JPH0216052U - - Google Patents
Info
- Publication number
- JPH0216052U JPH0216052U JP9516888U JP9516888U JPH0216052U JP H0216052 U JPH0216052 U JP H0216052U JP 9516888 U JP9516888 U JP 9516888U JP 9516888 U JP9516888 U JP 9516888U JP H0216052 U JPH0216052 U JP H0216052U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heater
- membranes
- insulating film
- temperature side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516888U JPH0216052U (zh) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516888U JPH0216052U (zh) | 1988-07-19 | 1988-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216052U true JPH0216052U (zh) | 1990-02-01 |
Family
ID=31319796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9516888U Pending JPH0216052U (zh) | 1988-07-19 | 1988-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216052U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04338290A (ja) * | 1991-05-15 | 1992-11-25 | Matsushita Electric Ind Co Ltd | 水浄化装置 |
| JP2008058214A (ja) * | 2006-09-01 | 2008-03-13 | Figaro Eng Inc | ガス検出装置とガス検出装置の自己診断方法 |
-
1988
- 1988-07-19 JP JP9516888U patent/JPH0216052U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04338290A (ja) * | 1991-05-15 | 1992-11-25 | Matsushita Electric Ind Co Ltd | 水浄化装置 |
| JP2008058214A (ja) * | 2006-09-01 | 2008-03-13 | Figaro Eng Inc | ガス検出装置とガス検出装置の自己診断方法 |
| JP4759475B2 (ja) * | 2006-09-01 | 2011-08-31 | フィガロ技研株式会社 | ガス検出装置とガス検出装置の自己診断方法 |
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