JPH0215865U - - Google Patents
Info
- Publication number
- JPH0215865U JPH0215865U JP9389488U JP9389488U JPH0215865U JP H0215865 U JPH0215865 U JP H0215865U JP 9389488 U JP9389488 U JP 9389488U JP 9389488 U JP9389488 U JP 9389488U JP H0215865 U JPH0215865 U JP H0215865U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holder
- water
- substrate
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389488U JPH0215865U (xx) | 1988-07-14 | 1988-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389488U JPH0215865U (xx) | 1988-07-14 | 1988-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215865U true JPH0215865U (xx) | 1990-01-31 |
Family
ID=31318372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9389488U Pending JPH0215865U (xx) | 1988-07-14 | 1988-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215865U (xx) |
-
1988
- 1988-07-14 JP JP9389488U patent/JPH0215865U/ja active Pending