JPH0216052U - - Google Patents
Info
- Publication number
- JPH0216052U JPH0216052U JP9516888U JP9516888U JPH0216052U JP H0216052 U JPH0216052 U JP H0216052U JP 9516888 U JP9516888 U JP 9516888U JP 9516888 U JP9516888 U JP 9516888U JP H0216052 U JPH0216052 U JP H0216052U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heater
- membranes
- insulating film
- temperature side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は実施例に用いたガスセンサの断面図、
第２図はその平面図、第３図はその―方向断
面図である。第４図は実施例のガス検出装置の回
路図、第５図はその動作波形図で、１はヒータ膜
６の動作を、２はヒータ膜８の動作を現す。第６
図は他の実施例の回路図、第７図はその動作波形
図で、１はヒータ膜６の動作を、２はヒータ膜８
の動作を現す。
Figure 1 is a cross-sectional view of the gas sensor used in the example.
FIG. 2 is a plan view thereof, and FIG. 3 is a sectional view thereof in the - direction. FIG. 4 is a circuit diagram of the gas detection device of the embodiment, and FIG. 5 is an operation waveform diagram thereof, in which 1 represents the operation of the heater membrane 6, and 2 represents the operation of the heater membrane 8. 6th
The figure is a circuit diagram of another embodiment, and FIG. 7 is its operation waveform diagram.
The behavior of
Claims (1)
の上部を絶縁膜で被覆し、絶縁膜上の各ヒータ膜
の上部の位置には、同一の金属酸化物半導体を用
いた２つのガス検出膜を設けて、ガスセンサとす
ると共に、 ２つのヒータ膜への電力を交互に変化させて、
各検出膜の温度を高温側と低温側との少なくとも
２種の温度に交互に変化させるための手段と、 高温側の検出膜の抵抗値から第１のガスを、低
温側の検出膜の抵抗値から第２のガスを検出する
ための手段とを設けたガス検出装置。[Claim for Utility Model Registration] Two heater films are provided on a heat-resistant insulating substrate, the upper part of which is covered with an insulating film, and the same metal oxide semiconductor is placed on the upper part of each heater film on the insulating film. By providing two gas detection membranes using a gas sensor to create a gas sensor, and alternately changing the power to the two heater membranes,
means for alternately changing the temperature of each detection membrane to at least two temperatures, high temperature side and low temperature side; A gas detection device comprising means for detecting a second gas from a value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516888U JPH0216052U (en) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9516888U JPH0216052U (en) | 1988-07-19 | 1988-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216052U true JPH0216052U (en) | 1990-02-01 |
Family
ID=31319796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9516888U Pending JPH0216052U (en) | 1988-07-19 | 1988-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216052U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04338290A (en) * | 1991-05-15 | 1992-11-25 | Matsushita Electric Ind Co Ltd | Water purifying device |
| JP2008058214A (en) * | 2006-09-01 | 2008-03-13 | Figaro Eng Inc | Gas detector, and self-diagnosis method of gas detector |
-
1988
- 1988-07-19 JP JP9516888U patent/JPH0216052U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04338290A (en) * | 1991-05-15 | 1992-11-25 | Matsushita Electric Ind Co Ltd | Water purifying device |
| JP2008058214A (en) * | 2006-09-01 | 2008-03-13 | Figaro Eng Inc | Gas detector, and self-diagnosis method of gas detector |
| JP4759475B2 (en) * | 2006-09-01 | 2011-08-31 | フィガロ技研株式会社 | Gas detection device and self-diagnosis method of gas detection device |
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