JPH02165416A - Thin-film magnetic recording medium - Google Patents
Thin-film magnetic recording mediumInfo
- Publication number
- JPH02165416A JPH02165416A JP32129688A JP32129688A JPH02165416A JP H02165416 A JPH02165416 A JP H02165416A JP 32129688 A JP32129688 A JP 32129688A JP 32129688 A JP32129688 A JP 32129688A JP H02165416 A JPH02165416 A JP H02165416A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- recording
- recording medium
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 239000010408 film Substances 0.000 claims description 40
- 230000005415 magnetization Effects 0.000 description 15
- 238000005530 etching Methods 0.000 description 6
- 230000035699 permeability Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910018499 Ni—F Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
磁気ディスク装置等に用いられる薄膜磁気記録媒体、特
に再生特性及びヘッド接触に対する耐久性の良好な媒体
構造に関し、
媒体面の記録トラック間に設けた非磁性のガードパッド
を利用して、記録再生時における磁気へラドスライダの
摺動、或いは不測の衝突(衝撃)等に対する媒体面の耐
久性を向上することを目的とし、
非磁性基板上に少なくとも一層からなる磁性膜を有し、
かつその磁性膜は所定幅で同心円状に複数に分割され、
該分割された各磁性膜部分間に、その磁性膜表面より突
出する硬質な非磁性ガードパッドを設けた構成とする。[Detailed Description of the Invention] [Summary] Regarding a thin film magnetic recording medium used in a magnetic disk device, etc., and in particular a medium structure with good reproduction characteristics and durability against head contact, the present invention relates to a non-magnetic magnetic recording medium provided between recording tracks on the medium surface. The purpose of this is to improve the durability of the medium surface against the sliding of the magnetic slider during recording and playback or unexpected collisions (shocks) by using the guard pad, and consists of at least one layer on a non-magnetic substrate. Has a magnetic film,
And the magnetic film is divided into a plurality of concentric circles with a predetermined width,
A hard non-magnetic guard pad protruding from the surface of the magnetic film is provided between each of the divided magnetic film parts.
本発明は磁気ディスク装置等に用いられる薄膜磁気記録
媒体に係り、特に再生特性及びヘッド接触に対する耐久
性の良好な媒体構造に関するものである。The present invention relates to a thin film magnetic recording medium used in magnetic disk drives and the like, and particularly to a medium structure with good reproduction characteristics and durability against head contact.
近来、コンピュータシステムの外部記憶装置として主流
をなす磁気ディスク装置においては、小型、高速及び大
容量化が要求され、これに伴って用いられる磁気記録媒
体も塗膜型記録媒体よりも高密度記録が可能なスパッタ
リング法等を駆使した薄膜型記録媒体の実用化開発が進
められ、その上記録トラック密度は益々高められる傾向
にある。In recent years, magnetic disk drives, which have become mainstream as external storage devices for computer systems, are required to be smaller, faster, and have larger capacities. The practical development of thin film recording media is progressing by making full use of available sputtering methods, and the density of recording tracks tends to be further increased.
このため、高クラック密度化に伴う隣接トラックからの
記録信号を再生するサイドクロストークの低減及び高密
度記録に伴うヘッド・媒体間の間隔の微小化による媒体
面のヘッド接触に対する耐久性の向上が要望されている
。For this reason, side crosstalk for reproducing recorded signals from adjacent tracks due to high crack density can be reduced, and durability against head contact on the medium surface due to miniaturization of the gap between the head and the medium due to high density recording has been improved. It is requested.
従来の薄膜磁気記録媒体は第4図の垂直磁気記録媒体の
例で示すように、アルマイト表面処理等が施されたアル
ミニウム(八り等からなる非磁性のディスク基板11上
に、例えばスパッタリング法などによってNi−Feか
らなる高透磁率の軟磁性層12と、該軟磁性層12上に
Co−Crなどからなる垂直磁化記録層13が積層状に
配設され、該垂直磁化記録層13の磁化記録により形成
される複数の同心円状の複数のデータトラック14間の
非磁化記録領域に、SiO□などからなる非磁性のガー
ドパッド15が前記基板面に達するように埋設され、前
記垂直磁化記録層13のデータトラック14での磁化記
録滲みを防止し、その結果、隣接トラックからの漏れ信
号を再生するサイドクロストークを低減し、高トラツク
密度化を容易にしている。As shown in the example of a perpendicular magnetic recording medium in FIG. 4, a conventional thin film magnetic recording medium is a non-magnetic disk substrate 11 made of aluminum (aluminum, etc.) that has been subjected to an alumite surface treatment, etc. A soft magnetic layer 12 with high magnetic permeability made of Ni-Fe and a perpendicular magnetization recording layer 13 made of Co-Cr or the like are arranged in a laminated manner on the soft magnetic layer 12, and the magnetization of the perpendicular magnetization recording layer 13 is A non-magnetic guard pad 15 made of SiO□ or the like is embedded in a non-magnetic recording area between a plurality of concentric data tracks 14 formed by recording so as to reach the substrate surface, and the perpendicular magnetization recording layer This prevents magnetization recording blur in the 13 data tracks 14, and as a result, reduces side crosstalk that reproduces leaked signals from adjacent tracks, making it easier to increase track density.
ところで上記したような薄膜磁気記録媒体においては、
記録再生時の媒体面に対する磁気へラドスライダの摺動
、或いは不測の衝突(衝撃)等は避けられず、垂直磁化
記録層13に磁化記録された情報を保護するために該記
録層13の表面に保護膜を施すことは不可欠である。By the way, in the thin film magnetic recording medium as mentioned above,
Sliding of the magnetic rad slider or unexpected collision (impact) with respect to the medium surface during recording and reproduction is unavoidable, and in order to protect the information magnetized and recorded in the perpendicularly magnetized recording layer 13, the surface of the recording layer 13 is Applying a protective film is essential.
しかしながら、前記記録層13上に施す保護膜は、記録
分解能を左右するヘッド・媒体間の間隔を適正化する観
点からできるだけ薄く設ける必要があるため、それによ
る前記耐久性の向上は必ずしも十分でなく、更に改善す
る必要があった。However, since the protective film applied on the recording layer 13 needs to be as thin as possible from the perspective of optimizing the distance between the head and the medium, which affects the recording resolution, the improvement in durability is not necessarily sufficient. , further improvements were needed.
本発明は上記したような従来の問題点に鑑み、媒体面の
記録トラック間に設けた非磁性のガードパッドを利用し
て、記録再生時における磁気ヘントスライダの摺動、或
いは不測の衝突(衝撃)等に対する媒体面の耐久性を向
上した新規な薄膜磁気記録媒を提供することを目的とす
るものである。In view of the above-mentioned conventional problems, the present invention utilizes a non-magnetic guard pad provided between recording tracks on the medium surface to prevent sliding of the magnetic hent slider or unexpected collision (impact) during recording and reproduction. ), etc. The object of the present invention is to provide a new thin film magnetic recording medium that has improved durability of the medium surface against the like.
本発明は上記した目的を達成するため、基板上に少なく
とも一層からなる磁性膜を有し、かつその磁性膜は所定
幅で同心円状に複数に分割され、該分割された各磁性膜
部分間に、その磁性膜表面より突出する硬質な区画保護
用の非磁性ガードパッドを設けた構成とする。In order to achieve the above object, the present invention has a magnetic film consisting of at least one layer on a substrate, and the magnetic film is divided concentrically into a plurality of parts with a predetermined width, and between each divided magnetic film part. , a hard non-magnetic guard pad for protecting the partition is provided that protrudes from the surface of the magnetic film.
本発明の薄膜磁気記録媒体では、基板上に設けた少なく
とも一層からなる磁性膜が所定幅で同心円状に複数に分
割され、その各分割磁性膜間に該磁性膜表面より微小に
突出する硬質の非磁性ガードパッド設けた構成とするこ
とにより、前記磁性膜表面に対する記録再生時の磁気へ
ラドスライダの摺動、衝突等の保護が十分に確保され、
媒体面の耐衝撃性が高められる。しかも前記媒体面が非
磁性ガードパッドの突出により微小な凹凸面となるので
、CS S (Contact 5tart 5top
)動作時等における磁気へラドスライダの吸着障害も防
止されるなど耐久性が向上する。In the thin film magnetic recording medium of the present invention, a magnetic film consisting of at least one layer provided on a substrate is divided concentrically into a plurality of parts with a predetermined width, and between each divided magnetic film there is a hard hard film that slightly protrudes from the surface of the magnetic film. By providing a non-magnetic guard pad, sufficient protection against sliding, collision, etc. of the magnetic RAD slider during recording and reproduction on the surface of the magnetic film is ensured;
The impact resistance of the media surface is increased. Moreover, since the medium surface becomes a minutely uneven surface due to the protrusion of the non-magnetic guard pad,
) Durability is improved, such as preventing adhesion failure of the magnetic RAD slider during operation.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第1図は本発明に係る薄膜磁気記録媒体の一実施例を垂
直磁気記録媒体に適用した場合の例を一部断面で示した
要部斜視図である。FIG. 1 is a perspective view of a main part, partially in cross section, of an example in which an embodiment of a thin film magnetic recording medium according to the present invention is applied to a perpendicular magnetic recording medium.
図において、21はアルマイト表面処理等が施されたア
ルミニウム(A f )などからなる非磁性のディスク
基板であり、該ディスク基板21上には例えばNi−F
eからなる高透磁率な軟磁性層22と、その表面にCo
−Crからなる垂直磁化記録123を積層状に設けてい
る。In the figure, 21 is a non-magnetic disk substrate made of aluminum (A f ), etc., which has been subjected to an alumite surface treatment, etc. On the disk substrate 21, for example, Ni-F
A soft magnetic layer 22 with high magnetic permeability made of E and Co on its surface.
Perpendicular magnetization recording 123 made of -Cr is provided in a laminated manner.
また上記軟磁性層22と垂直磁化記録1123とからな
る積層膜24は、例えばその半径方向に対してデータト
ラック幅に相当する所定幅毎に分割され、その分割され
た同心円状の各分割積層膜部分24a〜24f間に、そ
れぞれ図示のように前記垂直磁化記録層23の表面より
100〜200人程度の微小に突出する5iOz、或い
はA l zoz等からなる硬質な区画保護用の非磁性
ガードパッド25が配設されている。Further, the laminated film 24 made up of the soft magnetic layer 22 and the perpendicular magnetization recording 1123 is divided, for example, into a predetermined width corresponding to the data track width in the radial direction, and each divided laminated film is concentrically shaped. Between the portions 24a to 24f, as shown in the figure, hard nonmagnetic guard pads made of 5 iOz, Al zoz, etc. for protecting the partitions protrude minutely from the surface of the perpendicular magnetization recording layer 23 by about 100 to 200 micrometers. 25 are arranged.
従って、このような媒体構成においては、磁化記録滲み
、サイドクロストーク等の低減は勿論のこと、前記媒体
面が硬質な非磁性ガードパッド25の突出により微小な
凹凸面となるので、磁気へラドスライダの摺動、衝突等
に対する該媒体面の耐衝撃性が高められ、また磁気へラ
ドスライダとの接触面積が低減されるのでヘッド吸着が
防止されるなど、耐久性が向上する。Therefore, in such a medium configuration, not only magnetization recording bleeding and side crosstalk can be reduced, but also the medium surface becomes a minute uneven surface due to the protrusion of the hard non-magnetic guard pad 25, so the magnetic rad slider The impact resistance of the medium surface against sliding, collision, etc. is increased, and since the contact area with the magnetic rad slider is reduced, head adsorption is prevented and durability is improved.
更に第2図は本発明に係る薄膜磁気記録媒体の他の実施
例を垂直磁気記録媒体に適用した場合の例を一部断面で
示した要部斜視図であり、第1図と同等部分には同一符
号を付している。Further, FIG. 2 is a perspective view of a main part, partially in section, of an example in which another embodiment of the thin-film magnetic recording medium according to the present invention is applied to a perpendicular magnetic recording medium, and the same part as in FIG. 1 is shown. are given the same reference numerals.
この図で示す実施例が第1図の例と異なる点は、非磁性
基板21上に高透磁率な軟磁性層22を介在して設けた
垂直磁化記録層23が、例えばその半径方向に対してデ
ータトラック幅に相当する所定幅毎に分割され、その分
割された同心円状の各分割記録層部分23a〜23f間
に、それぞれ図示のように前記垂直磁化記録層23の表
面より100〜200人程度の微小に突出する5i02
、或いはA2□03等が4らなる硬質な区画保護用の非
磁性ガードパッド31を配設した構成としたことである
。The embodiment shown in this figure is different from the example shown in FIG. The recording layer is divided into predetermined widths corresponding to the data track width, and 100 to 200 people from the surface of the perpendicular magnetization recording layer 23 are placed between each of the divided concentric recording layer portions 23a to 23f as shown in the figure. 5i02 slightly protruding
, or a configuration in which a hard non-magnetic guard pad 31 for protecting the partitions consisting of four A2□03 etc. is provided.
このような実施例構造によっても前記第1図による実施
例と同様に耐久性の向上、ヘッド吸着が防止できる等の
効果が得られる。This structure of the embodiment also provides the same effects as the embodiment shown in FIG. 1, such as improved durability and prevention of head adsorption.
そして上記した第1図により説明した実施例構造の垂直
磁気記録媒体を作製するには、先ず第3図(a)に示す
ように、例えばアルマイト表面処理等が施されたアルミ
ニウム(Allりなどからなる非磁性のディスク基板2
1上に、0.7μmの膜厚の硬質なSing膜41をス
パッタリング法により被着形成し、その表面にレジスト
膜を用いてエツチング用マスク42を形成する。In order to fabricate a perpendicular magnetic recording medium having the structure of the embodiment described above in FIG. 1, first, as shown in FIG. Non-magnetic disk substrate 2
A hard Sing film 41 having a thickness of 0.7 μm is deposited on the etching film 1 by sputtering, and an etching mask 42 is formed on the surface thereof using a resist film.
次に第3図[有])に示すように該エツチング用マスク
42を介して前記Sin、膜41をイオンミリング法等
によりデータトラックに相当する部分を除去して複数の
5i02からなる硬質な非磁性ガードパッド25を形成
する。Next, as shown in FIG. 3, the portions corresponding to the data tracks are removed from the Sin film 41 through the etching mask 42 by ion milling or the like to form a hard non-etched film made of a plurality of 5i02. A magnetic guard pad 25 is formed.
次に第3図(C)に示すように前記非磁性ガードパッド
25を含むディスク基板21上に、例えばNi−Feか
らなる0、5μmの膜厚の高透磁率な軟磁性膜22と、
その表面にCo−Crからなる0、18μmの膜厚の垂
直磁化記録層23とを連続スパッタリング法等により被
着形成する。なお前記高透磁率な軟磁性膜22はめっき
法により形成するようにしてもよい。Next, as shown in FIG. 3(C), on the disk substrate 21 including the non-magnetic guard pad 25, a soft magnetic film 22 having a thickness of 0.5 μm and having a high magnetic permeability made of, for example, Ni-Fe is placed.
A perpendicular magnetization recording layer 23 made of Co--Cr and having a thickness of 0.18 .mu.m is deposited on the surface thereof by continuous sputtering or the like. Note that the high magnetic permeability soft magnetic film 22 may be formed by a plating method.
その後、前記レジスト膜からなるエツチング用マスク4
2を酸素プラズマ処理によりエツチング除去することに
より、そのマスク42上に積層したNiFe膜43及び
Co−Cr膜44も同時に除去する。そして前記垂直磁
化記録層23上にパーフロロポリエーテル等からなる図
示しない潤滑膜、或いは必要に応じて保護膜及び潤滑膜
を施して完成させる。After that, an etching mask 4 made of the resist film is formed.
By etching away the mask 2 through oxygen plasma treatment, the NiFe film 43 and Co--Cr film 44 laminated on the mask 42 are also removed at the same time. Then, a lubricating film (not shown) made of perfluoropolyether or the like, or a protective film and a lubricating film are applied as necessary on the perpendicular magnetization recording layer 23 to complete the process.
かくすれば、第3図((至)に示すように前記軟磁性層
22と垂直磁化記録層23からなる積層膜24が、例え
ばその半径方向に対してデータトラック幅に相当する所
定幅毎に分割され、その分割された同心円状の各分割積
層膜部分24a〜24f間に、それぞれ図示のように前
記垂直磁化記録層23の表面より200人程度の微小に
突出するSiO□からなる硬質な区画保護用の非磁性ガ
ードパッド25が配設された耐久性の良い本発明の垂直
磁気記録媒体が得られる。In this manner, as shown in FIG. Between each of the divided concentric laminated film portions 24a to 24f, hard sections made of SiO□ protrude minutely by about 200 mm from the surface of the perpendicular magnetization recording layer 23, as shown in the figure. A perpendicular magnetic recording medium of the present invention having good durability and provided with a non-magnetic guard pad 25 for protection can be obtained.
なお以上の実施例は垂直磁気記録媒体に適用した場合の
例について説明したが、本発明はこの例に限定されるも
のではなく、例えば−船釣な水平磁気記録方式の薄膜磁
気記録媒体に適用した場合にも同様な効果が得られる。Although the above embodiments are applied to perpendicular magnetic recording media, the present invention is not limited to this example. A similar effect can be obtained if
以上の説明から明らかなように、本発明に係る薄膜磁気
記録媒体によれば、媒体のデータトラック幅に相当する
各領域間に、該媒体面より微小に突出する硬質な区画保
護用の非磁性ガードパッドを埋設した構成とすることに
より、磁化記録滲み、サイドクロストーク等の低減は勿
論のこと、磁気へラドスライダの摺動、衝突等に対する
媒体面の耐衝撃性が高められ、ヘッド吸着が防止される
など、耐久性が向上する。また厚い保護膜を必要としな
いので記録分解能が裔められなど多くの優れた効果を有
し、高トラツク密度化を図る各種薄膜磁気記録媒体に適
用して極めて有利である。As is clear from the above description, according to the thin-film magnetic recording medium according to the present invention, there is a non-magnetic hard partition that slightly protrudes from the surface of the medium between each area corresponding to the data track width of the medium. The configuration with embedded guard pads not only reduces magnetization recording bleeding and side crosstalk, but also increases the impact resistance of the media surface against magnetic slider sliding and collisions, and prevents head adsorption. Durability is improved. In addition, since a thick protective film is not required, it has many excellent effects such as improved recording resolution, and is extremely advantageous when applied to various thin-film magnetic recording media aiming at high track density.
第1図は本発明に係る薄膜磁気記録媒体の一実施例を垂
直磁気記録媒体に適用した場
合の例を一部断面で示した要部斜視図、第2図は本発明
に係る薄膜磁気記録媒体の一実施例を垂直磁気記録媒体
に適用した場
合の他の例を一部断面で示した要部斜
視図、
第3図は本発明を適用した第1図の垂直磁気記録媒体の
製造方法の一実施例を工程順
に示す要部断面図、
第4図は従来の薄膜磁気記録媒体を垂直磁気記録媒体の
例で説明するための一部断面
で示した要部斜視図である。
第1図〜第3図において、
21はディスク基板、22は高透磁率な軟磁性層、23
は垂直磁化記録層、23a〜23fは分割記録層部分、
24は積層膜、24a〜24「は分割積層膜部分、25
.31は非磁性ガードパッド、41は5iOz膜、42
はエツチング用マスクをそれぞれ示す。
第3図FIG. 1 is a partially cross-sectional perspective view of essential parts of an example of a thin-film magnetic recording medium according to the present invention applied to a perpendicular magnetic recording medium, and FIG. 2 is a thin-film magnetic recording medium according to the present invention. FIG. 3 is a perspective view of a main part showing a partial cross section of another example in which one embodiment of the medium is applied to a perpendicular magnetic recording medium, and FIG. 3 is a method for manufacturing the perpendicular magnetic recording medium of FIG. 1 to which the present invention is applied. FIG. 4 is a sectional view of a main part showing an embodiment in the order of steps; FIG. 4 is a perspective view of a main part shown in partial cross section to explain a conventional thin film magnetic recording medium using an example of a perpendicular magnetic recording medium. In FIGS. 1 to 3, 21 is a disk substrate, 22 is a high permeability soft magnetic layer, and 23 is a disk substrate.
is a perpendicular magnetization recording layer, 23a to 23f are divided recording layer parts,
24 is a laminated film, 24a to 24'' are divided laminated film parts, 25
.. 31 is a non-magnetic guard pad, 41 is a 5iOz film, 42
1 and 2 indicate etching masks, respectively. Figure 3
Claims (1)
(24)を有し、かつその磁性膜(24)は所定幅で同
心円状に複数に分割され、該分割された各磁性膜部分(
24a〜24f)間に、その磁性膜(24)表面より突
出する硬質な非磁性ガードパッド(25)を設けたこと
を特徴とする薄膜磁気記録媒体。It has a magnetic film (24) consisting of at least one layer on a non-magnetic substrate (21), and the magnetic film (24) is divided concentrically into a plurality of parts with a predetermined width, and each of the divided magnetic film parts (
A thin film magnetic recording medium characterized in that a hard nonmagnetic guard pad (25) protruding from the surface of the magnetic film (24) is provided between the magnetic film (24a to 24f).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32129688A JPH02165416A (en) | 1988-12-19 | 1988-12-19 | Thin-film magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32129688A JPH02165416A (en) | 1988-12-19 | 1988-12-19 | Thin-film magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02165416A true JPH02165416A (en) | 1990-06-26 |
Family
ID=18130990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32129688A Pending JPH02165416A (en) | 1988-12-19 | 1988-12-19 | Thin-film magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02165416A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7352529B2 (en) | 2004-02-26 | 2008-04-01 | Tdk Corporation | Magnetic recording medium and magnetic recording and reproducing device using a magnetic recording layer formed with a predetermined concavo-convex pattern |
US7423842B2 (en) | 2004-02-26 | 2008-09-09 | Tdk Corporation | Magnetic recording medium having servo and data track regions with different arithmetical mean deviations |
US7494727B2 (en) | 2004-08-03 | 2009-02-24 | Tdk Corporation | Magnetic recording medium and magnetic recording and reproducing apparatus |
WO2010067830A1 (en) * | 2008-12-09 | 2010-06-17 | Hoya株式会社 | Magnetic recording medium and method for producing magnetic recording medium |
-
1988
- 1988-12-19 JP JP32129688A patent/JPH02165416A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7352529B2 (en) | 2004-02-26 | 2008-04-01 | Tdk Corporation | Magnetic recording medium and magnetic recording and reproducing device using a magnetic recording layer formed with a predetermined concavo-convex pattern |
US7423842B2 (en) | 2004-02-26 | 2008-09-09 | Tdk Corporation | Magnetic recording medium having servo and data track regions with different arithmetical mean deviations |
US7494727B2 (en) | 2004-08-03 | 2009-02-24 | Tdk Corporation | Magnetic recording medium and magnetic recording and reproducing apparatus |
WO2010067830A1 (en) * | 2008-12-09 | 2010-06-17 | Hoya株式会社 | Magnetic recording medium and method for producing magnetic recording medium |
US8795790B2 (en) | 2008-12-09 | 2014-08-05 | Wd Media (Singapore) Pte. Ltd. | Magnetic recording medium and magnetic recording medium manufacturing method |
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