JPH02169063A - Coating device - Google Patents
Coating deviceInfo
- Publication number
- JPH02169063A JPH02169063A JP32117888A JP32117888A JPH02169063A JP H02169063 A JPH02169063 A JP H02169063A JP 32117888 A JP32117888 A JP 32117888A JP 32117888 A JP32117888 A JP 32117888A JP H02169063 A JPH02169063 A JP H02169063A
- Authority
- JP
- Japan
- Prior art keywords
- syringe
- force
- liquid substance
- tip
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims description 13
- 238000000576 coating method Methods 0.000 title claims description 13
- 238000007599 discharging Methods 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 23
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、液状物質を吐出して塗布する装置に関する。[Detailed description of the invention] Industrial applications The present invention relates to an apparatus for discharging and applying a liquid substance.
従来の技術
最近は、半導体をはじめとする多くの分野で液状物質の
塗布舟の精度が問われるようになってきており、そのた
めに前記シリンジ部と被塗布物との距離のコントロール
が必要になってくる。Conventional technology Recently, the accuracy of liquid substance coating vessels has come to be questioned in many fields including semiconductors, and for this reason, it has become necessary to control the distance between the syringe part and the object to be coated. It's coming.
そのために従来の塗布装置は、被塗布物の上をガイドす
るガイドビンあるいはガイドローラを備え強制的に一定
の距離を保つように構成されたものや、レーザ光等によ
り被塗布物とシリンジ部の距離を測定して補正しながら
塗布するように構成されたものが知られている。For this reason, conventional coating devices are equipped with a guide bin or guide roller that guides the object to be coated, and are configured to forcibly maintain a certain distance, or are configured to use laser light, etc. to separate the object from the syringe. A device is known that is configured to apply while measuring and correcting the distance.
発明が解決しようとする課題
しかし、ガイドビンあるいはガイドローラで被塗布物の
上をガイドする従来例は、前記ビンやローラが被塗布物
に接触するため前記被塗布物に傷を付ける問題点があっ
た。Problems to be Solved by the Invention However, in the conventional example in which the object to be coated is guided by a guide bin or a guide roller, there is a problem in that the object to be coated is damaged because the bottle or roller comes into contact with the object to be coated. there were.
又、レーザ光等で測定しながら距離を補正する従来例は
装置が高額となる問題点があった。Furthermore, the conventional method of correcting the distance while measuring with a laser beam or the like has the problem that the equipment is expensive.
本発明は、以上のような間通点を解消する塗布装置を提
供するものである。The present invention provides a coating device that eliminates the above-mentioned points of confusion.
課題を解決するための手段
その手段は、液状物質を貯留するシリンジ部を、前記液
状物質を前記シリンジ部の先端から吐出する力によって
生じる反対の力に応じて押し上げる手段を設けたもので
、例えば、シリンジ部と、前記シリンジ部を保持する保
持部と、前記保持部を支える支軸と、前記支軸を基点に
前記シリンジ部の反対側にバランスをとるバランサーと
を備え、前記バランサーを調整することにより前記シリ
ンジ側を少し重くして下にさがる状態とした上で前記シ
リンジ部の先端から前記液状物質を吐出する力によって
生じる反対方向の力を利用して前記シリンジ側を押し上
げるように構成したり、シリンジ部と、前記シリンジ部
を上下動可能に保持する保持部と、前記シリンジ部の先
端から前記液状物質を吐出する力によって生じる反対方
向の力に応じて前記シリンジ部を押し上げる付勢手段と
を備えた構成とすると好適である。Means for Solving the Problem The means is provided with a means for pushing up a syringe portion storing a liquid substance in response to an opposite force generated by the force of discharging the liquid substance from the tip of the syringe portion, for example. , comprising a syringe part, a holding part for holding the syringe part, a support shaft for supporting the holding part, and a balancer for balancing on the opposite side of the syringe part based on the support shaft, and adjusting the balancer. Accordingly, the syringe side is made to be slightly heavier and lowered, and then the syringe side is pushed up by using the force in the opposite direction generated by the force of discharging the liquid substance from the tip of the syringe part. a syringe portion, a holding portion that holds the syringe portion so as to be movable up and down, and a biasing device that pushes up the syringe portion in response to a force in an opposite direction generated by a force for discharging the liquid substance from the tip of the syringe portion. It is preferable to have a configuration including the following.
作用 この技術的手段による作用は、次のようになる。action The effect of this technical means is as follows.
液状物質を入れたシリンジ部を、前記液状物質を前記シ
リンジ部の先端から吐出する力によって生じる反対方向
の力で押し上げるため、前記シリンジ部は被塗布物に対
し非接触の状態になる。その結果、前記被塗布物に傷が
付くのが防げる。Since the syringe portion containing the liquid substance is pushed up by a force in the opposite direction generated by the force of discharging the liquid substance from the tip of the syringe portion, the syringe portion is brought into a non-contact state with respect to the object to be coated. As a result, the object to be coated can be prevented from being scratched.
又、液状物質を吐出するために加える圧力を調整するこ
とによりシリンジ部の先端から前記液状物質を吐出する
力によって生じる反対の力が調整できる。その結果、シ
リンジ部と被塗布物との任意の距離が容易に得ることが
できる。Furthermore, by adjusting the pressure applied to discharge the liquid substance, the opposite force generated by the force for discharging the liquid substance from the tip of the syringe portion can be adjusted. As a result, any desired distance between the syringe portion and the object to be coated can be easily obtained.
実施例 以下、本発明の実施例を図面にもとづいて説明する。Example Embodiments of the present invention will be described below based on the drawings.
実施例１
第１図の１は液状物質５をいれるシリンジでシリンジ１
は保持部２に固定されている。保持２２は支軸３を支点
としてシリンジ１が上下動する方向ａ、 ｂに回転す
る構造になっている。Example 1 1 in Fig. 1 is a syringe into which a liquid substance 5 is placed.Syringe 1
is fixed to the holding part 2. The holder 22 has a structure that rotates around the support shaft 3 in directions a and b in which the syringe 1 moves up and down.
又、保持部２のシリンジ１の反対側にはバランスをとる
重り４が設けである。そして、重り４の位置を調整する
ことにより支軸３を支点として重り側のモーメン）Ｍ２
（Ｗ２ＸＬ２）に比べてシリンジ側のモーメントＭｌ
（ＷＩＸＬＩ）の方ヲ少しだけ大きくしてシリンジ側が
矢印すの方向に下がるようにしである。Further, a weight 4 for balancing is provided on the opposite side of the holding part 2 from the syringe 1. Then, by adjusting the position of the weight 4, the moment on the weight side with the support shaft 3 as the fulcrum is
Moment Ml on the syringe side compared to (W2XL2)
(WIXLI) is slightly larger so that the syringe side goes down in the direction of the arrow.
この状態で次に、液状物質５を吐出する圧力Ｐ１を加え
るとシリンジ１の先端から液状物Ｉｊ４１５が２２の力
で吐出される。そして、吐出される時の力Ｐ２が被塗布
物６の塗布面に作用してＰ２に反対の力Ｐ３が生じる。Next, in this state, when pressure P1 for discharging the liquid substance 5 is applied, the liquid substance Ij415 is discharged from the tip of the syringe 1 with a force of 22. Then, the force P2 at the time of discharge acts on the coating surface of the object 6 to be coated, and a force P3 opposite to P2 is generated.
この時の力Ｐ３は前記モーメン）Ｍｌ、Ｍ２の差より大
きくしであるのでシリンジ１は前記力Ｐ３により矢印ａ
の方向に押し上げられることになる。At this time, the force P3 is greater than the difference between the moments) Ml and M2, so the syringe 1 is moved by the arrow a due to the force P3.
It will be pushed in the direction of
以上のように、シリンジ側と正り側のモーメン）Ｍｌ、
Ｍ２をＭｌ＞Ｍ２とし且つ、 （Ｍｌ−Ｍ２）＜Ｐ３
とすることにより液状物質５が吐出されると同時にシリ
ンジ１が押し上げられるため被塗布物６とシリンジ１の
先端が非接触となる。As mentioned above, the moment on the syringe side and the correct side) Ml,
Let M2 be Ml>M2, and (Ml-M2)<P3
By doing so, the syringe 1 is pushed up at the same time as the liquid substance 5 is discharged, so that the object 6 to be coated and the tip of the syringe 1 are not in contact with each other.
又、被塗布物６とシリンジ１の先端との距離は、前記Ｍ
１ ＞Ｍ２と（Ｍｌ−Ｍ２）＜Ｐ３の関係を保ちなが
ら前記圧力Ｐ１を調整することにより得ることができる
。Furthermore, the distance between the object 6 and the tip of the syringe 1 is equal to the distance M
It can be obtained by adjusting the pressure P1 while maintaining the relationship of 1>M2 and (Ml-M2)<P3.
実施例２
第２図の１は液状物質５をいれるシリンジでシリンジ１
は矢印の方向ｃ、 ｄになめらかに動くように保持部
７に保持されている。又、シリンジ部はコイルバネ８で
矢印の方向ｄにＰ４の力を受けているが、前記Ｐ４はシ
リンジ１の型組より小さくしであるためシリンジ１は矢
印Ｃの方向に下がる。この状態で次に、液状物質５を吐
出する圧力Ｐ１を加えるとシリンジ１の先端から液状物
質がＰ２の力で吐出される。そして、吐出される時の力
Ｐ２が被塗布物８の塗布面に作用してＰ２に反対の力Ｐ
３が生じる。Example 2 1 in Fig. 2 is a syringe into which the liquid substance 5 is placed.Syringe 1
is held by the holding portion 7 so as to move smoothly in the directions c and d of the arrows. Further, the syringe part receives a force P4 in the direction d of the arrow by the coil spring 8, but since the force P4 is smaller than the mold of the syringe 1, the syringe 1 moves down in the direction of the arrow C. In this state, next, when a pressure P1 for discharging the liquid substance 5 is applied, the liquid substance is discharged from the tip of the syringe 1 with a force P2. Then, the force P2 when being discharged acts on the coating surface of the object 8 to be coated, and the force P2 opposite to P2
3 occurs.
この時の力Ｐ３は前記シリンジ１の重合と前記コイルバ
ネの力Ｐ４との差より大きくしであるのでシリンジ１は
力Ｐ３により矢印ｄの方向に押し上げられることになる
。Since the force P3 at this time is greater than the difference between the superposition of the syringe 1 and the force P4 of the coil spring, the syringe 1 is pushed up in the direction of the arrow d by the force P3.
又、被塗布物８とシリンジ部の先端との距離は、（シリ
ンジ１の重ｆｆ１−Ｐ４）＜Ｐ３の関係を保ちながら前
記圧力Ｐ１を調整することにより得ることができる。Further, the distance between the object to be coated 8 and the tip of the syringe portion can be obtained by adjusting the pressure P1 while maintaining the relationship (weight of the syringe 1 ff1-P4)<P3.
発明の効果
本発明は、被塗布物に傷を付けず、且つ構造簡単で被塗
布物とシリンジ部の先端との距離を容易にコントロール
することができる塗布装置を提供することができる。Effects of the Invention The present invention can provide a coating device that does not damage the object to be coated, has a simple structure, and can easily control the distance between the object to be coated and the tip of the syringe portion.
、窮１図は本発明の実施例１における塗布装置の概・皮
を示した側面図、第２図は同じく本発明の実施例２にお
ける塗布装置の概要を示した側面図である。
１・Φ・シリンジ、２ 保持部、３・・−支軸、４・φ
・重り、５・ｅ・液状物質、６一番・被塗布物、Ｐｌ・
・ｅ吐出するための圧力、Ｐ２−・畢吐出時の圧力、Ｐ
３・・φＰ２に反対の力、Ｐ４１１φ・コイルバネの力
、 Ｗｌ・・・シリンジ側の重ｆｆｉ、Ｗ２”・・重り
側の重量。
代理人の氏名 弁理士 粟野重孝 はか１名／−一一シ
ゾンンFIG. 1 is a side view schematically showing a coating device according to a first embodiment of the present invention, and FIG. 2 is a side view schematically showing a coating device according to a second embodiment of the present invention. 1・φ・Syringe, 2 Holding part, 3・・・Spindle, 4・φ
・Weight, 5・e・Liquid substance, 6・Object to be coated, Pl・
・Pressure for e-discharging, P2-・Pressure during discharging, P
3. Force opposite to φP2, P411φ force of coil spring, Wl... Weight on the syringe side ffi, W2''... Weight on the weight side. Name of agent Patent attorney Shigetaka Awano Haka 1/- Kazuichi Shizonun
Claims (3)
を前記シリンジ部の先端から吐出する力によって生じる
反対方向の力に応じて押し上げる手段を設けたことを特
徴とする塗布装置。(1) A coating device comprising means for pushing up a syringe portion that stores a liquid substance in response to a force in an opposite direction generated by a force that discharges the liquid substance from the tip of the syringe portion.
部を保持する保持部と保持部を支える支軸と、前記支軸
を基点に前記シリンジ部の反対側にバランスをとるバラ
ンサーとを備え、前記バランサーを調整することにより
前記シリンジ側を少し重くして下にさがる状態とした上
で前記シリンジ部の先端から前記液状物質を吐出する力
によって生じる反対方向の力を利用して前記シリンジ側
を押し上げるように構成したことを特徴とする請求項１
記載の塗布装置。(2) comprising a syringe section that stores a liquid substance, a holding section that holds the syringe section, a support shaft that supports the holding section, and a balancer that maintains balance on the opposite side of the syringe section based on the support shaft, By adjusting the balancer, the syringe side is made to be a little heavier so that it hangs downward, and then the syringe side is moved by using the force in the opposite direction generated by the force of discharging the liquid substance from the tip of the syringe part. Claim 1 characterized in that it is configured to be pushed up.
The coating device described.
部を上下動可能に保持する保持部と、前記シリンジ部の
先端から前記液状物質を吐出する力によって生じる反対
方向の力に応じて前記シリンジ部を押し上げる付勢手段
とを備えたことを特徴とする請求項１記載の塗布装置。(3) a syringe portion that stores a liquid substance; a holding portion that holds the syringe portion so as to be movable up and down; 2. The coating device according to claim 1, further comprising biasing means for pushing up the coating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32117888A JPH02169063A (en) | 1988-12-20 | 1988-12-20 | Coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32117888A JPH02169063A (en) | 1988-12-20 | 1988-12-20 | Coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02169063A true JPH02169063A (en) | 1990-06-29 |
Family
ID=18129663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32117888A Pending JPH02169063A (en) | 1988-12-20 | 1988-12-20 | Coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02169063A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008296174A (en) * | 2007-06-01 | 2008-12-11 | Juki Corp | Adhesive coater |
| JP2016504173A (en) * | 2012-09-28 | 2016-02-12 | インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ | Microfluidic surface treatment system and operation method (microfluidic surface treatment system with self-adjusting distance control to the surface) |
-
1988
- 1988-12-20 JP JP32117888A patent/JPH02169063A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008296174A (en) * | 2007-06-01 | 2008-12-11 | Juki Corp | Adhesive coater |
| JP2016504173A (en) * | 2012-09-28 | 2016-02-12 | インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ | Microfluidic surface treatment system and operation method (microfluidic surface treatment system with self-adjusting distance control to the surface) |
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