JPH0217699U

JPH0217699U -

Info

Publication number: JPH0217699U
Application number: JP9767688U
Authority: JP
Priority date: 1988-07-22
Filing date: 1988-07-22
Publication date: 1990-02-05

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示す一部破断正面
図、第２図は本考案の他の一実施例を示す一部破
断正面図、第３図ａ，ｂはそれぞれ第１図に示す
平行板バネの代りに用いる他の二つの例を示す平
面図、第４図は従来の一例を示す一部破断正面図
、第５図は第４図に示す高圧部および調圧部の代
りに使用する圧力制御部の一例を示す一部破断正
面図である。１……基盤、２，２′……筒部、３，３′，３
″……平行板バネ、３′ａ，３″ａ……スリツト
、４……ステージ、５，５′……作動ベローズ、
６，６′……駆動ベローズ、７，７′……圧力容
器、８……非圧縮性流体、９……駆動部、９ａ…
…駆動ロツド、９ｂ……駆動機構、１０……ポー
ト、１１……調圧部、１２……配管、１３……高
圧部、１４……可撓管、１５……容器、１６……
容器支持台、１７……支柱。 Fig. 1 is a partially cutaway front view showing one embodiment of the present invention, Fig. 2 is a partially cutaway front view showing another embodiment of the present invention, and Figs. 3a and 3b are the same as Fig. 1. 4 is a partially cutaway front view showing a conventional example, and FIG. 5 is an alternative to the high pressure section and pressure regulating section shown in FIG. 4. FIG. 3 is a partially cutaway front view showing an example of a pressure control section used in the present invention. 1... Base, 2, 2'... Cylinder part, 3, 3', 3
″...Parallel plate spring, 3'a, 3''a...Slit, 4...Stage, 5, 5'...Operation bellows,
6, 6'... Drive bellows, 7, 7'... Pressure vessel, 8... Incompressible fluid, 9... Drive section, 9a...
... Drive rod, 9b ... Drive mechanism, 10 ... Port, 11 ... Pressure regulating section, 12 ... Piping, 13 ... High pressure section, 14 ... Flexible tube, 15 ... Container, 16 ...
Container support stand, 17... support.

Claims

[Scope of utility model registration request]

a base, a cylindrical part with one end fixed to the base, a parallel plate spring with an outer periphery fixed along the inner circumferential surface of the cylindrical part, and a hole provided in the center of the parallel plate spring. A stage whose central part is fitted and can be elastically displaced vertically and a wafer is placed on the upper surface, an operating bellows whose upper and lower ends are hermetically fixed to the bottom surface of the stage and the base, and a side surface of the lower end of the operating bellows. a pressure vessel comprising a driving bellows having one end hermetically fixed to a hole provided in the actuating bellows and a driving bellows having an effective cross-sectional area smaller than the operating bellows; 1. A stage fine movement mechanism comprising: a drive mechanism fixed to a base; and a drive rod that is driven by the drive mechanism and presses the other end of the drive bellows.