JPH0216555U - - Google Patents

Info

Publication number
JPH0216555U
JPH0216555U JP9469588U JP9469588U JPH0216555U JP H0216555 U JPH0216555 U JP H0216555U JP 9469588 U JP9469588 U JP 9469588U JP 9469588 U JP9469588 U JP 9469588U JP H0216555 U JPH0216555 U JP H0216555U
Authority
JP
Japan
Prior art keywords
electron beam
voltage
discharge current
certain value
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9469588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0635365Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988094695U priority Critical patent/JPH0635365Y2/ja
Publication of JPH0216555U publication Critical patent/JPH0216555U/ja
Application granted granted Critical
Publication of JPH0635365Y2 publication Critical patent/JPH0635365Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1988094695U 1988-07-18 1988-07-18 電子線照射装置 Expired - Lifetime JPH0635365Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988094695U JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988094695U JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH0216555U true JPH0216555U (enrdf_load_stackoverflow) 1990-02-02
JPH0635365Y2 JPH0635365Y2 (ja) 1994-09-14

Family

ID=31319262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988094695U Expired - Lifetime JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0635365Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010218885A (ja) * 2009-03-17 2010-09-30 Nuflare Technology Inc 電子銃のコンディショニング処理方法
JP2012054076A (ja) * 2010-08-31 2012-03-15 Nuflare Technology Inc 電子銃のコンディショニング方法および電子ビーム描画装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922371A (enrdf_load_stackoverflow) * 1972-06-22 1974-02-27
JPS5991650A (ja) * 1982-11-17 1984-05-26 Hitachi Ltd 電子ビ−ム加工機
JPS61267243A (ja) * 1985-05-21 1986-11-26 Hitachi Ltd 荷電粒子加速電圧制御方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922371A (enrdf_load_stackoverflow) * 1972-06-22 1974-02-27
JPS5991650A (ja) * 1982-11-17 1984-05-26 Hitachi Ltd 電子ビ−ム加工機
JPS61267243A (ja) * 1985-05-21 1986-11-26 Hitachi Ltd 荷電粒子加速電圧制御方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010218885A (ja) * 2009-03-17 2010-09-30 Nuflare Technology Inc 電子銃のコンディショニング処理方法
JP2012054076A (ja) * 2010-08-31 2012-03-15 Nuflare Technology Inc 電子銃のコンディショニング方法および電子ビーム描画装置

Also Published As

Publication number Publication date
JPH0635365Y2 (ja) 1994-09-14

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