183407 A JP H02183407A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic material
head
alloy
permeability ferrite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1003157A
Other languages
Japanese (ja)
Other versions
JPH0827907B2 (en
Inventor
Koichi Kugimiya
公一 釘宮
Mitsuo Satomi
三男 里見
健 広田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1003157A priority Critical patent/JPH0827907B2/en
Priority to EP90100357A priority patent/EP0378160B1/en
Priority to DE69014210T priority patent/DE69014210T2/en
Priority to KR1019900000232A priority patent/KR930002479B1/en
Publication of JPH02183407A publication Critical patent/JPH02183407A/en
Publication of JPH0827907B2 publication Critical patent/JPH0827907B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To prevent a head output drop caused by an uneven abrasion, and also, to reduce pseudo gap noise by forming an interface of high magnetic permeability ferrite and an alloy magnetic material to an uneven shape in a metal-in gap head. CONSTITUTION:A magnetic core is constituted of high magnetic permeability ferrite being a sintered body whose average grain size is <=5mum desirably and an alloy magnetic material, and also, the alloy magnetic material is placed in the vicinity of a head gap, and in an interface of the high magnetic permeability ferrite and the alloy magnetic material, an uneven part whose average roughness is >=0.12mum is allowed to exist. By this uneven part in the interface, pseudo gap noise is reduced remarkably. Also, by executing a heat treatment in an atmosphere containing oxygen as impurity gas at a temperature of 800 deg.C to 1,000 deg.C in the manufacturing process, the uneven abrasiveness is enhanced.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は磁気ヘッドおよびその製造方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a magnetic head and a method of manufacturing the same.

従来の技術 従来より磁気ヘッド用コア材として、加工性、耐摩耗性
が良いという特長からフェライトが広く使用されている
が、飽和磁束密度Bsが合金材料に比べて30〜50%
低い。従って、近年登場してきた高抗磁力の高密度記録
媒体に使用した場合、ヘッドコア材料の磁気飽和が問題
となり、このような観点から、高密度記録媒体の対応ヘ
ッドとして、センダストや非晶質の合金材料をヘッドギ
ャップ近傍に配したいわゆるメタルインギャップヘッド
が実用に供されている。
Conventional technology Ferrite has been widely used as a core material for magnetic heads due to its good workability and wear resistance, but its saturation magnetic flux density Bs is 30 to 50% that of alloy materials.
low. Therefore, when used in high-density recording media with high coercive force that have appeared in recent years, magnetic saturation of the head core material becomes a problem. A so-called metal-in-gap head in which a material is placed near the head gap is in practical use.

このヘッドの一般的なテープ摺動面には問題がある。す
なわち、このヘッドを長時間、例えば100時閏以上走
行させるとヘッド出力が低下する。
There are problems with the typical tape sliding surface of this head. That is, when this head is run for a long time, for example, over 100 hours, the head output decreases.

出力の低下はヘッドのテープ摺動画の部分のフェライト
と合金材料の間に数百オングストローム段差、いわゆる
偏摩耗が発生しており、スペーシングロスによる出力低
下を生じている。
The decrease in output is due to a step of several hundred angstroms, so-called uneven wear, occurring between the ferrite and alloy material in the tape sliding area of the head, resulting in a decrease in output due to spacing loss.

又、裏通(illラフエライト合金磁性材との界面によ
る疑似ギャップノイズが非常に大きくその改善が望まれ
ている。
In addition, the pseudo gap noise caused by the interface with the rough ferrite alloy magnetic material is very large, and its improvement is desired.

発明が解決しようとする課題 本発明の目的は、メタルインギャップヘッドに於て、長
時間テープ走行により偏摩耗が発生し、その結果スペー
シングロスによりヘッド出力が低下するのを防止するこ
とである。更に疑似ギャップノイズを低減することであ
る。
Problems to be Solved by the Invention An object of the present invention is to prevent uneven wear that occurs in a metal-in-gap head due to long-time tape running, and as a result, a decrease in head output due to spacing loss. . Furthermore, the purpose is to reduce pseudo gap noise.

課題を解決するための手段 高透磁率フェライトと合金磁性材とで磁気コアを構成し
、かつ前記合金磁性材をヘッドギャップ近傍に配すると
ともに、前記高透磁率フェライトと合金磁性材との界面
に平均粗度0.12μm以上の凹凸を存在させる。
Means for Solving the Problems A magnetic core is constituted by a high magnetic permeability ferrite and an alloy magnetic material, and the alloy magnetic material is arranged near the head gap, and at the interface between the high magnetic permeability ferrite and the alloy magnetic material. Provide unevenness with an average roughness of 0.12 μm or more.

また、高透磁率フェライトとセンダスト合金磁性材で磁
気コアを構成した磁気ヘッドの製造方法において、当該
両材料界面となる前記高透磁率フェライト表面に平均粗
度0.12μm以上の凹凸を形成し、その上に前記セン
ダスト合金磁性材の層を形成しヘッドギャップ近傍に配
するとともに、その製造工程中で、800℃以上100
0℃以下の温度で不純物ガスとして酸素を含む雰囲気中
で熱処理する。
Further, in a method of manufacturing a magnetic head in which a magnetic core is made of a high magnetic permeability ferrite and a Sendust alloy magnetic material, an unevenness having an average roughness of 0.12 μm or more is formed on the high magnetic permeability ferrite surface that is an interface between the two materials, On top of that, a layer of the Sendust alloy magnetic material is formed and placed near the head gap.
Heat treatment is performed at a temperature of 0° C. or lower in an atmosphere containing oxygen as an impurity gas.

作用 界面での凹凸によって、疑似ギャップノイズが大幅に改
善される。
The roughness at the working interface significantly improves pseudogap noise.

また、上記製造方法によれば、熱処理によりセンダスト
合金磁性材の結晶粒界付近に高い酸素濃度の相が形成さ
れ、母相の合金磁性材より耐摩耗性が向上する結果、フ
ェライトとセンダスト合金磁性材の偏摩耗がを改善され
る。
In addition, according to the above manufacturing method, a phase with a high oxygen concentration is formed near the grain boundaries of the sendust alloy magnetic material by heat treatment, and as a result, the wear resistance is improved compared to the parent phase alloy magnetic material. Uneven wear of materials is improved.

実施例1 フェライト材料を基板とし、その表面を種々の粗さのダ
イアモンドカップで研削した。これらの表面の平均面粗
さは0.O1以下、0.06.0゜09.0.12.0
.18.0.23μtnであった。この上に、センダス
ト合金(Fe、Si、AI金合金をターゲットとして、
真空槽内を約5X10−’T。
Example 1 A ferrite material was used as a substrate, and its surface was ground with diamond cups having various roughnesses. The average surface roughness of these surfaces is 0. O1 or less, 0.06.0°09.0.12.0
.. It was 18.0.23 μtn. On top of this, targeting Sendust alloy (Fe, Si, AI gold alloy),
Approximately 5X10-'T inside the vacuum chamber.

rrに排気した後、Arガスを導入して1.5X10−
’Torrを保持しつつ、センダスト合金膜をスパッタ
蒸着した0次にノツチ加工した後800℃〜1000℃
の温度で50〜200pρ霧の微量の酸素を含有する窒
素中で20時以上理した0次にノツチにガラスを充填し
巻線窓を加工した後、ギャップ突合せ面をダイヤモンド
ペーストで鏡面に加工した。次に、この面にギャップス
ペーサ材を所定の厚みにスパッタして、ギャップ形成用
の片側コアを完成した。
After exhausting to rr, Ar gas was introduced to 1.5X10-
'While maintaining Torr, sendust alloy film is sputter-deposited and 0-order notch processed at 800℃~1000℃.
It was heated for more than 20 hours in nitrogen containing a trace amount of oxygen with a mist of 50 to 200 ppr at a temperature of . Next, a gap spacer material was sputtered to a predetermined thickness on this surface to complete a one-sided core for forming a gap.

こうして完成したコアを突合せてギャップ形成を行なっ
た。この一対のバーより切断線に沿って切り出し、ヘッ
ドを完成した。
The cores thus completed were butted together to form a gap. The head was completed by cutting out the pair of bars along the cutting line.

こうして完成したヘッドをVTRデツキに取り付はテー
プを走行させた。200時閏以上ヘッド出力、及びフェ
ライトとセンダスト合金の偏摩耗の測定、さらには疑似
ギャップノイズを測定した結果を第1.2表に示す、な
お、ヘッド出力はテープ走行直後のヘッド出力をOdB
とする。
The thus completed head was attached to a VTR deck and the tape was run. Table 1.2 shows the results of measuring head output over 200 hours, uneven wear of ferrite and Sendust alloy, and pseudo gap noise.Head output is OdB of head output immediately after tape running.
shall be.

第  1  表 (最短記録波長0.51zm) 第  2  表     μm / d B上記の表か
ら、面の平均粗度が0.12μmあれば、いわゆるDA
Tに使用できるノイズレベル22dBが得られることが
わかる。さらに0. 2μmではビデオヘッドに用い得
る30dBに達しており、優れた特性を示している。さ
らに、同時に部分酸化処理を施すことによって、偏摩耗
も大幅に改善されている。
Table 1 (Shortest recording wavelength 0.51zm) Table 2 μm/dB From the above table, if the average roughness of the surface is 0.12μm, the so-called DA
It can be seen that a noise level of 22 dB that can be used for T is obtained. Another 0. At 2 μm, it reaches 30 dB, which can be used in video heads, showing excellent characteristics. Furthermore, by simultaneously performing partial oxidation treatment, uneven wear has been significantly improved.

本発明で、熱処理温度を800℃〜1000℃と限定し
たのは、800℃以下ではセンダスト合金の耐摩耗が十
分でなく偏摩耗が発生し、また1000℃以上ではセン
ダスト合金自身の結晶粒が大きくなって磁気特性が損な
われたり、またセンダスト合金とフェライト間の相互拡
散がおこり、磁気特性が劣化するためである。以上を考
慮すれば900℃付近が最適である。
In the present invention, the heat treatment temperature is limited to 800°C to 1000°C because at temperatures below 800°C, the wear resistance of the sendust alloy is insufficient and uneven wear occurs, and at temperatures above 1000°C, the crystal grains of the sendust alloy itself become large. This is because the magnetic properties are deteriorated due to mutual diffusion between the sendust alloy and the ferrite, and the magnetic properties are deteriorated. Considering the above, a temperature around 900°C is optimal.

酸素濃度については、本発明では50〜200pp献こ
ついて述べたが、1 ppm〜500 ppIllの範
囲であればよい。1 ppm以下では酸素の拡散が十分
に行なわれず、500 ppm以上では表面酸化が起こ
り好ましくない。
Regarding the oxygen concentration, although 50 to 200 ppm has been described in the present invention, it may be in the range of 1 ppm to 500 ppIll. If it is less than 1 ppm, oxygen will not diffuse sufficiently, and if it is more than 500 ppm, surface oxidation will occur, which is not preferable.

又、上記濃度の酸素を含む雰囲気であれば、窒素、アル
ゴン、水素、真空等適宜選択すれば良い。
Further, as long as the atmosphere contains oxygen at the above concentration, nitrogen, argon, hydrogen, vacuum, etc. may be selected as appropriate.

なお、センダスト合金組成は、Fe−5i−AI!成で
あれば磁性を損なわない範囲でいずれも効果がある。
In addition, the sendust alloy composition is Fe-5i-AI! Any of these is effective as long as it does not impair magnetism.

又耐摩耗性の良好な部分は、例えばせいぜい100ミク
ロン程度であるので本発明の様にセンダスト合金磁性材
をヘッドギャップ近傍に配してなる磁気ヘッドに於いて
は、研磨量を考慮してもセンダスト合金部分の厚みは1
00ミクロン以下となるので、全てのセンダスト合金部
の耐摩耗性が良好である。従って熱処理の時期は基本的
にはいっでもよいが、熱処理によるガラスとの反応やゆ
るみを考慮して本願実施例のようにノツチ加工後行なう
のが望ましい。
In addition, since the area with good wear resistance is, for example, about 100 microns at most, in a magnetic head in which a sendust alloy magnetic material is arranged near the head gap as in the present invention, even when considering the amount of polishing, The thickness of the sendust alloy part is 1
00 microns or less, the wear resistance of all sendust alloy parts is good. Therefore, the heat treatment can basically be carried out at any time, but in consideration of the reaction with the glass and the loosening caused by the heat treatment, it is preferable to carry out the heat treatment after notching as in the embodiment of the present application.

なお、本発明のヘッドのセンダスト合金部を分析した所
、特に結晶粒界付近に高い酸素濃度の相が、存在する事
が分かった。
An analysis of the sendust alloy part of the head of the present invention revealed that a phase with a high oxygen concentration was present particularly near the grain boundaries.

実施例2 上記の例において高透磁率フェライト焼結体材料に多結
晶体を用いた。その平均粒径は各々約1.3.5.8.
12μmであった。研削後、熱燐酸にてエツチングを行
なったところ、その粒径に応じた凹凸が生じていた。そ
の粗度は各々0.16/1. 0. 42/3=0. 
14/1. 0. 615=0. 12/1.0.81
/8=0.10/L1.1/12=0.92/lになっ
ていた。ここで上段は面粗度μm、下段は平均粒径μm
である。
Example 2 In the above example, a polycrystalline body was used as the high magnetic permeability ferrite sintered body material. The average particle size is approximately 1.3.5.8.
It was 12 μm. After grinding, etching was performed using hot phosphoric acid, and as a result, unevenness was generated depending on the particle size. The roughness is 0.16/1. 0. 42/3=0.
14/1. 0. 615=0. 12/1.0.81
/8=0.10/L1.1/12=0.92/l. Here, the upper row is the surface roughness μm, and the lower row is the average grain size μm.
It is.

ノイズを測定したところ、0.12μm以上の面粗度以
上ではやはり20dB以上のS/Nが得られ、良好な結
果を示していた。
When noise was measured, a S/N of 20 dB or more was obtained for surface roughness of 0.12 μm or more, indicating a good result.

発明の効果 本発明によれば、フェライトと合金磁性材の界面に0.
12μm以上の凹凸を形成しておくことで疑似ギャップ
ノイズがも大幅に改善される。
Effects of the Invention According to the present invention, the interface between the ferrite and the alloy magnetic material has 0.
By forming irregularities of 12 μm or more, pseudo gap noise is also significantly improved.

また、製造工程中で、800℃以上1000℃以下の温
度で不純物ガスとして酸素を含む雰囲気中で熱処理する
ことにより、合金磁性材の耐摩耗性が改善されるので、
テープ走行によるフェライトと合金磁性材料間の偏摩耗
がほとんど発生せず、その結果ヘッド出力低下がなく安
定したヘッド出力が得られる。
In addition, the wear resistance of the alloy magnetic material is improved by heat-treating it in an atmosphere containing oxygen as an impurity gas at a temperature of 800°C or higher and 1000°C or lower during the manufacturing process.
There is almost no uneven wear between the ferrite and the alloy magnetic material due to tape running, and as a result, stable head output is obtained without any drop in head output.

Claims (6)

【特許請求の範囲】[Claims] (1)高透磁率フェライトと合金磁性材とで磁気コアを
構成し、かつ前記合金磁性材をヘッドギャップ近傍に配
するとともに、前記高透磁率フェライトと合金磁性材と
の界面に平均粗度0.12μm以上の凹凸を存在させた
ことを特徴とする磁気ヘッド。
(1) A magnetic core is constituted by a high magnetic permeability ferrite and an alloy magnetic material, and the alloy magnetic material is arranged near the head gap, and the interface between the high magnetic permeability ferrite and the alloy magnetic material has an average roughness of 0. . A magnetic head characterized by the presence of irregularities of 12 μm or more.
(2)合金磁性材の結晶粒界付近に高い酸素濃度の相が
存在する事を特徴とする請求項1記載の磁気ヘッド。
(2) The magnetic head according to claim 1, characterized in that a phase with a high oxygen concentration exists near the grain boundaries of the alloy magnetic material.
(3)高透磁率フェライトが平均粒径5μm以下の焼結
体で構成されている事を特徴とする請求項1または2記
載の磁気ヘッド。
(3) The magnetic head according to claim 1 or 2, wherein the high magnetic permeability ferrite is composed of a sintered body having an average grain size of 5 μm or less.
(4)高透磁率フェライトとセンダスト合金磁性材で磁
気コアを構成した磁気ヘッドの製造方法であって、当該
両材料界面となる前記高透磁率フェライト表面に平均粗
度0.12μm以上の凹凸を形成し、その上に前記セン
ダスト合金磁性材の層を形成しヘッドギャップ近傍に配
するとともに、その製造工程中で、800℃以上100
0℃以下の温度で不純物ガスとして酸素を含む雰囲気中
で熱処理する事を特徴とする磁気ヘッドの製造方法。
(4) A method for manufacturing a magnetic head in which a magnetic core is made of high magnetic permeability ferrite and Sendust alloy magnetic material, wherein the surface of the high magnetic permeability ferrite, which forms the interface between the two materials, is roughened with an average roughness of 0.12 μm or more. A layer of the Sendust alloy magnetic material is formed thereon and placed in the vicinity of the head gap, and during the manufacturing process, the temperature is
A method for manufacturing a magnetic head, characterized by heat treatment in an atmosphere containing oxygen as an impurity gas at a temperature of 0° C. or lower.
(5)高透磁率フェライトを平均粒径5μm以下の焼結
体で構成する事を特徴とする請求項4記載の磁気ヘッド
の製造方法。
(5) The method of manufacturing a magnetic head according to claim 4, wherein the high magnetic permeability ferrite is made of a sintered body having an average grain size of 5 μm or less.
(6)高透磁率フェライトに研削ないしは化学的エッチ
ングを施し、界面に凹凸を形成する事を特徴とする請求
項4または5記載の磁気ヘッドの製造方法。
(6) The method of manufacturing a magnetic head according to claim 4 or 5, wherein the high magnetic permeability ferrite is ground or chemically etched to form irregularities at the interface.
JP1003157A 1989-01-10 1989-01-10 Porcelain head and method of manufacturing the same Expired - Fee Related JPH0827907B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1003157A JPH0827907B2 (en) 1989-01-10 1989-01-10 Porcelain head and method of manufacturing the same
EP90100357A EP0378160B1 (en) 1989-01-10 1990-01-09 Magnetic head and method of producing the same
DE69014210T DE69014210T2 (en) 1989-01-10 1990-01-09 Magnetic head and manufacturing process.
KR1019900000232A KR930002479B1 (en) 1989-01-10 1990-01-10 Magnetic head and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1003157A JPH0827907B2 (en) 1989-01-10 1989-01-10 Porcelain head and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH02183407A true JPH02183407A (en) 1990-07-18
JPH0827907B2 JPH0827907B2 (en) 1996-03-21

Family

ID=11549516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1003157A Expired - Fee Related JPH0827907B2 (en) 1989-01-10 1989-01-10 Porcelain head and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JPH0827907B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5583728A (en) * 1994-02-04 1996-12-10 Japan Energy Corporation Improved magnetic head having smoothed chamfered surface for reducing magnetic scattering

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102409A (en) * 1985-10-30 1987-05-12 Canon Inc Magnetic head core
JPS6371908A (en) * 1986-09-15 1988-04-01 Tdk Corp Composite type magnetic head for picture recording and reproducing
JPS63108510A (en) * 1986-10-27 1988-05-13 Nec Kansai Ltd Magnetic head
JPS63311611A (en) * 1987-06-12 1988-12-20 Sumitomo Special Metals Co Ltd Composite type magnetic head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102409A (en) * 1985-10-30 1987-05-12 Canon Inc Magnetic head core
JPS6371908A (en) * 1986-09-15 1988-04-01 Tdk Corp Composite type magnetic head for picture recording and reproducing
JPS63108510A (en) * 1986-10-27 1988-05-13 Nec Kansai Ltd Magnetic head
JPS63311611A (en) * 1987-06-12 1988-12-20 Sumitomo Special Metals Co Ltd Composite type magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5583728A (en) * 1994-02-04 1996-12-10 Japan Energy Corporation Improved magnetic head having smoothed chamfered surface for reducing magnetic scattering

Also Published As

Publication number Publication date
JPH0827907B2 (en) 1996-03-21

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