JPH02175089A - Laser beam machine with fault preventive mechanism - Google Patents
Laser beam machine with fault preventive mechanismInfo
- Publication number
- JPH02175089A JPH02175089A JP63328563A JP32856388A JPH02175089A JP H02175089 A JPH02175089 A JP H02175089A JP 63328563 A JP63328563 A JP 63328563A JP 32856388 A JP32856388 A JP 32856388A JP H02175089 A JPH02175089 A JP H02175089A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- output
- workpiece
- oscillator
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003449 preventive effect Effects 0.000 title 1
- 238000001514 detection method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000005452 bending Methods 0.000 abstract 2
- 238000003754 machining Methods 0.000 abstract 1
- 230000002265 prevention Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、加工時の工作物からの反射光によるレーザ発
振器の故障防止機構付レーザ加工機に関するものである
。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a laser processing machine with a mechanism for preventing failure of a laser oscillator due to light reflected from a workpiece during processing.
従来の技術
レーザ加工機にはレーザ光を９０’折り曲げてノズル部
に向は反射する全反射性のベンドミラーが取付けられて
いる。A conventional laser processing machine is equipped with a totally reflective bend mirror that bends the laser beam by 90' and reflects it toward the nozzle.
発明が解決しようとする課題
従来の技術で述べた全反射性のベンドミラーにおいては
、例えば銅、アルミ等の高反射率、高熱伝導率の加工し
にくい材料を加工する際に、レーザ光が材料表面で反射
してノズル部に入りベンドミラーに反射されてレーザ発
振器内に戻され、レーザ発振器が故障するという問題点
を有している。Problems to be Solved by the Invention In the total reflection bend mirror described in the prior art, when processing difficult-to-process materials such as copper and aluminum with high reflectance and high thermal conductivity, the laser beam The problem is that the light is reflected from the surface, enters the nozzle, is reflected by the bend mirror, and is returned into the laser oscillator, causing the laser oscillator to malfunction.
本発明は従来の技術の有するこのような問題点に鑑みな
されたものであり、その目的とするところは、反射光に
よるレーザ発振器の故障防止機構付レーザ加工機を提供
しようとするものである。The present invention has been made in view of the problems of the prior art, and its object is to provide a laser processing machine with a mechanism for preventing failure of a laser oscillator due to reflected light.
課題を解決するための手段
上記目的を達成するために本発明における故障防止機構
付レーザ加工機は、出力レーザ光軸を逆行しレーザ発振
器に入る工作物からの反射光を検知するパワーメータ部
材と、該パワーメータ部材の検知信号によりレーザ発振
器の出力停止を行う制御装置とを含むものである。Means for Solving the Problems In order to achieve the above object, the laser processing machine with a failure prevention mechanism according to the present invention includes a power meter member that detects reflected light from a workpiece that travels in the opposite direction of the output laser optical axis and enters the laser oscillator. , and a control device that stops the output of the laser oscillator based on the detection signal of the power meter member.
またレーザ光を折り曲げ反射する一部透過性のベンドミ
ラーと、該ベンドミラーを透過する工作物からの反射光
を検知するパワーメータ部材と、該パワーメータ部材の
検知信号によりレーザ発振器の出力停止を行う制御装置
を含むものとすることもできる。In addition, there is a partially transparent bend mirror that bends and reflects the laser beam, a power meter member that detects the reflected light from the workpiece that passes through the bend mirror, and a detection signal from the power meter member that stops the output of the laser oscillator. It may also include a control device that performs the operations.
作用
今レーザ発振器から送られているレーザ光は、レーザ加
工機内のベンドミラーに当たり折り曲げられて反射され
、ノズル部を通り例えば材質がアルミ等の工作物に集光
されて加工が行われている。Function: Laser light sent from a laser oscillator is bent and reflected by a bend mirror in a laser processing machine, passes through a nozzle, and is focused on a workpiece made of aluminum, for example, to perform processing.
加工中レーザ光は工作物に反射して散乱するが、そのう
ちノズル部を通過してベンドミラーに達した反射光の一
部はベンドミラーを透過してパワーメータ部材のセンサ
に達する。これによりパワーメータ部材から検知信号が
でて制御器を介してし一ザ発振器の出力停止を行う。During processing, the laser light is reflected and scattered by the workpiece, and part of the reflected light that passes through the nozzle and reaches the bend mirror passes through the bend mirror and reaches the sensor of the power meter member. As a result, a detection signal is output from the power meter member, and the output of the oscillator is stopped via the controller.
実施例
実施例について第１図、第２図を参照して説明する。床
上に設置されたベツドｌ上にＸ軸方向に移動位置決め可
能にテーブル２が載置され、ベツド１の両側に角形コラ
ム３が立設され、コラム３上にＹ軸方向に移動位置決め
可能にスライドヘッド４が設けられている。スライドヘ
ッド４にはＺ軸方向に位置調整可能なノズル部を有する
出力筒５が設けられており、出力筒５の上部にベンドミ
ラー６がレーザ発振器７からの出力レーザ光軸に対して
４５°の角度に取付けられている。そしてベンドミラー
６は、９０％反射、１０％透過の一部透過性のものが使
用され、レーザ発振器７の出力レーザ光の９０％を９０
°折り曲げ反射してノズル部に送り、ベンドミラーの背
後で発振器の出力レーザ光軸の延長線上位置に設けられ
た出力測定用センサ８上に出力レーザ光の１０％のが照
光されるようになっている。更にベンドミラー６の背後
にはノズル部に向かうレーザ光軸の延長線上にもセンサ
９が取付けられており、テーブル上の工作物Ｗに当たり
反射され、出力筒５内に入りベンドミラー６を透過する
１０％の透過光が反射光検出用のセンサ９上に照光され
るよう幌なっている０反射光検出用センサ９はシリコン
セル等の高感度形センサが使用され、センサ９の出力は
反射光検出用パワーメータｌＯに送られて増幅され、制
御装置１３に検知信号が出力される。制御装置１３では
この検知信号により直ちにレーザ発振器の出力を停止し
、アラーム表示をするようになっている。一方センサ日
の出力は監視用パワーメータ１１に送られてデイスプレ
ィ１２に出力値が表示され、出力を監視しながら加工す
ることができるようになっている。Embodiment An embodiment will be explained with reference to FIGS. 1 and 2. A table 2 is placed on a bed l installed on the floor so that it can be moved and positioned in the X-axis direction, and square columns 3 are erected on both sides of the bed 1, and slide on the column 3 so that it can be moved and positioned in the Y-axis direction. A head 4 is provided. The slide head 4 is provided with an output cylinder 5 having a nozzle part whose position can be adjusted in the Z-axis direction, and a bend mirror 6 is mounted on the upper part of the output cylinder 5 at an angle of 45 degrees with respect to the optical axis of the output laser from the laser oscillator 7. installed at an angle of The bend mirror 6 is partially transparent with 90% reflection and 10% transmission, and 90% of the output laser light from the laser oscillator 7 is
° It is bent and reflected and sent to the nozzle part, and 10% of the output laser light is illuminated on the output measurement sensor 8 installed behind the bend mirror and on the extension of the output laser optical axis of the oscillator. ing. Furthermore, a sensor 9 is installed behind the bend mirror 6 on the extension line of the laser optical axis toward the nozzle section, and the laser beam hits the workpiece W on the table and is reflected, enters the output cylinder 5, and passes through the bend mirror 6. The sensor 9 for detecting reflected light is a high-sensitivity type sensor such as a silicon cell, and the output of the sensor 9 is the reflected light. The signal is sent to the detection power meter IO, where it is amplified, and a detection signal is output to the control device 13. In response to this detection signal, the control device 13 immediately stops the output of the laser oscillator and displays an alarm. On the other hand, the sensor output is sent to a monitoring power meter 11, and the output value is displayed on a display 12, so that processing can be performed while monitoring the output.
尚センサ９は、ベンドミラー６の後側にて反射光を検出
するものと限定されるものではなく、レーザ加工機又は
その周辺にセンサを設置してレーザ発振器に逆流する反
射光を検出するようにすることができるのは勿論である
。Note that the sensor 9 is not limited to one that detects the reflected light on the rear side of the bend mirror 6, but it can also be installed in or around the laser processing machine to detect the reflected light that flows back to the laser oscillator. Of course, it can be done.
発明の効果
本発明は、上述のとおり構成されているので、次に記載
する効果を奏する。Effects of the Invention Since the present invention is configured as described above, it produces the following effects.
レーザ発振器内に逆流する工作物からの反射光を検出し
てレーザ出力を停止するようになしたので、加工時の工
作物からの反射光によるレーザ発振器の故障を未然に防
止することができる。Since the laser output is stopped by detecting the reflected light from the workpiece flowing back into the laser oscillator, it is possible to prevent the laser oscillator from malfunctioning due to the reflected light from the workpiece during processing.
第１図は故障防止機構付レーザ加工機の構造図、第２図
は故障防止機構付レーザ加工機のブロック線図である。
６・・ベンドミラー ７・・レーザ発振器９・・センサ
１０・・パワーメータ１３・・制御装置FIG. 1 is a structural diagram of a laser processing machine with a failure prevention mechanism, and FIG. 2 is a block diagram of the laser processing machine with a failure prevention mechanism. 6...Bend mirror 7...Laser oscillator 9...Sensor 10...Power meter 13...Control device
Claims (2)
作物（Ｗ）からの反射光を検知するパワーメータ部材（
９、１０）と、該パワーメータ部材の検知信号によりレ
ーザ発振器（７）の出力停止を行う制御装置（１３）と
を含んでなる故障防止機構付レーザ加工機。(1) Power meter member (
9, 10) and a control device (13) that stops the output of the laser oscillator (7) based on the detection signal of the power meter member.
ミラー（６）と、該ベンドミラーを透過する工作物（Ｗ
）からの反射光を検知するパワーメータ部材（９、１０
）と、該パワーメータ部材の検知信号によりレーザ発振
器（７）の出力停止を行う制御装置（１３）とを含んで
なる故障防止機構付レーザ加工機。(2) A partially transparent bend mirror (6) that bends and reflects the laser beam, and a workpiece (W) that passes through the bend mirror.
) to detect the reflected light from the power meter member (9, 10
), and a control device (13) that stops the output of a laser oscillator (7) based on a detection signal from the power meter member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63328563A JPH02175089A (en) | 1988-12-26 | 1988-12-26 | Laser beam machine with fault preventive mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63328563A JPH02175089A (en) | 1988-12-26 | 1988-12-26 | Laser beam machine with fault preventive mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02175089A true JPH02175089A (en) | 1990-07-06 |
Family
ID=18211674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63328563A Pending JPH02175089A (en) | 1988-12-26 | 1988-12-26 | Laser beam machine with fault preventive mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02175089A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100705080B1 (en) * | 2005-09-22 | 2007-04-06 | 현대자동차주식회사 | Laser power control device of laser welding machine |
| CN113927190A (en) * | 2021-11-26 | 2022-01-14 | 深圳软动智能控制有限公司 | Laser axis motion control method and device, laser device and storage medium |
-
1988
- 1988-12-26 JP JP63328563A patent/JPH02175089A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100705080B1 (en) * | 2005-09-22 | 2007-04-06 | 현대자동차주식회사 | Laser power control device of laser welding machine |
| CN113927190A (en) * | 2021-11-26 | 2022-01-14 | 深圳软动智能控制有限公司 | Laser axis motion control method and device, laser device and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0511882B2 (en) | ||
| US8264696B2 (en) | Measuring instrument and method for determining geometric properties of profile sections | |
| JP2010500925A (en) | Monitoring device for laser processing equipment | |
| US6354716B1 (en) | Light curtain device | |
| JP2005205429A5 (en) | ||
| JPH02175089A (en) | Laser beam machine with fault preventive mechanism | |
| JPH0511762B2 (en) | ||
| JPH0611442A (en) | Infrared optical device | |
| US4780607A (en) | Laser beam power monitoring arrangement | |
| KR101138454B1 (en) | Laser system for output measurement and prevention of exit-hole damage and method of check normality. | |
| JP2809106B2 (en) | Processing state monitoring device in laser processing equipment | |
| JPS586785A (en) | Laser machining device | |
| JPS62227589A (en) | Laser beam processing machine provided with detector for misalignment of laser light axis | |
| JPS59137805A (en) | Optical distance meter for profiling work | |
| JPH09327783A (en) | External shutter unit | |
| KR100241974B1 (en) | Vision system using laser | |
| JP2663865B2 (en) | Laser device | |
| JPS61236462A (en) | Optical tool length measuring device | |
| JPH0474934A (en) | Measuring apparatus of characteristics of beam | |
| JPH05203432A (en) | Straightness measuring method | |
| JPH08304452A (en) | Calibration method of laser doppler-type speedometer | |
| JPH074909A (en) | Laser sensor apparatus | |
| JP2000146520A (en) | Reflection type displacement measuring instrument | |
| JPH10214388A (en) | Method and device for testing reflection type smoke sensor | |
| SU868348A1 (en) | Device for checking surface roughness |