JPS63147207A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS63147207A
JPS63147207A JP29343186A JP29343186A JPS63147207A JP S63147207 A JPS63147207 A JP S63147207A JP 29343186 A JP29343186 A JP 29343186A JP 29343186 A JP29343186 A JP 29343186A JP S63147207 A JPS63147207 A JP S63147207A
Authority
JP
Japan
Prior art keywords
object
counter
original point
shift value
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29343186A
Inventor
Kiyoshi Ogawa
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29343186A priority Critical patent/JPS63147207A/en
Publication of JPS63147207A publication Critical patent/JPS63147207A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To improve the positioning accuracy by using a linear encoder capable of measuring an absolute position to set an original point when a laser length measuring instrument to measure the shift value of a traveling object.
CONSTITUTION: A control signal SD is applied to an actuator 3 from an arithmetic control part 10. Thus a traveling object 1 is moved toward an arrow head 2. When the object 1 passes through an original point, an electrical signal SE is outputted to a position counter 9 from a linear encoder 4. Then the count contents of the counter 9 are cleared. While the electrical signals SL showing the shift of the object 1 are sequentially supplied to the counter 9 from a laser length measuring instrument 6. The counter 9 defines the input time point of the signal SE as an original point to count the shift value of the object 1. Then the counter 9 output an electrical signal SC showing the shift value of the object 1 against its original point to an arithmetic control par 10. The part 10 compares the object 1 shown by the signal SC with a desired positioning position. Then the supply of the signal SD is stopped to the actuator 3 when the coincidence is obtained from said comparison.
COPYRIGHT: (C)1988,JPO&Japio
JP29343186A 1986-12-11 1986-12-11 Positioning device Pending JPS63147207A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29343186A JPS63147207A (en) 1986-12-11 1986-12-11 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29343186A JPS63147207A (en) 1986-12-11 1986-12-11 Positioning device

Publications (1)

Publication Number Publication Date
JPS63147207A true JPS63147207A (en) 1988-06-20

Family

ID=17794667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29343186A Pending JPS63147207A (en) 1986-12-11 1986-12-11 Positioning device

Country Status (1)

Country Link
JP (1) JPS63147207A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012208937A (en) * 2006-01-19 2012-10-25 Nikon Corp Mobile object driving method and mobile object driving system, pattern formation method and pattern formation device, exposure method and exposure device, and device manufacturing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012208937A (en) * 2006-01-19 2012-10-25 Nikon Corp Mobile object driving method and mobile object driving system, pattern formation method and pattern formation device, exposure method and exposure device, and device manufacturing method
US9372414B2 (en) 2006-01-19 2016-06-21 Nikon Corporation Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads
US9423702B2 (en) 2006-01-19 2016-08-23 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer
US9423703B2 (en) 2006-01-19 2016-08-23 Nikon Corporation Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads
US10133195B2 (en) 2006-01-19 2018-11-20 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
US10185228B2 (en) 2006-01-19 2019-01-22 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
US10185227B2 (en) 2006-01-19 2019-01-22 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
US10203613B2 (en) 2006-01-19 2019-02-12 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

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