JPH02165539A - Formation of plasma display panel barrier - Google Patents

Formation of plasma display panel barrier

Info

Publication number
JPH02165539A
JPH02165539A JP63321591A JP32159188A JPH02165539A JP H02165539 A JPH02165539 A JP H02165539A JP 63321591 A JP63321591 A JP 63321591A JP 32159188 A JP32159188 A JP 32159188A JP H02165539 A JPH02165539 A JP H02165539A
Authority
JP
Japan
Prior art keywords
layer
barrier
insulating paste
photo
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63321591A
Other languages
Japanese (ja)
Other versions
JP2691292B2 (en
Inventor
Kazunari Tanaka
一成 田中
Shozo Otomo
大友 省三
Rikiya Kamimura
力也 上村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Narumi China Corp
Original Assignee
Narumi China Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Narumi China Corp filed Critical Narumi China Corp
Priority to JP63321591A priority Critical patent/JP2691292B2/en
Priority to KR1019890018922A priority patent/KR940006293B1/en
Publication of JPH02165539A publication Critical patent/JPH02165539A/en
Priority to US07/672,765 priority patent/US5209688A/en
Application granted granted Critical
Publication of JP2691292B2 publication Critical patent/JP2691292B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To form a barrier with narrow patterns which meets large-screen requirements by forming, on a glass plate, a layer made from photo-soluble resin with a thickness equal to that of the barrier and utilizing photolithography to form lines. CONSTITUTION:A layer 2 having the same thickness as a barrier is formed on a glass plate 1 using photo-soluble resin, and the layer 2 is then subjected to exposure and development to form openings 4 through removal of specific portions. Subsequently, ultraviolet rays are irradiated upon the layer now with the openings 4 to make it developer-soluble, and insulating paste 5a is embedded in the openings 4 to obtain a layer 5b loaded with the insulating paste 5a. When the layer 5b is developed, photo-soluble resin portions are removed to form patterns of the insulating paste 5a, which are then baked into the barrier. This process is useful in meeting both fine-pattern and large-screen requirements.

Description

【発明の詳細な説明】 イ9発明の目的 この発明は、プラズマディスプレイパネル用の障壁の製
造法に関し、従来より細幅の障壁を可能とし、かつ大画
面に対応できる製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION A.9 OBJECTS OF THE INVENTION The present invention relates to a method for manufacturing a barrier for a plasma display panel, and relates to a method for manufacturing a barrier that is narrower than the conventional barrier and is compatible with large screens.

1 @tl 1桁 プラズマディスプレイパネルは第2図に示すように、ア
ノード7用基板(前面板)8とカソード9用基板(背面
板)10および隔壁11からなり、各々電極は直角に対
向しこの交点間の空間に放電を起こすことにより発光さ
せる。このとき光のクロストーク(混線)を防ぐため、
また画面のコントラストを作るため、黒色の障壁11が
設けられている。この障壁の形状は、幅約100μnl
、高さ100μ亀以上であり、A4サイズのパネルの場
合、約640本の障壁が形成されている。従来この障壁
は、セラミック粉末を有機バインダー溶媒等と混合した
ペーストを厚膜印刷法でパターン形成した後、乾燥、焼
成して形成されている。
1 @tl As shown in Fig. 2, a single-digit plasma display panel consists of a substrate (front plate) 8 for an anode 7, a substrate (back plate) 10 for a cathode 9, and a partition wall 11, with the electrodes facing each other at right angles. Light is emitted by causing a discharge in the space between the intersections. At this time, to prevent optical crosstalk,
Furthermore, a black barrier 11 is provided to create contrast on the screen. The shape of this barrier is approximately 100 μnl wide
, the height is 100 μm or more, and in the case of an A4 size panel, approximately 640 barriers are formed. Conventionally, this barrier has been formed by forming a pattern using a thick film printing method using a paste made by mixing ceramic powder with an organic binder solvent, etc., followed by drying and firing.

魚貝力(解決しようとする課題 しかしながら、このような製造方法は一般的に以下に示
すような問題点がある。
Problems to be Solved However, such manufacturing methods generally have the following problems.

(1)厚膜印刷法で形成するために、−回の印刷では形
成可能な厚みはせいぜい十数μmであり、必要な100
μ−以上の高さをつけるために約10回以上の繰り返し
印刷が必要であった。このため、1回毎の位置合わせが
非常に重要であり、歩留を悪くする要因であった。
(1) In order to form the film using the thick film printing method, the thickness that can be formed in -times of printing is at most 10-odd μm, and the required thickness is 100 μm.
Repeated printing approximately 10 times or more was required to obtain a height of μ- or more. For this reason, positioning every time is very important, which is a factor that deteriorates the yield.

(2)厚膜印刷の繰り返しによる製造であるために、障
壁の幅は100μm程度が限界であり、将来の640本
以上のファインパターン化(III壁幅100μm以下
)に対応が難しい。
(2) Since it is manufactured by repeated thick film printing, the width of the barrier is limited to about 100 μm, making it difficult to support future fine patterns of 640 or more lines (III wall width of 100 μm or less).

(3)ステンレスメツシュを用いた厚膜印刷による製造
であるために印刷面積は、メツシュ原版により制約され
A4サイズを越える大画面化に対応するのが難しい。
(3) Since it is manufactured by thick-film printing using stainless steel mesh, the printing area is limited by the mesh original plate, making it difficult to support screens larger than A4 size.

本発明の目的は、上記従来技術の問題点を解決すること
であって、即ち、細い幅の障壁が確実に形成可能で、か
つ今後の大画面化にも対応できるプラズマデイスプレィ
用障壁の形成方法を提供することにある9 0、発明の構成 課at解jE虹擾11す!υE段 本発明は、ガラス板上に障壁と同等もしくはそれ以上の
厚みの光溶解性樹脂を用いた層を形成する工程と、前記
光溶解性樹脂を用いた層を露光および現像により所望す
る部分を取り除き開口部を形成する工程と、前記開口部
の形成された層に紫外線を照射し現像液に対し可溶性に
する工程と、前記開口部に障壁となる絶縁ペーストを埋
め込み、絶縁ペーストで満たされた層を形成する工程と
、前記絶縁ペーストで満たされた層を現像することによ
り光溶解性樹脂を用いた部分を取り除き絶縁ペーストの
パターンを形成する工程と、前記絶縁ペーストを焼成し
絶縁層とする工程からなることを特徴とするプラズマデ
ィスプレイパネル用の障壁形成法である。
The purpose of the present invention is to solve the above-mentioned problems of the prior art, namely, to form a barrier for plasma display that can reliably form a barrier with a narrow width and can also be adapted to larger screens in the future. 90, the composition of the invention is to provide a method for solving the problem! υE stage The present invention involves a step of forming a layer using a photosoluble resin on a glass plate with a thickness equal to or thicker than that of the barrier, and forming a layer using the photosoluble resin in a desired area by exposing and developing the layer using the photosoluble resin. irradiating the layer in which the opening has been formed with ultraviolet rays to make it soluble in a developer; embedding an insulating paste that acts as a barrier in the opening; and filling the layer with the insulating paste. forming a layer filled with the insulating paste, developing the layer filled with the insulating paste to remove the part using the photosoluble resin and forming a pattern of the insulating paste, and baking the insulating paste to form an insulating layer. This is a method for forming a barrier for a plasma display panel, which is characterized by comprising the steps of:

以下本発明に係る障壁形成法を第1図の(a)〜(g)
に基づき説明する。
The barrier formation method according to the present invention will be described below as shown in FIGS. 1(a) to (g).
The explanation will be based on.

割方扼例 図(a)は、ガラス板1上にドクターブレード法または
ロールコータ−法により光溶解性樹脂を用いた100〜
250μmの厚みの層2を形成する。
Fig. 1 (a) shows an example of how to divide 100 to 100 sheets using a photosoluble resin on a glass plate 1 by a doctor blade method or a roll coater method.
A layer 2 with a thickness of 250 μm is formed.

この光溶解性樹脂として例えばヘキストジャバン社製の
A24903フオトレジストがある。光溶解性樹脂を用
いた層2の厚みが100μ蹟以下のときは、乾燥、焼成
の際の収縮等により障壁1ゾみ100μ1以上が形成で
きない。また250μm以上のときは、形成されたアス
ペクト比(高さ7幅)が高くなり、成形性および保形性
が悪くなるためである。この発明の光溶解性樹脂を用い
た層2は、光溶解性樹脂単味でもよいが、光透過性、光
反応性を損なわない程度にセラミックス等の無機粉末、
有機粉末、有機溶液等を選択し、混合させてもよいので
、これらを総称している。
As this photosoluble resin, for example, A24903 photoresist manufactured by Hoechst Javan Co., Ltd. is available. When the thickness of the layer 2 made of a photosoluble resin is 100 μm or less, it is impossible to form a barrier with a thickness of 100 μm or more due to shrinkage during drying and baking. Moreover, when it is 250 μm or more, the formed aspect ratio (height 7 width) becomes high, and moldability and shape retention become poor. The layer 2 using the photo-soluble resin of the present invention may be made of a single photo-soluble resin, but may be made of inorganic powder such as ceramics or the like to the extent that light transmittance and photoreactivity are not impaired.
Since organic powders, organic solutions, etc. may be selected and mixed, these are collectively referred to.

図(b)は、上記光溶解性樹脂を用いた層にプリベーク
を行い、ガラスマスク3を用いて障壁となる所4に紫外
線が照射するようix択的に露光する。
In Figure (b), the layer using the above-mentioned photo-soluble resin is prebaked, and selectively exposed using a glass mask 3 to irradiate ultraviolet rays to areas 4 that will serve as barriers.

図(c)は、上記露光部を現像液を用いて現像し、開口
部4をもつ光溶解性樹脂を用いた層のバターニングが完
了する。
In Figure (c), the exposed area is developed using a developer, and the patterning of the layer using the photosoluble resin having the openings 4 is completed.

図(d)は、上記開口部4を持った層に紫外線を全面照
射し、現像液に対して可溶性にする。
In Figure (d), the entire surface of the layer having the openings 4 is irradiated with ultraviolet rays to make it soluble in the developer.

図(e)は、上記開口部を持った層の開口部に例えば重
量Xで5iOz 15%、Al2O520%、Fe2O
,10%、Cr2O331MnO1%、Co02%、 
PbO35% 、 B20q 8%からなるセラミック
粉末を含む絶縁ペーストを埋め込み、絶縁ペースト5a
で満たされた115bを形成する。なお絶縁ペーストは
、焼成後黒色化し、絶縁物となるセラミック粉末を含む
ものであればよい。
Figure (e) shows that, for example, 5iOz 15%, Al2O520%, Fe2O
,10%, Cr2O331MnO1%, Co02%,
An insulating paste containing ceramic powder consisting of 35% PbO and 8% B20q was embedded, and the insulating paste 5a
115b filled with Note that the insulating paste may be any material as long as it contains ceramic powder that turns black after firing and becomes an insulator.

図<f>は、−E!a開口部が絶縁ペーストで満たされ
た層を現像し、光溶解性樹脂を用いた層を取り除き約8
0μ■幅の絶縁ペーストのパターンを形成した。
Figure <f> is -E! Develop the layer in which the apertures are filled with insulating paste, and remove the layer using photosoluble resin.
A pattern of insulating paste with a width of 0 μm was formed.

図(g)は、上記障壁となる絶縁ペーストを580℃の
焼成温度で厚膜ペースト用の焼成プロセス(図示せず)
により処理すると有機バインダーは燃焼し、ガラスセラ
ミック材料は焼結し黒色絶縁層化し、約80μ−幅、約
150μm高さの障壁6が形成される。焼成温度は絶縁
ペーストが黒色化しかつ十分緻密化する温度であればよ
い。
Figure (g) shows the firing process (not shown) for thick film paste at a firing temperature of 580°C for the above-mentioned barrier insulation paste.
The organic binder burns out and the glass-ceramic material is sintered into a black insulating layer, forming a barrier 6 approximately 80 μm wide and approximately 150 μm high. The firing temperature may be any temperature at which the insulating paste becomes black and sufficiently densified.

ハ1発明の詳細 な説明したように、本発明に係る障壁の製造方法によれ
ば、ライン形成にフォトリソグラフィー法を用いるため
、印刷法のようにメツシュ原版の制約を受けないため、
大画面化に対応も可能である。また、従来の印刷法の十
数回に及ぶ位置合わせが不要となり工程の短縮が可能と
なる。さらには、焼成以降の後工程で従来のプロセスが
使用できる等の優れた効果がある。
C1 As described in detail of the invention, according to the barrier manufacturing method according to the present invention, since the photolithography method is used for line formation, there is no restriction of the mesh original plate as in the printing method.
It is also possible to accommodate larger screens. Additionally, alignment, which is performed over ten times in the conventional printing method, is no longer necessary, making it possible to shorten the process. Furthermore, there are excellent effects such as the ability to use conventional processes in subsequent steps after firing.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の製造方法を6)〜(g)図示した一例
である。第2図は、プラズマデイスプレィの構造の一例
である。 1、ガラス板、2.光溶解性樹脂J鋪、3.ガラスマス
ク、4.開口部、5a、絶縁ペースト、5b、開口部が
5aで満たされた層、6.障壁、7、アノード、8、前
面板、9.カソード、第1171 背面板、 1章壁。
FIG. 1 is an example of 6) to (g) illustrating the manufacturing method of the present invention. FIG. 2 shows an example of the structure of a plasma display. 1. Glass plate, 2. Photosoluble resin J, 3. Glass mask, 4. opening 5a; insulating paste 5b; layer in which the opening is filled with 5a; 6. Barrier, 7, Anode, 8, Front plate, 9. Cathode, No. 1171 back plate, Chapter 1 wall.

Claims (1)

【特許請求の範囲】[Claims]  ガラス板上に障壁と同等もしくはそれ以上の厚みの光
溶解性樹脂を用いた層を形成する工程と、前記光溶解性
樹脂を用いた層を露光および現像により所望する部分を
取り除き開口部を形成する工程と、前記開口部の形成さ
れた層に紫外線を照射し現像液に対し可溶性にする工程
と、前記開口部に障壁となる絶縁ペーストを埋め込み、
絶縁ペーストで満たされた層を形成する工程と、前記絶
縁ペーストで満たされた層を現像することにより光溶解
性樹脂を用いた部分を取り除き絶縁ペーストのパターン
を形成する工程と、前記絶縁ペーストを焼成し絶縁層と
する工程からなることを特徴とするプラズマディスプレ
イパネル用の障壁形成法。
A step of forming a layer using a photo-soluble resin on a glass plate with a thickness equal to or greater than that of the barrier, and removing a desired portion of the layer using the photo-soluble resin by exposing and developing to form an opening. a step of irradiating the layer in which the opening is formed with ultraviolet rays to make it soluble in a developer; embedding an insulating paste to serve as a barrier in the opening;
a step of forming a layer filled with an insulating paste; a step of developing the layer filled with the insulating paste to remove a portion using a photosoluble resin and forming a pattern of the insulating paste; and a step of forming a pattern of the insulating paste. A method for forming a barrier for a plasma display panel, which comprises a step of firing to form an insulating layer.
JP63321591A 1988-12-19 1988-12-19 Barrier forming method for plasma display panel Expired - Fee Related JP2691292B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP63321591A JP2691292B2 (en) 1988-12-19 1988-12-19 Barrier forming method for plasma display panel
KR1019890018922A KR940006293B1 (en) 1988-12-19 1989-12-19 Plasma display panel
US07/672,765 US5209688A (en) 1988-12-19 1991-03-20 Plasma display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63321591A JP2691292B2 (en) 1988-12-19 1988-12-19 Barrier forming method for plasma display panel

Publications (2)

Publication Number Publication Date
JPH02165539A true JPH02165539A (en) 1990-06-26
JP2691292B2 JP2691292B2 (en) 1997-12-17

Family

ID=18134254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63321591A Expired - Fee Related JP2691292B2 (en) 1988-12-19 1988-12-19 Barrier forming method for plasma display panel

Country Status (1)

Country Link
JP (1) JP2691292B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01251534A (en) * 1988-03-31 1989-10-06 Deikushii Kk Manufacture of electrode forming, member of discharge indicator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01251534A (en) * 1988-03-31 1989-10-06 Deikushii Kk Manufacture of electrode forming, member of discharge indicator

Also Published As

Publication number Publication date
JP2691292B2 (en) 1997-12-17

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