JP2000146520A - Reflection type displacement measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the distance between two surfaces which are set face to face or back to back. SOLUTION: The instrument is equipped with a light source 1 which emits measuring light, a half-mirror 4 which spectrally diffuses the measuring light in two directions and irradiates an object to be measuring with it, a photodetection part 7 which photodetects light reflected by the object, and a displacement arithmetic part 8 which calculates the distance from the position of the light on the photodetection part 7 to the object. Both the sides of the instrument body 30 can be irradiated with the light, so objects on both the sides can be measured by the single instrument.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection type displacement measuring device, and more particularly to an improved reflection type displacement measuring device capable of measuring displacements in two directions with a single measuring device.

[0002]

2. Description of the Related Art FIG. 4 shows a schematic configuration of a conventional reflection type displacement measuring device. The conventional reflection-type displacement measuring device includes a light source 31, a light-emitting side lens 32, a light-receiving side lens 33, a light receiving unit 34, a displacement calculating unit 35, and a light source driving unit 36,
These are provided inside the apparatus main body 37.

[0003] The measuring operation will be described below.

A main body 37 of the apparatus
Are set at a relative distance that can be measured. Measurement light emitted from the light source 31 is condensed by the light-emitting side lens 32 and is irradiated on the surface of the measurement target 38. Measurement object 3
The light reflected from the eight surfaces is condensed by the light receiving side lens 33 and is incident on the light receiving surface of the light receiving unit 34. Measurement object 38
When the gap length, that is, the relative position between the distance measuring device main body 37 and the relative position changes, the incident position on the light receiving surface changes in proportion to the change. Therefore, the displacement calculating unit based on the light spot position detection information from the light receiving unit 34. At 35, the displacement of the relative position between the measurement object 38 and the distance measuring device main body 37 can be obtained.

[0005]

As shown in FIG. 5, two planes facing each other, that is, two
When measuring the distance between the measurement objects 38a and 38b,
If two reflection-type displacement measuring devices are aligned on the back, measurement is possible, but all components are required two,
There is a problem that restrictions are large in terms of cost and size of the apparatus.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a reflection type displacement measuring device capable of measuring a distance between two surfaces facing each other or facing each other. It is assumed that.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a reflection type displacement measuring device of the present invention irradiates a measuring object from a light emitting portion provided inside the device main body to a measuring object, and reflects the reflected light. In a reflection-type displacement measuring device that receives light by a light receiving unit provided inside the device main body and calculates a displacement amount according to a gap length between the device main body and the measurement target. A half mirror for splitting and irradiating light is provided on both sides of the main body, and a light receiving lens system for receiving reflected light from both sides of the apparatus main body is provided close to the light receiving section, and provided on either side of the apparatus main body. It is characterized in that displacement measurement can be performed on a measurement object.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a schematic configuration of a reflection type displacement measuring apparatus according to the present embodiment.

The reflection type displacement measuring device according to the present embodiment is
A light source driving unit 9; a light source 1; a light emitting side lens 2; a total reflection mirror 3; a half mirror 4;
, Upper side light receiving lens 6, light receiving section 7, displacement calculating section 8
It is composed of The above-described components are housed and arranged inside the apparatus main body 40.

A feature of the present invention is that measurement light applied to an object to be measured is applied to both sides of the apparatus main body 40, and light reflected from either side is received by the light receiving section 7. By being able to receive light, displacement measurement can be performed on any side of the apparatus main body 40.

Next, referring to FIG. 2, description will be given of a case of measuring the distance between two surfaces that are back to back.

First, a case where the upper surface of the measurement object 10 is measured will be described.

The light emitted from the light source 1 is condensed by the light emitting side lens 2 and enters the total reflection mirror 3. The light reflected by the total reflection mirror 3 enters the half mirror 4, and is partially reflected and partially passed. The light passing through the half mirror 4 is incident on the upper surface of the measurement object 10, and the light reflected on the measurement object 10 is collected by the lower light receiving lens 5 and is incident on the light receiving surface of the light receiving unit 7.

Next, a case where the lower surface of the measurement object 10 is measured will be described.

Light emitted from the light source 1 is condensed by the light emitting side lens 2 and enters the total reflection mirror 3. The light reflected by the total reflection mirror 3 enters the half mirror 4, and is partially reflected and partially passed. The light reflected by the half mirror 4 is incident on the lower surface of the measurement object 10, and the light reflected on the measurement object 10 is condensed by the upper light receiving lens 6 and is incident on the light receiving surface of the light receiving unit 7.

When the relative position between the measurement object 10 and the apparatus main body 40 changes on both the upper and lower surfaces, the light incident position on the light receiving surface changes in proportion to the change. Based on the information, the relative position between the measurement object 10 and the apparatus main body 40 can be obtained as the amount of displacement by the displacement calculation unit 8.

FIG. 3 shows an example of a case in which the reflection type displacement measuring device of the present invention is attached to a machine tool to measure the diameter of a work to be processed.

Referring to FIG. 3, the apparatus main body 40 shown in FIG.
Is fixed to the tool rest 11 of the machine tool. As is well known, the tool rest 11 can be moved in the X and Z directions by an X-axis motor 12 and a Z-axis motor 13, and the movement distance between them is controlled by a feed shaft drive / control unit provided in a feed control device 16. 14 is controlled by a control signal. Of course, the moving distance is fed back from the motors 12 and 13 to the feed shaft drive / control unit 14 as encoder information.

As is apparent from the figure, the above-described apparatus main body 40 is positioned near the object to be measured fixed to the main shaft 19, that is, in the vicinity of the work 18, and as described above, the gap between the apparatus main body 40 and the work 18 at this time. The length is output from the displacement calculator 8. The measurement result of the displacement calculator 8 is used as the displacement information as the work size calculator 15 of the feed controller 16.
Supplied to Since the position information from the feed shaft drive / control unit 14 described above is supplied to the work size calculation unit 15, the work size calculation unit 15 calculates the size calculation result of the work 18 based on the position information and the displacement information. Can be supplied to the main processor 17.

The apparatus main body 40 measures the outer diameter of the work 18 on one side, for example, the upper side in FIG. 3, and then the main processor 17 uses the feed shaft drive / control unit 14 to move the tool rest 11 in FIG. Is moved to the opposite side of the work 18, that is, the lower side of the figure, and the same work outer diameter measurement is performed again.

In this manner, the two outer diameter positions of the work 18 are accurately measured by using a single reflection type displacement measuring device.
Based on this, the diameter dimension of the work piece can be obtained.

[0023]

As described above, as described above, the reflection-type displacement measuring apparatus of the present invention is used for facing or back-to-back.
By measuring the distance between the surfaces, the light source drive unit, light source, light receiving unit, and displacement calculation unit required for each surface measurement can be shared and used, so a single reflective displacement measurement device can be used and the cost can be reduced. Further, it is possible to make the reflection type displacement measuring device compact.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of a reflection type displacement measuring device according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram in a case where a distance between two surfaces to be back-to-back is measured using the reflection type displacement measuring device of the present invention.

FIG. 3 is a diagram illustrating an example of measuring a diameter dimension of a workpiece in a machine tool.

FIG. 4 is a diagram showing a schematic configuration of a conventional reflection-type displacement measuring device.

FIG. 5 is an explanatory diagram in a case where a distance between two surfaces to be back-to-back is measured using a conventional reflection-type displacement measuring device.

[Explanation of symbols]

1 light source, 2 light emitting side lens, 3 total reflection mirror, 4
Half mirror, 5 lower side light receiving lens, 6 upper side light receiving lens, 7 light receiving section, 8 displacement calculation section, 40 device main body.

Claims (1)

[Claims] 1. A measuring object from a light emitting unit provided inside a device main body is irradiated to a measuring object, and a reflected light is received by a light receiving unit provided inside the device main body, and a measuring light is transmitted between the device main body and the measuring object. In a reflection-type displacement measurement device that calculates a displacement amount according to a gap length, a half mirror that disperses and irradiates the measurement light to both sides of the device main body is provided in the device main body, and the device main body is provided in the light receiving unit. A light-receiving lens system for receiving reflected light from both sides of the device is placed close to it, and displacement measurement can be performed on the measurement object provided on either side of the device body. apparatus.