JPH0217699U - - Google Patents
Info
- Publication number
- JPH0217699U JPH0217699U JP9767688U JP9767688U JPH0217699U JP H0217699 U JPH0217699 U JP H0217699U JP 9767688 U JP9767688 U JP 9767688U JP 9767688 U JP9767688 U JP 9767688U JP H0217699 U JPH0217699 U JP H0217699U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- base
- fixed
- stage
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9767688U JPH0217699U (en, 2012) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9767688U JPH0217699U (en, 2012) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217699U true JPH0217699U (en, 2012) | 1990-02-05 |
Family
ID=31323305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9767688U Pending JPH0217699U (en, 2012) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217699U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006294793A (ja) * | 2005-04-08 | 2006-10-26 | Canon Inc | ステージ装置および露光装置 |
| JP2009218372A (ja) * | 2008-03-10 | 2009-09-24 | Canon Inc | 露光装置 |
-
1988
- 1988-07-22 JP JP9767688U patent/JPH0217699U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006294793A (ja) * | 2005-04-08 | 2006-10-26 | Canon Inc | ステージ装置および露光装置 |
| JP2009218372A (ja) * | 2008-03-10 | 2009-09-24 | Canon Inc | 露光装置 |